叠层相干衍射成像算法发展综述

随着同步辐射技术的发展和光源相干性的提升,叠层相干衍射成像(ptychography)得到快速发展.叠层相干衍射成像算法解决了传统相干衍射成像算法收敛速度较慢、容易陷入局部最优解和算法停滞等问题,具有成像视场大、算法鲁棒性强、对误差容忍性高、应用范围广等优点,正成为相干衍射成像领域的热点研究方向.本文首先介绍了叠层相干衍射成像算法提出的背景;然后详细总结了叠层相干衍射成像算法的发展脉络、主要的算法流程以及应用场景,并且介绍了叠层相干衍射成像与人工智能结合的新算法及应用潜力;最后介绍了叠层相干衍射成像算法具体的并行化实现及常用软件包.本文有助于建立叠层相干衍射成像领域算法本身、人工智能以及计算方法全局研究视角,对于促进叠层相干衍射成像方法学的系统发展具有重要的参考意义.     

上海光源硬X射线相干衍射成像实验方法初探

相干X射线衍射成像方法是一种先进的成像技术,分辨率可达纳米量级.国际上大多数的同步辐射装置和自由电子激光装置都建立了该成像方法,并有将其作为主要成像技术的趋势.上海光源作为目前国内唯一的一台第三代同步辐射光源,尚未建立基于硬X射线的相干衍射成像实验平台.随着一批以波荡器为光源的光束线站投入使用,使得该方法的建立成为了可能.本文基于上海光源BL19U2生物小角散射线站,通过有效的光路设计,搭建了相干衍射实验平台,在12 keV和13.5 keV能量点均获得了硬X射线相干光束,并基于小孔衍射测量了入射光束的空间相干长度.该平台支持常规和扫描相干衍射实验模式,对小孔衍射图样及波带片扫描衍射图样实现了正确的相位重建,证明了该平台初步具备开展硬X射线相干衍射成像实验的能力.硬X射线相干衍射成像实验平台为国内首次建立,将为国内该实验方法的发展和应用提供有效的软硬件支持.     

扫描相干衍射成像背景噪声分离算法研究

X射线扫描相干衍射成像(ptychography)是一种新型的无透镜成像方法,摆脱了传统透镜成像中聚焦元件对分辨率的限制,使理论分辨率只受到X射线波长和探测器数值孔径的限制.然而实验测量中的噪声限制了该方法对成像质量的改善,甚至最终导致图像重建失败.在研究了ptychography现有的相位恢复迭代算法后,本文提出了一种新型的图像重建迭代算法.该算法利用ptychography数据的高冗余性,通过梯度下降最小化技术,在重建样品和探针图像的同时还完成了背景噪声的同步迭代重建,实现了信号和噪声的盲分离功能.通过仿真模拟和实验数据重建,将该方法与传统的迭代算法进行了对比,结果表明新算法能够较好地实现信噪分离,显著提升ptychography的成像质量.     

相干衍射成像的相位复原及重建

相干衍射成像是一种对材料体密度敏感的超高分辨成像技术。相较于传统表面敏感的超高分辨成像技术,相干衍射成像利用了硬X射线的强穿透能力,可以深入材料体内部进行成像,且成像分辨能力可以根据成像布局进行调整,最高达到原子级空间分辨能力。这种灵活的空间分辨调整依赖于相干衍射成像独特的相位复原技术,即通过对图像成像强度的过采样,利用含约束的迭代算法同时获得光场的强度及相位,进而对样品进行重建;同时结合图像定向及组合技术,相干衍射成像可以实现对样品的三维重建。本文主要从成像原理、复原算法和重建方法介绍相干衍射成像技术,并结合实验进展及模拟研究展示该技术在多种重建情形下具备的诊断能力,以期较为全面地给出相干衍射成像技术的发展趋势。     

