轻敲模式下 AFM 动力学模型及能量耗散机理研究

轻敲模式下探针从远离到间歇性接触样品表面,是一个连续的能量耗散过程.针对该连续过程的能量耗散机理研究仅零星存在于各个文献之中,对于连续过程中各个阶段的能量耗散机理也没有一个系统的解释和实验验证.本文提出了新的位移激励下原子力显微镜探针-样品系统简化模型并得到了一维振子系统等效阻尼的计算方法,并通过该方法计算了探针在远离样品表面时的空气黏性阻尼和靠近样品时的空气压膜阻尼,分析了探针从远离样品到间歇性接触样品表面这一过程中的环境耗散机理变化,得到了原子力显微镜系统理论品质因数与探针工作位置的关系曲线;在此基础上设计了轻敲模式下的微悬臂梁扫频实验,得到了系统实验品质因数与探针工作位置的关系曲线,进而验证了理论模型的准确性. 本文通过对轻敲模式下AFM环境耗散机理进行理论分析和实验验证,希望可以对轻敲模式下AFM动力学特性及其阻尼作用机理有更近一步的认识,同时对微纳米机电系统 (MEMS/NEMS) 能量耗散机理的研究提供理论参考和实验方法.      

STUDY ON A DYNAMICS MODEL OF TAPPING MODE AFM AND ENERGY DISSIPATION MECHANISM$^{\bf 1)}$

轻敲模式下探针从远离到间歇性接触样品表面,是一个连续的能量耗散过程.针对该连续过程的能量耗散机理研究仅零星存在于各个文献之中,对于连续过程中各个阶段的能量耗散机理也没有一个系统的解释和实验验证.本文提出了新的位移激励下原子力显微镜探针-样品系统简化模型并得到了一维振子系统等效阻尼的计算方法,并通过该方法计算了探针在远离样品表面时的空气黏性阻尼和靠近样品时的空气压膜阻尼,分析了探针从远离样品到间歇性接触样品表面这一过程中的环境耗散机理变化,得到了原子力显微镜系统理论品质因数与探针工作位置的关系曲线;在此基础上设计了轻敲模式下的微悬臂梁扫频实验,得到了系统实验品质因数与探针工作位置的关系曲线,进而验证了理论模型的准确性. 本文通过对轻敲模式下AFM环境耗散机理进行理论分析和实验验证,希望可以对轻敲模式下AFM动力学特性及其阻尼作用机理有更近一步的认识,同时对微纳米机电系统 (MEMS/NEMS) 能量耗散机理的研究提供理论参考和实验方法.     

AFM稳定性研究

“突跳”现象严重影响着原子力显微镜(AFM)的性能。根据W igner-Seitz模型微观连续介质理论,建立了AFM针尖同试样面接触力包含斥力的数学模型;由分析力学的稳定平衡条件,发现了引起AFM“突跳”的本质是不稳定平衡点的存在;通过增加AFM悬臂梁刚度,提出了一种避免AFM“突跳”现象发生的方法,并给出仿真结果。     

粗糙表面的黏着试验研究

在微机械电子系统中,表面粗糙峰的几何特征、尺寸以及形状等对表面黏着以及摩擦特性有重要作用.为了研究粗糙度对黏着力的影响,首先用KOH溶液腐蚀硅片,得到8个粗糙度不同的样品.使用原子力显微镜(AFM)来测量样品的黏着力.分别使用两种探针来模拟不同的接触几何,第一种探针针尖为一个2μm左右的平台,另一种探针为尖探针.试验分别在干燥的手套箱内以及在空气中进行.在样品表面随机选取15个测量点,每个点测量50次,然后根据计算值,确定平面的平均黏着力以及标准差.并与Robinovich模型的计算结果作比较.结果显示:当粗糙度较小的时候,随着粗糙度增大,黏着力下降很快,这与Robinovich模型变化趋势较吻合;当粗糙度较大时,随着粗糙度增大黏着力略有增加,但不是很明显,与Robinovich模型相差较大.     

