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A Novel Contactless Method for Characterization of Semiconductors:Surface Electron Bean Induced Voltage in Scanning Electron Microscopy 下载免费PDF全文
We present a novel contactless and nondestructive method called the surface electron beam induced voltage (SEBIV) method for characterizing semiconductor materials and devices.The SEBIV method is based on the detection of the surface potential induced by electron beams of scanning electron microscopy (SEM).The core part of the SEBIV detection set-up is a circular metal detector placed above the sample surface.The capacitance between the circular detector and whole surface of the sample is estimated to be about 0.64pf.It is large enough for the detection of the induced surface potential.The irradiation mode of electron beam (e-beam) influences the signal generation When the e-beam irradiates on the surface of semiconductors continuously,a differential signal is obtained.The real distribution of surface potentials can be obtained when a pulsed e-beam with a fixed frequency is used for irradiation and a lock-in amplifier is employed for detection.The polarity of induced potential depends on the structure of potential barriers and surface states of samples.The contrast of SEBIV images in SEM changes with irradiation time and e-beam intensity. 相似文献
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为了研究间接馈电、两级级联柱-锥构型的爆磁压缩发生器的物理特性,发展了描述爆磁压缩物理过程的2维爆轰磁流体力学程序——MFCG(Ⅴ),并用其分析、计算了一系列模型。通过将计算结果与柱-柱构型的结果进行比较,表明了柱-锥构型更有利于功率放大:在同样的输出电流条件下,不仅爆磁压缩的时间缩短,而且输出功率也相应地增加。MFCG(Ⅴ)程序的建立以及相应的数值模拟结果有助于加深对柱-锥构型的爆磁压缩发生器物理过程的认识,并为实验设计提供参考。 相似文献
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Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering 下载免费PDF全文
This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes. 相似文献
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