共查询到18条相似文献,搜索用时 453 毫秒
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三维显微测振仪可用于测量微结构的三维振动,其两条离轴光路用于接收包含面内振动信息的信号光,系统的机械形变会直接影响光纤的耦合效率,从而影响系统的测振精度。结合衍射传播理论和光纤耦合原理,建立了离轴光路的信号光传输耦合模型,针对信号光平面与光纤平面存在倾角的问题,利用频域坐标旋转变换法将倾斜的物面信号光场投影到平行的参考平面上,再基于菲涅耳衍射传播计算得到光纤平面的光场分布,进而结合光纤的模场分布可计算得到光纤耦合效率。研究了耦合透镜、光纤等元件的机械形变对光纤耦合效率的影响,阐明了光纤耦合效率和各个机械变形量的关系,为三维激光多普勒显微测振系统的设计和装调工作提供了理论指导。 相似文献
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调频重采样是一种绝对测距技术。这种方法采用的光源波长随时间变化,形成一束宽光谱激光。激光在各时刻的波长通过辅助干涉装置进行测量,并对其中频率间隔相同的部分进行重采样,使调频测距系统具有较大的线性光谱带宽,较高的分辨率及精度。在实际测量过程中,测量装置本身及待测物都容易受到振动的影响,导致待测距离及辅助光纤长度发生变化,引入测距误差。针对这个问题,分析了振动对重采样测量结果产生的误差:(1)待测物的移动引入一个多普勒频移分量;(2)辅助光纤的振动使重采样频率也发生变化。为了弥补这两种误差,提出了一种三光路结构的补偿方法,在辅助光路中,使用一种光路结构简单小巧,且测量速度更快的全光纤马赫泽德干涉仪等效代替光谱仪,实时的监测信号光的瞬时频率。在测量光部分,在测量光路中引入两个部分反射镜产生两路补偿光信号,并通过FFT算法产生频谱。频谱的三个峰值分别与三路信号相对应。通过测量信号与其中一路补偿信号的峰值相减即可补偿多普勒误差,通过两路补偿信号的频率差与相对距离的比值即可得出实际的辅助光纤长度。实验证明,传统的重采样测距方法精度为23.6μm,三光路测距方法的精度可达到11μm,可见这种方法能够对系统的振动误差进行有效补偿。 相似文献
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应用共焦显微镜原理测量倾斜工程表面 总被引:3,自引:3,他引:0
用基尔霍夫衍射公式分析反射式共焦光路 ,得到了被测件有一定倾斜角度表面的共焦轴向响应理论模型。由菲涅耳衍射近似公式得到的共焦轴向响应特性只是它的理论模型的一个特例。同时 ,对接收端采用差动连接的共焦测量的聚焦瞄准信号进行了分析 ,得到了表面倾斜角对聚焦瞄准信号影响的关系。应用共焦实验系统及差动测量系统对具有不同倾角的块规斜面的轴向响应信号进行了测量。理论模型的数值分析与实验结果相吻合。用差动共焦光学系统作为瞄准传感器、用电容传感器进行位移监测 ,对倾角为 10°的角规的斜面进行测量 ,得到分辨率小于 2 0nm的表面形貌图。 相似文献
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为了准确诊测轴系振动特性,基于激光多普勒的频移原理,提出一种能同时测量旋转轴系弯曲振动、扭转振动和轴系旋转速度的方法。设计了能分离弯扭振动的多普勒外差干涉光路,结合光学差拍及参考光技术,构建了测量系统数学模型。对影响激光多普勒弯扭振动测量的主要因素进行了分析,讨论了各参量对测量结果的影响,并给出了相应的测量不确定度。在置信水平为95%时,瞬时转速的不确定为0.079 r/min,弯曲振动速度分量的不确定为0.001 4 mm/s,其精度能满足旋转状态下轴系振动的综合测量要求。 相似文献
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激光光栅多普勒效应微小振动测量 总被引:6,自引:0,他引:6
为了提高测量微小振动的精度和动态范围,提出一种基于激光光栅多普勒效应的微振动测量系统。通过对差拍信号的频率分析,以峰值频率比值的方法可以排除干扰获得被测振动频率,找到振动的翻转点并判断振幅的大小;推导了在翻转点附近的微小位移与电压值的关系,对于小于计数当量值的位移由测量电压得到,提高了微小振动位移的测量精度以及系统测量的最小分辨率、动态范围。实验系统的频率范围为0.5~500Hz,振幅为20~10mm,相对误差小于1%,其动态范围大于100dB。 相似文献
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Vijay Raj Singh Jianmin Miao Zhihong Wang Gopalkrishna Hegde Anand Asundi 《Optics Communications》2007,280(2):285-290
In this paper dynamic characterization of a MEMS diaphragm is investigated using lens-less time averaged in-line digital holography. The analysis and capability of the numerically reconstructed amplitude and phase information from in-line time averaged holograms as applied to MEMS vibration are presented. Particularly the effect of mean static state on the phase in time averaged digital holography is explored. A novel double exposure method is also demonstrated using a diverging object wave suitable for dynamic characterization of small size objects. A phase jump in the static deformation fringes in the vibrating regions is observed and described and can be used for precise analysis of vibration mode shape under simultaneous presence of mean static deformation. A simple and robust tool for dynamic optical metrology of MEMS devices and micro-objects using time averaged in-line digital holography is thus proposed. 相似文献
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A bi-directional laser Doppler velocimeter utilizing optical frequency shifting has been developed. Optical frequency shifting is achieved by using a rotating radial grating. A high diffraction efficiency permits the system to be used in the fringe mode. The zero velocity frequency shift can be varied from 0.1 to 2.5 MHz with a stability better than 0.2%. Important applications are velocity measurements in reversing flows, highly turbulent flows, two-phase flows, and boundary layers. The system described may also be used for vibration analysis. Experimental results are presented. 相似文献
