X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

斜角入射沉积法制备渐变折射率薄膜的折射率分析

斜角入射沉积法是一种制备薄膜的新颖方法,它可以用来制备渐变折射率薄膜.本文首先探讨了膜料的沉积入射角为α,薄膜柱状生长倾斜角为β时的薄膜的填充系数;之后利用drude理论,分析研究了斜角入射沉积法制备渐变折射率薄膜的折射率与薄膜的入射角和生长方向的关系. 关键词： 斜角入射沉积 渐变折射率 填充系数     

Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

CrN_x thin films have attracted much attention for semiconductor IC packaging molding dies and forming tools due to their excellent hardness, thermal stability and non-sticking properties (low surface free energy). However, few data has been published on the surface free energy (SFE) of CrN_x films at temperatures in the range 20-170 °C. In this study CrN_x thin films with CrN, Cr(N), Cr₂N (and mixture of these phases) were prepared using closed field unbalanced magnetron sputtering at a wide range of Cr⁺² emission intensity. The contact angles of water, di-iodomethane and ethylene glycol on the coated surfaces were measured at temperatures in the range 20-170 °C using a Dataphysics OCA-20 contact angle analyzer. The surface free energy of the CrN_x films and their components (e.g., dispersion, polar) were calculated using the Owens-Wendt geometric mean approach. The influences of CrN_x film surface roughness and microstructure on the surface free energy were investigated by atomic force microscopy (AFM) and X-ray diffraction (XRD), respectively. The experimental results showed that the lowest total SFE was obtained corresponding to CrN at temperature in 20 °C. This is lower than that of Cr(N), Cr₂N (and mixture of these phases). The total SFE, dispersive SFE and polar SFE of CrN_x films decreased with increasing surface temperature. The film roughness has an obvious effect on the SFE and there is tendency for the SFE to increase with increasing film surface roughness.     

Propagation properties of vectorial elliptical Gaussian beams beyond the paraxial approximation

Starting from the vectorial Rayleigh diffraction integral formula and without using the far-field approximation, a solution of the wave equation beyond the paraxial approximation is found, which represents vectorial non-paraxial elliptical Gaussian beams in free space. The far-field expressions for non-paraxial Gaussian beams and elliptical Gaussian beams can be regarded as special cases treated in this paper. Some basic propagation properties of vectorial non-paraxial elliptical Gaussian beams, including the irradiance distribution, phase term, beam widths and divergence angles are studied. Numerical results are given and illustrated.     

锥形光纤的偏振特性

随着光通信技术的不断发展，光纤的应用越来越广泛，而锥形光纤以其独特的传光方式越来越多地应用于光纤连接、成像及测量等领域。实验测定了不同锥角和不同长度锥形光纤的偏振特性。理论上，根据麦克斯韦方程组以及边界条件给出了光在理想光纤中的场分布，阐明了实际光纤中光的传输特性。论证了锥形光纤长度与其偏振特性的关系，进而利用几何光学方法对锥形光纤锥角与其偏振特性的关系作了定性说明。并用具体数据进行了定量计算，得出偏振光经锥形光纤传输或耦合后再传输到其终端所得到均是椭圆偏振光的结论。     

同步辐射小角x射线散射方法研究由城市固体垃圾制备的活性炭

应用同步辐射小角x射线散射方法研究了由不同城市固体垃圾制备而成的活性炭的孔结构-结果发现利用木类、纸张、塑料这三类典型垃圾组分的热解残余物为原料制备中孔发达的活性炭是可行的-活性炭的形态和结构取决于垃圾热解残余物的组分和热解程度等因素- 关键词： 小角x射线散射 活性炭 分形维数 平均孔径     

N[a,b]类中边界Nevanlinna-Pick插值(I)

用所谓的Hankel向量方法求解N[a,b]函数类中带边界插值数据的Nevanlina-Pick插值(BNP(N[a,b]))问题,并建立BNP(N[a,b])问题与[a,b]上的某种带约束条件的Hausdorff矩量问题之间等价的可解条件以及解之间明确的一一对应关系.这使得当BNP(N[a,b])问题有多解时,能通过带约束条件的矩量问题的可解性准则和解获得BNP(N[a,b])问题的可解性准则和解的参数化描述,而在唯一解的情况下,通过BNP(N[a,b])问题解的存在唯一性准则和唯一解来获得带约束条件的     

注入控制铜蒸气激光方向性时间过程测量

实验研究了注入控制对铜蒸气激光非稳腔输出光束质量的影响，从输出光发散角时间分辨过程的测量结果说明注入加速被注入腔内激光发散角的减小过程。由于被注入腔内放大自发辐射的存在，为得到较好的注入控制效果，注入光的脉宽和进入被注入腔的延时必须恰当。     

THE GENERALIZED MAXIMUM ANGLE CONDITION FOR THE Q1 ISOPARAMETRIC ELEMENT

We consider the quadrilateral Q1 isoparametric element and establish an optimal error estimate in H^1 norm for the interpolation operator under a weaker mesh condition which admits anisotropic quadrilaterals and allows the quadrilateral to become a regular triangle in the sense of maximum angle condition [5, 11].     

对正项级数敛散性判别法的关系的一些探讨

先对正项级数敛生判别法的粗细与强弱问题进行了辨析，然后建立了三个有关正项级数剑散判别的命题，分别比较了三组判别法之间的强弱关系。