谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响

研究了谐振式检测器谐振腔对声表面波气相色谱仪灵敏度的影响。构建无液膜负载和有液膜负载下压电基片和金属指条结构的三维有限元模型,利用有限元方法提取不同周期结构的耦合模参量,结合P矩阵级联技术,推导出传感器灵敏度随检测器腔体结构改变的变化关系。实验制备了两种三换能器结构的声表面波谐振器,其输入换能器与输出换能器间距离分别为22.25倍波长和1.25倍波长,通过测试甲基膦酸二甲酯气体,验证理论计算结果。结果表明:缩短谐振器的谐振腔长度使器件中心处能量更为集中,有效地提高了声表面波气相色谱仪灵敏度。      

谐振式检测器指条厚度对质量型声表面波传感器灵敏度的影响

研究了谐振器指条厚度对质量型声表面波传感器灵敏度的影响.利用耦合模方程推导出耦合模参量与周期栅阵禁带边界频率的关系,结合有限元及P矩阵模型,获得了声表面波传感器灵敏度随指条厚度的变化关系。制备3种不同铝指条厚度(1600?,1900?,3100?)的声表面波谐振器,通过对其表面中心区域沉积SiO_2层验证了计算结果。结果表明:采用ST-X石英基底的声表面波谐振器对SiO_2负载检测时,传感器的灵敏度随铝指条厚度的增加先变大后减小,最优归一化指条厚度为1.9%。分析表明,指条厚度对传感器灵敏度的影响主要来自于传播速度和耦合系数的共同作用,通过优化指条厚度的方法可改善传感器的灵敏度.     

表面垂直裂痕诱发瑞利波散射的数值分析

激光激发的声表面波为材料表面缺陷的检测提供了有力的工具.针对含缺陷材料在模型边界上的复杂性,建立了基于平面应变的有限元模型并选取了相同厚度但含有不同深度的表面裂痕的单层铝板进行了对比计算,得到了声表面波经过不同深度的表面裂痕时产生的反射及透射信号波形的时域特征.进而引入了基于Wigner-Ville分布理论的时-频分析方法计算裂痕前、后散射的瞬态表面波的能量在时间-频率平面内分布的情形.结果显示：声表面波接近中心频率的某一频率成分在经过深度小于其中心波长的表面缺陷时,随着裂痕深度的增加,对应于该频率的反射系数呈现单调递增的趋势;而透射系数呈现递减的特征,这一结果可以为激光超声检测表面缺陷提供一种定量的表征手段.     

基于指条厚度优化的冷凝式SAW气体传感器灵敏度提升方法

该文通过对声表面波谐振器指条厚度的优化提升了冷凝式气体传感器的灵敏度。基于流固耦合理论,利用有限元商业软件建立了有液膜负载和无液膜负载下的多物理场三维周期模型,并提取了相应的耦合模参量,利用耦合模模型及P矩阵级联技术,计算了不同指条厚度下液膜负载引起的传感器响应,获得了冷凝式声表面波气体传感器灵敏度随指条厚度的变化关系。实验中制备了6种不同电极厚度的声表面波谐振器,并利用甲基膦酸二甲酯实验样品完成了传感器的响应测试,验证了理论分析的正确性。结果表明,冷凝式声表面波气体传感器的灵敏度随指条厚度的增加先变大后减小,最优归一化电极厚度为6.4%～7.6%之间。该研究结果对进一步提升传感器灵敏度具有重要意义。     

基于AlN声表面波滤波传感器器件的有限元仿真

声表面波器件是一种利用压电材料的压电效应与逆压电效应工作电子器件, 文章首先详细描述了声表面波器件的设计与仿真过程,运用有限元分析的方法分别计算了利用声表面波的 SAW 器件与利用体波的 BAW 器件的性能与各项参数,对相关的器件进行了计算分析,分别用上述方法研究了基于 AlN 薄膜的声表面波器件和悬臂梁结构的体波器件,推导得出了器件的电学导纳与频率之间的关系, 通过分析器件的导纳-频率曲线,推导出器件内部声波的模式以及合适的工作频率,最终得出在 IDT 周期为 8 微米的情况下,SAW 器件的理想工作频率是 0.7-1.95GHz,BAW 器件的理想工作频率在 0.6-3.2GHz 的结果。     

单根电极或沟槽形成的栅格对声表面波的散射*

该文借鉴汪承灏先生研究栅格声表面波散射的技术路线,提出一种既不限制基片和栅格形状、类型,也不限制声波入射方向,可精确计算栅格对SAW散射的有限元通用模型。作为对《超声学》第六章"声表面波"中栅格对声表面波的反射和体波散射一节部分结论的进一步阐释和说明,计算了YZ-Li Nb O3和128?YX-Li Nb O3单晶上厚度为200 nm、宽度为1μm的单根悬浮铝栅条以及沟槽在不同频率下的反射系数曲线。提出的计算方法今后可推广应用于层状结构基底、应用到非规则指条、沟槽、金属点阵、基片端面、台阶等的反射的精确分析,为优化设计新型声表面波器件奠定理论基础。     

