正弦光栅标量衍射及等效介质理论有效性分析

利用严格傅里叶模式理论研究了不同基底折射率、入射角度、归一化周期、归一化沟槽深度对正弦型光栅微结构衍射效率的影响,并分析了该光栅的衍射特性.基于标量衍射理论和等效介质理论,分别计算了光栅周期远远大于和远远小于入射波长时,正弦型光栅的衍射效率,并与傅里叶模式理论的计算结果进行比较,分析标量衍射理论和等效介质理论的有效性.结果表明:在垂直入射条件下,当光栅基质材料折射率为1.5时,标量衍射理论在光栅归一化周期大于5时,能够准确计算光栅衍射效率,误差小于3%;当基底折射率增大到3.42时,只有在光栅归一化周期大于10时,标量衍射理论才有效,误差小于5%;当正弦型光栅透射光中只有0级衍射光传播时,等效介质理论能够准确计算其透射率;随着入射角度的增大,标量衍射理论和等效介质理论的有效性都不同程度地降低.     

双重复合式液晶/聚合物电调谐光栅的制备

采用一次性全息曝光的方法同时在样品上制备了周期分别为1μm和4μm,衍射效率电场可调的双重复合式液晶/聚合物光栅.使用He-Ne激光器对复合光栅的衍射特性进行了实验研究,发现光栅存在两个1级衍射极强峰.对峰值衍射效率的测定结果表明,周期1μm的光栅衍射效率为90%,周期4μm的光栅,60%.结合耦合波理论计算了周期1μm和4μm光栅的衍射效率理论值,分别为92.57%和63.68%.实验结果与理论值符合得非常好.对电光特性的测试表明该复合光栅内的两套子光栅的驱动电压V₉₀关键词： 光栅 液晶     

红外波段高效率低偏振相关损耗光栅的设计

衍射效率高、偏振相关损耗低的衍射光栅是集成波分复用/解复用器件的一种核心元件,在光通信中具有很重要的应用价值。通过利用严格的耦合波理论计算光栅衍射效率的方法,分别编制出了计算TE波和TM波的衍射效率程序。通过改变光栅的面形来进行计算,最终得到了衍射效率高和偏振相关损耗小的光栅面形。     

亚波长介质光栅的制作误差分析

利用严格耦合波理论（RCWA）分析了方向误差和面形误差对亚波长光栅衍射效率的影响. 通过分析发现,方向误差和图案边缘钝化对光栅的衍射效率影响不大,而刻蚀过程中由于侧壁倾斜而产生的面形误差对光栅的衍射效率影响非常大.在制作亚波长光栅时,可以通过选取合理的刻蚀系统或增大占空比的方法来避免基底型误差的出现.该结论对于制作亚波长光栅具有重要的指导作用.同时根据得出的结论,选用专门用于硅深刻蚀的等离子体辅助刻蚀系统制作出了红外30 μm亚波长抗反射光栅,检测结果显示,光栅沟槽侧壁陡峭且透过率和设计值吻合得比较好.     

周期介质膜压缩光栅中的导模共振效应

 使用耦合波法以及特征矩阵法计算了周期膜堆结构以及介质压缩光栅的本征值，研究了介质型压缩光栅产生导模共振现象的条件，并计算了导模共振点附近光栅的衍射效率曲线。针对导模共振效应对光栅应用的影响，提出了一种避开该效应的方法。计算结果表明：当介质折射率呈周期变化时，取光栅周期为0.667 μm，深度为0.6 μm时，可以避开导模共振效应。     

高密度相位光栅的偏振选择性

高密度光栅具有与传统光栅不同的性质,其衍射特性往往是偏振相关的。本文针对1550nm波长TE/TM偏振入射光和0.5的光栅占空比,利用严格耦合波分析数值计算了不同光栅周期下0级及-1级的衍射效率。研究表明,相比周期为1550nm的光栅,当周期为1200nm时,偏振相关衍射效应明显增强,当光栅周期为890nm时,TE偏振光的衍射效率随着光栅深度呈正余弦变化,而TM偏振光的衍射效率始终集中在0级,具有偏振选择性。通过模式方法,利用模式中的有效折射率概念,研究了不同周期下被入射光所激发的两种光波模式通过光栅区域传播所累积的相位差;基于双光束干涉,模拟了0级和-1级的衍射效率。结果表明,利用严格耦合波分析的数值计算结果符合模式方法的理论预期,对于高密度相位光栅的偏振选择性给予了合理的物理机制解释。     

