| Pt／Ti／Si3N4／SiO2／Si基底的多层薄膜制备及拉曼研究 |
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| 引用本文： | 谭秋林,;张文栋,;薛晨阳,;刘俊,;李都泓,;熊继军.Pt／Ti／Si3N4／SiO2／Si基底的多层薄膜制备及拉曼研究[J].化学物理学报(中文版),2009(3):333-338. |
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| 作者姓名： | 谭秋林 ;张文栋 ;薛晨阳 ;刘俊 ;李都泓 ;熊继军 |
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| 作者单位： | [1]中北大学仪器科学与动态测试教育部重点实验室,太原030051; [2]电子测试技术国家重点实验室,太原030051 |
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| 基金项目： | This work was supported by the Chinese National Programs ＂863＂ for High Technology Research and Development （No.2006AA040101）, the Innovation Group of Shanxi Province, the Graduate Student Excellent Innovation Project of Shanxi Province, and Shanxi Province Outstanding Researcher award. |
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| 摘 要： | 选用三水醋酸铅、乙酰基丙酮酸锆、四异丙氧基钛、乙酰丙酮作初始材料，用同样的方法分别制备了锆钛酸铅（PZT）和钛酸铅（PT）两种固体前驱物．采用改良型的溶胶-凝胶工艺技术，分别在不同的Pt-Ti-Si3N4-SiO2-Si基底上，按照不同的组合方式，制备了三种多层薄膜：PZT、PT／PZT—PZT／PT、PT／PZT／-／PZT／PT．较详细地讨论了薄膜制备的工艺技术，发现当凝胶通过烧结和干燥后变成固态物质时，薄膜内部存在着较大的残余应力，当薄膜在600℃下退火时其内部残余应力可以被减小．通过拉曼衍射和XRD分析，发现PT／PZT—PZT／PT结构的薄膜具有较好的结晶性和较小的残余应力．XRD分析表明，多层混合薄膜的衍射峰是PZT和PT两种薄膜衍射峰的叠加．
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| 关 键 词： | 多层薄膜 热释电 溶胶-凝胶 拉曼 X衍射分析 |
Research on Raman-scattering and Fabrication of Multilayer Thin Film with Different Structures and Components Based on Pt/Ti/Si3N4/SiO2/Si Substrate |
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| Institution: | Qiu-lin Tan, Wen-dong Zhang, Chen-yang Xue, Jun Liu, Jun-hong Li, Ji-jun Xiong(a. Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China b. National Key Laboratory for Electronic Measurement Technology, Taiyuan 030051, China) |
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| Abstract: | Using the same conditions and various starting materials, such as lead acetate trihydrate, tetrabulyl titanate, zirconium n-butoxide, and acetylacetone, two kinds of solid precursors, lead zirconate titanate （PZT, Zr/Ti=15/85） and lead titanate （PT）, were fabricated. With three different combinations, namely, PZT, PT/PZT-PZT/PT, and PT/PZT/-/PZT/PT, three multilayer thin films were deposited on three Pt-Ti-Si3N4-SiO2-Si substrates by a modified sol-gel process. The fabrication process of the thin films is discussed in detail. We found that there is a large built-in stress in the thin film, which can be diminished by annealing at 600 ℃, when the gel is turned into solid material through drying and sintering. The Raman scattering spectra of the films with different compositions and structures were investigated. With the help of X-ray diffraction （XRD） analyzer and Raman scattering spectra analyzer, it was found that the thin films with the PT/PZT-PZT/PT structure have reasonable crystallinity and less residual stress. XRD testing shows that the diffraction pattern of the multilayer film results from the superimposition of the PZT and PT patterns. This leads to the conclusion that the PT/PZT-PZT/PT multilayer thin film has a promising future in pyroelectric infrared detectors with high performance. |
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| Keywords: | Multilayer thin film Pyroelectric Sol-gel Raman XRD analysis |
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