基于GIXRR反射率曲线的二氧化硅纳米薄膜厚度计算

为了快速、准确得到纳米薄膜厚度,采用Kiessig厚度干涉条纹计算薄膜厚度的线性拟合公式,计算了不同系列厚度(10~120 nm)的二氧化硅薄膜。薄膜样品采用热原子层沉积法(T-ALD)制备,薄膜厚度使用掠入射X射线反射(GIXRR)技术表征,基于GIXRR得到的反射率曲线系统讨论了线性拟合公式计算薄膜厚度的步骤及影响因素,同时使用XRR专业处理软件GlobalFit2.0比较了两种方法得到的膜厚,最后提出一种计算薄膜厚度的新方法-经验曲线法。结果表明：峰位级数对线性拟合厚度产生主要影响,峰位级数增加,厚度增大;峰位对应反射角同样对线性拟合厚度有较大影响,表现为干涉条纹周期增大,厚度减小。但峰位级数及其对应反射角在拟合薄膜厚度过程中引入的误差可进一步通过试差法,临界角与干涉条纹周期的校准来减小。对任意厚度的同一样品,线性拟合和软件拟合两种方法得到的薄膜厚度具有一致性,厚度偏差均小于0.1 nm,表明线性拟合方法的准确性。在厚度准确定值的基础上提出薄膜厚度与干涉条纹周期的经验关系曲线,通过该曲线,可直接使用干涉条纹周期计算薄膜厚度,此方法不仅省略了线性拟合过程中确定峰位级数及其对应反射角的繁琐步骤,而且避免了软件拟合过程中复杂模型的建立,对快速、准确获得薄膜厚度信息具有重要的意义。     

利用透射光谱与X射线反射谱精确测量溶胶-凝胶TiO2薄膜厚度和光学常数

在洁净K9玻璃基底上沉积TiO2薄膜,将透射光谱和X射线反射光谱相结合分析获得膜层的厚度和光学常数。X射线反射谱拟合能精确得到膜层的厚度、电子密度及表面和界面粗糙度,其中膜层厚度的数值为透射光谱的分析提供了重要参考。基于Forouhi-Bloomer色散模型拟合膜层透射光谱,得到薄膜折射率和消光系数,理论曲线和实验曲线吻合良好。对于同一样品,两种光谱拟合分析得到的厚度数值非常接近,差值最大为4.9nm,说明两种方法的结合能够提高光学分析结果的可靠性。     

磁控反应溅射法制备渐变折射率薄膜的模型分析

阐述了磁控反应溅射法制备渐变折射率薄膜的机理;探讨了磁控反应溅射法制备渐变折射率薄膜的理论模型,给出了渐变折射率薄膜的折射率与反应气体分压的关系,在一定的沉积参数下,由要得到的膜层折射率随膜层几何厚度的变化规律可推导出反应气体分压比随时间的变化规律;最后以制备折射率线性变化的薄膜为例说明了如何推导得到反应气体分压比随时间的变化规律. 关键词： 渐变折射率 磁控反应溅射 模型     

线性共蒸法制备非均匀膜的误差特性模拟分析

对双源线性共蒸法制备的非均匀薄膜折射率分布与光学特性的关系作了探讨,并与均匀介质膜的光学特性作了对比;从折射率正变和负变两个方面,讨论了混合介质膜折射率不同变化规律对光学性能带来的影响;讨论了厚度误差和折射率极值误差对非均匀膜光学性能的影响。结果发现折射率变化规律误差主要对非均匀膜的应用波段范围产生影响,而膜层厚度误差和折射率极值误差超过一定值时,将对薄膜光学特性产生重要影响。     

离子束溅射薄膜光学常数表征的光斑效应

利用离子束溅射沉积制备了光学薄膜。基于椭圆偏振测量技术,研究了折射率、膜层厚度和表面层厚度与测试光斑大小的关系。研究结果表明,随着样品表面测试光斑尺寸的增加,薄膜折射率变小,膜层厚度、表面层厚度增加。使用反射光谱法和轮廓仪分别验证了各光学常数的光斑效应。研究结果表明,光学薄膜的折射率与膜层厚度具有弱横向非均匀性,采用大尺寸测量光斑能弱化这种非均匀性。     

自适应模拟退火遗传算法在薄膜厚度及光学常数反演中的应用

准确的测量薄膜的厚度和光学常数,在薄膜的制备、研究和应用中都是十分重要的。借助Cauchy色散模型,通过薄膜透过率测量曲线,用改进的自适应模拟退火遗传算法对透过率曲线进行全光谱拟合,从而反演得到薄膜的厚度和光学常数。对由电子束蒸发制备的TiO2单层膜和SiO2/TiO2双层膜的厚度和光学常数进行了测量计算。实验结果表明,计算得到的光学参数与实测结果相一致,厚度误差小于2nm,在560nm波长处折射率误差小于0.03。     

