Optical channel waveguides with trapezoidal-shaped cross sections in KTiOPO4 crystal fabricated by ion implantation

Optical channel waveguides were fabricated in KTiOPO₄ crystal by He⁺-ion implantation using photoresist masks with wedged-shaped cross sections. Semi-closed barrier walls with reduced refractive indices inside the crystal constructed the enclosed regions to be channel waveguides with trapezoidal-shaped cross sections. The m-line as well as end-fire coupling arrangements were performed to characterize the waveguides with light at wavelength of 632.8 nm. The propagation loss of the channel waveguides was determined to be as low as ∼2 dB/cm after simple post-irradiation thermal annealing treatment in air.     

Enhanced refractive index well-confined planar and channel waveguides in KTiOPO<Subscript>4</Subscript> produced by MeV C<Superscript>3+</Superscript> ion implantation with low dose

We report on the fabrication and characterization of planar and channel waveguides in KTiOPO₄ crystals by 6.0 MeV C³⁺ ion implantation with the dose of 1×10¹⁴ ions/cm². The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. An increase of the both n _x and n _y refractive indices induced by the annealing after implantation is believed to be responsible for waveguide formation. The bright near-field intensity distribution of the transverse-electric and transverse-magnetic modes in the annealed channel waveguide was collected and studied by end-coupling method.     

Waveguide effect in ZnO crystal by He+ ions implantation: Analysis of optical confinement from implant-induced lattice damage

Waveguide effect was observed in He⁺ implantation ZnO with different energies and doses. Computer code was used to simulate the process of ion implantation into ZnO crystal and the implantation-produced damage distribution is extracted according to RBS experimental result. The prism coupling and end-face coupling technique are used to investigate the waveguide properties. The reconstructed refractive index profile shows that the ordinary index decreases at the near surface region after He⁺ implantation under different conditions. The damage layer, which is governed by nuclear energy deposition of He⁺ ions, makes itself a reduced index barrier for guiding light. Ion-implantation, generally used for electrical isolation, may play a role for optical confinement in ZnO light emitting devices.     

Tailoring of the spectral–directional characteristics of rare-earth fluorescence by metal–dielectric planar structures

It is demonstrated that the spectrum, direction and polarization of rare-earth fluorescence can be tailored by embedding the impurity ions into a planar metal–dielectric structure (MDS). The latter was designed by spin coating a rare-earth-doped oxide film (TiO₂:Sm³⁺) onto a gold-covered glass substrate. For spectral–directional investigations of Sm³⁺ fluorescence, the MDS was attached to a semi-cylindrical prism and excited by UV light from the flat side. An angular scan revealed a strongly polarized and directional emission of Sm³⁺ from the convex side of the prism. The tuning of TiO₂ film thickness in the MDS allows a control of the polarization and direction of the emission bands. A theoretical modeling of the reflectivity of the MDS suggests that the observed angular resonances in the fluorescence emission are caused by its effective coupling with surface plasmons on the gold–dielectric interface or coupling with leaky modes in sufficiently thick dielectric films working as a waveguides.     

Property study of Si + -ion-implanted Nd:YVO 4 waveguides

Planar waveguides were formed in Nd:YVO₄ crystals by 3.0-MeV Si⁺-ion implantation at doses of 1×10¹³–1.5×10¹⁵ ions/cm² at room temperature. The effective refractive indices of the waveguide propagation modes were measured by using a prism-coupling method. It was found that the number of the propagation modes is dependent on the doses for the waveguides in Nd:YVO₄. The atom displacement in the near-surface region (about 2 μm beneath the surface) of the Nd:YVO₄ crystal induced by the implantation was simulated by using the TRIM 98 (transport and range of ions in matter) code. The possible reasons for the waveguide formation are discussed in a primary way. Received: 17 July 2002 / Revised version: 20 September 2002 / Published online: 11 December 2002 RID="*" ID="*"Corresponding author. Fax: +86-531-8565167, E-mail: drfchen@sdu.edu.cn     

Er-Yb co-doped glass waveguide amplifiers using ion exchange and field-assisted annealing

Er³⁺-Yb³⁺ co-doped waveguide amplifiers fabricated using thermal two-step ion-exchange are demonstrated. K⁺-Na⁺ ion-exchange process was first carried out in pure KNO₃ molten bath, and then field-assisted annealing (FAA) was used to make the buried waveguides. The effective buried depth is estimated to be ∼3.4 μm for the buried FAA waveguides. With the use of cut-back method, the fiber-to-guide coupling loss of ∼4.38 dB, the waveguide loss of ∼2.27 dB/cm, and Er³⁺ absorption loss ∼5.7 dB were measured for a ∼1.24-cm-long waveguide. Peak relative gain of ∼7.0 dB is obtained for a ∼1.24-cm-long waveguide. The potential for the fabrication of compact optical amplifiers operating in the range of 1520-1580 nm is also demonstrated.     

