采用Al/TaN叠层电极提高Si基Ge PIN光电探测器的性能

金属与Ge材料接触由于存在强烈的费米钉扎效应, 导致金属电极与n型Ge接触引入较大的接触电阻, 限制了Si基Ge探测器响应带宽. 本文报道了在SOI衬底上外延Ge单晶薄膜并制备了不同台面尺度的Ge PIN光电探测器. 对比了电极分别为金属Al和Al/TaN叠层的具有相同器件结构的SOI基Ge PIN光电探测器的暗电流、响应度以及响应带宽等参数. 发现在Al与Ge之间增加一薄层TaN可有效减小n型Ge的接触电阻, 将台面直径为24 μ的探测器在1.55 μ的波 长和-1 V偏压下的3 dB响应带宽提高了4倍. 同时, 器件暗电流减小一个数量级, 而响应度提高了2倍. 结果表明, 采用TaN薄层制作金属与Ge接触电极, 可有效钝化金属与Ge界面, 减轻费米钉扎效应, 降低金属与n-Ge接触的势垒高度, 因而减小接触电阻和界面复合电流, 提高探测器的光电性能.     

金属与半导体Ge欧姆接触制备、性质及其机理分析

金属与Ge材料接触时界面处存在着强烈的费米钉扎效应, 尤其与n型Ge形成的欧姆接触的比接触电阻率高, 是制约Si基Ge器件性能的关键因素之一. 本文对比了分别采用金属Al和Ni 与Si衬底上外延生长的p型Ge和n型Ge材料的接触特性. 发现在相同的较高掺杂条件下, NiGe与n型Ge可形成良好的欧姆接触, 其比接触电阻率 较 Al接触降低了一个数量级, 掺P浓度为2×10¹⁹ cm^-3时达到1.43×10^-5 Ω·cm². NiGe与p型Ge接触和Al接触的比接触电阻率相当, 掺B浓度为4.2×10¹⁸ cm^-3时达到1.68×10^-5 Ω·cm². NiGe与n型Ge接触和Al电极相比较, 在形成NiGe过程中, P杂质在界面处的偏析是其接触电阻率降低的主要原因. 采用NiGe作为Ge的接触电极在目前是合适的选择. 关键词： 金属与Ge接触性质 NiGe 比接触电阻率     

MSM结构Mg0.2Zn0.8O可见盲光电探测器

采用射频磁控溅射,通过传统的紫外曝光和湿法腐蚀的方法,制备了不同电极间距的金属-半导体-金属(MSM)结构Mg0.2Zn0.8O可见盲光电探测器.研究了器件的暗电流和响应度随电极间距的变化关系,当施加的电压没有达到贯穿电压的时候,暗电流和响应度均随着电极间距的增加而减小,并对其具体的机制进行了研究.     

InGaAs-MSM光电探测器设计与仿真研究

对基于InGaAs材料体系的金属 半导体 金属（metal semiconductor metal,MSM）光电探测器进行设计,并对其暗电流、光电流、电容以及截止频率等性能参数进行仿真。通过添加InAlAs肖特基势垒增强层,将探测器的暗电流减小到了pA量级。仿真结果表明,探测器在光照下有明显的光响应,通过合理设计器件结构,探测器的工作频率可以达到1.5 THz。制备了探测器样品,并对其暗电流和光响应进行了测试,测试结果与仿真结果基本吻合。     

低暗电流InGaAs-MSM光电探测器

MSM(金属-半导体-金属)型光电探测器的较低寄生电容和高带宽的特点使得其应用广泛,可用于空间通信、遥感等多方面,但暗电流偏大仍是制约其发展的重要因素.为此,本文研制了100×100μm2面积的InGaAs-MSM光电探测器,通过设计InAlGaAs/InGaAs短周期超晶格和InAlAs肖特基势垒增强结构,将器件暗电流密度降至0.6pA/μm2(5V偏置),改善了目前同类器件的信噪比.对器件光电参数进行了表征:3dB带宽6.8GHz,上升沿58.8ps,1550nm波段响应度0.55A/W,光吸收区域外量子效率88%.分析了短周期超晶格和肖特基势垒增强层对暗电流的抑制机理.     

高性能SOI基GePIN波导光电探测器的制备及特性研究

本文报道了在SOI衬底上外延高质量单晶Ge薄膜并制备高性能不同尺寸Ge PIN波导光电探测器.通过采用原子力显微镜、X射线衍射、拉曼散射光谱表征外延Ge薄膜的表面形貌、晶体质量以及应变参数,结果显示外延Ge薄膜中存在约0.2%左右的张应变,且表面平整,粗糙度为1.12 nm.此外,通过暗电流、光响应度以及3 dB带宽的测试来研究波导探测器的性能,结果表明尺寸为4μm×20μm波导探测器在-1 V的反向偏压下暗电流密度低至75 mA/cm~2,在1.55μm波长处的响应度为0.58 A/W,在-2 V的反向偏压下的3 dB带宽为5.5 GHz.     

