差分谐振式压力微传感器灵敏度匹配特性（英文）

谐振式压力微传感器因其高精度、高稳定性及准数字输出等特性而广泛应用于气压监测、航空航天等领域。相较于其他结构,差分谐振式具有灵敏度高、线性度好及温度漂移小等优势。然而,要获得差分谐振式压力微传感器的最优性能,仍需解决差分谐振梁灵敏度不匹配的问题。在仿真与实验的基础上,对差分谐振式压力微传感器的灵敏度匹配特性进行了相关研究。根据研究结果,对传感器的结构参数进行了优化设计。两谐振梁的设计灵敏度为±46 Hz/kP,实验结果显示中心梁的实际灵敏度为45Hz/kPa,边梁的实际灵敏度为-44Hz/kPa,差分输出的线性度高达0.9999999。     

差分谐振式压力微传感器灵敏度匹配特性（英文）

谐振式压力微传感器因其高精度、高稳定性及准数字输出等特性而广泛应用于气压监测、航空航天等领域。相较于其他结构,差分谐振式具有灵敏度高、线性度好及温度漂移小等优势。然而,要获得差分谐振式压力微传感器的最优性能,仍需解决差分谐振梁灵敏度不匹配的问题。在仿真与实验的基础上,对差分谐振式压力微传感器的灵敏度匹配特性进行了相关研究。根据研究结果,对传感器的结构参数进行了优化设计。两谐振梁的设计灵敏度为±46 Hz/kP,实验结果显示中心梁的实际灵敏度为45Hz/kPa,边梁的实际灵敏度为-44Hz/kPa,差分输出的线性度高达0.999 999 9。     

基于近PMTP区域双峰谐振效应的长周期光纤光栅应变传感理论分析

利用长周期光纤光栅(LPFG)的双峰谐振效应,结合LPFG传感器工作于近相位匹配转折点(PMTP)附近的高灵敏度,提出了一种新型的长周期光纤光栅应变传感器的设计方法。利用LPFG相位匹配条件,分析了长周期光纤光栅近PMTP附近的双峰谐振特性、应变传感特性,发现双峰波长间距对微小应变具有很高的响应度和线性度。进一步讨论了光栅结构参数和包层直径对双峰LPFG应变灵敏度的影响,发现光栅周期对该传感器的应变灵敏度、线性度和应变测量范围具有很大的影响;光栅长度对谐振峰高度和宽度有较大影响,直接关系到传感器寻峰精度;通过增大包层直径,可以进一步增大应变灵敏度。结果表明,通过选取适合的光栅结构参量和包层半径,该传感器应变灵敏度可比一般长周期光纤光栅应变传感器的应变灵敏度提高2个数量级。这为设计高应变灵敏度双峰谐振LPFG应变传感器提供了结构优化的理论支持。     

基于L形刚性梁与弹性膜片结构的低频光纤光栅加速度传感器

为满足低频振动信号精确测量的实际需要,设计了一种基于L形刚性梁与弹性膜片结构的光纤布拉格光栅加速度传感器。进行了结构理论分析,并通过Matlab仿真讨论了各结构参量对传感器灵敏度和谐振频率的影响,进行了参量优化设计。根据理论分析结果制作了加速度传感器并对其加速度灵敏度的幅频特性、线性响应和抗横向干扰特性进行了测试。实验结果表明,L形刚性梁的传动结构有效增强了结构稳定性,消除了传统悬臂梁结构带来的光纤光栅啁啾或反射谱多峰现象。加速度传感器在20~70 Hz的低频段具有平坦的灵敏度响应,加速度灵敏度可达220 pm/g,线性响应的相关度为99.98%;金属膜片使得该传感器具有较强的抗横向干扰能力,在工作频段内横向串扰为-32.73 d B。     

低频高灵敏度光纤Bragg光栅振动传感器设计

为实现对低频振动信号的准确测量,设计了一种新型的双光纤光栅振动传感器.首先,理论分析了传感器的灵敏度和谐振频率.其次,使用ANSYS数值模拟软件分析了传感器的灵敏度和谐振特性.最后,根据分析结果设计了光纤Brgg光栅振动传感器,并通过实验研究了传感器的幅频特性、线性响应、温度自补偿特性和抗横向干扰特性.实验结果表明:传感器在10~130Hz范围内加速度灵敏度为231.48pm/g,线性度为99.98%;-20~60℃范围内,具有良好的温度自补偿能力;同时,该传感器具有较强抗横向干扰能力,横向引入误差小于3.47%.     

