共查询到18条相似文献,搜索用时 125 毫秒
1.
2.
3.
为了使研究者能更详细地了解类金刚石(DLC)薄膜的研究现状,综述了类金刚石薄膜的特性及应用,分析对比了目前常用的一些类金刚石薄膜的制备方法,包括物理气相沉积法(PVD)和化学气相沉积法(CVD),并对类金刚石薄膜的抗强激光损伤特性以及提高其激光损伤阈值的方法进行了论述。结果发现,利用PVD法制备的DLC膜的硬度可以达到40 GPa~80 GPa,且薄膜的残余应力可以达到0.9 GPa~2.2 GPa之间,而CVD法则由于反应气体的充入导致类DLC薄膜的沉积速率大大降低,故使用率不高。同时,优化膜系的电场强度设计,采用合理的制备工艺,进行激光辐照后处理,施加外界电场干预均可有效地提高DLC薄膜的抗激光损伤能力, 且目前的DLC薄膜的激光损伤阈值可达到2.4 J/cm2。 相似文献
4.
5.
6.
7.
用YAG激光制备类金刚石薄膜及其光学折射率研究 总被引:2,自引:2,他引:0
用高功率的Nd^3+:YAG脉冲激光轰击真空室内的石墨靶,形成激光等离子体雾状物质,在硅衬底上沉积形成类金刚石薄膜,用椭圆偏振光谱法测量不同衬底温度下制备的系列样品的厚度和折射率,发现随着衬底温度的升高,薄膜的厚度减小而的折射率增大,这种可以控制折射率米化的薄膜,可能为光学增透增反膜的制备提供一种新方法。 相似文献
8.
《中国光学与应用光学文摘》2006,(4)
TN241 2006043027激光辐照对类金刚石薄膜改性及损伤研究=Laser modifi-cation and damages on diamond-like carbon fil ms[刊,中]/高巍(哈尔滨工业大学复合材料与结构研究所.黑龙江,哈尔滨(150001)) ,朱嘉琦…∥功能材料.—2006 ,37(4) .—519-523介绍了激光损伤的检测及损伤阈值的测量方法。讨论激光辐照对类金刚石结构和性质的影响规律,并论述不同工作参数的激光对类金刚石薄膜的激光破坏行为及其损伤阈值。在此基础上分析类金刚石薄膜激光损伤的机理,还从物理特性及制备技术方面着手,比较分析金刚石及类金刚石薄膜各自的优缺点和实际… 相似文献
9.
氦压对类金刚石薄膜结构和光学性质的影响 总被引:1,自引:1,他引:0
使用脉冲激光沉积技术在不同氦压下制备了系列无氢类金刚石薄膜,测量了样品的Raman光谱、光吸收光谱和光致发光光谱,采用原子力显微镜测试了薄膜的表面形貌,研究了薄膜的微结构和光学性质与制备条件的依赖关系. 结果表明,该薄膜是由sp2和sp3杂化碳原子组成的非晶碳膜. 薄膜的光学带隙在1.45~1.78 eV. 薄膜的发光在可见光区呈宽带结构,氦压能够对类金刚石薄膜的结构和光学性质产生较大影响. 当氦压从0.05 Pa升高至15 Pa时,sp2团簇变大,带尾态增多,从而导致薄膜的发光增强,光学带隙变窄,发光峰位红移. AFM 形貌表明随着氦压的升高,薄膜的表面由致密光滑变得粗糙,并且许多大小不均匀的球状颗粒出现在薄膜表面. 相似文献
10.
11.
12.
13.
采用飞秒激光(800 nm,120 fs,3 W,1 000 Hz)制备类金刚石膜,研究了不同偏压、生长温度和氧气氛等辅助手段对激光沉积类金刚石膜的影响,实验发现在室温(25℃)、无偏压和低气压氧气氛(2 Pa)条件下沉积的类金刚石膜性能最优。在单面预镀普通增透膜的硅红外窗口材料上镀制出了无氢类金刚石膜,3~5μm波段平均透过率达到90%以上,纳米硬度高达40 GPa,用压力为9.8 N的橡皮磨头,摩擦105次,膜层未见磨损,并且通过了军标规定的高温、低温、湿热、盐雾等环境试验,所制类金刚石膜可对红外窗口起到较好的增透保护作用。 相似文献
14.
利用脉冲激光沉积技术制备了掺杂金纳米颗粒的钛酸钡复合薄膜Au-BaTiO3,用高分辨透射电镜和X射线光电子能谱对薄膜进行了表征。从透射电镜照片可以看出,制备的样品中金颗粒大小约为2~3 nm,呈球形,均匀分布在载体介质中。X射线光电子能谱给出了Ba3d、Ti2p和Au4f电子芯能级结合能,结果表明载体介质是以BaTiO3的形式存在,而Au以金属的状态掺杂其中。330~800 nm范围的线性吸收谱表明样品中Au颗粒的共振吸收峰在500 nm附近。用单光束纵向扫描方法测量了样品的三阶非线性光学效应,使用的光源为调Q的YAG激光器,波长为532 nm,脉宽为10 ns,得到的非线性折射率和非线性吸收系数分别为-2.42×10-6esu和2.22×10-6m/W,表明了Au-BaTiO3复合薄膜有较大的非线性光学响应。 相似文献
15.
