积分棒在步进扫描投影光刻系统中的应用

从几何光学角度讨论了积分棒的匀光原理，介绍了积分棒在步进扫描投影光刻系统中的应用.分析了积分棒入射光束的数值孔径对刀口狭缝面上光强分布的影响，得到了积分棒尺寸与刀口狭缝面上照明视场的关系，为步进扫描投影光刻系统中积分棒的设计提供了依据.     

极紫外投影光刻接触孔掩模的快速仿真计算

采用一个极紫外投影光刻掩模衍射简化模型实现了三维接触孔掩模衍射场的快速仿真计算。基于该模型,得到了接触孔掩模衍射场分布的解析表达式,并对光刻成像时的图形位置偏移现象进行了解释和分析。简化模型中,掩模包括吸收层和多层膜两部分结构,吸收层的透射利用薄掩模修正模型进行计算,多层膜的反射近似为镜面反射。以周期44 nm、特征尺寸分别为16 nm和22 nm的方形接触孔为例,入射光方向发生变化时,该简化模型与严格仿真相比,图形特征尺寸误差小于0.4 nm,计算速度提高了近100倍。此外,考虑到多层膜镜面位置对图形位置偏移量的影响,得到了图形位置偏移量的计算公式,其计算结果也与严格仿真相一致。     

Compensation for the self-steepening effects inoptical fiber communication system usingmidway optical phase conjugation

Effects of self-steepening (SS) of chirped Gaussian pulses on optical fiber communication system using midway optical phase conjugation (OPC) are analyzed. Dynamic evolution of the ultrashort pulses is simulated numerically. It is found that OPC cannot compensate for pulse waveform distortion due to SS. The initial chirp of pulses and dispersion can counteract SS and improve the compensation performance for the distortion.     

Compensation for the self-steepening effects in optical fiber communication system using midway optical phase conjugation

Effects of self-steepening (SS) of chirped Gaussian pulses on optical fiber communication system using midway optical phase conjugation (OPC) are analyzed. Dynamic evolution of the ultrashort pulses is simulated numerically. It is found that OPC cannot compensate for pulse waveform distortion due to SS.The initial chirp of pulses and dispersion can counteract SS and improve the compensation performance for the distortion.     

Position sensor based on slit imaging

A position sensor based on slit imaging is proposed and its measurement principle is described. An imaging slit is illuminated by a collimated laser beam with square-wave modulation and imaged on a detection double slit through a 4f system. A magnified image of the detection double slit is formed on a bi-cell detector. The position of the imaging slit is obtained by detecting light intensity on two parts of the hi-cell detector. In experiments, the feasibility of the sensor was verified. The repeatability was less than 40 nm.     

光纤光栅传感器的应用

在光纤传感领域，光纤光栅传感技术是十多年来发展最为迅速的技术之一，传感系统本身和应用领域均有了很大发展．文章介绍了光纤光栅的结构、性能以及传感的原理，回顾了光纤光栅传感器在地球动力学、航天器及船舶航运、民用工程结构、电力工业、医学、和化学传感中的应用．     

基于达曼光栅的快照式斯托克斯偏振测量方法

斯托克斯偏振测量常被用于获取光束的偏振特性。提出一种利用偏振无关的达曼光栅快照式测量偏振光束斯托克斯参量的方法。偏振光束通过达曼光栅后在空间对称的位置上被分成4束,这4束光经波片和线偏振器调制后,最终被CCD采集。将单次快照采集的光强图简单叠加运算就可计算得到偏振光束的斯托克斯参量,并可进一步计算得到偏振光束的偏振分布、矢量质量因子（VQF）和模间相位。所提测量方法对不同椭圆偏振光的测量结果与商用偏振测量仪的测量结果之间的平均相对误差为6.97%。所提方法的测量装置简单,无需转动任何器件,单次快照就可完成测量,具有可靠的测量精度。     

Analysis of illumination pupil filling ellipticity for critical dimensions control in photolithography

Shrinking of critical dimensions (CDs) in semiconductor circuits has been pushing optical lithography to print features smaller than the wavelength of light source. The demand for CD control is ever-increasing. In this paper, the study is conducted to reveal the impact of illumination pupil filling ellipticity on CD uniformity. As main parameters of CD uniformity, horizontal-vertical feature bias (H-V bias) and isolated-dense feature bias (I-D bias) caused by pupil filling ellipticity are calculated using the PROLITH software under four different illumination settings. Simulation shows that H-V bias and I-D bias are proportional to the pupil filling ellipticity. The slopes of the fitting lines of the H-V bias versus pupil filling ellipticity are calculated.     

大气湍流对斜程传输准单色高斯-谢尔光束时间相干性的影响

由第一类零阶贝塞尔函数的级数展开推导出波结构函数在任意湍流条件下的近似表达式。由广义惠更斯-菲涅耳原理、随高度变化的Hufnagel-Valley湍流廓线模型以及波结构函数在任意湍流条件下的近似表达式,导出了斜程传输时准单色高斯-谢尔光束互相干函数的解析式。然后,利用表征光束时间相干性的纵向相干长度(可由互相干函数导出),研究了斜程传输时大气湍流对准单色高斯-谢尔光束时间相干性的影响。研究结果表明,准单色高斯-谢尔光束的时间相干性在整个斜程传输过程中保持不变。最后,对该结果在物理上给予了定性解释。     

物体表面形貌的正弦相位调制实时干涉测量技术研究

表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。