基于F型梁的光纤光栅加速度传感器

为满足悬臂梁式传感器测量带宽大、灵敏度高的需求,采用F型梁增敏结构设计了一种光纤光栅加速度传感器。首先推导出传感器的谐振频率和灵敏度公式,在此基础上使用MATLAB优化传感器参数,并利用ANSYS对传感器进行模态分析和谐响应分析,得到了传感器的模态振型图以及两种不同阻尼比条件下的幅频响应,仿真结果与理论计算基本一致。制作了2个传感器实物,对直接封装的传感器1和填充硅油后封装的传感器2进行了幅频响应、灵敏度特性和横向抗干扰能力测试。实验结果表明：传感器1的谐振频率约为168 Hz,测量带宽为1.5～50 Hz,灵敏度系数为159.84 pm/g,横向抗干扰度为9.88%,谐振频率和灵敏度理论值与实际值误差分别为0.93%和3.29%;填充硅油后的传感器2的测量带宽为1.5～100 Hz,灵敏度系数为133.57 pm/g,横向抗干扰度为8.1%。实验证明在传感器内部填充硅油可以增大传感器工作带宽,提高横向抗干扰能力。     

光纤法布里-珀罗微压传感器

设计并研制了一种新型光纤法布里-珀罗压力传感器,通过光刻、硅片刻蚀、阳极键合等微机电系统技术制作而成,适合恶劣环境下、狭小空间内的微压环境压力测量。详细阐述了传感器的结构设计和制作方式。该设计巧妙地利用了光纤法兰盘,保证了光纤端面与敏感膜的平行,从而形成高质量的法布里-珀罗干涉腔。该结构也有利于初始腔长的稳定,减小了传感器误差。建立了实验解调系统,对其压力、温度等特性进行了详细的测试。实验结果表明,在0~0.1MPa的压力范围内,传感器线性度好,重复性高,灵敏度达到了61.6μm/MPa。     

飞秒激光加工微悬臂梁薄膜光纤声波传感器

设计并制作了一种光纤微悬臂梁传感器,由于悬臂梁在受迫振动过程中不会产生拉伸变形,与四周固定的圆形密闭薄膜相比,会产生更高的声波灵敏度。采用飞秒激光加工制作微悬臂梁薄膜光纤声波传感器,制备出长宽均为500μm,厚6μm的微悬臂梁结构。通过实验得到其反射光谱对比度为8.8 dB,自由光谱范围为7.72 nm,理论计算得光纤法布里-珀罗腔长为155.6μm。研究结果表明,该光纤声波传感器在2 200 Hz处出现明显的共振峰,对应的声压灵敏度为414 mV/Pa,在300 Hz时有最大的灵敏度675 mV/Pa,与普通硅橡胶薄膜声波传感器相比灵敏度显著提高。理论计算硅橡胶微悬臂梁光纤声波传感器的一阶共振频率为198 Hz,与实验测得的共振频率较为接近。同时悬臂梁传感器的声压灵敏度可达675 mV/Pa,声压响应线性度为0.994。     

石英音叉温度频率特性的温度传感器（英）

提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545 kHz,灵敏度为-1.9 Hz/℃,在-20到100 ℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。     

石英音叉温度频率特性的温度传感器（英文）

提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545kHz,灵敏度为-1.9Hz/℃,在-20到100℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。     

Dynamic stability of parametrically-excited linear resonant beams under periodic axial force

The parametric dynamic stability of resonant beams with various parameters under periodic axial force is studied.It is assumed that the theoretical formulations are based on Euler-Bernoulli beam theory.The governing equations of motion are derived by using the Rayleigh-Ritz method and transformed into Mathieu equations,which are formed to determine the stability criterion and stability regions for parametricallyexcited linear resonant beams.An improved stability criterion is obtained using periodic Lyapunov functions.The boundary points on the stable regions are determined by using a small parameter perturbation method.Numerical results and discussion are presented to highlight the effects of beam length,axial force and damped coefficient on the stability criterion and stability regions.While some stability rules are easy to anticipate,we draw some conclusions:with the increase of damped coefficient,stable regions arise;with the decrease of beam length,the conditions of the damped coefficient arise instead.These conclusions can provide a reference for the robust design of parametricallyexcited linear resonant sensors.     

