Research on Raman-scattering and Fabrication of Multilayer Thin Film with Different Structures and Components Based on Pt/Ti/Si3N4/SiO2/Si Substrate

选用三水醋酸铅、乙酰基丙酮酸锆、四异丙氧基钛、乙酰丙酮作初始材料,用同样的方法分别制备了锆钛酸铅(PZT)和钛酸铅(PT)两种固体前驱物. 采用改良型的溶胶-凝胶工艺技术,分别在不同的Pt-Ti-Si₃N₄-SiO₂-Si基底上,按照不同的组合方式,制备了三种多层薄膜：PZT、PT/PZT-PZT/PT、PT/PZT/-/PZT/PT. 较详细地讨论了薄膜制备的工艺技术,发现当凝胶通过烧结和干燥后变成固态物质时,薄膜内部存在着较大的残余应力,当薄膜在600 ºC下退火时其内部残余应力可以被减小. 通过拉曼     

Comparison between photoluminescence spectroscopy and photoreflectance spectroscopy in CuGaSe2 epilayer

Photoluminescence （PL） spectroscopy and photoreflectance （PR） spectroscopy are very useful techniques for studying the properties of materials. In this paper, the same material of Cu-rich metal-organic vapour phase epitaxy （MOVPE） grown CuGaSe2 layer is investigated in a temperature range from 20 to 300 K to compare these two techniques. Both PL and PR spectra appear red shifted, less intense and broadened. The temperature dependence of interband transitions is studied by using the Manoogian Leclerc equation. The values of the band gap energy at T=0K and the effective phonon temperature are estimated. The temperature dependences of intensities and broadenings of PL and PR spectral lines are also analysed. Based on the results of the comparison, the features and applications of the PL and PR can be shown in detail.     

不同沉积层的纳米波导谐振腔特性测试

为确定硅基片上系统半导体光电器件集成中绝缘层材料对器件整体性能的影响,设计并制备了带有覆层的纳米波导谐振腔.谐振透射谱功率测试表明顶层覆盖Si_3N_4薄膜和SiO_2薄膜绝缘层没有削弱环形谐振腔的品质因素,沉积后的最佳耦合间距为70~110 nm.覆层为SiO_2时谐振点波长附近的谐振峰消光比达16.5 dB,3 dB带宽为0.12 nm;覆层为Si_3N_4时谐振点波长附近的谐振峰消光比达13.9 dB,3 dB带宽为0.18 nm.该研究为片上系统集成设计中最佳绝缘层材料的选择提供参考.     

基于级联分光成像的动态火焰层析表征方法

提出一种多相机共光路层析成像方法,对火焰的时空演化特性进行表征。首先,在成像光路结构中利用级联分光棱镜将光能量分配到不同探测通道,在同步控制器驱动下,成像系统能够对瞬态火焰的不同断面同时进行聚焦。其次,建立光学层析系统的空间物像映射关系,基于反卷积算法实现火焰不同断面位置处自发辐射特性的数值解析。实验结果表明,不同相机能够同步独立地获取火焰辐射信息,可实现对动态火焰的高空间分辨率测试。     

锥形光纤激发盘腔光学模式互易性研究

光学谐振腔由于其高Q值特性,作为谐振式陀螺的核心元件,有望实现谐振式陀螺的小型化、集成化,但是非互易性噪声成为制约其精度提高的不利因素. 介绍了采用传统半导体工艺制备的盘型腔与熔融法拉制的锥形光纤组成的耦合系统. 当盘型腔在光纤锥区的不同位置进行耦合谐振时,将输入输出正/反对调,观察到输出透射谱发生偏差,谐振频率、耦合效率以及Q值均发生变化,即存在非互易性现象. 用Rsoft软件对锥形光纤倏逝场分布特性进行仿真,理论分析了非互易性产生的原因. 以此可抑制谐振式光学陀螺应用中由锥形光纤与谐振腔组成的耦合系统产生的非互易性噪声. 关键词： 光学谐振腔 锥形光纤 非互易性 谐振式陀螺     

Wireless contactless pressure measurement of an LC passive pressure sensor with a novel antenna for high-temperature applications

In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600°C. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.     

Pt／Ti／Si3N4／SiO2／Si基底的多层薄膜制备及拉曼研究

选用三水醋酸铅、乙酰基丙酮酸锆、四异丙氧基钛、乙酰丙酮作初始材料,用同样的方法分别制备了锆钛酸铅（PZT）和钛酸铅（PT）两种固体前驱物．采用改良型的溶胶-凝胶工艺技术,分别在不同的Pt-Ti-Si3N4-SiO2-Si基底上,按照不同的组合方式,制备了三种多层薄膜：PZT、PT／PZT—PZT／PT、PT／PZT／-／PZT／PT．较详细地讨论了薄膜制备的工艺技术,发现当凝胶通过烧结和干燥后变成固态物质时,薄膜内部存在着较大的残余应力,当薄膜在600℃下退火时其内部残余应力可以被减小．通过拉曼衍射和XRD分析,发现PT／PZT—PZT／PT结构的薄膜具有较好的结晶性和较小的残余应力．XRD分析表明,多层混合薄膜的衍射峰是PZT和PT两种薄膜衍射峰的叠加．     

Temperature Effects of Piezoresistance Coefficient

A higher sensitivity is achieved by making use of a high electron mobility transistor （HEMT） as the piezoresistive device. The temperature dependence on the electromechanical coupling effect of accelerometers is reported. The current in the structure of our study decreases at the rate of 3.15 mA/℃ with the temperature going up at every region, and piezoresistance coefficient decreases because of the shift of energy and expansion of lattice.     

SOI环形光波导谐振腔双层石墨烯调制器

在片上光互连系统中,电光调制器起到将电信号调制为光信号的作用,是光互联系统中的核心部件之一。调制器的3 dB带宽决定着载波所能携带的最大信息量,是衡量调制器性能的核心参数。利用石墨烯和高Q环形谐振腔设计成具有CMOS结构的新型调制器,其集成了石墨烯的宽带吸收、载流子迁移率高等材料优势和高Q值环形光学谐振腔的光程放大的结构优势,通过理论计算,其3 dB调制带宽可以达到100 GHz。同时,基于微环谐振腔的石墨烯电光调制器结构可以方便的与光互联系统中的波分复用器相集成,从而提升片上光互联系统的集成度和降低技术复杂性。