| 等腰闪耀光栅及其在非对称双光栅位移测量中的应用研究 |
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| 引用本文： | 吕海宝,李圣怡,曹聚亮,罗武胜,徐涛.等腰闪耀光栅及其在非对称双光栅位移测量中的应用研究[J].光学技术,1999(6). |
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| 作者姓名： | 吕海宝 李圣怡 曹聚亮 罗武胜 徐涛 |
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| 作者单位： | 国防科技大学,机械电子工程与仪器系,湖南长沙,410073 |
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| 摘 要： | 本文简述了非对称双光栅位移测量的原理和特点，针对其中存在的一些问题，设计了一种新型透射式位相光栅———等腰闪耀光栅。文中导出了等腰闪耀光栅在垂直入射时的光栅方程和衍射光强分布公式，并通过计算机仿真，得到了衍射光强的分布图。最后探讨了等腰闪耀光栅在非对称双光栅位移测量中的应用
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| 关 键 词： | 衍射 光栅 位移测量 衍射效率 分辨力 |
Isosceles blazed grating and its application discussion in displacement measurement with nonsymmetrical double gratings |
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| LU Hai-bao,LI Sheng-yi,CAO Ju-liang,LUO Wu-sheng,XU Tao.Isosceles blazed grating and its application discussion in displacement measurement with nonsymmetrical double gratings[J].Optical Technique,1999(6). |
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| Authors: | LU Hai-bao LI Sheng-yi CAO Ju-liang LUO Wu-sheng XU Tao |
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| Abstract: | The principle and characteristics of displacement measurement with nonsymmetrical double gratings (DMNG) are briefly described in the paper firstly. As a new kind of phase type grating, isosceles blazed grating is designed in allusion to the problems of DMNG. Its grating equation and diffraction intensity distribution formula under the condition of perpendicular incidence are derived. Then the diffraction intensity graph is obtained by means of computer simulation. The application of isosceles blazed grating in DMNG is discussed in the end. |
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| Keywords: | diffraction grating displacement measurement diffraction efficiency resolution |
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