沿膜厚方向的簿膜非均匀折射率及其色散测量

以传统的光学监控法与石英晶体振荡法为基础,在薄膜沉积过程中,同时测量膜片的透过率及膜层的厚度,以及与它们对应的控制波长,并根据三者与折射率之间的关系,由计算机反解出不同膜厚处的折射率——非均匀折射率及不同厚度、不同波长处的薄膜折射率——非均匀色散。同时给出了硫化锌薄膜在水晶石薄膜的测量实例,并进行了分析与讨论。     

基于反射和透射光谱的氢化非晶硅薄膜厚度及光学常量计算

采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅（a-Si:H）薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数|通过拟合薄膜透射光谱干涉极大值和极小值的包络线来确定薄膜折射率和厚度的初始值,并利用干涉极值公式进一步优化薄膜的厚度值和折射率|利用柯西公式对得到的薄膜折射率进行拟合,给出了a-Si:H薄膜的色散关系曲线.为了验证该方法确定的薄膜厚度和光学常量的可靠性,将理论计算得到的透射光谱与实验数据进行了比较,结果显示两条曲线基本重合,可见这是确定a-Si:H薄膜厚度及光学常量的一种有效方法.     

基底温度对电子束蒸发制备氧化铝薄膜的影响

为了考察基底温度对氧化铝薄膜折射率以及沉积厚度的影响情况,在不同基底温度环境下,通过离子辅助电子束蒸发方式,在玻璃基底上制备了同一Tooling因子条件下所监测到相同厚度的Al2O3薄膜,利用分光光度计测量光谱透过率,依据光学薄膜相关理论,计算了基底温度在25℃～300℃范围内获得的膜层实际物理厚度为275.611 nm～348.447 nm,以及膜层折射率的变化。通过对实验结果的数值计算和曲线模拟,给出了基底温度对于薄膜的折射率和实际厚度的影响情况。     

镀金属两层膜系长周期光纤光栅模式转换与折射率响应

基于耦合模理论,研究了镀金属两层膜系长周期光纤光栅(LPFG)的模式转换及其折射率响应特性。从表面等离子体共振(SPR)的激励条件和模式转换发生条件出发,指出镀金属两层膜系LPFG中的SPR和模式转换不会同时发生,在此基础上分析了镀金属两层膜系LPFG包层模有效折射率随敏感薄膜厚度的变化,发现镀金属两层膜系LPFG的模式转换区域比镀膜LPFG的转换区域要宽,且模式转换区域内第一次转换时的有效折射率变化斜率比镀膜LPFG的大,意味着在该区域其对敏感膜层的变化有更高的响应。考察了金属薄膜厚度对镀金属两层膜系LPFG包层模有效折射率的影响,结果表明,随着金属薄膜厚度的增加,第一次转换时有效折射率的变化斜率逐渐增加。分析了第一次转换时镀金属两层膜系LPFG透射谱对敏感薄膜折射率变化的响应特性,结果表明,镀金属两层膜系LPFG传感器对敏感薄膜折射率的灵敏度明显高于镀膜LPFG,对敏感薄膜折射率的灵敏度的分辨率可达10-6。     

Transparent and UV-Reflective Photonic Films and Supraballs Composed of Hollow Silica Nanospheres

For an optically transparent, UV-reflective film, hollow silica nanospheres smaller than the visible wavelength (<λ_vis) are prepared and assembled into colloidal glasses, of which interstices are then backfilled with a polymer. The polymer refractive index is matched with the silica shell to minimize backscattering in the visible range, and the average distance between the hollow silica particles is adjusted by tuning the shell thickness to satisfy the interference resonance condition for a UV selective reflection. The resulting composite film shows a strong UV reflection as expected, but it is translucent in visible light due to non-negligible backscattering, which may be caused by large defects or fluctuation of the particle concentration. In order to avoid such backscattering, another polymer is introduced of which the refractive index is matched with the average refractive index of the hollow nanospheres. This allows an optically transparent film that selectively reflects the UV light. Furthermore, spherical aggregates of hollow silica nanospheres called “supraballs” are prepared and their average refractive index is matched with a solvent by adjusting the mixture ratio of water and ethylene glycol, which yields an optically transparent solution, selectively reflecting UV.     

基于亚微米光栅透射共振蛋白质检测模型研究

建立了一种基于亚微米光栅透射共振理论的蛋白质检测模型,设计了一种金属光栅型蛋白质检测生物传感器,运用光栅耦合激发表面等离子体共振理论对提出的模型进行了理论分析,通过计算机计算模拟,分析了蛋白质样品折射率、厚度等对透射率的影响。结果表明:透射率与样品折射率、厚度呈二阶多项式关系,并且厚度、折射率都随灵敏度的增加而增加。这种检测模型可应用在蛋白质检测传感方面。基于此方法的蛋白质检测模型具有同时检测蛋白质种类和含量、灵敏度高、实时、无需标记,便于集成芯片化,适用于批量生产、成本低等优点,在蛋白质芯片、生物分析、环境监测、生物器件研发等方面具有广泛的应用前景。     

周期结构薄膜在折射率色散下反射区特性研究

周期性结构是光学薄膜设计的基本物理模型,给出了反射区中心波长的一般性条件,研究了在膜层材料存在折射率色散情况下,等厚周期结构和非等厚周期结构的薄膜反射区中心波长与带宽特性.研究结果表明:在等厚和非等厚周期结构中,考虑膜层材料折射率色散与忽略色散情况相比,中心波长向长波方向移动,反射级次与相对波数的线性关系偏离;在薄膜光学厚度一定的非等厚周期结构中,高折射率层光学厚度大于低折射率层时,反射级次与相对波数的线性关系偏离度高;非等厚周期结构薄膜的带宽在低反射级次上小于等厚周期结构,同时膜层的色散对反射带宽影响不大.     

