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建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
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Sadaharu Jo 《Applied Surface Science》2006,252(10):3514-3519
The morphologies and lattice structures of anthracene single crystals grown from the vapor phase were investigated using optical microscopy, phase contrast microscopy, atomic force microscopy (AFM), and X-ray diffraction analysis. Common morphologies with hexagonal large planes were observed irrespective of crystal size. The observation of certain surface morphologies with a phase contrast microscopy revealed that the spiral steps originated from screw dislocations present on the (0 0 1) planes. Moreover, the center and edge of the (0 0 1) planes had large curvatures, similar to hills. Resultantly, quarter-monolayer (ML) steps were observed on the large and flat planes between both hills. 相似文献
67.
A planar metamaterial structure consisting of two layers of split-ring resonator (SRR) arrays is demonstrated to form the
image of a point source with subwavelength resolution. The source frequency is swept through the resonance gap of the metamaterial
layers and the lateral field intensity distribution is recorded on the transmission side of the metamaterial. When the source
is tuned to the resonance frequency of SRRs, the metamaterial acts as a high permeability medium and a distinct image with
subwavelength resolution in the lateral direction is obtained. Increasing the distance between the individual SRR layers reduces
the interlayer coupling, and the intensity and spatial resolution of the image decrease rapidly. 相似文献
68.
Recently, molecular imaging has been rapidly developed to studyphysiological and pathological processes in vivo at the cellularand molecular levels. Among molecular imaging modalities, opticalimaging has attracted a major attention for its unique advantages.In this paper, we establish a mathematical framework for multispectralbioluminescence tomography (BLT) that allows simultaneous studiesof multiple optical reporters. We show solution existence, uniquenessand continuous dependence on data as well as the limiting behaviourswhen the regularization parameter approaches zero or when thepenalty parameter approaches infinity. Then, we propose twonumerical schemes for multispectral BLT and derive error estimatesfor the corresponding solutions. 相似文献
69.
P. Kavouras Th. Kehagias K. Chrissafis Ph. Komninou Th. Karakostas 《Journal of Thermal Analysis and Calorimetry》2006,86(3):715-719
Three batch compositions of pure oxides (SiO2,
Fe2O3, PbO, Na2O)
with equivalent SiO2, Fe2O3
and PbO contents and a gradually increased Na2O content
were vitrified through heating in a high temperature electric furnace and
subsequent quenching. The resulting vitreous products were thermally treated
in order to study the devitrification behaviour, under conditions designated
from differential thermal analysis experiments. Depending on the Na2O
content, crystal phase separation gave rise to the growth of acmite and hematite
or maghemite. A uniformly phase separated glass-ceramic material, with crystallites
of similar size and population density, was produced from devitrification
of the vitreous product with the higher Na2O content. 相似文献
70.