线偏振高斯光束通过复合型衍射光栅的传输特性

提出一种集合浮雕和折射率周期分布调制的复合型衍射光栅,并利用角谱表示和严格的模式理论研究了线偏振高斯光束通过这种复合型衍射光栅的传输特性.数值计算结果表明,在光栅的同一透射深度处复合型衍射光栅光强的起伏频率要比浮雕型光栅光强的起伏频率小.最后使用复合型衍射光栅模型,研究了亚波长体积相位全息光栅的表面起伏和入射光束的束腰宽度对衍射效率的影响. 关键词： 复合型衍射光栅 亚波长体积相位全息光栅 高斯光束 严格模式理论     

亚波长光栅衍射效率特性设计的遗传算法优化

亚波长光栅中的衍射需要使用矢量衍射理论进行分析,其衍射效率与多个因素有关,对任意面形、任意入射条件的亚波长光栅的衍射来说,使用严格的耦合波理论进行分析计算可以得到数值解。通过分析不同参数条件下的衍射特性和衍射效率对各个参数的敏感性,获得了对衍射效率影响最大的光栅参数——槽深。用接近衍射效率曲线的抛物线作为目标函数建立了适应度函数。使用遗传算法进行优化,得到了所期望的衍射效率滤波特性,从而完成了具有防伪功能的亚波长光栅的设计。     

矩形光栅的衍射特性

本文采用严格的一阶耦合波理论,对矩形光栅的衍射特性进行了分析,给出了TE模和TM模同时具有很高的衍射效率时的光栅结构。计算表明:只有在满足Bragg衍射条件时,TE模和TM模才能达到峰值衍射效率。为了验证理论与编制程序的正确性,将计算结果与已有的资料进行了比较.     

自支撑透射光栅的设计、制作和测试

采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300 nm、线宽/周期比为055、厚度为200 nm、总面积为1 mm×1 mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在55—38 nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8 nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35 nm范围内的极紫外波段具有基本稳定的衍射效率. 关键词： 自支撑透射光栅 电子束光刻 电镀     

可见光波段双层浮雕型导模共振滤波器设计与分析

基于傅里叶模式理论分析了双层浮雕型导模共振光栅的共振效应,分别讨论了光栅的槽深、剩余厚度、周期以及填充系数对峰值反射率、带宽、旁带反射率的影响. 数据计算表明,欠刻蚀情形的误差宽容度远远优于过刻蚀情形,两者在光栅槽深相对误差小于15％的范围内,都能保证共振峰的衍射效率高于99.5%,在相同的误差范围内,共振峰线宽的相对误差将分别达到7％和60％,因此厚度误差集中反映在对共振线宽的改变上. 另外,光栅周期和填充系数的变化将明显改变共振峰中心波长和线宽. 关键词： 导模共振 平面波导 窄带滤波     

T-matrix analysis of electromagnetic wave differaction from a Fourier grating

This paper is described for T-matrix analysis of the electromagnetic wave diffraction from a Fourier grating that the boundary value problem is treated by applying the extended boundary condition. The rigorous form of the expression of matrix elements is presented in the term of Bessel functions of the first kind. The error of power conservation versus the truncated number has been examined for mode number. Diffraction efficiencies versus groove depth and wavelength for a second or third harmonic wave of Fourier grating have been discussed. Numerical results are in good agreement with those obtained from other method and experimental values. Reasonable numerical results are presented for a groove depth per period of the Fourier grating less than 0.25.     

A detailed study of metallic surface-relief grating

This paper presents a more detailed interaction of an electromagnetics light with a metallic surface-relief subwavelength grating utilizing the rigorous coupled-wave analysis. The focus of this work is the accurate modeling of undetermined aspects of diffraction patterns produced by binary metallic grating structures, specially gold grating. First-order diffraction efficiency for rectangular-groove gold grating with equal groove and ridge widths are presented for various wavelengths as a function of period, groove depth, polarization and angle of incidence. We also studied diffraction efficiency of both of TE and TM polarization modes against increasing of incident angle as well as TE polarization against increment of grating period. As a result, very low reflectivity at zero-order was found out for TE and TM polarizations at the pitch of Λ = 2λ. Having been studied diffraction efficiency of metallic surface-relief gratings, we also examined polarization-dependent efficiency of diffraction orders, for different groove depths. Simulation results have been completely presented.     

