KDP晶体飞切加工表面缺陷的抑制方法

研究了磷酸二氢钾(KDP)晶体表面典型缺陷的形成原因及抑制方法。通过飞切加工及表面染色切削实验证明了成因分析结果的正确性,进一步明确了KDP晶体表面缺陷的形成过程。建立了适用于描述KDP晶体表面缺陷形成过程的理论模型,提出了获得无缺陷晶体表面的工艺条件。对飞切加工参数及刀具结构进行了优化,实验验证了缺陷抑制措施的有效性。研究结果表明,在飞切条件下,KDP晶体(001)晶面的脆塑转变(BDT)深度变化范围为125～268 nm,当沿45°方向切削时BDT深度最大,此时只要保证进给速率小于36.6μm/r即可避免在晶体表面形成凹坑。通过优化刀具结构,可消除晶体表面的凸起缺陷,有效抑制KDP晶体的表面缺陷,最终获得了粗糙度小于2 nm的光滑KDP晶体表面。     

KDP晶体单点金刚石车削表面形貌分形分析

 分别使用2维和3维分形方法对单点金刚石车削加工的KDP晶体表面形貌进行了分析，并对表面的3维分形维数和3维粗糙度表征参数进行了比较，分析了二者对表面形貌表征的差异。使用2维轮廓分形方法计算了KDP晶体表面圆周各方向上的分形维数。通过分析得出：3维分形维数与表面粗糙度值成反比关系；使用单点金刚石车削方法加工KDP晶体会形成各向异性特征明显的已加工表面，在一定程度上容易形成小尺度波纹；已加工表面是否具有明显的小尺度波纹特征与表面粗糙度值并无直接关系，但与其表面轮廓分形状态分布密切相关；KDP晶体表面2维功率谱密度与其分形状态具有相近的方向性特征。     

光学工艺 光学加工工艺与设备

TQ171．683 2005053948 KDP晶体塑性域超精密切削加工过程仿真=Simulation of ultra-precision cutting process of KDP crystal in ductile mode[刊,中]／陈明君(哈尔滨工业大学精密工程研究所． 黑龙江,哈尔滨(150001)),王景贺…∥光电工程．-2005, 32(5)．-69-72 提出了压痕实验与有限元仿真结合的方法。它采用 压痕深度与有限元仿真深度进行对比,可求解出KDP晶 体的塑性特性参数。建立了KDP晶体塑性域切削的有限 元模型,仿真研究了切削参数对KDP晶体表面形成过程 的影响。结果表明,在刀具前角为-40°左右时,工件表面 质量可达到最佳值。研究还发现,当刀具刃口半径为80 nm时,其能够产生切屑的最小切削厚度在10～30 nm之 间,此时法向切削力与主切削力之比为0．96,该结论对 KDP晶体超光滑表面的获取有着重要指导意义。图6参 6(严寒)     

KDP晶体金刚石车削参数对晶体雾化的影响

安装在高功率激光系统中的KDP晶体,其表面质量是一个很重要的问题。单点金刚石车削是唯一获得透射波前误差和激光损伤阈值的方法,尤其是在紫外UV波段。KDP晶体表面雾化与金刚石车削参数有关。研究金刚石车削参数主要是为了提高KDP晶体的频率转化效率。研究结果表明,在金刚石切削中使用一种纯净的切削油和适宜的加工参数能大大地减少晶体表面的雾化。     

单点金刚石飞切KDP晶体表面缺陷深度的研究

基于印压断裂力学理论分析了磷酸二氢钾晶体表面缺陷面积与中位裂纹深度的关系.在刀具参量和主轴转数一定的情况下,采用不同切削深度和进给速率对磷酸二氢钾晶体进行单点金刚石飞切加工实验,并计算晶体表面单位面积缺陷的占比系数.实验结果表明,晶体表面缺陷深度与面积占比系数成正相关,与理论分析结果相符,进而提出了利用计算晶体表面缺陷占比系数估测缺陷深度的方法.最后基于该方法得到高效率切削步骤,并加工获得了表面粗糙度算术平均值优于5nm的超光滑晶体表面.     