超薄介质插层调制的氧化铟锡/锗肖特基光电探测器

本文通过在氧化铟锡(indium tin oxide, ITO)透明电极和锗(germanium, Ge)之间引入超薄氧化物介质层以调节其接触势垒高度,制备出低暗电流、高响应度的锗肖特基光电探测器.比较研究了采用不同种类介质Al_2O_3和MoO_3,以及不同掺杂浓度的锗和硅衬底上外延锗材料制作的ITO/Ge肖特基二极管特性.发现2 nm厚的Al_2O_3插层可有效提高ITO与n-Ge和i-Ge的接触势垒高度,而MoO_3插层对ITO与不同Ge材料的接触势垒高度影响不明显. ITO/Al_2O_3/i-Ge探测器由于其增大的势垒高度表现出性能最佳,暗电流(–4 V)密度低至5.91 mA/cm~2, 1310 nm波长处光响应度高达4.11 A/W.而基于硅基外延锗(500 nm)材料制作的ITO/Al_2O_3/Ge-epi光电探测器的暗电流(–4 V)密度为226.70 mA/cm~2, 1310 nm处光响应度为0.38 A/W.最后,使用二维位移平台对ITO/Al_2O_3/i-Ge光电探测器进行了单点成像实验,在1310 nm, 1550 nm两个波段得到了清晰可辨的二维成像图.     

电极间距对ZnO基MSM紫外光电探测器性能的影响

利用金属有机物化学气相沉积法在蓝宝石衬底上制备了ZnO薄膜。利用Au电极,在ZnO薄膜上制备电极间距不同的金属-半导体-金属结构紫外光电探测器。发现随着电极间距从150μm降至5μm,探测器响应度呈现出从15 mA/W到75 mA/W的明显提高。同时,随着电极间距的减小,器件的I-V曲线线形发生了显著改变。这被归结为电极间距变化改变了器件耗尽区宽度和电极间电阻造成的结果。     

p-i-nInP/In_(0.53)Ga_(0.47)As/InP探测器结构优化

利用半导体仿真工具Silvaco对p-i-n InP/In_(0.53)Ga_(0.47)As/InP近红外光探测器进行优化仿真.参考实际器件对红外探测器进行建模,并将其暗电流、光谱响应仿真结果与实验结果进行拟合,保证仿真结果的有效性.以减小探测器的暗电流为目的,优化其结构.针对探测器吸收层厚度和吸收层掺杂浓度对暗电流、光响应的影响进行研究,发现当吸收层厚度大于0.3μm后,暗电流不再上升,但光响应随着吸收层厚度的增加而增大;当吸收层掺杂浓度不断上升时,器件暗电流不断降低,当掺杂浓度上升到2×1017/cm3时,暗电流达到最低值.本文还研究了p-i-n型探测器的瞬态响应,探究了响应速度与反偏电压之间的关系,发现提高反偏电压能减小探测器响应时间.     

ZnO基紫外探测器的制作与研究

利用新型的等离子体辅助金属有机化学气相沉积(P-MOCVD)系统在蓝宝石、硅等衬底上生长出具有单一c轴取向、高阻的ZnO薄膜,利用添加的等离子体发生装置,进行氮掺杂获得高阻ZnO薄膜。利用ZnO的宽禁带与高光电导特性,结合MSM(金属-半导体-金属)结构器件响应度高、速度快、随偏压变化小、工艺简单、易于单片集成等优点,制作了ZnO基紫外探测器,器件规格为80 μm×100μm,电极为叉指式电极。测试中采用500 W的氙灯做测试光源,探测器的Ⅰ-Ⅴ特性曲线显示;正向偏压下探测器的暗电流及光照电流与外加偏压呈线性增长。不同波长下的响应曲线显示:探测器对紫外波段有响应,响应峰值在375nm附近。     

Electron scattering from 70Ge and 72Ge

Cross sections have been measured for the elastic and inelastic scattering of electrons from ⁷⁰Ge and ⁷²Ge for momentum transfers from 0.65 to 1.14 fm^?1. Values for the parameters of a Fermi type ground-state charge distribution were obtained from a phase shift analysis of the elastic cross sections. The rms charge radius corresponding to these parameters is 4.07±0.02 fm for ⁷⁰Ge and 4.05±0.03 fm for ⁷²Ge. Using DWBA analysis the reduced transition probabilities for the electroexcitation of the 2₁⁺ and 3₁^? states were found to be: B(E2, ω)↑ = 19.7±1.2, 26.8±2.0 W.u.; B(E3, ω)↑ = 36±5, 37±7 W.u. for ⁷⁰Ge and ⁷²Ge respectively. The J^π = 3^? assignments for the state at 2.562 MeV in ⁷⁰Ge and 2.515 MeV in ⁷²Ge are confirmed.     

