Single mode ridge waveguides based on vinyltriethoxysilane hybrid sol–gel material

In this work, fabrication and characterization of a single-mode vinyltriethoxysilane (VTES) based hybrid organic–inorganic sol–gel ridge waveguide is reported. VTES based hybrid sol–gel material has been deposited by multiple spin-coating process on quartz substrate. Channel waveguides have been fabricated by UV photopolymerization followed by wet etching process. Optical guided mode was observed to ensure the single mode condition while cut-back technique was performed for loss propagation measurement. Optical propagation losses were measured to be 1.6 dB/cm at 1.31 μm wavelength. This value shows that this material is a promising choice for the development of integrated optical circuits for telecommunication field.     

Long range surface plasmon polariton waveguides at 1.31 and 1.55 μm wavelengths

We investigate characteristics of gold metal strip waveguides based on long range surface plasmon polaritons (LRSPPs) along thin metal strips embedded in a polymer for practical applications at the telecommunication wavelengths of 1.31 and 1.55 μm. Guiding properties of the gold strip waveguides are theoretically and experimentally evaluated with the limited thickness and width up to ∼20 nm and ∼10 μm, respectively. The lowest propagation loss of ∼1.4 dB/cm is obtained with a 14.5-nm-thick and 2-μm-wide gold strip at 1.55 μm. With a single-mode fiber, the lowest coupling loss of ∼0.4 dB/facet is achieved with a 14.5-nm-thick and 5-μm-wide gold strip at 1.55 μm. The lowest insertion losses are obtained 8-9 dB with 1.5 cm-long gold strips of a limited thickness and width at both the wavelengths. We demonstrate a 10 Gbps optical signal transmission via the LRSPP waveguide with a 14 nm-thick, 2.5 μm-wide, and 4 cm-long gold strip. These LRSPP waveguides have potential applications for optical interconnects and communications.     

有机-无机复合ZrO2-SiO2平面光波导

采用溶胶-凝胶法合成ZrO2-SiO2有机一无机复合光波导材料,通过改变其中ZrO2的含量来调节材料的折射率,使材料分别适用于平面光波导的导光层(ng≈1．497)和衬底层、包层(mb=nc≈1．479)。采用旋转涂膜工艺和相应的热处理,在单晶硅基片上制备衬底层、导光层和包层等薄膜,其中导光层介质因具有感光性而可通过紫外光刻来制备光路图案。所得有机一无机复合ZrO2-SiO2板型平面光波导(衬底层 导光层),用棱镜耦合截断法测试其光损耗在632．8nm波长处约为0．8dB／cm。对板型平面波导的导光层薄膜进行紫外光刻和异丙醇淋洗,制备出脊状光波导通道,在覆盖包层后,即获得埋层沟道式平面光波导。采用端耦合截断法测试了埋层沟道式平面光波导的光损耗(小于0．1dB／cm),并观察了其近场图像以及导光材料在近红外窗口的吸收光谱。     

Optical channel waveguides with trapezoidal-shaped cross sections in KTiOPO4 crystal fabricated by ion implantation

Optical channel waveguides were fabricated in KTiOPO₄ crystal by He⁺-ion implantation using photoresist masks with wedged-shaped cross sections. Semi-closed barrier walls with reduced refractive indices inside the crystal constructed the enclosed regions to be channel waveguides with trapezoidal-shaped cross sections. The m-line as well as end-fire coupling arrangements were performed to characterize the waveguides with light at wavelength of 632.8 nm. The propagation loss of the channel waveguides was determined to be as low as ∼2 dB/cm after simple post-irradiation thermal annealing treatment in air.     

Polymer-based waveguides with low propagation loss and polarization-dependent loss

Polymeric optical waveguides based on a new synthesized bisphenol A–aldehyde polymer (PA-1 resin) have been fabricated using photolithography and reactive ion etching technique. The polymer is novel with relatively high refractive index, low birefringence and absorption at the optical communication wavelengths. The single-mode channel waveguides exhibit a propagation loss of 0.41±0.05 dB/cm at a wavelength of and 0.5±0.05 dB/cm at for both the TE and TM polarizations. The polarization-dependent loss of the waveguides is 0.1±0.05 dB/cm at these wavelengths.     