考虑中性层位置变化的微悬臂梁气体传感器静态模型的分析

微悬臂梁是一种高灵敏度的生化传感器。本文考虑吸附表面应力引起的中性层位置的变化,采用能量法建立了微悬臂梁在单层分子吸附稳定后的静态弯曲模型,并以表面吸附有水蒸汽分子的微悬臂梁为例,研究了微悬臂梁曲率半径随其厚度、杨氏模量及吸附分子间距的变化规律以及中性层位置变化对微悬臂梁传感器性能预测的影响,结果发现：1)微悬臂梁的曲率半径与其杨氏模量、厚度及吸附分子间距之间可以近似用一次、二次和八次函数关系表示;2）中性层变化导致的曲率半径计算误差,随着微悬臂梁厚度、杨氏模量的增加而减小,但影响较小,而吸附分子间距会对该相对误差产生明显影响;3）中性层位置变化会对微悬臂梁传感器灵敏度和表面应变预测产生明显的影响。     

光热激励下微悬臂梁在流体中的振动研究

微悬臂梁结构广泛应用于微纳电子机械系统. 在实际应用中,涂层和工作环境的变化对微悬臂梁结构动态工作模式有着不容忽视的影响. 运用流体中双层微悬臂梁的光热振动模型,研究了在激光光热驱动下,金涂层微悬臂梁在不同流体中的振动特性. 理论上得到了微悬臂梁的温度场,光热驱动力和振动变形场的解析表达式. 研究结果表明,流体环境对微悬臂梁的光热振动谱有显著的影响,主要表现在共振频率的偏移和品质因子的变化两个方面. 相比较于悬臂梁在真空中的响应,当悬臂梁在空气中振动时,共振频率向低频产生微小的漂移（0.7%）,共振峰未发生明显变化;然而,当悬臂梁在液体中振动的时候,共振频率向低频产生巨大的漂移（58%~80%）,而且品质因子发生量级上的减小,共振峰发生了畸变. 本研究对微纳探测以及原子力显微镜等仪器的设计优化,有着一定的理论指导意义.      

STUDY ON THE VIBRATION OF MICROCANTILEVERS IMMERSED IN FLUIDS UNDER PHOTOTHERMAL EXCITATION

微悬臂梁结构广泛应用于微纳电子机械系统. 在实际应用中,涂层和工作环境的变化对微悬臂梁结构动态工作模式有着不容忽视的影响. 运用流体中双层微悬臂梁的光热振动模型,研究了在激光光热驱动下,金涂层微悬臂梁在不同流体中的振动特性. 理论上得到了微悬臂梁的温度场,光热驱动力和振动变形场的解析表达式. 研究结果表明,流体环境对微悬臂梁的光热振动谱有显著的影响,主要表现在共振频率的偏移和品质因子的变化两个方面. 相比较于悬臂梁在真空中的响应,当悬臂梁在空气中振动时,共振频率向低频产生微小的漂移（0.7%）,共振峰未发生明显变化;然而,当悬臂梁在液体中振动的时候,共振频率向低频产生巨大的漂移（58%~80%）,而且品质因子发生量级上的减小,共振峰发生了畸变. 本研究对微纳探测以及原子力显微镜等仪器的设计优化,有着一定的理论指导意义.     

浅论建筑结构分析中计算简图的建立

建筑结构的力学分析都是通过建立计算简图及计算模型进行的, 探讨了 建筑结构计算简图及计算模型的概念、建立计算简图的原则、对实际建筑结构进行简化的内 容, 并介绍了5种实际建筑结构简化的结果, 期望能帮助学生做好结构分析.     

类石墨烯二维原子晶体的微态理论模型

基于微态(Micromorphic) 连续介质理论,提出了针对类石墨烯二维原子晶体的新力学模型. 该模型以有限大小的布拉维单胞为基元体,考虑基元粒子的宏观位移和微观变形,依据微态理论基本方程,推导了全局坐标系下模型的主导方程. 然后针对布拉维单胞中含有两个原子的类石墨烯晶体,通过分析单胞中声子振动模式与基元体自由度的关系,获得了微态形式下声子色散关系的久期方程,并根据二维晶体声子色散特性对久期方程进行了简化,进而确定了类石墨烯晶体模型的本构方程. 最后,以石墨烯和单层六方氮化硼为例,利用简化的表达式拟合了它们面内声子色散关系数据,计算了模型材料的常数,石墨烯模型的等效杨氏模量、泊松比分别为1.05 TPa 和0.197,氮化硼分别为0.766 TPa 和0.225,均与已有的实验值相符合.      