Optical inhomogeneity model for evaporated Y2O3 obtained from physical thickness measurement

A multiparameter fitting with additional parameters for film inhomogeneity based on transmission results is used to get film inhomogeneity information and to compare different models for film structure. For a number of evaporated materials similar results from transmission fitting have been obtained by using a model consisting of two sublayers with a constant difference in refractive indices between them, either with a thin sublayer in the contact with a substrate or with air. As additional information, we obtained the film physical thickness result from step profile measurements for an oxygen-doped Y₂O₃ film on a fused silica and we compared it with the fit results for this coating. The result closest to the profilometry one has been achieved for a model with a thinner sublayer in contact with the substrate. The differences are great enough to assert that Y₂O₃ films on a fused silica possess a higher refractive index in the first stages of growth and then, after some transition, the main material with smaller refractive index grows on it.     

Study of refractive index and thickness of TiO2／ormosil planar waveguide

Hybrid titania/ormosil waveguide films have been prepared by sol-gel method at low thermal treatment temperature of 150℃. The influence of processing parameters including the molar ratios of Ti(OBu)_{4}/glycidoxypropyltrimethoxysilane (GLYMO) and H_{2}O/Ti(OBu)_{4} (expressed as R), especially aging of sol, on the refractive index and thickness of film was investigated. The optical properties of films were measured with Scanning Electron Microscope and m-line spectroscopy. The results indicate that the film thickness increases with the aging time of sol, but the variation of refractive index as a function of aging time of sol depends on the relative ratio of GLYMO to Ti-alkoxide. The relation between film thickness and corresponding sol viscosity is linear as the volume of GLYMO is 80% within the range of measured data.     

System for measuring optical admittance of a thin film stack

A new method based on the polarization interferometer structure has been applied to measure the optical admittance, the refractive index and thickness of a thin film. The structure is a vibration insensitive optical system. There is one Twyman-Green interferometer part to induce a phase difference and one Fizeau interferometer part to induce the interference in the system. The intensities coming from four different polarizers were measured at the same time to prevent mechanical vibration influence. Using the polarization interferometer, the optical admittance, the refractive index and thickness of a single layer of Ta₂O₅ thin film has been measured. The measurement results were compared with the results obtained by ellipsometer. The results meet reasonable values in both refractive index and thickness.     

泄漏波导法精确测量薄膜参数的理论和实验研究

对泄漏波导法测量薄膜折射率和厚度的实验方法做了介绍,基于四层介质结构的理论模型,通过严格的电磁场理论推导出了测量方法依据的本征色散方程,并使用了Newton-Raphson方法求解复传播常数,保证了测量的精确与快捷.以等离子增强化学气相沉积法生长的SiO2薄膜为例,对其折射率和厚度进行了测定.实验证明,本文方法与传统方法相比,不仅具有更高的测量精度,而且数据处理更加快捷,完成一片样品测试,仅花费机时60 ms.     

Styrene acrylonitrile (SAN) based polymeric waveguides

In the present study styrene acrylonitrile based polymeric waveguides have been optimized with the help of aging (variation of baking time keeping the temperature constant), annealing (variation of baking temperature keeping the time constant), concentration and thickness (physical). Propagation losses are lowest at an annealing temperature of 100°C and aging time of 8 h. The values of effective refractive index of the waveguides change inconsistently between 1.566 and 1.569 and between 1.5660 and 1.5667 for aging and annealing effect, respectively. However, by increasing the physical thickness of the film, the value of refractive index was decreased. By increasing the concentration of the solution, the refractive index of the waveguides was increased. The birefringence in the present observation is of the order of 10⁻⁴. Polarization selective properties were also observed in the present study for certain range of concentration.     

Effect of the transition layer on ellipsometric measurement of nanodimensional layers

The results of numerical simulation of a nanodimensional film-transition layer-absorbing substrate structure are presented. It is found that the transition layer affects the accuracy of determining the refractive index and thickness of the nanodimensional coating. It is shown that the introduction of the effective values of the refractive index and absorption coefficient of the substrate improves the accuracy of ellipsometric measurements of the nanodimensional film parameters. Physical (full-scale) and numerical experiments demonstrate that, when the thickness and refractive index of a nanodimensional film on a substrate with an unknown transition layer comparable in thickness with the film are measured, it is appropriate to replace the substrate-transition layer structure by a substrate with effective optical parameters. It is found that a change in the thickness of the transition layer does not noticeably affect the accuracy of determining the thickness and refractive index of the film deposited when the effective values of the refractive index and absorption coefficient of the substrate are used.