KDP光学零件超精密车削加工误差的频谱特性与控制

超精密车削技术适于加工KDP(磷酸二氢钾)等频率转换类型的强光光学零件,但车削表面存在明显的加工纹理,导致抗激光损伤阈值降低。以加工表面误差幅值及其频谱分布为对象,分析了KDP光学零件超精密车削的加工特征和误差形态,采用功率谱密度(PSD)评价方法研究了工艺参数与误差频谱的内在关系,结果表明:不同进给速度及主轴转速将使螺旋形刀痕的间距发生变化,进而影响KDP表面误差的频率成分;切削深度虽然对误差频谱影响很小,但会改变PSD的幅值;当主轴转速高于500 r/min、进给速度小于2 mm/min、切削深度小于2 μm时能够加工出rms值优于20 nm的KDP面形。在此基础上,以典型KDP光学零件加工为例,通过超精密补偿车削方法将低频误差的PSD控制在300 nm2·mm以内,中高频误差的PSD控制到国家点火装置(NIF)标准线以下,满足强光系统的工作要求。     

加工误差引入的薄型KDP晶体附加面形

针对惯性约束聚变（ICF）驱动装置中口径为400 mm400 mm薄型频率转换KDP晶体在45放置状态下产生的附加面形问题,采用有限元分析软件ANSYS,建立了以实测数据为基础的大口径薄型KDP晶体的应变模型和有加工误差的夹具模型,仿真分析了KDP晶体的加工误差和夹具的加工误差对KDP晶体附加面形的影响, 给出了KDP晶体附加面形变化的P-V值和RMS值。在此基础上,通过对KDP晶体的加工误差及夹具支撑表面不同类型和不同大小加工误差的分析和比较,得出:KDP晶体边缘的加工误差和夹具支撑表面的凹型加工误差是引起较大附加面形的原因之一,KDP晶体的加工误差也会导致其面形变化不均匀,而夹具支撑表面的凸型、波浪形加工误差和压条表面的随机加工误差对KDP晶体附加面形的影响相对较小,且支撑表面的随机加工误差引起的附加面形变化介于其他两者之间。     

KDP晶体微纳米加工表层缺陷对其激光损伤阈值的影响

使用有限元方法分析了在激光辐照条件下,KDP晶体已加工表面存在的残余内应力、微裂纹及微孔等多种微纳米加工表层缺陷对晶体激光损伤阈值的影响。通过分析发现:KDP晶体微纳米加工表层缺陷的存在,会影响晶体表面的温度场及热应力场的分布,使入射激光的能量积聚在缺陷附近的很小范围内,造成晶体缺陷处产生局部熔融现象,从而使KDP晶体产生损伤,降低KDP晶体的激光损伤阈值。针对微纳米表层的微裂纹进行了损伤阈值测试实验,结果表明微裂纹的存在会降低KDP晶体的激光损伤阈值(约降低3J/cm2),实验结果与仿真结果符合得很好。     

基于傅里叶模方法的KDP晶体镀膜减反技术

 采用傅里叶模方法,分析了单点金刚石铣削后KDP晶体表面小尺度波纹的周期和幅值对单层增透膜折射率、厚度以及透射率的影响。研究表明：膜层最佳折射率在1.22左右,在此折射率条件下,保证透射率大于99%的单层增透膜的理想厚度范围应为180~220 nm,并且折射率和膜厚值的选取基本不受晶体表面小尺度波纹周期和幅值的影响。若只考虑SPDT法加工后KDP晶体表面小尺度波纹周期和幅值的实际范围,透射率基本不受波纹周期的影响,但却会随波纹幅值的增大而加速下降。理想镀膜条件下透射率最大值大于99%,并且通常在99.67%~99.94%之间。     

KDP晶体相位匹配角理论预测模型及其验证分析

在高功率固体激光器的终端光学组件内, 大口径薄型KDP (KH₂PO₄)晶体的精密装配和校准是实现惯性约束核聚变的关键技术之一. 为了达到晶体在线安装高效高精度的要求, 需要测量高功率激光三次谐波转换效率达到最高时的晶体相位匹配角分布. 本文针对Ⅰ/Ⅱ类大口径薄型KDP晶体三次谐波转换的方式, 根据晶体的非线性光学属性获得了晶体不同位置相位匹配角之间的关系; 根据激光束在晶体内的传输路径分析得到了晶体面形、相位匹配角与激光三次谐波转换效率达到最高时 晶体最佳偏转角之间的相互关系. 在此基础上, 建立了Ⅰ/Ⅱ类KDP晶体相位匹配角的理论预测模型, 并利用实验进行了验证和分析. 实验结果表明, 晶体相位匹配角的预测值与实验值之差在10.0 μrad以内, 验证了Ⅰ/Ⅱ类KDP晶体相位匹配角理论预测模型的正确性, 为获得晶体全口径相位匹配角分布提供了简单、高效的预测方法.     

