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Growth characteristics of amorphous-layer-free nanocrystalline silicon films fabricated by very high frequency PECVD at 250 ℃ 下载免费PDF全文
Amorphous-layer-free nanocrystalline silicon films were prepared by a very high frequency plasma enhanced chemical vapor deposition(PECVD) technique using hydrogen-diluted SiH4 at 250 C.The dependence of the crystallinity of the film on the hydrogen dilution ratio and the film thickness was investigated.Raman spectra show that the thickness of the initial amorphous incubation layer on silicon oxide gradually decreases with increasing hydrogen dilution ratio.High-resolution transmission electron microscopy reveals that the initial amorphous incubation layer can be completely eliminated at a hydrogen dilution ratio of 98%,which is lower than that needed for the growth of amorphous-layer-free nanocrystalline silicon using an excitation frequency of 13.56 MHz.More studies on the microstructure evolution of the initial amorphous incubation layer with hydrogen dilution ratios were performed using Fourier-transform infrared spectroscopy.It is suggested that the high hydrogen dilution,as well as the higher plasma excitation frequency,plays an important role in the formation of amorphous-layer-free nanocrystalline silicon films. 相似文献
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利用电子万能试验机和改进的分离式Hopkinson压杆测试了飞机风挡无机玻璃在2种准静态应变率(4×10-4、4×10-3 s-1)和2种动态应变率(200、400 s-1)下的单轴压缩力学行为,并利用高速摄像机记录试样破坏过程。实验结果表明:玻璃破坏时表现为典型的脆性材料,随着应变率的提高,材料的压缩强度显著提高。通过观察试样变形过程及变形后的形貌可知,玻璃在压缩载荷下的破坏模式为横向张应力引起的裂纹成核、沿轴向扩展与联结交错导致的失效破坏,并从微裂纹成核扩展和能量耗散的角度对材料的应变率效应做出了合理的解释。 相似文献
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Optoelectronic components and subsystems such as optically controlled phased array antennas, distributed radar networks, interferometric optical fiber hydrophones, and high-speed optoelectronic chips demand highaccuracy optical time delay measurement with large measurement range and the capability for single-end and wavelength-dependent measurement. In this paper, the recent advances in the optical time delay measurement of a fiber link with high accuracy are reviewed. The general models of the typical time delay measurement technologies are established with the operational principle analyzed. The performance of these techniques is also discussed. 相似文献
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氢键构筑的二维网状结构镍配合物[Ni(en)2(dpas)2]的合成、晶体结构及电化学性质 总被引:2,自引:2,他引:0
A new 2D Hydrogen-bonded network complex [Ni(en)2(dpas)2] (Nadpas=sodium diphenylamine sulphonic acid salt,en=ethanediamine) has been synthesized in aqueous solution,and characterized by elemental analysis,IR. The crystal structure was determined by single-crystal X-ray diffraction. The complex crystallizes in space group P21/c,with cell parameters a=0.605 6(5)nm,b=1.448 1(5) nm,c=1.711 9(5)nm,β=93.257(5)°,and V=1.498 9(14) nm3,Dc=1.497 g·cm-3,Z=2,F (000)=708,R=0.027 7,wR=0.072 5. The crystal structure shows that the nickel atom is coordinated with four nitrogen atoms from the two en and two oxygen atoms from two dpas to form a mononuclear complex. Furthermore,the adjacent complex units are extended into a 2D supramolecular network through hydrogen bonds. 相似文献
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结合非单调信赖域方法,和非单调线搜索技术,提出了一种新的无约束优化算法.信赖域方法的每一步采用线搜索,使得迭代每一步都充分下降加快了迭代速度.在一定条件下,证明了算法具有全局收敛性和局部超线性.收敛速度.数值试验表明算法是十分有效的. 相似文献
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日-地系拉格朗日L1点太阳观测器热设计 总被引:1,自引:0,他引:1
对将运行于日-地L1点的太阳观测器进行了热设计,重点论述了日-地L1点的轨道外热流计算和Lyman α日冕仪(LACI)反射镜M2光阱、Lyman α日冕成像仪(LADI)滤光片组件、CCD组件、电箱、观测器主体等部分的热设计方案。通过在探测器对日面设置集热板,将观测器的主动加热功耗降低了73%;选用预埋热管的设计方案解决了对日定向观测导致的框架温差问题。仿真分析结果表明,在对日高温工作、对日低温工作、低温存储、轨道转移等4个极端工况下,观测器各组件温度均满足指标要求。该热设计方案以较低的加热功耗,解决了太阳观测器在轨工作阶段的散热、轨道转移阶段的保温等问题,满足CCD焦面工作温度<-50℃的要求。 相似文献
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一类约束优化问题的非单调信赖域算法 总被引:1,自引:0,他引:1
本文就一类等式约束优化问题,结合当前比较流行的非单调技术,提出了一类新的求解等式约束优化的非单调信赖域算法.其非单调程度由算法自适应控制,计算预测下降量和实际下降量的比值时,采用前m(k)个点的信息,这不同于以前在计算预测下降量和实际下降量的比值时,仅仅采用当前-个点的信息.在没有正则性条件的假设下我们证明了算法是有定义的.并且通过对不同情况的讨论证明了算法的全局收敛性.基本的数值试验表明算法是有效的,且说明提出的非单调信赖域算法比单调信赖域算法有效. 相似文献
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利用等离子体增强化学气相沉积技术,在高氢稀释条件下,研究不同激发频率对纳米晶硅薄膜生长特性的影响.剖面透射电子显微镜(TEM)分析结果显示,不同激发频率下制备的纳米晶硅薄膜晶化区均呈锥状结构生长,但13.56 MHz激发频率下制备的纳米晶硅薄膜最初生长阶段存在非晶态孵化层,即纳米晶硅薄膜的形成经历了由非晶态孵化层到晶态结构层的转变.而高激发频率(40.68 MHz)下硅纳米晶则能直接在非晶态衬底上生长形成.Raman谱和红外吸收谱测量结果表明高激发频率(40.68 MHz)下制备的纳米晶硅薄膜不但具有较高 相似文献