双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Circularly polarized luminescence based on small organic fluorophores

Circularly polarized luminescence (CPL) has attracted attention as a next-generation light signal because of its carrying more information compared with normal and linearly polarized lights as well as its potential wide application in information fields. Recently, much attention has been paid to small organic molecules-based CPL emitters because of easy synthesis, fine structural modification at molecular level, and tunable wide range emission wavelength. This review highlights the development of small organic molecules-based CPL emitters in the past 5 years (2017–2021). The progress suggests that small organic molecules-based CPL emitters provide a simple and efficient way to generate CPL.     

Separation,Preconcentration, and Determination of Lead,Cadmium, and Iron Using Cloud Point Extraction with Flame Atomic Absorption Spectrometry

Journal of Applied Spectroscopy - The concentration of heavy metals in drinking water is an important standard for water quality evaluation and water pipeline corrosion detection. This research...     

Inverse central ordering for the Newton interpolation formula

Numerical Algorithms - An inverse central ordering of the nodes is proposed for the Newton interpolation formula. This ordering may improve the stability for certain distributions of nodes. For...     

Multivariate Calibration of Concentrations of C,Mn, Si,Cr, Ni,and Cu in Low-Alloy Steels from Raw Low-Resolution Spectra Obtained By Laser-Induced Breakdown Spectroscopy

Journal of Applied Spectroscopy - Multivariate models were developed on the basis of raw low-resolution LIBS spectra of reference samples of lowalloy steels for calibration of the concentrations of...     

A multigrid method for the ground state solution of Bose–Einstein condensates based on Newton iteration

BIT Numerical Mathematics - In this paper, a new kind of multigrid method is proposed for the ground state solution of Bose–Einstein condensates based on Newton iteration scheme. Instead of...     

Delannoy数与Schröder数的一些和式公式

研究了Delannoy数与Schr?der数.利用分析方法和组合技巧,建立了任意多个Delannoy数乘积的一些和式公式,并对Schroder数的和式公式进行了类似的研究.     

Investigation of Relationships between Grain Structure and Inhomogeneous Deformation by Means of Laboratory-Based Multimodal X-Ray Tomography: Strain Accuracy Analysis

Experimental Mechanics - The internal strain distribution developing during plastic deformation is important for understanding the mechanical properties of polycrystalline materials. Such...