A MODAL TESTING METHOD FOR CANTILEVER BEAM1)

基于欧拉-伯努利梁理论得到悬臂梁自由振动的振型函数。通过数值计算得出实验用的悬臂梁前五阶振型的节点位置及其与梁长的比值。考虑传感器对悬臂梁固有频率的影响,建立梁-传感器模型进行仿真分析并得出悬臂梁前五阶固有频率。基于节点位置和测点位置,在实验中选择激励点。将具体实验的结果与梁-传感器仿真模型结果进行对比,通过前五阶固有频率的误差分析,发现仿真分析结果与实验结果误差最高为 1.3%。研究完整地叙述了悬臂梁的模态测试流程,可为工程技术人员的模态测试起一定的指导作用。     

Influence of atomic force microscope (AFM) probe shape on adhesion force measured in humidity environment

In micro-manipulation, the adhesion force has very important influence on behaviors of micro-objects. Here, a theoretical study on the effects of humidity on the adhesion force is presented between atomic force microscope （AFM） tips and substrate. The analysis shows that the precise tip geometry plays a critical role on humidity depen- dence of the adhesion force, which is the dominant factor in manipulating micro-objects in AFM experiments. For a blunt （paraboloid） tip, the adhesion force versus humidity curves tends to the apparent contrast （peak-to-valley corrugation） with a broad range. This paper demonstrates that the abrupt change of the adhesion force has high correla- tion with probe curvatures, which is mediated by coordinates of solid-liquid-vapor contact lines （triple point） on the probe profiles. The study provides insights for further under- standing nanoscale adhesion forces and the way to choose probe shapes in manipulating micro-objects in AFM experiments.     

Investigation of Near-Surface Mechanical Properties of Materials Using Atomic Force Microscopy

As ultra-thin films or small-scale structures become widely used in electronics and biology, knowledge concerning their near-surface mechanical properties of the materials is increasingly important. Atomic force microscopy (AFM) is employed to determine near-surface elastic modulus via force-penetration curves acquired during indentation. Samples include polydimethylsiloxane (PDMS), parylene, mica, and single-crystal silicon, and indentations are performed with single-crystal silicon and silicon nitride AFM tips. An analysis algorithm based on the secant modulus method is proposed to extract the true penetration curves from the experimental displacement curves. The penetration data is then analyzed in terms of Hertzian model to estimate the elastic modulus. Three concerns in applying nanoscale AFM indentation to the measurement of the elastic modulus of an ultra-thin material are addressed. First, the effect of the lateral force caused by the inclined angle of the cantilevered probe is investigated theoretically and by numerical simulation. A second concern is local plastic deformation induced by a sharp probe tip. In this case, numerical results show a relatively small effect on the force-penetration curves if the plastic deformation is limited to the central area below the probe tip. The deviation of the elastic-plastic simulation from the elastic estimation depends on the yield strength of the material. Finally, the effect of stiffness matching between the AFM probe and the sample is a key issue that is studied numerically, and appropriate stiffness matching criteria are suggested.     

Modal interactions in contact-mode atomic force microscopes

Atomic force microscopes (AFM) are used to estimate material and surface properties. When using contact-mode AFM, the sample or the probe is excited near a natural frequency of the system to estimate the linear coefficient of the contact stiffness. Because higher modes offer lower thermal noise, higher quality factors, and higher sensitivity to stiff samples, their use in this procedure is more desirable. However, these modes are candidates for internal resonances, where the energy being fed into one mode may be channeled to another mode. Ignoring such interactions could distort or affect the accuracy of measurements. The method of multiple scales is used to derive an approximate analytical expression to the probe response in the presence of two-to-one autoparametric resonance between the second and third modes. We examine characteristics of this solution in relation to a single-mode response and consider its implications in AFM measurements. We find that the influence of this interaction extends over a considerable range of the tip-sample contact stiffness.     