ZnO/Diamond/Si结构中声表面波传播特性分析

基于递归刚度矩阵方法, 建立了多层结构声表面波表面有效介电常数模型, 计算出了ZnO/Si结构声表面波的相速度频散特性, 与实验结果符合较好, 表明本文所建模型的准确性和有效性. 进一步计算得到了三层结构(ZnO/Diamond/Si)声表面波的相速度和机电耦合系数的频散规律, 获得此结构最优的高波速和高机电耦合系数组合及达到最优组合所需控制的变量, 为高频高性能声表面波器件设计和优化提供了有益参考. 关键词： 声表面波 多层结构 递归刚度矩阵 表面有效介电常数     

频率色散表面阻抗对真空电子太赫兹源的影响

为了研究欧姆损耗对高频真空电子器件工作特性的影响,首先推导频率色散表面阻抗边界在三维共形粒子模拟软件UNIPIC-3D中的实现原理,并通过对有耗边界矩形谐振腔和圆波导进行模拟验证了该阻抗边界算法的正确性.采用有耗共形UNIPIC-3D模拟相对论太赫兹表面波振荡器和低电压平板格栅返波振荡器.模拟结果表明,对于表面波振荡器和平板BWO这种电磁场集中在金属慢波结构附近的太赫兹真空电子器件,欧姆损耗会对器件的运行带来极大影响,对于采用铜材料的器件,输出功率会下降一半左右,器件起振时间出现延迟,但器件工作频率几乎不变.为了提高相对论太赫兹表面波振荡器的效率,在二极管和慢波结构之间增加了反射腔,模拟结果表明,在考虑器件表面损耗的条件下,器件的工作频率保持不变,输出功率由41 MW提高到60 MW.     

壁面结构对非定常薄膜流动表面波特性的影响

采用VOF方法,在入口处引入周期扰动,对沿矩形结构底板下落的二维非定常薄膜流动进行直接数值模拟.计算结果表明,不同频率的外加周期扰动在流场中激发出不同波长的自由表面波.当壁面结构的波长与之相比较小时,由于壁面结构引起的静态波骑行在外加扰动形成的行进波上.若这两个波长相近,非线性效应将促进附近的表面波之间的合并.当薄膜无...     

利用激光超声研究功能梯度材料中声表面波的传播特性

利用有限元的方法建立了脉冲激光在功能材料中激发声表面波的理论模型,根据该理论模型分别分析了脉冲激光在不同空间调制下所激发的声表面波(SAWS)在功能梯度材料表面的传播特性,以及不同力学参量变化对所激发的声表面波传播特性的影响.模拟结果表明,线源激发的宽带声表面波在功能梯度材料表面传播时,声表面波会出现明显的色散效应;当...     

高功率光纤中传输光模式与其波长相关性研究

针对高功率光纤激光模式诊断和光谱诊断的需求,研究了光纤中传输模式的波长相关性,数值计算了光纤中各个模式的模场分布随波长的变化曲线及相应的光束质量,采用双傅里叶变换F~2法实际测量了光纤模式成分与波长的关系曲线.结果表明,光纤中各个模式的模场分布随波长变化,波长越长,模场面积越大;模式的光束质量随波长变化不大,但在截止频率附近明显变差;光纤中各个模式的功率占比与波长有关.     

Transmission characteristics of a microscale dielectric slab waveguide device with a deep groove and an embedded metallodielectric grating at low terahertz frequency

We discuss the transmission characteristics of a microscale dielectric waveguide device with a deep groove and an embedded metallodielectric grating illuminated by a continuous wave of TM and TE modes at low terahertz frequency. To study its performance we solve numerically the corresponding Maxwell equations by means of finite difference time domain method with uniaxial perfectly match layer as its boundary condition. By varying the angle of incident, grating filling factor and refractive index of analyte in the deep groove, it is found that the device exhibits a significant transmission enhancement for the TM mode due to the existence of surface plasmon interaction. We also demonstrate its potential application as a biosensor device.     

Comparison of 1D transfer matrix method and finite element method with tests for acoustic performance of multi-chamber perforated resonator

Multi-chamber perforated resonator (MCPR) is a kind of typical silencer element which can both attenuate broadband noise and satisfy specific installation requirements. The one-dimensional transfer matrix method (TMM) and finite element method (FEM) are widely used to predict the transmission loss of the resonators. This paper mainly focuses on the comparison between 1D TMM and FEM in which detailed perforation modeling is applied for the acoustic modeling of MCPRs. Five resonators with different acoustic attenuation frequency ranges are built for simulation and test. In order to verify the results of the above methods, a transmission loss test facility is designed based on two-load method. Through adjusting the distance between microphones, the facility’s effective measurement frequency can be changed. The results show that despite of the complex modeling and calculation, FEM with detailed perforation modeling shows good consistency with test results in both frequency and amplitude within entire frequency range. In comparison, TMM is limited by the cut-off frequency when calculating transmission losses. Besides, accuracy of TMM in low frequency range is also affected by perforation conditions. However, TMM is time-saving in calculation and structure optimization. In MCPRs’ development process, TMM can be used to quickly design and optimize structure parameters while FEM can be used to verify the acoustic performance before prototyping.     

