Discussions on on-machine measurement of aspheric lens-mold surface

At present, regarding to the machining of aspheric lens mold, there are two major methods to carry out the on-machine measurement (OMM) — contacting method (CM) and non-contacting method (NCM). Here such two methods are reviewed in detail. CM is mainly based on the contacting probe which is scratching aspheric surface of lens mold to achieve profile data. To be efficient, an idea with 45° tilt of probe is proposed for OMM of lens mold by Suzuki. But generally speaking, the contacting OMM is not so efficient and can only deal with axisymmetric aspheric lens mold. On the contrary, NCM mostly uses laser to achieve aspheric profile without any contact. On ultra-precision lathe, laser scanning system or laser interferometer is mounted on the frame of lathe and transfers measurement data to machining system efficiently. However, most NCMs need stable environment and low working noise except instantaneous phase-shifting shearing interferometry (IPSSI). Therefore, a new idea about IPSSI is proposed in this paper to realize OMM of lens molds. Unfortunately, it's also difficult to test the high numerical aperture aspheric or free-form lens molds. By comparison, the newly-developed fringe reflection (FR) method is becoming the promising method because it features the high efficiency and high accuracy. However, this method has not been used for OMM system yet. Much research should be conducted for FR OMM technology.     

标准球面透镜的几何特性与误差分析

标准球面透镜是斐索型干涉仪的核心器件，综述标准球面透镜的几何特性和误差。分析标准球面透镜在干涉照明光路和成像光路中的作用，重点介绍并实验验证了球面干涉成像的R-sinθ几何特性关系模型，给出了采用Q非球面实现非球面分裂的新型设计方法，以及2片式非球面标准球面透镜结构的实例，概述了针对小F数标准球面透镜球面干涉腔中的待测球面调整误差和移相空间非均匀性误差的研究成果，介绍了校正球面干涉腔中误差的波面差分算法，指出在近标准球面透镜焦点位置测量球面时的回程误差影响，从物像共轭关系角度解释了近焦点位置回程误差较大的原因，比对分析了标准球面透镜的透射波前与斜率对回程误差的影响。提出了在设计标准球面透镜时需注意的几何特性关系，以及使用标准球面透镜时易产生的误差和相应的抑制方法。     

Phase-shifting lateral shearing interferometer with two pairs of wedge plates

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.     

透镜初级球差的横向剪切干涉条纹研究

利用玻璃平行平板构成简单的横向剪切干涉仪可以观察到单薄透镜形成的准直光束的剪切干涉条纹,由干涉条纹分布求出对应的几何像差和离焦量.用焦距为190 mm的单薄透镜做实验,实验结果与计算机模拟结果符合,说明可以从剪切干涉条纹的分布求出透镜的轴向调整误差和初级球差.     

Optical design for enhanced prism type fingerprint scanner image contrast with asymmetrical aspheric lens

The design of optical prism fingerprint scanner with aspheric lens is researched. We propose a modified structure for optical prism fingerprint scanner, which has an asymmetrical aspheric lens on the output plane. It is numerically shown under elliptic valley similar fingerprint model that the optical image qualities of such a scanner are better than the scanner with symmetrical aspheric lens. When the fingerprint range is 15 mm, the results show that the minimum image contrast is 0.49 for an optical prism with asymmetrical aspheric lens, much better than a symmetrical aspheric lens with 0.20. The relative illumination variation is from 0.62 to 1.00 for optical prism with asymmetrical aspheric lens, and for the symmetrical aspheric lens it is 0.35 to 1.00. We conclude that an optical prism with asymmetrical aspheric lens is better than an optical prism with symmetrical aspheric lens.     

A microprism array as shearing device for speckle shearing interferometry

In most speckle shearing interferometers image shearing is performed by means of a Michelson interferometer or by means of a wedge prism covering half of the aperture of the camera objective. We present a speckle shearing interferometer which utilizes a microprism array for this purpose. It is placed between the test specimen and the camera. In comparision with a wedge prism it exhibits some advantages: it needs no exact alignment, it works with any camera lens, the shearing distance and direction of shearing can be easily changed by changing position (resp. angular orientation) of the element. Phase stepping for computer evaluation of the speckle shearing interferograms is performed by the translation of the shearing element. A special translation stage was developed. Experimental results are presented. The interferometer is suited for microcomponent and microsystem testing.     