Single-mode SiON/SiO2/Si optical waveguides prepared by plasma-enhanced chemical vapor deposition

We present the characteristics of low-propagation-loss single-mode SiON / SiO₂ / Si planar optical waveguides using plasma-enhanced chemical vapor deposition (PECVD). Using a thermal annealing process and a thick silicon dioxide buffer layer, we get an improvement on the propagation loss by the amounts of 1.24 dB /cm and 1.1 dB /cm, respectively. Optical waveguides with propagation loss lower than 0.3 dB /cm can be achieved.     

Er-Yb co-doped glass waveguide amplifiers using ion exchange and field-assisted annealing

Er³⁺-Yb³⁺ co-doped waveguide amplifiers fabricated using thermal two-step ion-exchange are demonstrated. K⁺-Na⁺ ion-exchange process was first carried out in pure KNO₃ molten bath, and then field-assisted annealing (FAA) was used to make the buried waveguides. The effective buried depth is estimated to be ∼3.4 μm for the buried FAA waveguides. With the use of cut-back method, the fiber-to-guide coupling loss of ∼4.38 dB, the waveguide loss of ∼2.27 dB/cm, and Er³⁺ absorption loss ∼5.7 dB were measured for a ∼1.24-cm-long waveguide. Peak relative gain of ∼7.0 dB is obtained for a ∼1.24-cm-long waveguide. The potential for the fabrication of compact optical amplifiers operating in the range of 1520-1580 nm is also demonstrated.     

Optical loss measurements in femtosecond laser written waveguides in glass

The optical loss is an important parameter for waveguides used in integrated optics. We measured the optical loss in waveguides written in silicate glass slides with high repetition-rate (MHz) femtosecond laser pulses. The average transmission loss of straight waveguides is about 0.3 dB/mm at a wavelength of 633 nm and 0.05 dB/mm at a wavelength of 1.55 μm. The loss is not polarization dependent and the waveguides allow a minimum bending radius of 36 mm without additional loss. The average numerical aperture of the waveguides is 0.065 at a wavelength of 633 nm and 0.045 at a wavelength of 1.55 μm. In straight waveguides more than 90% of the transmission loss is due to scattering.     

Writing low-loss waveguides in borosilicate (BK7) glass with a low-repetition-rate femtosecond laser

Borosilicate glass (BK7) is a widely-used material in integrated optics devices and in the optical communications industry. We report on laser-written waveguiding in BK7 glass using a low-repetition-rate (1 kHz) laser producing 40 fs pulses of 800 nm light. A 500 μm slit is used to write structures 100 μm below the glass surface. These waveguides show strong guidance at 635 nm, with an index contrast of 3 × 10^− 4 and a propagation loss of ~ 0.5 dB/cm. We measured the change in refractive index for a range of writing conditions as quantified in terms of energy dose; there is an energy dose window (> 0.6 μJ μm^− 3 and < 1.5 μJ μm^− 3) within which the written structures show guidance.     

Epitaxially grown zinc oxide films for electro-optic and acousto-optic interactions

Measurements of acoustic surface waves (ASW) and optical guided waves (OGW) wave properties have been carried out on chemical vapor deposited (CVD) epitaxial zinc oxide (ZnO) films on sapphire (Al₂O₃) substrates of different orientations. Surface preparation and orientation effects have been studied. Untuned acoustic insertion loss of 40 dB at 160 MHz and optical propagation loss of better than 5 dB/cm at 6328Å for the TE₀ mode were obtained in a 2μm thick (11$\text{2}$4) ZnO film deposited on a (0001) sapphire substrate.     

