特殊光学元件的新型子孔径拼接检测方法研究

使用新型的特殊整流罩窗口可以明显地提升飞行器的空气动力学性能,但由于这种共形窗口光学表面的复杂性,传统的非球面检测技术已经较难满足要求.本文提出了一种新型子孔径拼接检测技术,在建立新的检测原理基础上,还重点介绍了这种检测方法的设计.同时基于补偿法的原理,文中还针对一个口径70 mm的共形窗口,设计了相应的特殊补偿器,其最终剩余波像差(RMS)为0.0515λ(λ=632.8 nm),可以满足实际使用要求. 关键词： 共形窗口 共形检测 子孔径拼接检测 补偿器     

All-reflective optical system design for extreme ultraviolet lithography

All-reflective optical systems,due to their material absorption and low refractive index,are used to create the most suitable devices in extreme ultraviolet lithography （EUVL）.In this letter,we present a design for an all-reflective lithographic projection lens.We also discuss its design idea and structural system.After analysis of the four-mirror optical system,the initial structural parameters are determined,the optical system is optimized,and the tolerances of the system are analyzed.We also show the implementation of optimal layout and desired imaging performance.     

Optical system design with conformal decentered and tilted elements

We investigate the aberration properties of the conformal optical system with decentered and tilted elements by vector aberration theory.By decentering and tilting the window and corrector of the system,two elements are effectively used together in a particular manner by aberration compensation to achieve off-axis imaging.A conceptual design is performed with a half-field of 2° ,the F# of 4,and the wavelength ranging of 3700-4800 nm.The imaging quality can reach the optical diffraction limit and satisfy corresponding requirements.