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Tong Guo Hong Chang Jinping Chen Xing Fu Xiaotang Hu 《Optics and Lasers in Engineering》2009,47(3-4):512-517
A computer-controlled micro-motion analyzer (MMA) to study the dynamic behavior of movable structures of MEMS is described in this paper. It employs two optical nondestructive methods—computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion measurement. This fully integrated system includes a high-performance imaging system, drive electronics, data acquisition and data analysis software. This system can freeze the fast motions of MEMS devices using strobed illumination and measure motions in three dimensions with nanometer accuracy. The static measurement accuracy and repeatability of the system is calibrated by a step height standard which is certified by National Institute of Standards and Technology (NIST). The capabilities of this system are illustrated with a study of the dynamic behaviors of a surface micromachined polysilicon micro-resonator. 相似文献
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As a preliminary study for the collection of dust particles in an electrostatic precipitator, laser Doppler velocimetry has been used to measure the velocity of small dust particles charged in the high electric field of a model electrostatic precipitator. A differential optical system is adopted for the velocimeter. The period-measuring system is used to analyse Doppler beat signals and to obtain velocity data from them. By means of the laser Doppler velocimeter, the dynamic behaviour of the velocity and direction of moving dust particles is fully revealed as a function of the applied electric voltage in the entire collecting space of the model electrostatic precipitator, and is shown in vectorial flow diagrams of particle velocity. 相似文献
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L.X. Yang M. Schuth D. Thomas Y.H. Wang F. Voesing 《Optics and Lasers in Engineering》2009,47(2):252-258
In this paper, vibration measurement and analysis of microsystems, such as micro-electro-mechanical systems (MEMS) by using stroboscopic digital speckle pattern interferometry (DSPI) is presented. Because of the speckle interferometry, the technique is suited for samples which have a rough surface or whose surfaces can be sprayed into a scattering surface. A laser speckle microinterferometer incorporated with optoelectronic devices for a stroboscopic illumination and a synchronization of the signals between excitation and stroboscopic illumination is described and demonstrated. The system can measure both out-of-plane and in-plane displacement under either a static or dynamic loading. The fundamental is explained and some applications are demonstrated. 相似文献
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以激光Doppler效应为原理,结合可调谐半导体激光吸收光谱技术的窄线宽、可调谐优势, 可实现高速气流流速的实时在线检测.介绍了流速测量的基本原理和方法,搭建了双光路流速测量系统, 利用DFB激光器对位于1398 nm处的水汽吸收线进行10 kHz快速扫描,获得高速气流的实时光谱信息, 并根据两路吸光度曲线之间的Doppler频移来反演气流流速.介绍了频率标定和Doppler频移测量的方法. 在风洞上进行了流速测量验证性实验,将流速测量结果与理论计算结果进行了对比,二者之间符合得较好, 初步证明了该方法的可行性.分析了系统的性能及可能引起流速测量误差的因素,以便系统进一步优化. 相似文献