沉积参数对SiNx薄膜结构及阻透性能的影响

利用直流脉冲磁控溅射法在室温下制备无氢SiNx,薄膜.通过傅里叶变换红外光谱、台阶仪、紫外一可见分光光度计、接触角测量仪、透湿测试仪等表征技术,分析了N2流量、Si靶溅射功率等实验参数对SiNx薄膜成分、结构、及阻透性能、透光性能、接触角等性能的影响.研究结果表明,Si靶溅射功率固定时,在低N2流量条件下,或N2流量固定时,在高Si靶溅射功率条件下,制备的SiN,薄膜中Si-N键含量高,结构致密,薄膜对H2O的阻透性能优良,随着N2流量的增加或者Si靶溅射功率的降低,SiNx,薄膜成分、结构发生变化,红外光谱发生偏移,其对H2O的阻透性能下降.在N2流量为6 sccm,Si靶溅射功率为300 W时制备的SiN,薄膜在可见光波段透过率超过97.5%,对H2O的接触角为30,同时其对H2O的渗透系数最低,为0.764,综合性能满足柔性有机电致发光器件封装用阻透膜的要求,因此SiNx薄膜有望成为新一代柔性有机电致发光器件封装用阻透材料.     

凝胶-燃烧法合成YAG∶Eu3+纳米荧光材料的结构和发光性能

Y₃Al₅O₁₂∶Eu nanophosphors were synthesized by a gel combustion method. The structure of phosphors was characterized by XRD and FTIR. YAG phase came to occur when YAG∶Eu precursors were sintered at 800 ℃, although the phase was mainly amorphous. The organic groups pyrolyzed completely and pure YAG phase was obtained in the samples sintered at 900 ℃. In the formation of YAG phase, no intermediate phases such as YAP and YAM were detected. Both ⁵D₀ → ⁷F₁ orange and ⁵D₀ → ⁷F₂ red emission could be observed for all the sintered samples. However, the emission of amorphous samples was greatly different from that of crystalline ones. The former was mainly ⁵D₀→ ⁷F₂ red emission, but the latter was ⁵D₀ → ⁷F₁ orange emission. As sintering temperature rises, the ratio of orange to red for phosphors increases. Eu could be doped up to 8% in YAG host lattice, and fluorescence quenching was absent. It indicated that the gel combustion synthesis method can increase emission intensity and quenching concentration due to a good distribution of Eu³⁺ activators in Y₃Al₅O₁₂ matrix.     

凝胶-燃烧法合成YAG∶Eu~(3+)纳米荧光材料的结构和发光性能

处于4f6电子组态的Eu3 是一个理想的荧光探针离子,通过它的荧光光谱结构可以探测被取代离子周围的对称性。最近,Eu3 作为荧光探针探测了YVO4纳米晶的表面效应[1]。因此Eu3 离子掺杂的发光材料引起了人们的广泛关注[2~4]。钇铝石榴石Y3Al5O12(YAG)具有优良的物理和化学性能,被广     

沉积参数对SiNx薄膜结构及阻透性能的影响

利用直流脉冲磁控溅射法在室温下制备无氢SiN_x薄膜.通过傅里叶变换红外光谱、台阶仪、紫外—可见分光光度计、接触角测量仪、透湿测试仪等表征技术,分析了N₂流量、Si靶溅射功率等实验参数对SiN_x薄膜成分、结构、及阻透性能、透光性能、接触角等性能的影响.研究结果表明,Si靶溅射功率固定时,在低N₂流量条件下,或N₂流量固定时,在高Si靶溅射功率条件下,制备的SiN _{关键词： x}')" href="#">SiN_x 磁控溅射 微观结构 阻透性能     

白宝石晶体的高温强度及强化技术研究进展

白宝石高温强度的降低主要是由于c轴方向受到压应力时产生r面双晶所引起的.高温强度的下降导致其抗热震性能降低,从而限制了白宝石晶体作为红外窗口和头罩材料的应用.白宝石晶体的强化主要以消除双晶核以及控制双晶的扩展来实现.本文分析了影响白宝石强度的主要因素,在此基础上对目前白宝石晶体强化的方法进行了总结和分析.