锗团簇Ge65, Ge70, Ge75的稳定结构及其电子结构性质

将两种全局结构搜索方法(压缩液态法、遗传算法)与锗的紧束缚势模 型相互结合, 对Ge₆₅, Ge₇₀, Ge₇₅的稳定结构进行了大规模的搜寻,提 出能量较低的可能结构, 然后进一步利用第一性原理方法对这些低能结构进行精确 的优化计算, 确定出了这三种尺寸团簇的基态结构. 发现这三种团簇各具有两种稳定的并且能量相近的异构体: 类球形和类椭球形, 这与实验上报道的大尺寸团簇Ge_n (65 ≤ n ≤ 80) 的结构特征相符合. 简要地分析了这三种团簇基态结构的电子性质. 关键词： 锗团簇 紧束缚势 遗传算法 压缩液态法     

Regrowth kinetics of amorphous Ge layers created by 74Ge and 28Si implantation of Ge crystals

Epitaxial regrowth of ion-implanted amorphous Ge on the underlying crystal substrate occurs between 300 to 400°C with an activation energy of 2.0 eV and a rate of 100Å/min on <100> Ge at 350°C. The regrowth rate is strongly dependent on the orientation of the underlying Ge crystal. The regrowth behavior of amorphous Ge is similar to that of implanted amorphous Si.     

Phonons in Ge/Si superlattices with Ge quantum dots

Ge/Si superlattices containing Ge quantum dots were prepared by molecular beam epitaxy and studied by resonant Raman scattering. It is shown that these structures possess vibrational properties of both two-and zero-dimensional objects. The folded acoustic phonons observed in the low-frequency region of the spectrum (up to 15th order) are typical for planar superlattices. The acoustic phonon lines overlap with a broad emission continuum that is due to the violation of the wave-vector conservation law by the quantum dots. An analysis of the Ge and Ge-Si optical phonons indicates that the Ge quantum dots are pseudoamorphous and that mixing of the Ge and Si atoms is insignificant. The longitudinal optical phonons undergo a low-frequency shift upon increasing laser excitation energy (2.54–2.71 eV) because of the confinement effect in small-sized quantum dots, which dominate resonant Raman scattering.     

Magnetoluminescence of Ge/Ge1−x Six heterostructures

This paper reports on the first investigation made of luminescence of Ge/Ge_1−x Si_x heterostructures at liquid-helium temperatures in a magnetic field of up to 14 T. The luminescence lines observed in the spectra are due to both free and impurity bound excitons in Ge layers. The diamagnetic shift of the quasi-two-dimensional exciton has been measured. From the experimental data the size of the exciton has been estimated to be 75–90 Å. Zh. éksp. Teor. Fiz. 114, 619–627 (August 1998)     

Compton profile study of V3Ge and Cr3Ge

In this paper the results of a Compton profile study of two polycrystalline A15 compounds, namely, V₃Ge and Cr₃Ge, have been reported. The measurements have been performed using 59.54 keV γ-rays from an ²⁴¹Am source. The theoretical Compton profiles have been computed for both the compounds using ab-initio linear combination of atomic orbitals (LCAO) method employing CRYSTAL98. For both the A15 compounds, the isotropic experimental profiles are found to be in good overall agreement with the calculations. The comparison points out residual differences in V₃Ge whereas for Cr₃Ge the differences are within experimental error. The behaviour of valence electrons in the two iso-structural compounds has been examined on the scale of Fermi momentum. The valence electron distribution seems to be dominated by the metallic constituents rather than Ge and two compounds show covalent nature of bonding which is larger in V₃Ge compared to Cr₃Ge.      

Ellipsometry studies of Si/Ge superlattices with embedded Ge dots

In this paper, we present an analysis for treating the spectroscopic ellipsometry response of Si/Ge superlattices (SLs) with embedded Ge dots. Spectroscopic ellipsometry (SE) measurement at room temperature was used to investigate optical and electronic properties of Si/Ge SLs which were grown on silicon (Si) wafers having 〈111〉 crystallographic orientation. The results of the SE analysis between 200 nm and 1000 nm indicate that the SL system can effectively be described using an interdiffusion/intermixing model by assuming multicrystalline Si and Si_1?x Ge _x intermixing layers. The electronic transitions deduced from the analysis reveal Si-, Ge- and alloying-related critical energy points.