0.18μm CMOS工艺栅极氧化膜可靠性的衬底和工艺依存性

用斜坡电压法(Voltage Ramp, V-ramp)评价了0.18μm双栅极 CMOS工艺栅极氧化膜击穿电量(Charge to Breakdown, Q_bd)和击穿电压(Voltage to Breakdown, V_bd). 研究结果表明，低压器件(1.8V)的栅极氧化膜(薄氧)p型衬底MOS电容和N型衬底电容的击穿电量值相差较小，而高压器件(3.3V)栅极氧化膜(厚氧)p衬底MOS电容和n衬底MOS电容的击穿电量值相差较大，击穿电压测试值也发现与击穿电量 关键词： 薄氧 可靠性 击穿电压 击穿电量     

气体放电等离子体特性测量I-V曲线不对称性的研究

利用气体放电双探针法研究了等离子体的I-V曲线中的电流I相对于电压V轴交点的不对称性,并提出2种可能的解释:一认为是由于两探针表面积不同引起的;二认为是由于探针所在处等离子体电位不等引起的.本文利用仪器的工艺误差和调换放电管电压的方法,对提出的2种可能原因分别进行验证,并指出第二种解释的合理性,并对其进行了理论分析.     

A Novel Contactless Method for Characterization of Semiconductors：Surface Electron Bean Induced Voltage in Scanning Electron Microscopy

We present a novel contactless and nondestructive method called the surface electron beam induced voltage (SEBIV) method for characterizing semiconductor materials and devices.The SEBIV method is based on the detection of the surface potential induced by electron beams of scanning electron microscopy (SEM).The core part of the SEBIV detection set-up is a circular metal detector placed above the sample surface.The capacitance between the circular detector and whole surface of the sample is estimated to be about 0.64pf.It is large enough for the detection of the induced surface potential.The irradiation mode of electron beam (e-beam) influences the signal generation When the e-beam irradiates on the surface of semiconductors continuously,a differential signal is obtained.The real distribution of surface potentials can be obtained when a pulsed e-beam with a fixed frequency is used for irradiation and a lock-in amplifier is employed for detection.The polarity of induced potential depends on the structure of potential barriers and surface states of samples.The contrast of SEBIV images in SEM changes with irradiation time and e-beam intensity.     

螺旋脉冲形成线实验

在脉冲功率技术中，长脉冲的电压脉冲形成是研究的一个难点。形成数百纳秒甚至上微秒采用一般的同轴传输线是不现实的，而采用集中参数人工线在负载为低阻抗时由于电容器的寄生电感等的影响而使波形成形较差。螺旋传输线可以延缓脉冲的传播速度，形成较长的脉冲，是比较有前途的发展方向，本次实验以300kV功率源作为螺旋线的脉冲充电电源，试验螺旋传输线形成高压脉冲的可行性及具体的技术问题。     

HL－1装置中LHCD和等离子体参数的关系

本文研究了在ＨＬ－１托卡马克的不同放电阶段的低混杂波驱动特性。给出了驱动电流及驱动效率和等离子体参数，如电子平均密度ｎｅ、等离子体电流Ｉｐ及纵向磁场的关系。也给出和分析了波驱动和入射波功率的关系。在放电平段，对正反向驱动效率进行了研究和比较。     

Ohmic Radio-Frequency Synergy Current Drive and Transformer Recharging Experiments in the HT-7 Tokamak

Lower hybrid current drive (LHCD) experiments for investigating the interaction between lower hybrid (LH) wave and residual dc electric field were performed in extensive plasma parameter ranges in the HT-7 superconducting tokamak. The experimental results are well fitted to the Karney-Fisch theory on the efficiency of LH waves energy converted to poloidal magnetic field energy. The fraction of absorbed LH power is about 0.75 for the HT-7 machine, and the upshift of the LH-wave parallel refraction index during LHCD experiments have been derived by the optimizing fitting parameters. The LH wave is also used for the transformer recharging when the plasma current is maintained unchanged. The highest efficiency about 7% has been achieved in HT-7 machine.     

基于Delaunay三角法的电压门控钾离子通道的分类和拓扑结构识别

本文构建了一个Delaunay模型对电压门控钾离子(Kv)通道进行预测。该方法通过建立一系列带有隐含变量的单纯形来分类电压门控钾离子通道,然后通过未知序列在主成分空间里面的投影来预测结构。结果表明该模型无论是在分类和结构预测上均可以得到很好的结果。     

"电动势"教学难点的突破

电动势是中专物理教材“恒定电流”中的一个重点概念，又是学生难以理解的难点内容．电动势描述了电源内部非静电力移动电荷做功的能力大小，在教学中学生对电源、电动势、电压之间的关系很容易混淆，对电源能持续向外供电的原因不理解，特别是对电源内部由于非静电力搬移电荷做功，使电源两极间保持恒定电势差的事实无法体会，同时，也很难利用实验做到让学生直观、形象地认识，因此形成了教学难点．鉴     

低功率密度激光驱动的类镍钽X射线激光

“水窗”附近的X射线激光对于生物全息和成像方面的研究有着独特的优点和价值，因此倍受重视。特别是波长位于“水窗”外沿的4．48nm的类镍钽X射线激光更是进行生物全息研究最合适的工具之一。但是，波长越短的激光，其产生的条件也就越苛刻。一般只有采用非常大规模的激光装置才有可能获得一定强度的输出。对于类镍钽X射线激光来说，20世纪90年代，LLNL利用数千焦耳能量的激光驱动，获得了GL≈8的输出；2002年，在“神光”-Ⅱ激光装置上利用基频、倍频联合驱动的方式，以不足400J的驱动激光，获得了GL≈5．5的好结果。但是要以同样方式获得更好的结果，却受到了器件的限制。     

Measurements of Boundary Plasma in Synergy Discharges of IBW and LHCD on the HT-7 Tokamak

By applying ion Bernstein wave (IBW) heating into the lower hybrid current drive (LHCD) plasma, improved confinements have been obtained in the HT-7 tokamak. The central electron temperature was doubled and the storage energy was increased significantly. The core electron density and temperature were broadened and ther profiles near the edge were steepened. A transport barrier has been formed in the vicinity of the limlter radial location. An enhanced shear in poloidal phase velocity was found in the same region with reduction of the fluctuation levels and the coherences between fluctuations. The results suggest that the improved confinement in the IBW and LHCD plasma is at least partially due to the modification of shear in poloidal velocity and then the suppression of fluctuations and fluctuation induced fluxes via de-correlation effect.