台阶光栅衍射的傅里叶分析

提出了一种台阶光栅模型 ,并应用傅里叶光学方法推导出了反射式衍射光强的表达式。分析计算了衍射光强随台阶数、入射波长、衍射角和轮廓角 (闪耀角 )的变化关系。结果表明 ,台阶光栅能起到闪耀作用 ,台阶对衍射强度分布有影响 ,但不改变衍射光极大值的位置 ,随台阶数的增加 ,能量逐渐向闪耀方向集中。当台阶数等于 8时 ,其衍射效率可接近三角形闪耀光栅的衍射。台阶光栅衍射的傅里叶分析对光栅制作有一定的指导意义     

Etching blazed grating into quartz substrate with selectivity 1:1 against photoresist by inductively coupled plasma technology

Inductively coupled plasma (ICP) etching technology is becoming widely used in the fabrication of micro-optical elements. Because of its advantages such as relatively high etching rate and anisotropic etching, ICP technology is receiving more attention. Selectivity 1:1 of the substrate against photoresist is very convenient, because we can easily get the same structures which were designed on the photoresist. Through extensive experiments we have achieved an optimized etching condition under which the transfer process generates fairly smooth etched structures with selectivity 1:1. The first order diffraction efficiency of the etched blazed gratings is 83.5% which is a little bit lower than the theoretical efficiency 88.9%. The diffraction of etched blazed gratings matches the theoretical results well.     

Fabrication of blazed gratings by area-coded effective medium structures

Area-coded effective medium structures (ACES) are a recently presented novel type of diffractive structure. Because of their higher stability compared to 2D binary blazed gratings, they have the potential of a broader use in micro-optics applications. The first fabrication with electron-beam lithography validate the theoretical model of blazed ACES. The measured diffraction efficiencies are in very good agreement with the values obtained from rigorous electromagnetic analysis.     

严格耦合波法计算闪耀光栅衍射效率

针对一般标量近似算法精度不高的问题,提出采用S矩阵的严格耦合波的方法计算光栅衍射效率.通过建立完整的闪耀光栅理论模型,对各分层电磁场进行傅里叶级数展开,采用散射矩阵方法求解各谐波系数,完成衍射效率计算.该方法已应用到红外光栅TE和TM 2种模式衍射效率的计算.分析了散射矩阵解决数值运算不稳定的原因,通过与标量近似计算方法进行比较,说明红外光栅衍射偏振特性.     

共振域矩形介质光栅的逆向设计

采用模态法研究了共振域光栅分束器及闪耀光栅等光学器件的设计原理及逆向设计方法,给出了-1级非偏振闪耀光栅的典型设计示例。研究表明,自准直角入射时,光束在光栅内传输将激发产生离散模,通过调节离散模透过光栅传输时的累积相位差,可对衍射光进行调控,实现偏振(非偏振)分束、偏振(非偏振)闪耀等功能。采用严格耦合波法对基于模态法逆向设计的-1级非偏振石英闪耀光栅的几何参数进行验证,计算结果显示两者非常吻合,证明了该方法的正确性。     

Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings

We introduce a new structural cutoff beyond which subwavelength gratings cease to behave as homogeneous media and discuss its effects on the proper selection of the sampling periods of subwavelength diffractive elements. According to this analysis, a 3lambda-period blazed binary grating composed of square pillars is designed for He-Ne operation and is fabricated by etching of a TiO>(2) layer deposited upon a glass substrate. Its first-order measured diffraction efficiency is 12% larger than the theoretical efficiency of an ideal blazed échelette grating in glass with the same period.     

小角度衍射噪声光栅滤波方法研究

针对因衍射等原因引起的小角度差光噪声信号,探讨了利用闪耀光栅的2级闪耀,实现角度差放大,提高空间低通滤波器适应性的滤波新方法。理论分析和模拟仿真表明,对于小于5°的角度差,可实现3倍以上放大。放大所需闪耀光栅的频率与入射单色波长成反比,波长越长,所需光栅频率越低。与正的斜入射角相比,负斜入射角度差的放大倍数更大。当负斜入射角超过一定值时,会因为全反射角的限制而导致斜入射2级闪耀不存在,只保留了有效信号的2级闪耀,滤波效果更好。     

多层膜闪耀光栅衍射的运动学研究

用 X射线运动学理论对软 X射线多层膜闪耀光栅的衍射特性进行了详细的研究 ,得到了衍射规律的一般表达式 ,讨论了产生衍射极大值的条件、光谱特性 ,不同于光栅和多层膜的色散特性。以及用作软 X射线单色器的一般性问题。发现只要选择合适的光栅参数 ,便可以将衍射光的大部分能量集中到某一个非零衍射级上。     

Formation of blazed holographic gratings

Various methods for the recording of blazed holographic diffraction gratings are presented and the regions in the wavelength-groove density plane for which they can be used are shown. The gratings are made in the positive photoresist Shipley AZ-1350. The diffraction efficiency for s and p polarization was measured as a function of wavelength and angle of incidence. An absolute efficiency of 80% was achieved.     

High spectroscopic qualities in blazed ion-etched holographic gratings

Blazed ion-etched holographic gratings with a high absolute diffraction efficiency, good diffracted wavefront, high resolution, and low stray light have been produced. The performances were proved to be the same as, or superior to, commercially available blazed gratings produced by a ruling technique.     

