Electron spectra are generally presented in arbitrary units. The experimental elastic peak intensity
Iespec(
E) is determined by the elastic backscattering probability
Ie(
E) of electrons backscattered elastically within the solid angle of the spectrometer. The experimental elastic peak
Iespec(
E) is converted to
Ie(
E) backscattering probability using our new procedure based on the Goto
ie(
E) elastic backscattering current database. The elastic backscattering probability
Ic(
E) was calculated applying the EPESWIN software of
Jablonski.
Ie(
E) <
Ic(
E) due to the surface losses of electrons, characterized by the surface excitation parameter
Pse (SEP).
Pse(
E) was determined experimentally using the Goto database and the relationship of Tanuma. Our new procedure is applied to angular‐resolved (AREPES) spectra of
Jablonski and Zemek presented in arbitrary units. In their AREPES experiments, the experimental elastic peak intensity
Iespec =
Ie(
E, α
d, ΔΩ) was measured at α
d angle of detection (35–74°) with a small HSA, with ΔΩ solid angle. The experimental value at 42° $I_{e}(E, {\it{42}}\deg{\hbox{}}, {\Delta}\Omega)$ was converted to probability with the Goto database. It was corrected with a SEP parameter
Pse, determined by trial and error method for Si, Ni, Cu and Ag for
E = 0.5 and 1 keV primary energies. Copyright © 2010 John Wiley & Sons, Ltd.
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