共查询到18条相似文献,搜索用时 88 毫秒
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本文主要采用超声喷镀法在玻璃衬底上制备了N-Al共掺的p型ZnO薄膜.研究了前驱溶液的不同配比对薄膜电学、结构特性的影响.X射线衍射的结果显示:共掺与本征ZnO具有很相似的结晶特性.霍耳测试结果表明:随着Al原子掺入量的逐渐增加,制备ZnO的类型逐渐由n型转换成p型,进一步提高后又转换成n型,文中对其中的原因进行了讨论.在普通玻璃衬底上制备出了空穴浓度达到4.6×1018cm-3,同时迁移率和电阻率分别为0.4cm2·V-1·s -1、3.3Ω·cm的p型ZnO薄膜. 相似文献
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采用化学浴法,以ZnSO4·7H2O和SC( NH2)2作为反应前驱物,C6H5O7 Na3·2H2O作为络合剂,NH3·H2O 作为辅助络合剂和缓冲剂制备Zn(O,S)薄膜.采用SEM、EDS、XPS、XRD和透射光谱分析方法,研究氨水浓度对化学浴法制备的Zn(O,S)薄膜形貌、成分、结构和光学性能的影响以及Zn(O,S)薄膜的形成机理.结果表明:Zn(O,S)薄膜是由ZnO和ZnS纳米颗粒混合组成的,ZnO具有纤锌矿结构,ZnS是以非晶相存在.随着反应溶液中氨水浓度的降低,薄膜中所包含的ZnO逐渐减少,ZnS逐渐增加,S/Zn原子比逐渐增加,透射率和光学带隙也逐渐增大. 相似文献
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利用直流反应磁控溅射法(纯金属锌作为靶材,Ar-N2-O2混合气体作为溅射气体)在石英玻璃衬底上制备了N掺杂p型ZnO薄膜.通过XRD、Hall和紫外可见透射谱分别研究了衬底温度对ZnO薄膜结构性能、电学性能和光学性能的影响.XRD结果显示所有制备的薄膜都具有垂直于衬底的c轴择优取向,并且随着衬底温度的增加,薄膜的晶体质量得到了提高.Hall测试表明衬底温度对p型ZnO薄膜的电阻率具有较大影响,400℃下生长的p型ZnO薄膜由于具有较高的迁移率(1.32 cm2/Vs)和载流子浓度(5.58×1017cm-3),因此表现出了最小的电阻率(8.44Ω·cm). 相似文献
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以醋酸锌水溶液为前驱体溶液,采用超声喷雾热分解法在玻璃衬底上制备得到了温度在350℃到450℃范围内的ZnO薄膜.用X射线衍射(XRD)、扫描电镜(SEM)及紫外-可见分光光度计分析了ZnO薄膜的晶体结构、微观形貌及其光学性质,重点探究了衬底温度对ZnO薄膜生长过程及微观结构的影响.分析表明:制备的ZnO薄膜为六角铅锌矿结构,衬底温度对薄膜的质量有着重要的影响;所得薄膜在400℃时结晶性能好,沿c轴择优取向生长,具有优良的均匀性和致密性;所制备的薄膜在可见光区透过率高达86;以上,在紫外光区吸收强烈. 相似文献
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采用水热法,6 mol/L KOH作为矿化剂,按物质的量比0.02∶0.5∶1添加SnO2、CoCl2和ZnO作为前驱物,填充度70%,温度430℃,以常规水热法制备的纯ZnO晶片为籽晶([0002]方向),在ZnO籽晶片上制备出多元掺杂的ZnO厚膜。厚膜呈墨绿色,EDS测量显示Co和Zn元素的相对含量为7.47∶92.53。电学测量晶体膜层为n型导电类型,载流子浓度1.15×1020cm-3,电阻率1.94×10-3Ω.cm,迁移率27.8 cm2/V.s,SQUID测量表明厚膜为顺磁性。 相似文献
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利用直流磁控溅射法在石英衬底上制备出了高透明导电的掺锆氧化锌(ZnO:Zr)薄膜.研究了衬底温度对ZnO:Zr薄膜结构、形貌及光电性能的影响.XRD表明实验中制备的ZnO:Zr为六方纤锌矿结构的多晶薄膜,具有垂直于衬底方向的c轴择优取向.实验所制备ZnO:Zr薄膜的晶化程度和导电性能对衬底温度有很强的依赖性.当衬底温度为300 ℃时, ZnO:Zr薄膜具有最小电阻率7.58×10-4 Ω·cm,其可见光平均透过率超过了91;. 相似文献
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本文利用磁控溅射法在Si(100)衬底上制备了Zn0.95Co0.05O薄膜,考察了沉积温度对Zn0.95Co0.05O样品的结构与磁性的影响.采用XRD、FESEM、XPS和SQUID等方法对样品的结构与磁性进行了表征与分析.XRD结果表明:Zn0.95Co0.05O薄膜样品为纤锌矿结构且具有(002)择优生长,不存在Co和其他杂质相.XPS数据证明:薄膜样品中的Co是以Co2+形式存在,并且Co2+占据ZnO晶格中的Zn原子位.磁滞回线表明:Zn0.95Co0.05O薄膜具有明显的室温铁磁性,随着沉积温度的升高,薄膜的铁磁性逐步减弱. 相似文献
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以Zn(NO3)2·6H2O为锌源,尿素为沉淀剂,氧化石墨烯(GO)为碳源,采用均匀沉淀法合成碱式碳酸锌与氧化石墨烯复合材料前驱体,350℃下焙烧前驱体2h,获得ZnO/GO复合材料,在室温下研究了该复合材料对NOx的气敏性能.通过X射线衍射、拉曼光谱、扫描电子显微镜和透射电子显微镜对材料的形貌和结构进行表征.结果表明,所得样品为六方ZnO与GO复合材料,ZnO纳米粒子较均匀的覆盖在GO的表面.当硝酸锌溶液浓度为0.3mol/L时,所合成的复合材料对NOx有较高的灵敏度,且注入NOx体积浓度97 ppm时,灵敏度为27.5;,响应时间1s,最低检测浓度可达0.97 ppm. 相似文献
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Yamin Feng Jinghua Chen Xintang Huang Weifeng Liu Yu Zhu Wei Qin Xiaoyuan Mo 《Crystal Research and Technology》2016,51(10):548-553
A dye‐sensitized solar cell (DSSC) based on ZnO/TiO2 composite nanorods (NRs) photoanode is fabricated. The power conversion efficiency (PCE) of the ZnO/TiO2 composite NRs film DSSC is 4.36%, which is obviously higher than that of DSSCs based on pure TiO2 NRs (0.6%) and ZnO NRs (3.10%). The enhanced performance of ZnO/TiO2 composite NRs film DSSC can be attributed to the combined effects of ZnO and TiO2 NRs. In this architecture, the thick ZnO NRs overlayer offers a large surface area for enough dye absorption, while the thin TiO2 NRs underlayer not only offers a direct and quick pathway for photoinjected electron transfer along the photoanode but also acts as a blocking layer, which effectively hinders the direct contact between the substrate and the electrolyte resulting in lower carrier recombination. 相似文献