Reconstruction of extraordinary refractive index profiles of optical planar waveguides with single or double modes fabricated by O ion implantation into lithium niobate

A method named intensity calculation method (ICM), which is based on beam propagation method (BPM) and image processing, was carried out to reconstruct the extraordinary refractive index profile (RIP) of single-mode planar waveguide in lithium niobate (LiNbO₃), which was fabricated by multi-energy megaelectron-volt (MeV) O²⁺ ion implantation. In addition, it has been proved reasonable that the alternation of extraordinary refractive index induced by ion implantation into LiNbO₃ is mainly due to the degradation of polarization and reduction of material physical density. As a result, the possible extraordinary RIP of the double-mode planar waveguide could be reconstructed using BPM according to such a hypothesis and the calculated guiding mode values. The end-fire coupling and m-line arrangements were carried out to obtain the near-field modal patterns and dark-mode spectra of waveguides, respectively.     

K-Na离子交换单模平面波导的制备及其表征

通过K-Na离子交换技术制备了多模玻璃平面波导.采用棱镜耦合技术测量了波导的有效折射率,用IWKB方法拟合得到K-Na离子交换波导的折射率分布符合高斯分布,由色散曲线得到单模波导的制备条件(即扩散深度范围),从而得出单模波导的离子交换时间范围,制备出单模波导,并通过求解WKB色散方程得出单模波导的表面折射率.用普通数码相机,通过对离子交换平面玻璃光波导传输线进行数字成像,根据传输线上的光强分布拟合出光强传输衰减曲线,计算出单模波导的传输损耗大约为0.4 dB/cm.     

Structural and optical properties of waveguides in YbVO4 crystals formed by 3.0 MeV Cu-ions implantation

We report on the structural and optical characterization of waveguides formed in YbVO₄ crystals by Cu²⁺-ion implantation with an energy of 3.0 MeV and doses of 3.0×10¹⁴-1.0×10¹⁵ ions/cm². The damage properties are determined by RBS/Channeling measurements with the help of simulation code RUMP. The m-line method is used to characterize the dark-mode spectroscopy in the planar waveguides. According to the reconstructed refractive index profile of the waveguide cross section, a numerical simulation is carried out to investigate the confinement of the light in the waveguides based on the beam propagation method.     

Photorefractive properties of ion-implanted waveguides in strontium barium niobate crystals

0.61 Ba_0.39Nb₂O₆, SBN61), either by proton or helium ion implantation. Proton-implanted samples show a large increase of dark conductivity that reduces or even prevents the recording of refractive index gratings. For waveguides formed by helium implantation this effect is absent, and they can be used for efficient holographic recording. Photorefractive properties of the waveguides are investigated by two-beam coupling. After implantation with 2.0 MeV He⁺ and doses of (0.5-5)×10¹⁵ cm^-2, the samples have to be polarized again, because heating or charge effects at the crystals surface during the implantation process decreases or even reverses the effective electrooptic coefficients in the waveguiding layer. For repoled samples, we find logarithmic gain coefficients of up to 45 cm^-1 with time constants for the build-up of the purely π/2-shifted refractive index grating of the order of 1 ms for the blue lines of an Ar⁺ laser. Photoconductivity depends nonlinearly on light intensity with an exponent x≈0.55. With increasing implanted helium dose, both electronic and nuclear damage of the waveguiding layer grows, and the photorefractive properties of the waveguides are considerably degraded. Received: 20 February 1997/Revised version: 1 May 1997     

Low loss optical channel waveguides for the infrared range using niobium based hybrid sol-gel material

In this work, we report the fabrication of single-mode Nb₂O₅ based hybrid sol-gel channel waveguides. Nb₂O₅ based hybrid sol-gel material has been deposited by spin-coating on silicon substrate and channel waveguides have been fabricated by a UV direct laser writing process. Optical guided modes have been observed to confirm single-mode conditions and optical propagation loss measurements have been performed using the cut-back technique. Optical propagation losses were measured to be 0.8 dB/cm and 2.4 dB/cm at 1.31 μm and 1.55 μm respectively. These experimental results demonstrate low loss optical waveguiding within the infrared range and are very promising in view of material choice for the development of integrated optical devices for telecommunication.     

Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation

The propagation losses (PL) of lithium niobate optical planar waveguides fabricated by swift heavy-ion irradiation (SHI), an alternative to conventional ion implantation, have been investigated and optimized. For waveguide fabrication, congruently melting LiNbO₃ substrates were irradiated with F ions at 20 MeV or 30 MeV and fluences in the range 10¹³–10¹⁴ cm⁻². The influence of the temperature and time of post-irradiation annealing treatments has been systematically studied. Optimum propagation losses lower than 0.5 dB/cm have been obtained for both TE and TM modes, after a two-stage annealing treatment at 350 and 375^∘C. Possible loss mechanisms are discussed.     

Improved method for loss measurements in planar waveguides

A method employing an isosceles prism and a right-angle one is developed for loss measurement in planar waveguides. During the measuring process, the isosceles prism is fixed and the right-angle prism fixed on the waveguide slides by following the waveguide. Only by adjusting the gap thickness we can realize the loss measurement in planar waveguides. The method is demonstrated with an Ag/Na ion-exchanged waveguide fabricated on BK7 glass from AgNO₃ melt diluted with NaNO₃ (mass ratio 1:9), with the condition of 4 h and . The experimental results show that the method has the advantages on convenient operation, accurate results and no required end polishing.     