等腰闪耀光栅及其在非对称双光栅位移测量中的应用研究

本文简述了非对称双光栅位移测量的原理和特点,针对其中存在的一些问题,设计了一种新型透射式位相光栅———等腰闪耀光栅。文中导出了等腰闪耀光栅在垂直入射时的光栅方程和衍射光强分布公式,并通过计算机仿真,得到了衍射光强的分布图。最后探讨了等腰闪耀光栅在非对称双光栅位移测量中的应用     

计算凹面闪耀光栅衍射效率的通用方法

为使凹面光栅的衍射能量更多地集中在所需要的级次上,提出了利用机械刻划的方法在凹面基底上制作变刻槽角度的凹面闪耀光栅,并利用菲涅耳-基尔霍夫衍射公式推导了同时在主截面和非主截面内计算凹面闪耀光栅衍射效率的理论方法,弥补了以往只在主截面内考虑衍射效率的不足,最后利用Matlab仿真软件模拟了衍射效率随波长的变化曲线,并对比了在不同制作和使用参数下衍射效率峰值的变化规律,为今后凹面光栅的设计和制作提供了参考价值。     

Wide-field-angle behavior of blazed-binary gratings in the resonance domain

Blazed-binary gratings for which a blazed effect with binary etches is achieved under normal incidence offer first-order diffraction efficiencies larger than those of blazed-échelette gratings in the resonance domain [Opt. Lett. 23 1081 (1998)]. We provide further insight into the behavior of blazed-binary gratings and show that they operate efficiently under symmetrical mounting and over a wide field-angle interval. These properties are illustrated with theoretical and experimental results obtained for an approximately 1000-line/mm grating at 633 nm.     

Diffraction efficiency of holographic blazed diffraction gratings

Holographic blazed diffraction grating is analysed as a periodic relief of an inclined sinusoidal curve in the shallow profile approximation. Under the condition that the rate of the development is a linear function of the development dose the evolution of the relief during the development is discussed. Theoretical curves of diffraction efficiency are compared with measurements on gratings made by direct holographic method for uv spectral region.     

Atom optics using microfabricated structures

We present a novel method for fabricating precisely positioned small openings in thin silicon nitride membranes. Several optical elements for atoms have been constructed, including amplitude diffraction gratings and zone plates, and the results of experiments using these devices are presented. A method for creating a blazed diffraction grating is discussed.     

软X射线透射光栅制作技术

金透射光栅广泛用于真空紫外、X射线、物质波的衍射和光谱测量。分别介绍了美国麻省理工学院空间微结构实验室和中国科学技术大学国家同步辐射实验室的透射光栅制作技术及其新进展。麻省理工学院空间微结构实验室为完成 AXAF巨型空间天文台上的高能透射光栅谱仪经历了近 2 0年的发展 ,其光栅制作工艺日趋成熟 ,代表了当前世界最高水平。中国科学技术大学国家同步辐射实验室为了满足惯性约束核聚变实验研究的需要 ,在国内较早地开展了透射光栅的研制工作 ,在提高光栅质量的同时不断提高线密度     

Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching

The transfer of continuous-relief diffractive structures from resist into diamond by use of direct-write electron-beam lithography followed by dry etching in an inductively coupled plasma is demonstrated. The gases used for the diamond etching are O(2) and Ar. The chemical-vapor-deposited diamond substrate is of optical quality. Our results show that the transfer process generates fairly smooth etched structures. Blazed gratings with periods of 45mum and Fresnel lenses have been manufactured. The blazed gratings have been optically evaluated with a femtosecond laser operating at 400 nm. The diffraction efficiency was 68% in the first order, with a theoretical value of 100%. We intend to investigate the transfer process further and then to fabricate diffractive and refractive elements for use with Nd:YAG high-power lasers.     

Efficiency of Blazed Diffractive Optics Produced by Diamond Turning

In blazed diffractive optics produced by the diamond turning process, the finite size of the tool causes a decrease in diffraction efficiency. To analyze the influence of the tool, we evaluate first-order diffraction efficiency of periodic gratings based on the electromagnetic theory. The design indices of the diffractive optics for higher efficiency are shown. Even with the same power of diffractive optics, the efficiency differs with the front or back side of the surface. The efficiency of a diffractive-refractive hybrid lens depends on the curvature of the refractive surface.     

Modulation Transfer Function of Blazed Diffractive Optics Produced by Diamond Turning

In blazed diffractive optics produced by the diamond turning process, the finite size of the tool determines the decrease in diffraction efficiency of the desired order. Diffracted light of other orders degrades the image quality. To analyze the influence of the tool, we evaluate diffraction efficiency and phase of periodic gratings based on the electromagnetic theory and calculate modulation transfer function using a linear system approach.     

1000线/毫米软X射线自支撑闪耀透射光栅的设计与制作

基于标量衍射理论讨论了软X射线自支撑闪耀透射光栅的特性并设计了光栅的结构参数. 采用全息光刻和湿法腐蚀技术, 成功制作了周期1 μm、占空比0.1---0.2、高宽比约100、栅线厚度10 μm、 有效面积比为65%的自支撑闪耀透射光栅. 单元尺寸为15mm× 15mm的硅绝缘体上含有四个5 mm× 5 mm的自支撑闪耀透射光栅窗口. 在国家同步辐射实验室检测了该光栅在5---50 nm波长范围内的衍射效率. 波长扫描测量结果表明, 闪耀效应明显地发生在类似镜面的光栅侧壁镜面反射方向上, 闪耀级次位置及其特征与标量理论预测的一致. 衍射效率的实测结果基本与理论模拟符合, 只是因光栅结构上的缺陷致使衍射效率偏低, 峰值只有理论值的38---49%. 实验结果证明了闪耀透射光栅的概念和湿法制作工艺的可行性.