Collimation of atomic beams by resonant laser radiation pressure

The application of the resonant light pressure created by an axially symmetrical light field for collimating atomic beams has been considered. As an example, consideration is given to the possibility of collimating an atomic beam by the light field produced by the reflection of a plane wave from the internal surface of a metal cone. It has been shown that the radiation pressure can reduce the atomic-beam transverse velocities to the value of the order of 100 cm/s which corresponds to effective temperature of about 10^–3 K. A method for producing collimated beams of cold atoms based on simultaneous deceleration and collimation of atomic beams by resonant laser radiation pressure is proposed.     

基于双开口谐振环超表面的宽带太赫兹涡旋光束产生

提出了一种基于双开口谐振环单元结构超表面的太赫兹宽带涡旋光束产生器.该结构由金属-电介质两层构成,位于顶层的是基于双开口谐振环单元结构的超表面,底层为介质层.对单元结构阵列进行数值仿真,圆偏振的入射光可以被转换成相应的交叉偏振透射光,通过旋转表层金属谐振环,可以控制交叉偏振透射光具有相同的振幅和不同的相位.这些单元结构按照特定的规律排列,可以形成用以产生不同拓扑荷数的涡旋光束的涡旋相位板.以拓扑荷数1和2为例,设计了两种涡旋相位板,数值分析了圆偏振波垂直入射到该涡旋相位板生成交叉圆偏振涡旋光束的特性.结果表明,在1.39—1.91 THz的频率范围内产生了比较理想的不同拓扑荷数的涡旋光束,且透过率高于20%,最高可达到24%,接近单层透射式超表面的理论极限值.     

基于7.6μm量子级联激光的光声光谱探测N_2O气体

近年来,气候变化对地球的生态环境产生严重影响,而大气温室气体在气候变化中具有重要的作用.一氧化二氮(N_2O)作为一种重要的温室气体,其浓度变化对大气环境产生重要影响,因此对其浓度的探测在大气环境研究中具有重要意义.本文开展了基于中国自主研发的7.6μm中红外量子级联激光的共振型光声光谱探测N_2O的研究,建立了N_2O光声光谱传感实验系统.此系统在传统的光声光谱探测的基础上优化改进,采用双光束增强的方式,增加了有效光功率,进一步提高了系统的探测灵敏度.探测系统以1307.66 cm~(-1)处的N_2O吸收谱线作为探测对象,结合波长调制技术对N_2O气体进行探测研究.通过对一定浓度的N_2O气体在不同调制频率和调制振幅的光声信号的探测,确定了系统的最佳调制频率和调制振幅分别为800 Hz和90 mV.在最优实验条件下对不同浓度的N_2O气体进行了测量,获得了系统的信号浓度定标曲线.实验表明,在锁相积分时间为30 ms时,系统的浓度探测极限为150×10~(-9).通过100次平均后,系统噪声进一步降低,实现了大气N_2O的探测,浓度探测极限达到了37×10~(-9).     

Differential Helmholtz resonant photoacoustic cell for spectroscopy and gas analysis with room-temperature diode lasers

The results of theoretical and experimental studies and the design of a multi-purpose differential Helmholtz resonant photoacoustic detector (DHRD) and its applications to high-resolution spectroscopy of molecular gases and gas analysis with a room-temperature diode laser in the near-IR region are summarized. The series of experiments and numerical analysis of the DHRD sensitivity were performed for both types (single-pass and multi-pass) of DHRDs within a wide pressure range 0.1–101 kPa, including the regime of a gas flowing through a DHRD cell. The hardware and electronic arrangement of DHRDs for diode laser spectrometers and gas analyzers providing a limiting absorption sensitivity better than 10^-7 Wm^-1 are described. The results of measurements of spectral line parameters of H₂O near 800 and 1390 nm and CH₄ near 1650 nm (intensities, line broadening and shifting by atomic and molecular gases) are presented and discussed. The problems and the ways of perfection of the methodology and accuracy of DHRD techniques with tunable diode lasers of near-IR and visible spectral ranges are discussed. Received: 1 April 2002 / Revised version: 20 June 2002 / Published online: 21 August 2002 RID="*" ID="*"Corresponding author. Fax: +7/382-225-8026, E-mail: kvan@asd.iao.ru     