WKB analysis of guided and semileaky modes in graded-index anisotropic optical waveguides

WKB analysis of graded-index anisotropic optical waveguides is briefly presented. The angular dependencies of the propagation characteristics of both guided and semileaky modes are calculated numerically for the out-diffused and in-diffused LiNbO₃ waveguides with parabolic index profile. The results for the out-diffused waveguide are compared with those obtained from the rigorous theory and the applicability of the WKG method is discussed for semileaky mode loss calculations. The angular dependence of the propagation constants of a TiO₂-diffused LiNbO₃ waveguide is demonstrated experimentally, too.     

Visible and near-infrared optical properties of Nd:CLNGG crystal waveguides formed by proton implantation

A Nd:CLNGG waveguide structure operated at wavelengths of both 632.8 nm and 1539 nm was demonstrated for the first time to our knowledge, which was produced by the 480-keV H~+ion implantation with a dose of 1.0×10~(17)protons/cm~2.Its propagating modes at 632.8 nm and 1539 nm were measured by the well-known prism coupling technique. The refractive index profile at either 632.8-nm wavelength or 1539-nm wavelength was optical barrier type in the proton-implanted Nd:CLNGG crystal optical waveguide, which was calculated by using the reflectivity calculation method. The near-field light intensity distributions were also simulated by the finite-difference beam propagation method in the visible and nearinfrared bands.     

质子注入掺镱磷酸盐玻璃平面光波导的近红外特性

在能量为(0.5+0.55)MeV和剂量为(1.0+2.0)×10^16 ions/cm^2的条件下,通过氢离子注入制备了掺Yb^3+磷酸盐玻璃波导,并研究了该波导在近红外波段的特性.棱镜耦合法测量的离子注入波导的导模的有效折射率与反射计算法计算的有效折射率基本吻合.通过模拟辐照引起的空位分布,探讨了离子注入平面波导的形成理论.利用FD-BPM对波导中的传播模式进行了模拟,结果表明高能量的氢离子注入掺Yb 3+磷酸盐玻璃能够制备出近红外波导结构.     

Characterization of laser waveguides in Nd:CNGG crystals formed by low fluence carbon ion implantation

We report on Nd:CNGG active planar waveguides produced by 6.0 MeV carbon ion implantation at fluence from 1 × 10¹⁴ ions/cm² to 8 × 10¹⁴ ions/cm². The refractive index profiles, which were reconstructed according to the measured dark mode spectroscopy, showed that the refractive indices had negative changes in the surface region, forming typical barrier waveguide. The width of waveguide structure induced by carbon ion implantation is ∼3.8 μm. The typical barrier-shaped distribution may be mainly due to the nuclear energy deposition of the incident ions into the substrate. By performing a modal analysis on the observed TE modes, it was found that the TE₀ and TE₁ modes can be well-confined inside the waveguide.     

Proton-implanted optical channel waveguides in Nd<Superscript><Emphasis Type="Bold">3+</Emphasis></Superscript>:MgO:LiNbO<Subscript><Emphasis Type="Bold">3</Emphasis></Subscript>: fabrication,guiding properties,and luminescence investigation

Optical channel waveguides in Nd³⁺:MgO:LiNbO₃ crystals are produced by using implantation of 500 keV protons at dose of 6×10¹⁶ ions/cm² with a stripe photoresist mask. With thermal annealing treatment at 400°C for 60 min, the propagation losses of the waveguides could be reduced down to ∼4 dB/cm at wavelength of 632.8 nm. The calculated modal profiles are in fairly good agreement with the experimental near-field intensity distributions of the waveguide modes. The microluminescence investigation indicates the emission intensity of Nd³⁺ ions is only slightly modified with respect to the bulk, exhibiting potentials for laser applications.     

Analysis of the coupling of two non-parallel dielectric rod waveguides

In this paper the coupling between two closely spaced single mode dielectric rod waveguides is investigated when the corresponding propagation axes are not in the same plane. An approximate analysis is presented by assuming only first order interaction between the guided waves. For a given incident HE₁₁ mode (in one of the rod waveguides) the coupled wave amplitudes are computed in the other waveguide for both propagation directions. Numerical results are presented for several coupling geometries.     

多孔硅通道型光波导的制备及传输损耗的测量

利用多孔硅在阳极腐蚀过程中外加的光照度与孔隙率的对应关系,提出了一种利用光照控制多孔硅折射率的方法制备通道型光波导技术.对制备出的多孔硅波导损耗进行了分析.由于多孔硅波导层中孔状结使得波导端面较为粗糙,耦合损耗大是多孔硅光波导传输损耗测量中遇到的的问题,对此采用了一种非破坏性的简便的优化端面耦合传输损耗测量方法,可以实现入射光束与波导的完全耦合,消除了因光波与波导中导波模式间失配引起的损耗.较精确的测量出实验中制备的通道型多孔硅光波导的传输损耗为16.2dBcm,波导端面的散射损耗为3.6dB.