双相多孔锂离子电池液/固界面的声反射与声透射

采用传递矩阵法,同步联立改进的Biot理论,对含液固界面的双相多孔锂离子电池的超声反射与透射系数进行理论求解。考虑锂离子的摇摆特性对电极力学性能的影响,计算了对应状态下液/固界面的双相多孔锂离子电池声反射及透射系数的角度谱与频率谱。同时,构建了不同荷电状态时含单元锂离子电池的频域仿真模型,以萃取对应的超声反射及透射角度谱及频率谱,并与理论计算结果对比吻合良好。随后,以多单元锂离子电池为例,在不同的荷电状态下,分析了反射与透射系数随斜入射角度、入射波频率的变化关系,并分别指出了其角度谱及频率谱特征点随荷电状态的变化特征,为锂离子电池运行状态的超声无损测量提供了理论基础。     

An investigation of transmission coefficients for finite and semi-infinite coupled plate structures

This paper introduces a method for determining the transmission coefficient for finite coupled plates using an analytical waveguide model combined with a scattering matrix. In the scattering matrix method, the amplitudes of the structural waves impinging on a junction are separated into incident, reflected, and transmitted components. The energy flow due to each of these waves is obtained using a wave impedance method, which is subsequently used to determine the transmission coefficient. Transmission coefficients for semi-infinite and finite L-shaped plates are investigated for single and multiple point force excitations, and for controlled incident wave sources. It is shown that the transmission coefficients can also be calculated from details of the modal transmission coefficients and the modal composition of the energy incident on the junction. Results show that the modal transmission coefficients are largely independent of whether the plates have finite or semi-infinite boundary conditions, and are only dependent on the details of the coupling. Finally, frequency averaged transmission coefficients are compared for semi-infinite and finite structures. In the cases considered, it is found that the semi-infinite system is a good approximation for finite systems after frequency averaging, especially if the system is excited with multiple point force excitation.     

贴片晶振在冲击环境下的损伤边界

贴片式石英晶体振荡器广泛应用于各类电子和通信设备系统中。针对晶振在冲击环境中容易出现结构破坏而导致系统工作异常的问题,通过分析单自由度系统在不同频率冲击载荷作用下的响应特点,建立了结构的应力响应水平与相关冲击响应谱谱值之间的联系,获得了较已有结论更合理的损伤边界形式。根据典型晶振结构易损组件的力学特性建立对应的简化分析模型,得到了贴片晶振在大频率范围内的结构损伤边界。利用有限元仿真软件,对晶振结构在0.5~30 kHz频率范围内冲击载荷下的响应进行仿真分析,验证了该损伤边界的有效性。这也为以贴片晶振为代表的微小元器件在冲击环境下的可靠性研究提供了一种可行的方法。     

Nano-image profiles transferred by near field phase-shifting lithography precisely simulated by finite element method and fabricated

The operating frequency of the SAW filters is limited by the gap width but not the line width. The narrow gap width is required for the high operating frequency SAW filters. Therefore, in this study, high precision nano-image profiles transferred by near field phase-shifting mask (NFPSM) lithography at various exposure-energy-intensities (EEIs) are simulated by the finite element method (FEM). The transferred energy-intensity distribution (TEID) in the photoresist during the NFPSM process (at the wavelength of 248 nm) can be accurately simulated by the FEM. The TEID at the interface between the mask and the photoresist is also simulated. The fabricated pattern widths clearly match the simulation results. The study of the simulated image profiles shows that they are dependent on the EEI. The greater the EEI is, the narrower the width and the shorter the height of the image profile. The nano-linewidth of 60 nm is simulated and fabricated. The fabricated nano-imaging profile precisely fits the simulation results. Therefore, any expected nano-image profile can easily be fabricated by way of the simulation.     

Multiobjective muffler shape optimization with hybrid acoustics modeling

This paper considers the combined use of a hybrid numerical method for the modeling of acoustic mufflers and a genetic algorithm for multiobjective optimization. The hybrid numerical method provides accurate modeling of sound propagation in uniform waveguides with non-uniform obstructions. It is based on coupling a wave based modal solution in the uniform sections of the waveguide to a finite element solution in the non-uniform component. Finite element method provides flexible modeling of complicated geometries, varying material parameters, and boundary conditions, while the wave based solution leads to accurate treatment of non-reflecting boundaries and straightforward computation of the transmission loss (TL) of the muffler. The goal of optimization is to maximize TL at multiple frequency ranges simultaneously by adjusting chosen shape parameters of the muffler. This task is formulated as a multiobjective optimization problem with the objectives depending on the solution of the simulation model. NSGA-II genetic algorithm is used for solving the multiobjective optimization problem. Genetic algorithms can be easily combined with different simulation methods, and they are not sensitive to the smoothness properties of the objective functions. Numerical experiments demonstrate the accuracy and feasibility of the model-based optimization method in muffler design.