相干X射线衍射成像三维重建的数字模拟研究

利用相干X射线衍射成像“过采样”采集样品的远场相干衍射图样, 结合相位重建迭代算法重建物空间样品信息. 三维重建过程中, 边界约束条件是相位重建算法中最为关键的部分. 本文采用数字模拟的方法, 利用灰度值图像作为物空间的样品, 研究并实现了边界条件的自动寻找, 重建结果显示比以往采用较“松”的边界约束更为精确. 利用噪声模拟方法, 研究了衍射图样中不同噪声类型的滤除对重建结果的影响. 研究发现传统的去噪方法在高噪声情况下不能直接应用于相干X射线衍射成像, 并找到了适用于相干X射线衍射成像噪声滤除的有效方法. 研究表明, 此方法能非常有效地降低噪声对重建结果的影响. 利用模拟三维纳米金颗粒作为样品, 完成了对纳米金颗粒中电子密度分布的三维重建, 在有随机噪声的影响下, 也得到了很好的重建结果, 并找到了成功实现三维重建的噪声限为信噪比不低于27. 关键词： X射线相干衍射成像 过采样 三维相位重建 显微成像     

基于FDTD的高深宽比沟槽结构低相干显微干涉信号仿真分析

低相干垂直扫描干涉技术是微结构形貌特征参数无损检测的有效手段。但当微结构的沟槽深宽比高于5∶1时,遮挡效应以及阶跃边缘复杂的衍射效应会导致本应仅包含一个包络的垂直扫描测量干涉信号异常,形成两个甚至多个包络,继而影响形貌检测结果。本文解析低相干垂直扫描干涉的测量过程,采用时域有限差分法对低相干显微干涉测量系统的显微成像、相干扫描测量过程进行数值仿真,计算待测微结构表面返回场及显微成像后的像面干涉场,得到低相干显微干涉信号。分别仿真了深宽比为5∶1、80∶3的硅基沟槽微结构的干涉信号,并与实验室自研的Linnik型低相干垂直扫描干涉系统对沟槽微结构的检测信号进行对比,匹配其高深宽比沟槽结构干涉信号的双包络及幅频双峰性的特征,验证所提方法的准确性。该仿真方法可应用于实测前对被测结构低相干显微干涉信号的先验性仿真计算,通过提前分析信号特征,为形貌复原算法的选取及改进指引优化方向。     

多波长同时照明的菲涅耳域非相干叠层衍射成像

传统的叠层衍射成像往往采用单波长照明,即使使用多波长来提升恢复质量也是采用依次照明的方式,同时对相干性要求很高.非相干光照明一直被认为不利于衍射成像.本文提出了一种多波长同时照明的非相干叠层衍射成像方案及相应的多路复用叠层衍射成像算法,并通过仿真和实验验证了该方案的可行性.相比于传统的相干叠层衍射成像方案,该方案不仅能够很好地恢复物像,同时也能够恢复不同波长下分别对应的物体的光谱响应、复振幅探针和光谱比例,从而获得更多的物体信息,具有多通道和多光谱的优势.同时,通过彩色图像编码的方式,能够实现物体的真彩色复原和图像质量的增强.此外,还证明了该算法具有很强的鲁棒性,研究了最多可分辨波长的数量.该研究结果为叠层衍射成像技术的信息多路复用及多光谱成像在更多领域的应用展现了可能性.     

相干X射线衍射成像技术及在材料学和生物学中的应用

无损获取高分辨率、高衬度微纳米材料结构图像,并能够原位、定量分析是X射线成像技术发展方向之一.最新发展起来的相干X射线衍射成像技术,也称为无透镜成像技术,为实现这一目标提供了可能.本文介绍了相干X射线衍射成像技术的成像原理和发展过程,以及在材料学和生物学中的一些典型应用和最新进展,例如掺杂铋元素在硅晶体中的分布成像,GaN量子点壳层结构的三维高分辨成像,染色大肠杆菌的二维成像,鱼骨的二维成像及矿化机理研究,单个未染色疱疹病毒的二维高衬度成像,未染色酵母菌细胞的三维高分辨成像及原位定量分析.最后对相干X射线衍射成像技术的发展方向做了展望.随着X射线自由电子激光的应用和冷冻技术与相干X射线衍射成像技术的结合,相干X射线衍射成像技术将得到快速的发展和广泛的应用.     

