Classification of rough surfaces: comparison between two hybrid optical coherent processors

Two coherent optical approaches to the classification of rough surfaces using Fourier techniques are compared. Results for various machined metal samples show the potentials of these non-destructive techniques for roughnesses of R_t ranging from 0.1 to 10 μm.     

无铬相移掩模光刻技术

本文论述了相移掩模(PSM)提高光刻分辨率的基本原理、主要类型、无铬PSM的制作方法,简述了曝光实验和实验结果.用NA=0.28的g线光刻机得到了0.5μm的实际分辨率.     

Laser-Diode Phase-Shifting Joint-Transform Correlator with Multiple-Object Recognition

A joint-transform phase correlation is made by an extracted phase from the joint power spectrum using a phase-shifting Mach-Zehnder interferometer with a wavelength-shifted laser diode (LD), and then by numerically Fourier-transforming a measured phase. The algorithm in six steps is insensitive to the power changes in an LD. The phase correlator gives the best discrimination performance. Discriminative multiple-object recognition is performed with no intermodulation noise and artifact noise-free correlation by arranging the multiple objects in a regularly equal-spaced array. The experimental and numerical results are shown.     

Phase-Measuring Algorithms to Suppress Spatially Nonuniform Phase Modulation in a Two-Beam Interferometer

Phase modulation of presently used phase-shifting interferometers is assumed to be spatially uniform across the observing aperture. However, calibration errors or the configuration of an interferometer can cause a spatial nonuniformity in the phase modulation. Spatial nonuniformity causes a significant error in the measured phase when the phase modulator has nonlinear sensitivity. An even-order nonlinearity in the phase modulation in particular contributes to the errors. Lowest-order errors can be suppressed by adding a new symmetry to the sampling functions of the phase-shifting algorithm, however the algorithm suffers from large random noise. The random noise is shown to be decreased substantially by applying one more sampled frame to the algorithm. We derive new seven-sample and eight-sample algorithms that can compensate for a nonuniform phase shift and has much less random noise than the previous algorithm we proposed.     

一种新的移相干涉技术

本文提出了一种对连续采得的大量移相干涉图通过干涉条纹光强定标或傅里叶变换方法求出被测波前相位分布的新的移相干涉技术。此技术充分利用了近代计算机和ＣＣＤ数字图像处理技术的新成果，不仅可使干涉仪的硬件系统简化，成本降低，还可明显提高仪器的抗干扰能力，促进移相干涉技术的普及和推广应用。     

移相干涉仪的抗振技术研究进展

在对光学元件面形进行检测和光学系统成像质量的评价中,移相干涉测量技术有着广泛地应用。但是,光学干涉仪的测量精度对环境的要求非常苛刻,环境的振动和空气的扰动会对测量结果产生很大影响。提高移相干涉仪的抗振性很有必要,受到广泛重视。国际上移相干涉仪的抗振技术主要包括主动抗振和被动抗振两方面,两种技术具有各自特点。     

通过相移条纹图差分测定相移量的方法

提出一种通过两幅相移条纹图相减来确定它们之间相移量的方法,进行了理论分析和实验验证。两幅相移条纹图相减并归一化后,得到的相移差分函数是振幅只与相移量有关的正弦函数,可以通过确定该函数最大极值的方法得到振幅,进而计算出相移量。介绍了极值直接查找法和平均法两种实现最大极值测量的方法。由于不使用傅里叶变换,减少了运算时间,既可以用于高空间频率条纹,也可以用于稀疏平行条纹,以及任意花样的条纹。在衬比度因子确定后,用这种方法就能够直接在空域内确定两幅条纹图之间的相移量,通过大量采样点进行统计计算,使结果达到很高的精度。将所得到的结果与用傅里叶变换方法得到的结果进行了比较,表明两种方法得到的结果具有完全相同的精度。     

New Phase-Shifting Method Using Two Images

We propose a continuous two-step method (CTSM) to obtain an image from two interference images for the measurement time reduction of optical coherence tomography. Image processing is performed for each pixel in CTSM. The calculated signal intensity has an average and standard deviation after processing since the heterodyne beat signal contains the noise in the measurements. We assume that the heterodyne beat signal contains the random noise in simulations and calculate the influence of the normalized standard deviation (NSD = standard deviation/average) on the random noise intensity for both CTSM and the conventional three-step method (TSM). We found that the NSD of the CTSM is only 1.4 times greater than that of the TSM despite processing only two images.     

基于波长移相剪切干涉的准直波前重构技术

为了实现干涉仪出射准直波前的重构，提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射，通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响，推导相对剪切比和其影响因素间的关系公式，给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前，波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置，提高了测量精度，特别适合于测量波长移相干涉仪的出射波前。     

数字剪切散斑相关条纹图的形成及其分析

本文提出了用线性相关计算形成高可见度的数字剪切散斑相关条纹图的方法，为相关条纹图的自动分析奠定了良好的基础。文中还推导了附加位相与物光反射镜转角的关系，使精确地计算附加位相成为可能。同时还介绍了任意附加位相的三步相移技术。最后给出了用线性相关计算法形成的相关条纹图及计算出的位相图。