Optical path design and evaluation in Tm doped glass channel waveguide for S-band amplification

To achieve high-gain S-band waveguide amplifiers and promote the practicality of integrated signal amplification devices, bent waveguide structures based on Tm³⁺ doped germanate glass substrate have been designed. Using simulated-bend method, the optimal radius for the curved structure is offered to be 1.90 cm with a loss coefficient of 0.04 dB/cm, as the substrate size is minimally schemed. For the folded-spiral waveguide, the internal gain at 1482 nm is derived to be 13.01 dB, which is higher than the values of 8.21 and 4.22 dB in the U- and S-bend waveguides, respectively, and nearly three times higher than that of the straight one. Simulation results indicate that the optical path design is attractive in realizing the high gain of Tm³⁺ doped germanate glass channel waveguides for practical S-band amplification.     

Infrared optical properties of Ba(Zr0.20Ti0.80)O3 and Ba(Zr0.30Ti0.70)O3 thin films prepared by sol-gel method

Ba(Zr_xTi_1−x)O₃ (BZT) (x = 0.20 and 0.30) thin films are deposited on Pt(1 1 1)/Ti/SiO₂/Si(1 0 0) substrate by sol-gel method. X-ray diffraction patterns show that the thin films have a good crystallinity. Optical properties of the films in the wavelength range of 2.5-12 μm are studied by infrared spectroscopic ellipsometry (IRSE). The optical constants of the BZT thin films are determined by fitting the IRSE data using a classical dispersion formula. As the wavelength increases, the refractive index decreases, while the extinction coefficients increase. The effective static ionic charges are derived, which are smaller than that in a purely ionic material for the BZT thin films.     

Fabrication of fluorinated polyimide optical waveguides by micropen direct writing technology

A novel and cheap direct writing method based on the micropen has been developed to fabricate fluorinated polyimide stripe optical waveguides on Si/SiO₂ wafers. The overall design, starting material, micropen direct writing system and fabrication processes of the stripe optical waveguides are presented. The effects of the key direct writing parameters, such as the tip-to-substrate distance, extrusive gas pressure, writing speed and viscosity of the polyamic acid, on the dimension and morphology of the stripe optical waveguides are discussed in detail. After deposition by the micropen system and baking process, the fluorinated polyimide stripe optical waveguides with good morphology and surface quality can be fabricated using the optimal parameters. The propagation losses at the wavelength of 1.55 μm are in the range of 1.4-3.5 dB cm⁻¹ as characterized by different length combinations of the strip optical waveguides.     

Waveguiding and photoluminescence in Er-doped Ta2O5 planar waveguides

The optimization of erbium-doped Ta₂O₅ thin film waveguides deposited by magnetron sputtering onto thermally oxidized silicon wafer is described. Optical constants of the film were determined by ellipsometry. For the slab waveguides, background losses below 0.4 dB/cm at 633 nm have been obtained before post-annealing. The samples, when pumped at 980 nm yielded a broad photoluminescence spectrum (FWHM∼50 nm) centred at 1534 nm, corresponding to ⁴I_13/2-⁴I_15/2 transition of Er³⁺ ion. The samples were annealed up to 600 °C and both photoluminescence power and fluorescence lifetime increase with post-annealing temperature and a fluorescence lifetime of 2.4 ms was achieved, yielding promising results for compact waveguide amplifiers.     

Organic-inorganic materials for fabrication of integrated optical circuits

In the last few years, ORganically MOdified SIlicates (ORMOSILS) [R_xSi(OR)_4−x] prepared by sol-gel process were particularly attractive for integrated optics fabrication. A composition based on 3-(trimethoxysilyl)propylmethacrylate (MAPTMS) has already allowed the industrial fabrication of optical integrated devices. For this kind of materials, the polymerization of the organic network is typical of free radical curing.In this work, we try to obtain waveguides with another hybrid precursor [2-(3,4-epoxycyclohexylethyltrimethoxysilane)] using cationic polymerization. The main advantage of cationic polymerization is its ability to allow spontaneous cure reaction in presence of oxygen, in contrast with radical polymerization. We choose cycloaliphatic compounds because of their well-known high polymerization rates. The polymerization of the organic network of this hybrid material requires a cationic photoinitiator.The purpose of this paper is dedicated to the inorganic part of the material. Hydrolysis and polycondensation are followed by ²⁹Si NMR. The main objective is to obtain the highest reactive multifunctional oligomer with the lowest OH groups content.Based on our results, we obtained 3D waveguides with a cross-section of 5 μm × 5 μm.     