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采用溶胶-凝胶法在石英玻璃基板上制备了ZB1-xMgxO薄膜,研究退火温度对高Mg含量Zn0.5Mg0.5O薄膜的相组成、相偏析及紫外-可见透过光谱中吸收边移动的影响,当退火温度≤500℃时,Zn0.5Mg0.5O薄膜未发生相偏析现象,且400℃退火处理制备的Zn0.5Mg0.5O薄膜的紫外-可见透过光谱中吸收边蓝移最大.因此,对于高Mg含量Zn0.5Mg0.5O薄膜,退火温度是影响Mg2+在ZnO中固溶度的关键因素,且400℃是其理想的退火温度.在此条件下研究了不同Mg含量对Zn1-xMgO(x=0~0.8)薄膜带隙调节的影响,随着Mg含量的增加,其紫外-可见透过光谱中紫外光区吸收边呈现规律性蓝移,光学带隙值Eg从纯ZnO的3.3 eV调节至4.2 eV. 相似文献
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Jiangnan Dai Hongbo Su Li Wang Yong Pu Wenqing Fang Fengyi Jiang 《Journal of Crystal Growth》2006,290(2):426-430
In this paper, we compare the properties of ZnO thin films (0 0 0 1) sapphire substrate using diethylzinc (DEZn) as the Zn precursor and deionized water (H2O) and nitrous oxide (N2O) as the O precursors, respectively in the main ZnO layer growth by atmospheric pressure metal–organic chemical vapor deposition (AP-MOCVD) technique. Surface morphology studied by atomic force microscopy (AFM) showed that the N2O-grown ZnO film had a hexagonal columnar structure with about 8 μm grain diameter and the relatively rougher surface compared to that of H2O-grown ZnO film. The full-widths at half-maximum (FWHMs) of the (0 0 0 2) and () ω-rocking curves of the N2O-grown ZnO film by double-crystal X-ray diffractometry (DCXRD) measurement were 260 and 350 arcsec, respectively, indicating the smaller mosaicity and lower dislocation density of the film compared to H2O-grown ZnO film. Compared to H2O-grown ZnO film, the free exciton A (FXA) and its three phonon replicas could be clearly observed, the donor-bound exciton A0X (I10):3.353 eV dominated the 10 K photoluminescence (PL) spectrum of N2O-grown ZnO film and the hydrogen-related donor-bound exciton D0X (I4):3.363 eV was disappeared. The electron mobility (80 cm2/V s) of N2O-grown ZnO film has been significantly improved by room temperature Hall measurement compared to that of H2O-grown ZnO film. 相似文献
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D. Sivalingam J. B. Gopalakrishnan J. B. Balaguru Rayappan 《Crystal Research and Technology》2011,46(7):685-690
Nanostructured ZnO thin films were coated on glass substrate by spray pyrolysis using Zinc acetate dihydrate as precursor. Effect of precursor concentration on structural, morphological, optical and electrical properties of the films was investigated. The crystal structure and orientation of the ZnO thin films prepared with four different precursor solution concentrations were studied and it was observed that, the prepared films are polycrystalline in nature with hexagonal wurzite structure. The peaks are indexed to (100), (002), (101), (102) and (110) planes. Grain size and texture coefficient (TC) were calculated and the grain size found to increase with an increase in precursor concentration. Presence of Zn and O elements was confirmed with EDAX spectra. Optical absorption measurements were carried out