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DuanMei(段梅);YutakaMiyamoto(宫本裕);ZhouBenkuan(周本宽);ChenDapeng(陈大鹏)(ReceivedMarch2,1995)ACOMPARATIVESTUDYONTHEh-CONVERGENCEOF4-N... 相似文献
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经过三十多年的研发, 接近式X射线光刻技术已经非常成熟,其具有分辨率高、焦深大、工艺宽容度大、产量高等诸多优点.对于X射线掩模吸收体材料, 如果选择金, 只能采用电镀工艺, 而且金会污染硅基集成电路;而钽硅材料可以采用干法刻蚀工艺, 不会污染硅基集成电路, 是一种理想的X射线掩模吸收体材料.本文论述了氮化硅/钽硅X射线掩模制作工艺, 不同于常规工艺, 电子束光刻显影后, 以ZEP520电子束光刻胶作为阻挡层,SF6/CHF3作为反应气体, 电感耦合等离子体直接刻蚀钽硅薄膜.初步的实验结果证明了这种X射线掩模制作工艺是可行的. 相似文献
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本文将人工机械心瓣/血液耦合系统作为研究对象,采用有限元法,分析了热解碳、钛合金钢、钴-铬合金钢及陶瓷四种材料机械瓣关闭状态下受突加阶梯压力荷载时的瞬态动力行为。结果表明,人工机械瓣态动力行为近乎刚性,寻致瓣叶上产生较高冲击压力,减小机械瓣的弹性模量,可以降低瓣/血液耦合系统的冲击压力。 相似文献
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俄国自彼得大帝采取开放政策以来,文化科学与教育事业虽得以发展,但最初以派留学生和聘请国外著名学者赴俄进行科学研究,担任科学院院士或以讲学的方式培养俄国的科技人才,进程比较缓慢,收效不是很大.到十月革命前,在物理学科领域中,仅出 相似文献
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We propose a substrate-free focal plane array (FPA) in
this paper. The solid substrate is completely removed, and the
microcantilevers extend from a supporting frame. Using finite
element analysis, the thermal and mechanical characterizations
of the substrate-free FPA are presented. Because of the large
decrease in thermal conductance, the supporting frame is temperature
dependent, which brings out a unique feature: the lower the thermal
conductance of the supporting frame is, the higher the energy
conversion efficiency in the substrate-free FPA will be. The results
from the finite element analyses are consistent with our
measurements: two types of substrate-free FPAs with pixel sizes
of 200× 200 and 60× 60~μ m2 are implemented
in the proposed infrared detector. The noise equivalent temperature
difference (NETD) values are experimentally measured to be 520 and
300~mK respectively. Further refinements are considered in various
aspects, and the substrate-free FPA with a pixel size of 30×
30~μ m2 has a potential of achieving an NETD value of
10~mK. 相似文献
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A type of penalty-hybrid variational principle is suggested for the analysis of Stokesian flow. On such a basis, a finite element model is formulated featuring, among others, a priori satisfaction of the deviatoric stress and hydrostatic pressure on linear momentum balance equations. Also in the present scheme the hydrostatic pressure is successfully eliminated at the element level, leaving only nodal velocities as solution unknowns. A series of 4-node and 8-node quadrilateral elements are derived and examined. Numerical examples demonstrating their characteristic behaviors are also included.The project Supported by National Natural Science Foundation of China 相似文献