布儒斯特角附近的透射光栅传输特性

 减小光栅表面的反射率以得到更高的衍射效率是目前光栅设计与制造中需要解决的重要问题之一。提出利用偏振光沿布儒斯特角入射时具有的特性来实现降低光栅表面反射率的方案，介绍了这种方案的物理模型，并利用严格耦合波分析法进行了模拟计算。计算结果显示，对入射光为TM偏振，波长0.35 μm，当光栅周期较长为2.80 μm时,以布儒斯特角入射的光波，它的表面反射被大大抑制；当光栅周期较短为0.21 μm时也有类似的结论，并且透射光的一级衍射效率极大值出现在刻槽深度为3.50 μm处附近，衍射效率大于95%。     

矩形槽光栅矢量模式理论的数值计算

本文根据矩形槽光栅的矢量模式理论进行了数值计算。对于任意入射方向及任意偏振态的入射场，计算了其衍射效率和偏振特性变化，并详细研究了光栅结构参数（周期、槽宽、槽深等）对衍射场的影响。     

软X射线位相型金透射光栅的设计与制作

根据衍射光栅的标量理论,计算并讨论了金透射光栅在软X波段衍射效率对光栅厚度和占宽比的依赖关系.结果表明,选择合适的光栅槽深和占宽比,高达 21.9%的衍射效率可能被获得,远高于振幅型光栅的+1级衍射效率10.14%.通过全息光刻与电镀转移技术制作的位相型金透射光栅由300nm的聚酰亚胺薄膜支撑,光栅槽深200nm,占宽比为0.55,周期为1μm,面积为20mm×5mm.在国家同步辐射装置上,测得其+1级透射衍射效率在波长λ=7.425nm时获得最大值,约为16%. 关键词： 透射位相光栅 全息光刻 电镀     

任意槽形金属光栅矢量模式理论的数值计算

本文根据任意槽形金属光栅的矢量模式理论，对正弦槽光栅和半椭圆槽光栅的情况进行了推导和数值计算。对任意入射方向和偏振态的入射场，计算了其衍射场的分布情况，并详细研究了光栅结构参数（光栅常数、槽宽、槽深等）对衍射场的影响。     

Influence of groove depth and surface profile on fluorescence enhancement by grating-coupled surface plasmon resonance

The fluorescence intensity of a sample placed on a metal grating pattern is enhanced due to excitation by the electric field of the grating-coupled surface plasmon resonance (GC-SPR). The dependence of the enhancement on groove depth and surface profile was studied with the aim of improving the sensitivity of fluorescence detection. The enhancement was found to depend on the groove depth, with intensity most enhanced on grating substrate of about 20 nm depth, which produced an intensity about 30 times greater than that on a flat borosilicate glass substrate. Rigorous coupled wave analysis calculation showed that the shape of the groove influenced GC-SPR, suggesting that controlling not only the depth but also the shape of the grating surface profile can be an important factor in improving the sensitivity of detection by fluorescence microscopy.     

Grazing incidence off-plane lamellar grating as a beam splitter for a 1-Å free electron laser

A beam splitter based on the diffraction grating working in the grazing incidence conical diffraction is proposed for x-ray free-electron laser (XFEL) experiments with coherent beams in plasma and atomic physics. Such a beam splitter can provide undistorted wavefronts, high-power radiation scattering, and split beams with equal intensities, which propagate with delay along different paths to the target chamber of the XFEL end station. Using the PCGrate software based on rigorous electromagnetic theory and developed for the short-wavelength range, it is shown that the plane grating with lamellar groove profile of a certain depth, operating in grazing conical incidence mount (grooves are parallel to the incident beam), separates three beams in the ?1, 0, and +1 orders with close diffraction efficiency. Numerical simulation predicts 23–27% absolute efficiency for 0.1-nm incident radiation in each separated order of a bulk or multilayer grating, taking into account the atomic level roughnesses and interdiffusion. When using a multilayer coating based on Ru/C or Ru/B₄C pairs, the optimum grazing angle providing approximately equal efficiencies is ～1.038° which is four times higher than for the Pt-coated grating. Such optimization of radiation geometry, groove profile shape, and multilayer coating parameters can be performed for various XFEL wavelengths. The proposed grating, in addition to diffraction, technological, and design advantages over the beam splitter based on a set of perfect crystals, can be fabricated and tested using currently available methods.