Design and analysis of multi-ring microstructured-core optical fibers

A novel design of single-mode large-mode-area optical fiber is presented. The core is composed of alternate high and low-index regions to form an effectively low-index contrast between the core and the cladding. The proposed fiber is investigated by the finite-element method with anisotropic perfect matched layer boundary conditions. In addition, the bending losses of the fibers are calculated and compared with those of the step-index optical fibers. In particular, numerical simulations demonstrate that single-mode operation can be achieved in one such fiber with mode area larger than 600 μm² at the wavelength of 1.55 μm and bending loss lower than 0.02 dB/m for bending radius greater than 20 cm.     

Low cost fabrication of SiO2 optical waveguides by laser direct writing on Ti-doped Sol-Gel films

A commercial direct laser writing (DLW) system operating at 1070 nm was used to fabricate SiO₂ optical waveguides on silicon wafers. A Ti-doped SiO₂ Sol-Gel film was deposited on the SiO₂/Si substrate by the dip-coating technique, based on which SiO₂ optical waveguides were patterned by DLW using a Ytterbium fiber laser and followed by chemical etching. The effects of laser parameters and the preheated temperature of Sol-Gel films on the dimensions of optical waveguides were studied systematically. The differences of etching rate between laser irradiated and non-irradiated areas in Sol-Gel films preheated at various temperatures are characterized by measuring the thickness of the films. Results demonstrate that the available laser power density range for laser densification and the width of the patterned optical waveguides are influenced strongly by the preheated temperature of the Sol-Gel films. The width of the optimized optical waveguide in this work is 25 μm. The minimum propagation loss of the fabricated optical waveguides is 1.7 dB cm⁻¹ at the wavelength of 1550 nm.     

焦磷酸质子交换LiTaO3光波导

本文首次报道了在低于300℃的焦磷酸中制备质子交换LiTaO_3光波导的方法。通过测量有效扩散系数D给出D_0=3.91×10~6μm~2/h和激活能E_a=0.74eV;并测量了波导参数。实验结果表明:只有非寻常折射率产生增量△n_6,其中TM单模波导的传输损耗低达0.1dB/cm(633mm)。发现,热退火处理后的波导表面非寻常折射率增大了。     

Single-mode rib polymer waveguides and electro-optic polymer waveguide switches

Mode-matching and effective index methods are used to analyze single-mode operation of optical rib polymer waveguides. Their single-mode waveguiding conditions are determined. Single-mode rib waveguides fabricated from guest–host polyetherketone are presented. The estimated propagation loss of straight rib-waveguides is 0.7 dB/cm at 1.55 μm. Furthermore, by using the mode field-transfer matrix method, 2×2 and 4×4 polymer Mach–Zehnder interference switch operating at 1.55 μm wavelength has been designed based on optical multi-mode interference.     

Influence of surface effects on the performance of lead-niobium-germanate optical waveguides

Lead-niobium-germanate planar waveguides have been produced by pulsed laser deposition. The composition of the waveguides is found to be relatively weakly dependent on the laser fluence, while their surface morphology is affected dramatically. Smooth surfaces are obtained for a narrow fluence range centered at 2.0 J/cm², while particulates having typical diameters of <0.5 μm or droplets with typical diameters of <10 μm are observed at lower and higher fluences, respectively. The refractive index of the waveguides increases with fluence up to 2.1 at 2.0 J/cm², which is close to the value of the bulk glass, and remains constant at higher fluences. Propagation losses show instead a minimum (≈6.5 dB/cm) at 2.0 J/cm². The characteristics of the ablation process that leads to the ejection of solid particulates or molten droplets as well as the increase of the waveguides density on increasing the fluence are discussed to be responsible for the observed optical behavior.