Etching-assisted femtosecond laser microfabrication

Although femtosecond laser microfabrication is one of the most promising three-dimensional(3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication(EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.     

基于飞秒激光直写的单向单模耦合微腔

对具有高Q值的回音壁模式微腔进行调制来获得单向单模输出,对研究腔光力学和开发高质量的微激光具有重要意义.本文对利用飞秒激光直写加工的耦合回音壁模式微腔的研究进行了简要回顾,具体介绍了微腔结构设计、加工过程、激射和耦合机制研究等.利用飞秒激光直写加工的强大三维图案化能力,灵活地设计实现了具有集成功能的单个微腔和具有不同空间组合位置的多个耦合微腔.基于耦合微腔的微激光具有低阂值,同时显示出良好的单模特性和单向性.结合理论模拟可以证实,微腔与微腔/光栅之间的耦合,一方面支持游标效应和集成滤波两种选模方式,另一方面能够破坏微腔的旋转对称性从而获得单向输出,从而实现了对微腔输出的有效调控.