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1.
高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd18+—Gd27+离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd14+—Gd17+离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时... 相似文献
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《Arabian Journal of Chemistry》2022,15(8):103988
In this work, a green technique for preparing TbFeO3/CuO was reported by employing Crataegus and Lantana Camara leaves as fuel and alkalizing agents, respectively. The new sensor based on the perovskite-type nanocomposite was employed as a sensitive and selective platform to detect Pb(II), Zn(II) and Cd(II) simultaneously. TbFeO3/CuO/Carbon paste electrode (CPE) exhibited a large specific surface area and great electrical conductivity, which enhanced electron transport in the electrochemical process considerably. Moreover, square wave anodic stripping voltammetry (SWASV) was used for the investigation of some factors influencing the sensor sensitivity like pH, modifier concentration, as well as accumulation time and potential. Therefore, the low detection limit (LOD) and a wide linear range were obtained at optimum conditions. In this study, a linear range between 0.9 and 110 µg/L for three ions and LOD of 0.48, 0.29 and 0.12 for zinc, cadmium and lead were achieved, respectively. Moreover, TbFeO3/CuO/CPE was employed to detect zinc, cadmium and lead ions simultaneously in the real samples so that the results have shown consistency with a standard inductively coupled plasma (ICP). 相似文献
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Cobalt oxide (Co3O4) modified anatase titanium dioxide nanotubes (ATNTs) have been investigated for the electrochemical sensing of hydrogen peroxide (H2O2). ATNTs have been synthesized by a two-step anodization process. ATNTs were then modified with Co3O4 employing chemical bath deposition method. The structure and morphology of ATNTs and their modification with Co3O4 has been confirmed by X-ray diffraction by scanning electron microscopy. H2O2 sensing has been studied in 0.1 M PBS solution, by cyclic voltammetry and amperometry. Variation in the peak positions and current densities was observed with addition of H2O2 for Co3O4 modified ATNTs. Sensitivity and limit of detection improved with modification of ATNTs with Co3O4 with precursor concentration up to 0.8 M. However, at higher precursor concentrations sensitivity and limit of detection toward H2O2 deteriorated. Co3O4 Modified ATNTS using 0.8 M precursor concentration are comparatively more suitable for H2O2 sensing applications due to the optimum formation of Co3O4/ATNTs heterojunctions. 相似文献
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采用自主设计搭建的雾化辅助化学气相沉积系统设备,开展了Ga2O3薄膜制备及其特性研究工作。通过X射线衍射研究了沉积温度、系统沉积压差对Ga2O3薄膜结晶质量的影响。结果表明,Ga2O3在425~650 ℃温度区间存在物相转换关系。随着沉积温度从425 ℃升高至650 ℃,薄膜结晶分别由非晶态、纯α-Ga2O3结晶状态向α-Ga2O3、β-Ga2O3两相混合结晶状态改变。通过原子力显微镜表征探究了生长温度对Ga2O3薄膜表面形貌的影响,从475 ℃升高至650 ℃时,薄膜表面粗糙度由26.8 nm下降至24.8 nm。同时,高分辨X射线衍射仪测试表明475 ℃、5 Pa压差条件下的α-Ga2O3薄膜样品半峰全宽仅为190.8″,为高度结晶态的单晶α-Ga2O3薄膜材料。 相似文献
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《中国物理 B》2021,30(5):55207-055207
Trichel pulse is a kind of pulsed mode in negative DC corona discharge, which has attracted significant attention because of its considerable applications in industry. Over eighty years, plenty of effort including simulations and experiments has been spent to reveal the ionization and quenching mechanisms of Trichel pulse. By revisiting and summarizing the basic characteristics and well-accepted ionization and quenching mechanisms, this review provides a basic understanding and the current status of Trichel pulse. 相似文献
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Yves Pomeau 《Comptes Rendus Mecanique》2018,346(3):184-197
The equations for a self-similar solution to an inviscid incompressible fluid are mapped into an integral equation that hopefully can be solved by iteration. It is argued that the exponents of the similarity are ruled by Kelvin's theorem of conservation of circulation. The end result is an iteration with a nonlinear term entering a kernel given by a 3D integral for a swirling flow, likely within reach of present-day computational power. Because of the slow decay of the similarity solution at large distances, its kinetic energy diverges, and some mathematical results excluding non-trivial solutions of the Euler equations in the self-similar case do not apply. 相似文献