Estimation of the degree of asphericity of a glass sphere using a vectorial shearing interferometer

The degree of asphericity is estimated by determining the average radius of curvature in different sections, at various points on the surface of a sphere, and the deviation from it. We employ the vectorial shearing interferometer (VSI) as the instrument to determine the radius of curvature from two subapertures of the transparent glass sphere. We incorporate the sphere as a thick lens into the interferometric setup, illuminating it with an expanded beam. The spherical aberration, introduced by the sphere in the wave front, depends on the local sphere radius, on the refraction index of the glass, and on the cone angle of the source. The wave front aberrated by the sphere impinges on the VSI. Here, the wave front is divided in two in amplitude, it is sheared vectorially, and it is superimposed with itself. The fringe pattern is formed in the intersection of the wave fronts. The shape of the resulting fringe pattern is directly related to spherical aberration. We estimate qualitatively the degree of asphericity, comparing the phase gradients in different sections of the sphere. Here, we report on the experimental setup to test the asphericity, the results with different vectorial shearing (magnitude and direction). Finally, we perform a comparison with the theoretical predictions.     

Phase shifting speckle shearing polarization interferometer using a birefringent wedge

A digital speckle pattern shearing interferometer is presented which utilizes a single birefringent wedge. Two orthogonally polarized images of an object measured are sheared by the wedge, and the bias phase difference between two polarized images is shifted by translating the wedge. The phase shifting technique applied to speckle pattern shearing interferometry makes it possible to analyze a slope and surface strain numerically. The fringe formation in the present interferometer is analyzed with statistical theory. Experimental results are also presented in two cases: (1) measurement of a slope and normal displacement with a single illumination; (2) simultaneous and separate measurement of a slope and surface strain with two symmetrical illuminations.     

New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes

We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach—Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach—Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates.     

Simple phase-shifting lateral shearing interferometer

A phase-shifting electronic speckle pattern shearing interferometer with a very simple shearing device is proposed. Two partially reflective glass plates are used to introduce the shear in this new interferometer. The reflection coefficients of the coatings on the two plates are 0.3 and 0.7. The distance between the two glass plates controls the size of the shear. The proposed new interferometric system is simple, flexible, and low cost.     

轴对称非球面透镜光轴共轴度的测量研究

介绍了一种轴对称非球面透镜的光轴共轴度的测量方法。激光管发出的光束经束腰变换透镜入射到被测透镜的非球面表面,由CCD摄像头接收非球面的反射激光光斑,CCD的光敏面位于反射激光光束的束腰位置;调整被测透镜位置,直到激光束腰中心位置不随被测非球面透镜的旋转而变化,这说明被测透镜的非球面对称轴与机械旋转轴重合;再利用球面偏心测量原理检测被测透镜球面一面的偏心量,即可以求得被测非球面透镜的光轴共轴度。该测量方法的误差小于20″。该方法适用于判定非球面透镜和非球面反射镜是否合格,以及调整非球面透镜的制造工艺。     

Interference fringe detection system for distance measuring interferometer

A novel photodetection system for a homodyne distance measuring interferometer by means of fringe counting method is presented. The system is based on applying compact size integrated photodetector operating with fringe pattern having fixed, finite period. 13-element integrated photodiode arranged in novel signal processing scheme receives interference fringes movement. Additional lens is used to adjust the fringe period to photoelements’ distances. Due to the proposed configuration of the photoelement's signal processing and the applied lens the system has reduced sensitivity to interference fringe period errors caused by the angular misalignment of interfering beams. The theoretical analysis and experimental verification of the system metrological feasibilities are presented. Comparison of performance of examples of standard and novel detection systems is shown finally.     

Pickup lens inspection on the 5th order aberration using shearing interference by grating with curve fitting algorithm

An optical system based on shearing interference using diffraction grating was applied, to carry out the aberration inspection process of the pickup lens of a digital versatile disc (DVD) at high speed. An algorithm was devised that processes points allocated on certain lines on a fringe and fits relations between the distance from basis point to the measurement points, and phase data of the fringe at these points to an equation of higher degree as curve fitting. Aberration was numerically estimated as the size of a certain coefficient. Simulation showed that this algorithm could detect all 5th order aberrations independently. An inspection system developed based on this optical system and algorithm detected aberration as accurately as a conventional interferometer that has been used as the standard, attaining an inspection time of 1/10-1/20. In comparison with the spot method, this system has 5th order aberration detecting ability and 1/3 the inspection time.     

