排序方式: 共有2条查询结果,搜索用时 15 毫秒
1
1.
2.
Improvement of total-dose irradiation hardness of silicon-on-insulator materials by modifying the buried oxide layer with ion implantation 下载免费PDF全文
The hardening of the buried oxide (BOX) layer of separation by implanted
oxygen (SIMOX) silicon-on-insulator (SOI) wafers against total-dose irradiation
was investigated by implanting ions into the BOX layers. The tolerance to
total-dose irradiation of the BOX layers was characterized by the
comparison of the transfer
characteristics of SOI NMOS transistors before and after irradiation to
a total dose of 2.7
Mrad(SiO2. The experimental results show that the implantation of
silicon ions into the BOX layer can improve the tolerance of the BOX layers
to total-dose irradiation. The investigation of the mechanism of the
improvement suggests that the deep electron traps introduced by silicon
implantation play an important role in the remarkable improvement in
radiation hardness of SIMOX SOI wafers. 相似文献
1