多模干涉耦合器中重叠像相干相消现象分析

根据多模干涉耦合器的自映像原理和重叠成像的规律, 首次提出多模干涉耦合器中存在重叠像相干相消现象, 推导了重叠像相干相消现象出现的条件. 在此基础上, 对对称干涉和成对干涉两种特殊重叠成像做出解释, 得出对称干涉和成对干涉成像个数及成像位置的表达式. 用实例证明了重叠像相干相消现象并不只存在于成对干涉和对称干涉两种特殊情况, 并总结了重叠像相干相消随位置数变化的规律. 用导模传输分析法验证了所得表达式和成像规律的正确性. 关键词： 集成光学 多模干涉耦合器 相干相消 导模传输分析法     

相干X射线衍射成像的数字模拟研究

相位重建是实现X 射线相干衍射成像的关键, 它利用远场采集的样品傅里叶相干衍射花样、结合过采样理论,再采用迭代算法复原样品的相位信息. 文中采用数字模拟的方法, 利用小尺寸二维非周期性图形作为物场, 研究了过采样比对重构结果的影响, 研究发现, 迭代次数为1000 次时最佳过采样比的范围是3—7 之间. 利用噪声模拟方法, 研究了噪声对相位重建的影响, 找到了完成相位重建的噪声限是信噪比不能低于10. 分析了重构结果中孪生像以及随机平移的产生原因, 并给出了相应的解决办法, 结果表明, 此方法可有效地提高重构图像的质量. 关键词： 相干X射线衍射成像 过采样 相位重建算法 显微成像     

Atom-scale ptychographic electron diffractive imaging of boron nitride cones

Ptychographic coherent diffractive imaging (CDI) has been extensively applied using both x rays and electrons. The extension to atomic resolution has been elusive. This Letter demonstrates ptychographic electron diffractive imaging at atomic resolution, permitting identification of structure in a boron nitride helical cone at a resolution of order 1 ?, beyond that of comparative Z-contrast images. A scanning transmission electron microscope is used to create a diverging illumination in a defocused Fresnel CDI geometry, providing a robust strategy leading to a unique solution.     

Phase-diverse coherent diffractive imaging: high sensitivity with low dose

This Letter demonstrates that coherent diffractive imaging (CDI), in combination with phase-diversity methods, provides reliable and artefact free high-resolution images. Here, using x rays, experimental results show a threefold improvement in the available image contrast. Furthermore, in conditions requiring low imaging dose, it is demonstrated that phase-diverse CDI provides a factor of 2 improvement in comparison to previous CDI techniques.     

Versatility of a hard X‐ray Kirkpatrick–Baez focus characterized by ptychography

In the past decade Kirkpatrick–Baez (KB) mirrors have been established as powerful focusing systems in hard X‐ray microscopy applications. Here a ptychographic characterization of the KB focus in the dedicated nano‐imaging setup GINIX (Göttingen Instrument for Nano‐Imaging with X‐rays) at the P10 coherence beamline of the PETRA III synchrotron at HASLYLAB/DESY, Germany, is reported. More specifically, it is shown how aberrations in the KB beam, caused by imperfections in the height profile of the focusing mirrors, can be eliminated using a pinhole as a spatial filter near the focal plane. A combination of different pinhole sizes and illumination conditions of the KB setup makes the prepared optical setup well suited not only for high‐resolution ptychographic coherent X‐ray diffractive imaging but also for moderate‐resolution/large‐field‐of‐view propagation imaging in the divergent KB beam.     