Modification of three dimensional topography of the machined KDP crystal surface using wavelet analysis method

The wavelet analysis method has been extensively employed to analyze the surface structures and evaluate the surface roughness. In this work, however, the wavelet analysis method was introduced to decompose and reconstruct the sampled surface profile signals in the cutting direction that achieved by SPDT (single point diamond turning) operation, and the surface profile signals in tool feeding direction were reconstructed with the approximate harmonic functions directly. And moreover, the orthogonal design method, i.e. the combination design of general rotary method, was resorted to model the variations of the independent frequency and amplitude of different simulated harmonic signals in the cutting and tool feeding directions. As expected resultantly, a novel 3D surface topography modeling solution was established, which aims to predict and modify the finished KDP (potassium dihydrogen phosphate or KH₂PO₄) crystal surfaces. The validation tests were carried out finally under different cutting conditions, and the collected average surface roughness in any case was compared with the corresponding value as predicted. The results indicated the experimental data were well consistent with the predictions, and only an average relative error of 11.4% occurred in predicting the average surface roughness.     

切削参数对KDP晶体加工表面实际频率特征的影响

针对采用单点金刚石超精加工的KDP晶体光学表面,研究了切削参数对微观形貌频率特征的影响。通过功率谱密度获得表面轮廓频率分布,并用连续小波重构加工过程中随切削用量变化的微观轮廓频率特征。结果表明:切削参数对微观形貌的影响具体表现在实际频率特征上,中频特征波长及幅值反映了切深及转速变化,随切深及转速增加,幅值变大;低频特征反映了进给量变化,随着进给量变小,频率及幅值变小;高频特征是加工过程中振动及材料各向异性的具体表现。     

Laser cutting of polymeric materials: An experimental investigation

The CO₂ laser cutting of three polymeric materials namely polypropylene (PP), polycarbonate (PC) and polymethyl methacrylate (PMMA) is investigated with the aim of evaluating the effect of the main input laser cutting parameters (laser power, cutting speed and compressed air pressure) on laser cutting quality of the different polymers and developing model equations relating input process parameters with the output. The output quality characteristics examined were heat affected zone (HAZ), surface roughness and dimensional accuracy. Twelve sets of tests were carried out for each of the polymer based on the central composite design. Predictive models have been developed by response surface methodology (RSM). First-order response models for HAZ and surface roughness were presented and their adequacy was tested by analysis of variance (ANOVA). It was found that the response is well modeled by a linear function of the input parameters. Response surface contours of HAZ and surface roughness were generated. Mathematical model equations have been presented that estimate HAZ and surface roughness for various input laser cutting parameters. Dimensional accuracies of laser cutting on polymers were examined by dimensional deviation of the actual value from the nominal value. From the analysis, it has been observed that PMMA has less HAZ, followed by PC and PP. For surface roughness, PMMA has better cut edge surface quality than PP and PC. The response models developed can be used for practical purposes by the manufacturing industry. However, all three polymeric materials showed similar diameter errors tendency in spite of different material properties.     

Dual-wavelength laser polarimeter and its performance capabilities

A dual-wavelength optical polarimetric approach has been proposed as a means of elimination of the systematic errors and estimation of the optical anisotropy parameters for a single DKDP crystal. Our HAUP-related polarimeter uses two semiconductor lasers with the neighbouring wavelengths of 635 nm and 650 nm. Based on the temperature dependence analysis of small characteristic azimuths of light polarization with respect to the axis of the sample, we found the parameters of imperfections of polarization system. We acquired eigen waves ellipticities in a DKDP crystal and found perpendicular to the optic axis value of the optical rotatory power. Our results correlate positively with previously measured data for KDP crystals.     

Optimized laser cutting on light guide plates using grey relational analysis

This paper present the optimum conditions for direct CO₂ laser cutting of 6-mm-thick polymethylmethacrylate (PMMA) for backlit module applications. The influence of the major processing parameters on the optical transmittance ratio and surface roughness of cut samples material have been discussed. In order to assess the effects of several operational parameters on multiple-performance characteristics, we applied the grey relational analysis method. In this paper, we studied the effects of several laser direct cut parameters, such as assisted gas-flow rate, pulse repetition frequency, cutting speed, and focus position to achieve optimum characteristics for two product characteristics, optical transmittance ratio and work-piece surface roughness. The study involved nine experiments based on an orthogonal array, and results indicate the optimal process parameters as 20 NL/min for assisted-gas flow rate, 5 kHz for pulse repetition frequency, 2 mm/s for cutting speed, and 0 mm for laser focusing position. Additionally, by analyzing the grey relational grade, we found that the assisted-gas flow rate has more influence than any other single parameter.