基于AlN声表面波滤波传感器器件的有限元仿真

声表面波器件是一种利用压电材料的压电效应与逆压电效应工作电子器件, 文章首先详细描述了声表面波器件的设计与仿真过程,运用有限元分析的方法分别计算了利用声表面波的 SAW 器件与利用体波的 BAW 器件的性能与各项参数,对相关的器件进行了计算分析,分别用上述方法研究了基于 AlN 薄膜的声表面波器件和悬臂梁结构的体波器件,推导得出了器件的电学导纳与频率之间的关系, 通过分析器件的导纳-频率曲线,推导出器件内部声波的模式以及合适的工作频率,最终得出在 IDT 周期为 8 微米的情况下,SAW 器件的理想工作频率是 0.7-1.95GHz,BAW 器件的理想工作频率在 0.6-3.2GHz 的结果。

AlN surface acoustic wave filter sensor device simulation based on Finite element

the surface acoustic wave device is a use of piezoelectric effect and converse piezoelectric effect of electronic devices, this paper describes the design and Simulation of surface acoustic wave devices, using the method of finite element analysis were calculated using SAW devices, surface acoustic wave and the properties and parameters of BAW device body wave of, on the related devices are calculated, respectively, by the method of body wave device of AlN thin films and surface acoustic wave devices based on cantilever structure, derived the relationship between the electrical admittance and the frequency device, through frequency admittance analysis device curve, derived from the internal wave mode and device appropriate working frequency, in the IDT cycle is 8 micron case, ideal frequency of SAW device is 0.7-1.95GHz, BAW device is an ideal frequency in the 0.6-3.2GHz results.