Step index fibre using laser interferometer

A model is suggested to describe the fringe shift which occurs due to the phase variations of cladded glass fibre introduced between the two plates of the liquid wedge interferometer illuminated with a He–Ne laser. The fringe shift of the phase object which appears in the denominator of the Airy distribution formula of the multiple beam interference is represented in the harmonic term. An experiment is conducted using liquid wedge interferometer where the step index glass fibre of a nearly quadratic thickness variation is introduced between the two plates of the interferometer. The obtained fringe shift shows a good agreement with the proposed quadratic model. The Matlab code is written to plot the interferometer fringes comprising the shift of the step index fibre. Secondly, recognition of elliptical fibres is outlined using tomographic imaging. Finally, results and concluding remarks are given.     

Modeling of the fringe shift in multiple beam interference for glass fibers

A quadratic model is suggested to describe the fringe shift occurred due to the phase variations of uncladded glass fiber introduced between the two plates of the liquid wedge interferometer. The fringe shift of the phase object is represented in the harmonic term which appears in the denominator of the Airy distribution formula of Fabry-Perot’s interferometer. A computer program is written to plot the computed fringe shifts of the described model. An experiment is conducted using liquid wedge interferometer where the fiber of a nearly quadratic thickness variation is introduced between the two plates of the interferometer. The obtained fringe shift shows a good agreement with the proposed quadratic model. Also, it is compared with the previous theoretical shift based on ray optics of semi-circular shape.      

Simple versatile shearing interferometer suitable for measurements on a microscopic scale

Micro-electromechanical systems (MEMS) behave differently from massive samples. Conventional testing and inspection techniques usually fail at the microscale. Recently there has been an increasing interest in the application of optical techniques for microstructure testing, because they are high-resolution, non-contact, full-field, fast and relatively inexpensive. New interferometric systems, which are suitable for microscopic optical metrology, are of interest for engineering and industrial applications.A modified electronic speckle pattern shearing interferometer (ESPSI) with a very simple shearing device has been designed for metrology applications on the microscale. The shearing device consists of two partially reflective glass plates. The reflection coefficients of the coatings are 0.3 and 0.7, respectively. The distance and the tilt between the two glass plates control the size of the shear. A long working distance microscope objective is attached to the CCD camera to form a field of view variable over several millimetres in width. The suitability of the system for microscopic measurements is demonstrated. The capability of the system for phase shifting is also demonstrated. The results obtained are promising for future applications of the ESPSI system for testing and characterisation of MEMS.     

易测量非球面定义及应用

本文提出了一种新型、易于用传统光学干涉仪测量的非球面。该非球面的检测主要基于Zemax光学程序软件设计的多重配置特性。第一配置为易于测量非球面,第二配置为采用平行平面玻璃板或单透镜作为零位校正器,用于检测第一配置的非球面。本文通过一些实例,说明了易测量非球面检测技术的应用和优势,证实了与圆锥或普通非球面相比,易测量非球面更易于操作与检测,同时有利于减小光学像差。     

光学相干性综合实验

利用双频光栅剪切干涉法，CCD摄像机采集剪切干涉条纹图，用自行设计的软件对图像进行处理，可定量测量光场的时空相干性以及梯度折射率透镜的像差。     

靶镜光学质量检测技术的研究

提出了一种利用扫描型哈特曼检测装置检验靶镜光学质量的技术.该装置对传统哈特曼检验装置的光阑进行了改进,通过扫描型哈特曼光阑的旋转扫描,可对被检靶镜全口径范围内连续采样.利用该扫描型哈特曼检测装置对一块口径为270 mm的非球面靶镜的能量集中度和波像差进行了检验,其结果与激光数字波面干涉仪的测量结果相吻合,其中能量集中度的相对测量误差为7.7%,波像差的相对测量误差为10.2%,验证了该检测技术的有效性.     

用粒子群算法进行单个非球面透镜的球差校正

为设计出符合球差要求的单个非球面透镜,把粒子群算法应用到单个非球面透镜的球差校正中,构造相应的数学模型,并编程实现算法.设计关于非球面高次多项式的顶点曲率半径,高次多项式各项系数,透镜面之间的距离和玻璃折射率等光学系统结构参数的适应度函数,用这个函数作为评价函数,实现对球差的自动校正.给出用粒子群算法进行单个非球面透镜设计的实例,结果证明:粒子群算法用于非球面透镜的球差校正简单有效,能同时校正不同入射高处的球差,且容易发现一系列好的设计结果.从实际光学设计角度呈现使用这种方法进行单个非球面透镜的自动设计分析.