in the wavelength region of 380 to 800 nm and the band gap decreases as precursor concentration increases. The current‐voltage characteristics were observed at room temperature and in dark. It was found that for the films deposited at four different precursor concentrations, the conductivity improves as precursor concentration increases. As trimethyl amine TMA is a good marker for food quality discrimination, sensing behavior of the films at an optimized operating temperature of 373 K, towards various concentrations of (TMA) was observed and reported. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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Al‐doped ZnO nanoparticle thin films were prepared on glass substrate at the optimum temperature of (410±10) °C by spray pyrolysis technique using zinc nitrate as a precursor solution and aluminium chloride as a dopant. The dopant concentration (Al/Zn at%) was varied from 0 to 2 at%. Structural analysis of the films shows that all the films are of polycrystalline zinc oxide in nature, possessing hexagonal wurtzite structure. The films exhibit variation in peak intensities corresponding to (100), (002) and (101) reflection planes on Al‐doping. The crystallite size calculated by Scherrer formula has been found to be in the range of 35‐65 nm. The optical absorption study shows that the optical band gap in the Al‐doped films varies in the range of 3.11 – 3.22 eV. The width of localized states in the band gap estimated by the Urbach tail analysis has been found to be minimum in case of the 1 at% Al‐doped zinc oxide thin film. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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本文通过在ZnO靶材上放置高纯Mg片,运用射频磁控溅射法在普通玻璃衬底上制备了Zn1-xMgxO(x=0.1,0.16,0.18,0.24)薄膜.用X射线衍射仪、扫描电镜、紫外-可见-分光光度计等研究了Zn1-xMgxO薄膜的组织结构和性能.结果表明:Zn1-xMgxO薄膜呈ZnO的纤锌矿结构,在ZnO晶格中Mg2+有效地替代了Zn2+.样品表面比较平整,颗粒均匀致密,薄膜质量较高,且在可见光范围内光透过率均为90;左右,具有极好的透光性;此外,随着Mg掺入量的增多,Zn1-xMgxO薄膜的吸收边出现蓝移现象,实现了对禁带宽度的调节. 相似文献
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High-quality ZnO thin films prepared by two-step thermal oxidation of the metallic Zn 总被引:16,自引:0,他引:16
S. J. Chen Y. C. Liu J. G. Ma D. X. Zhao Z. Z. Zhi Y. M. Lu J. Y. Zhang D. Z. Shen X. W. Fan 《Journal of Crystal Growth》2002,240(3-4):467-472
In this paper, we report the preparation of nanocrystalline ZnO thin films on Si (1 0 0) substrates using a simple method, in which a resistive thermal evaporation of Zn and a two-step annealing process were employed. The aim of the first annealing step in an oxygen ambient at 300°C for 2 h is to form ZnO layers on the surface of the Zn films to prevent the diffusion of the metallic Zn from the films during the high-temperature annealing process. To obtain high-quality ZnO films, a high-temperature annealing step was performed at temperature in the range of 600–900°C. The effects of the annealing temperature on the photoluminescence (PL) and orientation of ZnO nanocrystalline thin films were studied. A very strong near-band-edge emission around 375 nm with a full-width at half-maximum of 105 meV and a relatively weak emission around 510 nm related to deep-level defects were observed, which indicated that high-quality ZnO films have been obtained. 相似文献