Scanning-Position Error-Correction Algorithm in Dual-Wavelength Ptychographic Microscopy

We propose a new algorithm for the error correction of scanning positions in ptychographic microscopy. Since the scanning positions are varied mechanically by moving the illuminating probes laterally, the scanning errors will accumulate at multiple positions, greatly reducing the reconstruction quality of a sample. To correct the scanning errors, we use the correlation analysis for the diffractive data combining with the additional constraint of dual wavelengths. This significantly improves the quality of ptychographic microscopy. Optical experiments verify the proposed algorithm for two samples including a resolution target and a fibroblast.     

Framework for three-dimensional coherent diffraction imaging by focused beam x-ray Bragg ptychography

We present the framework for convergent beam Bragg ptychography, and, using simulations, we demonstrate that nanocrystals can be ptychographically reconstructed from highly convergent x-ray Bragg diffraction. The ptychographic iterative engine is extended to three dimensions and shown to successfully reconstruct a simulated nanocrystal using overlapping raster scans with a defocused curved beam, the diameter of which matches the crystal size. This object reconstruction strategy can serve as the basis for coherent diffraction imaging experiments at coherent scanning nanoprobe x-ray sources.     

A general phase retrieval algorithm based on ptychographicaliterative engine for coherent diffractive imaging

Coherent diffractive imaging (CDI) is a lensless imaging technique and can achieve a resolution beyond the Rayleigh or Abbe limit. The ptychographical iterative engine (PIE) is a CDI phase retrieval algorithm that uses multiple diffraction patterns obtained through the scan of a localized illumination on the specimen, which has been demonstrated successfully at optical and X-ray wavelengths. In this paper, a general PIE algorithm (gPIE) is presented and demonstrated with an He-Ne laser light diffraction dataset. This algorithm not only permits the removal of the accurate model of the illumination function in PIE, but also provides improved convergence speed and retrieval quality.     

A general phase retrieval algorithm based on a ptychographical iterative engine for coherent diffractive imaging

Coherent diffractive imaging (CDI) is a lensless imaging technique and can achieve a resolution beyond the Rayleigh or Abbe limit. The ptychographical iterative engine (PIE) is a CDI phase retrieval algorithm that uses multiple diffraction patterns obtained through the scan of a localized illumination on the specimen, which has been demonstrated successfully at optical and X-ray wavelengths. In this paper, a general PIE algorithm (gPIE) is presented and demonstrated with an He-Ne laser light diffraction dataset. This algorithm not only permits the removal of the accurate model of the illumination function in PIE, but also provides improved convergence speed and retrieval quality.     

Optical image encryption based on coherent diffractive imaging using multiple wavelengths

Coherent diffractive imaging is an optical technique in which the information of an object is encoded in the diffraction intensity using a single-path wave propagation strategy. In recent years, coherent diffractive imaging has attracted much attention in many fields due to its marked advantages, such as robustness to vibration and the suitability for various wavelengths. In this paper, we propose to apply coherent diffractive imaging using multiple wavelengths for optical image encryption. A light wavelength is tuned during the encryption, and a series of diffraction intensity maps (i.e., ciphertexts) is sequentially recorded in the Fresnel domain. During image decryption, an iterative retrieval algorithm is further developed, and cryptosystem security and robustness of the proposed method are also analyzed. Numerical simulation results are presented to demonstrate feasibility and effectiveness of the proposed method.     

基于光栅分光法的相干衍射成像

提出一种可以通过单次曝光实现 PIE(ptychographic imaging engine)成像的方法, 该方法用正交光栅将入射细光束衍射为传播方向不同的子光束簇以对样品进行照明, 并用CCD同时记录各个子光束所形成的衍射光斑阵列. 该方法很好地克服了现有PIE方法的成像质量易受机械扫描误差影响和数据采集时间过长两个缺点, 具有很好的实用价值. 关键词： 相干衍射成像 相位恢复 显微成像 迭代算法