多艾里光束合成自聚焦光束的实验实现

多光束合成和单光束聚焦一直是提高激光束功率和功率密度的两个重要方法. 结合艾里光束在自由空间中沿弯曲路径传播的特性, 从数值模拟和实验两个方面, 研究了利用多个一维艾里光束合成自由空间自聚焦光束的方法, 并对所得到的模拟和实验结果进行了对比. 采用分步束传播法, 分别模拟了由四个和八个一维艾里光束合成的自聚焦光束在自由空间中的传播过程, 给出了自聚焦光束在传播过程中横向和纵向的光强分布和变化趋势. 采用计算全息和空间光调制器技术实验, 实现了多个一维艾里光束合成的自聚焦光束. 实验中分别测量了四个和八个一维艾里光束合成的自聚焦光束的横向光强分布. 实验结果和理论结果符合得较好. 另外, 为了进一步增大自聚焦光束的功率, 可以增加参与合成的一维艾里光束的数量. 同时, 自聚焦光束的焦距可以通过调整各个一维艾里光束的相对位置进行调节.     

Mechanisms of resonant laser ionization

An experimental investigation and numerical simulation of resonant laser breakdown are performed. As a result, quantitative agreement between the experimental data on the parameters of a dense resonant plasma (the electron density and the electron temperature) and the results of calculations in the range of detunings of the laser radiation from resonance Δλ>2–2.5 nm, in which the spatial instability of the intense resonant laser beam and the absorption of radiation are minimal, is obtained for the first time. It is shown that the previously proposed mechanism of resonant breakdown associated with laser-induced associative ionization introduces only a small correction to the final extent of ionization of the resonant plasma and scarcely alters its temperature. The influence of quantum stimulated inverse bremsstrahlung processes, which are usually described as collisions of the second kind in the resonance case, on the energy gain by electrons is analyzed for the first time in reference to specific experimental findings. The numerical calculations show that at detunings of the order of the Rabi frequency, the mechanism by which electrons gain energy through the resonant system does not reduce to collisions of the second kind and can significantly increase the density of the resonant plasma. However, in this range of detunings the laser beam is still strongly perturbed by instability processes, precluding a proper comparison of the theory with experiment. At large Δλ the classical and quantum cases differ from one another only slightly, and the values of N _e calculated for both mechanisms lie within the measurement error. Zh. éksp. Teor. Fiz. 111, 1274–1296 (April 1997)     

热声谐振管的实验研究

本文主要介绍作者热声谐振管研制方面的工作，作者成功地研制了热声谐振实验装置系统。     

面向谐振式微光学陀螺应用的球形谐振腔DQ乘积优化

基于谐振式光学陀螺高灵敏度、低成本与微型化的发展需求, 为了实现高灵敏度的谐振式微光机电陀螺, 提出了以集成光学微谐振腔领域里高Q值、大直径谐振腔的制作为目标, 应用方向为谐振式光学陀螺的球形光学微谐振腔核心敏感单元. 在实验中以氢火焰作为热源采用熔融法制备球形光学微谐振腔. 通过调节氢气的流量控制氢火焰热源面积, 制备了不同直径(300-2200 μm)的球形谐振腔, 分析了球形谐振腔Q 值、DQ乘积、陀螺灵敏度与谐振腔直径D的对应关系及其原因, 获得了最优参数的面向谐振式光学陀螺的球形谐振腔敏感单元. D=1260 μm时, 球腔品质因数 Q=7.18×10⁷, 得到的最优陀螺灵敏度约为10°/h, 满足商业级应用的需求, 为芯片级、高精度、低成本的新型谐振式光学微腔陀螺的研究奠定了实验基础.     

Interaction of a supersonic beam of toluene with a resonant RF electric field

Deflection of a cold supersonic toluene beam seeded in He has been observed when these molecules interact with both a static and a resonant oscillating electric field. The toluene beam splits into two beams each one peaking at a deflection angle of 1 degree towards the positive and negative direction of the Stark field when the employed resonant frequency between the two Stark levels of the toluene molecule is 1411 kHz. This deflection angle is about four orders of magnitude higher than the value one would expect from the toluene dipole moment and the employed RF field gradient. Different hypothesis are suggested to explain the observed strong beam splitting including the possibility of transverse beam interferences induced by both the resonant RF field and the transverse uniform electric field. A theoretical model is presented based on molecular beam interferences induced by the resonant RF field which seems to account satisfactorily for the present observations.