Phase-Shifting Fringe Analysis for Laser Diode Wavelength-Scanning Interferometer

A method for analyzing the fringe patterns obtained from a wavelength-scanning interferometer is proposed. It is based on phase retrieval with the phase-shifting method and derivation of its slope along the wave number axis. The accuracy and the error sources are estimated by experiments, in which a laser diode under small wavelength-modulation (-95pm) is used as the light source. A conventional piezoelectric phase shifter was used for a phase shifter. This technique can be applied to profile measurement of stepped objects located across the zero-path position.     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.     

数字相移技术用于不连续复杂物体的三维面形测量

提出了一种检测不连续复杂三维物体面形的技术,即数字相移技术结合查找表双频解包裹算法,用于不连续复杂物体的面形测量。首先介绍了数字相移技术和查找表双频解包裹算法的基本原理,然后通过实验实现了对不连续复杂物体的三维面形测量。结果验证了所提出的测量方案的有效性。     

精密干涉测量中余弦依赖算法的误差研究

针对相移算法中以双光束干涉为基础的余弦依赖算法的算法误差,以菲佐干涉仪精密测长为应用背景进行了研究。利用干涉光学的基本原理导出了在多束光干涉（经光学面多次反射、透射）的情况下干涉光强随相位分布的精确公式;通过数值分析得出了在给定参量条件下忽略次级反射光所引入的光强误差达到14．4％;对余弦依赖算法所引起的光强误差分别就四步算法、五步算法得出了不同的依赖关系：由于四步算法比五步算法对光强误差更为敏感,因而五步算法具有更高的准确度;对于两个反射面均具有较高反射率的情况,必须考虑算法误差;当测长准确度要求不太高时,在两个或至少其中一个反射面反射率较低的情况下可以忽略算法误差的影响。     

一种新的数字散斑振动定量分析系统

在数字散斑干涉(DSPI)测量方法中，数字散斑时间平均法测量振动时得到的是贝塞尔条纹，其定量分析比较困难。该文采用贝塞尔条纹准相移技术进行数字散斑振动定量分析，即在参考光路中引入和物体同频率的偏置参考振动,当参考振动的相位改变时,振动条纹会产生移动,这相当于静态余弦条纹的相移,可以采用相移算法对数字散斑振动测量的贝塞尔条纹进行定量分析。文中开发了一种新的数字散斑振动定量分析系统，研制了一种低压光学相移器和测量控制电路，给出了圆周固定圆片和四周固定方铜板的振动测量结果。实验结果表明：采用本系统可以方便地定量测出物体的振动模态。     

Mirau相移干涉法测量微透镜阵列面形

基于Mirau相移干涉法，在实验室环境下对微透镜阵列的微表面形貌进行了轮廓测量.实验使用He-Ne激光器作为光源，干涉成像系统由Mirau干涉物镜和其他光学元件组成.在实验中使用压电陶瓷执行器作为相移器，通过5步相移法计算待测表面形貌.实验结果表明，基于Mirau相移干涉法对微透镜阵列面形的测量，水平分辨率达到1.1 μm，垂直测量准确度达到6.33 nm，垂直测量范围为5 μm.对于微透镜阵列的面形测量，通过将微透镜阵列划分为若干微小区域以保证局部面形最大高度小于5 μm，然后辅以精密平移机构进行若干次5步相移法测量局部面形，再利用相位重建所得的数据进行拼接和3D轮廓重建，最终得到整个微透镜阵列的精确微表面形貌.     

粒子场相移全息术

本文利用相移全息术记录的双曝光粒子场全息图,以改进再现图像的SNR、分辨率和对比度。并发展了这种技术的理论,讨论了相移的引入方法,给出了实验结果,与通常的同轴和离轴双曝光结果进行了比较。     

空域移相偏振点衍射波前检测技术

点衍射干涉仪结构简单、共光路、测量精度高, 空域移相干涉仪抗振性能优越, 两者在波前检测领域获得了广泛的应用. 本文采用激光打孔技术, 通过在金属纳米线栅偏振片上制备小孔, 制作了偏振点衍射板; 结合分光结构的空域移相技术, 搭建了空域移相偏振点衍射干涉仪, 并对一焦距为550 mm, F_#10的平行光管准直物镜透射波前进行测量, 与法国Phasics公司生产的商业化波前传感器SID4的测量结果相比较, 两者峰谷值相差0.09λ, 均方根值相差0.012λ ; 利用35项Zernike多项式拟合两者的测量结果, 将拟合得到的系数在同一坐标轴下绘制成两条曲线, 两者基本重合, 从而验证了所搭建的空域移相偏振点衍射波前检测装置的测试精度. 从而在传统点衍射干涉仪的基础上引入了空域移相技术, 实现了波前的高分辨率、高精度、实时检测, 并且提高了对振动、气流等环境因素的抗干扰能力.     

Digitally whole-field analysis of isoclinic parameter in photoelasticity by four-step color phase-shifting technique

This paper presents a whole-field method for automatic determination of the isoclinic parameter φ in photoelasticity. The method determines φ in the true phase interval (-π/2<φ+π/2) based on the four-step color phase-shifting approach and a new unwrapping method based on simple logic operations, a binary image and a gray-scale mask. A plane polariscope with a white light source is used for capturing raw photoelastic fringe images. The theoretical validation of the method is done with the problem of a circular disk under compression. Comparisons between theoretical and experimental results are also demonstrated. The experimental confirmation for the proposed method is tested with the photoelastic model having an isotropic point(s) and/or a singular point(s). The results show the method permits the reliable isoclinic parameter to be determined in the true phase interval with almost no defects of the isochromatic parameter.     

偏振相移干涉栅投影技术及其应用

本文提出偏振相移干涉栅投影技术并成功地用于三维物面形状和大变形物体的位移测量，得到较为满意的实验结果。