Diamond-like carbon (DLC) films were fabricated by pulsed laser ablation of a liquid target. During deposition process the growing films were exited by a laser beam irradiation. The films were deposited onto the fused silica using 248 nm KrF eximer laser at room temperature and 10−3 mbar pressure. Film irradiation was carried out by the same KrF laser operating periodically between the deposition and excitation regimes. Deposited DLC films were characterized by Raman scattering spectroscopy. The results obtained suggested that laser irradiation intensity has noticeable influence on the structure and hybridization of carbon atoms deposited. For materials deposited at moderate irradiation intensities a very high and sharp peak appeared at 1332 cm−1, characteristic of diamond crystals. At higher irradiation intensities the graphitization of the amorphous films was observed. Thus, at optimal energy density the individual sp3-hybridized carbon phase was deposited inside the amorphous carbon structure. Surface morphology for DLC has been analyzed using atomic force microscopy (AFM) indicating that more regular diamond cluster formation at optimal additional laser illumination conditions (∼20 mJ per impulse) is possible. 相似文献
16.
Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition 总被引:1,自引:0,他引:1 下载免费PDF全文
A novel method, pulsed laser arc deposition combining the advantages
of pulsed laser deposition and cathode vacuum arc techniques, was
used to deposit the diamond-like carbon (DLC) nanofilms with
different thicknesses. Spectroscopic ellipsometer, Auger electron
spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy,
atomic force microscopy, scanning electron microscopy and
multi-functional friction and wear tester were employed to
investigate the physical and tribological properties of the deposited
films. The results show that the deposited films are amorphous and
the sp$^{2}$, sp$^{3}$ and C--O bonds at the top surface of the films
are identified. The Raman peak intensity and surface roughness
increase with increasing film thickness. Friction coefficients are
about 0.1, 0.15, 0.18, when the film thicknesses are in the range of
17--21~nm, 30--57~nm, 67--123~nm, respectively. This is attributed to
the united effects of substrate and surface roughness. The wear
mechanism of DLC films is mainly abrasive wear when film thickness
is in the range of 17--41~nm, while it transforms to abrasive
and adhesive wear, when the film thickness lies between 72 and 123~nm. 相似文献
17.
Timothy T. Ho Manisha Gupta Fatema Rezwana Chowdhury Zhijiang Chen Ying Yin Tsui 《Applied physics. B, Lasers and optics》2013,113(3):429-436
Here, we report the fabrication of diamond-like carbon (DLC) thin films using pulsed laser deposition (PLD). PLD is a well-established technique for deposition of high-quality DLC thin films. Carbon tape target was ablated using a KrF (248 nm, 25 ns, 20 Hz) excimer laser to deposit DLC films on soap-coated substrates. A laser fluence between 8.5 and 14 J/cm2 and a target to substrate distance of 10 cm was used. These films were then released from substrates to obtain freestanding DLC thin foils. Foil thicknesses from 20 to 200 nm were deposited using this technique to obtain freestanding targets of up to 1-inch square area. Typically, 100-nm-thick freestanding DLC films were characterized using different techniques such as AFM, XPS, and nano-indentation. AFM was used to obtain the film surface roughness of 9 nm rms of the released film. XPS was utilized to obtain 74 % sp2, 23 % sp3, and 3 % C–O bond components. Nano-indentation was used to characterize the film hardness of 10 GPa and Young’s modulus of 110 GPa. Damage threshold properties of the DLC foils were studied (1,064 nm, 6 ns) and found to be 7 × 1010 W/cm2 peak intensity for our best ultrathin DLC foils. 相似文献
18.
A. Sikora A. Berkesse O. Bourgeois J.-L. Garden C. Guerret-Piécourt A.-S. Loir F. Garrelie C. Donnet 《Applied Physics A: Materials Science & Processing》2009,94(1):105-109
We report on electrical measurements and structural characterization performed on boron-doped diamond-like carbon thin films
deposited by femtosecond pulsed laser deposition. The resistance has been measured between 77 and 300 K using four probe technique
on platinum contacts for different boron doping. Different behaviours of the resistance versus temperature have been evidenced
between pure DLC and boron-doped DLC. The a-C:B thin film resistances exhibit Mott variable range hopping signature with temperature.
Potential applications of DLC thin films to highly sensitive resistive thermometry is going to be discussed. 相似文献