Complex Dynamics of a Pyranose Ring Structure Molecule Attached to an Atomic Force Microscope

Dynamic numerical simulations were performed for a pyranose ring structure molecule attached to an Atomic Force Microscope (AFM) using a standard semiempirical potential energy surface model. The fundamental static force-extension behavior was first determined using a slow pulling base excitation at the AFM probe. The static force-extension curve displays a stiffness nonlinearity, both softening and hardening, that depends upon level of the pulling force. For the dynamic analysis, a single harmonic base excitation is applied to the AFM probe. A typical evolution process from periodic to aperiodic or chaotic motion obtained by varying the excitation frequency and amplitude is discussed. A strong chaotic response motion was generated for certain system parameters. The numerical analysis shows this chaotic response arises from a molecular structure conformational change.     

连体构架避雷针风振计算的简化方法

为简化构架避雷针风振时域计算从而有效降低计算耗时,以单跨和三跨构架避雷针结构为例,根据构架体系的结构特性和风振特点,提出一种简化计算方法,即对每个塔架单独建模并考虑结构刚度和质量系统的一致性和横梁荷载的等效加载,从而对每个塔架单独进行动力计算,并对这种简化方法的合理性进行了验证．研究发现,构架避雷针的频率较小,风振效应较为显著,但在各方向均以一阶振型为绝对主力;构架避雷针的塔架在平面外的荷载耦联效应极小,平面内也仅表现有位移均值的耦联效应：这两个结构特性也为风振简化计算提供了便利．对每个塔架的简化模型,通过在塔架与原横梁连接处设置弹簧和附加质量来实现对原结构一阶振型的等效,并通过影响线法将横梁分布风荷载等效为塔架的集中荷载．由此简化方法所得的结构风振静动力响应结果均与原始结构有良好一致性,并且计算效率得以显著提升．     

梁柱简化模型在自立塔塔线体系动态响应中的适用性研究

对输电塔进行合理简化可以提高塔线体系动力学仿真的效率。本文给出自立塔梁柱简化模型的计算方法，并提出利用梁柱简化模型计算方法建立自立塔塔线体系整体模型，同时采用桁梁混合模型建立精细化塔线体系整体模型，对两种模型塔线体系静力特性及振型和固有频率等动力特性进行对比分析。以脱冰工况为例，采用生死单元技术将施加在输电线节点上的集中质量单元杀死来模拟脱冰，实现对塔线体系动力学响应的有限元模拟，研究塔线体系简化模型在动态响应中的适用性。结果表明，两种模型弯曲变形误差小，低阶的振型相同，固有频率值误差小，动力特性基本相同；脱冰工况下，自立塔节点位移和塔材内力时程曲线一致，在提高计算效率的情况下，能有效保证计算精度。     

剪切弯曲下短深梁位移数值计算精度的研究

分析了短深梁位移的基本解，评述了有限元解法中关于高次分布力简化为节点力的问题。使用虚功原理和位移线性插值推导了满足二次分布力作用的精确节点力分配公式。通过矩形截面悬臂梁自由终端受集中载荷的算例，阐明了提高短深梁位移计算精度的途径。     

Continuum modeling of cell membranes

In this paper, we develop a finite-deformation model for cell membranes with a view toward characterizing the local mechanical response of membranes in atomic force microscope (AFM) experiments. The membrane is modeled as a 2-D fluid continuum endowed with bending resistance. The general theory is used to obtain equations that describe axisymmetric equilibrium states. The membrane is assumed to enclose a fluid medium, which transmits hydrostatic pressure to the membrane, and a point load is applied at the pole to simulate an AFM probe. Both types of loading are associated with a potential and the problem is then cast in a variational setting. The equilibrium equations and boundary conditions are obtained by applying standard variational procedures, resulting in a pair of coupled fourth-order differential equations to be solved for the shape of the meridian. Further refinements associated with global constraints on the enclosed volume and contact with a rigid substrate are introduced, and a solution strategy is proposed which relies on an iterative scheme for calculating the associated Lagrange multipliers.