Measuring scanning acoustic microscope with a harmonic sounding signal

A concept of a scanning acoustic microscope with a harmonic sounding signal for measuring the parameters of local homogeneous regions of flat samples is proposed. The distinctive feature of the device is the utilization of the Doppler effect that occurs in the sounding wave reflected from the sample surface when the sample is uniformly moved relative to the focusing ultrasonic transducer of the microscope. It is theoretically demonstrated that the spectrum of the received signal is determined by the product of the reflection coefficient and the transfer function of the transducer. The errors of the measurement technique are considered, and the sources of signal distortions are analyzed. High sensitivity of the measurement results to the errors of the scanning system is demonstrated. The developed measuring microscope is described, in which an acoustic interferometer is used to provide the necessary precision of the scanning coordinate measurement. The microscope transfer function is measured for the frequency of the sounding signal 65 MHz, and the values of density and bulk wave velocities are determined for a homogeneous sample by the measured phase of the reflection coefficient using the technique of nonlinear estimation of parameters. With fused quartz used as an example, it is shown that the measurement error is 7.2% for density and 2.3 and 0.7% for the velocities of longitudinal and transverse waves, respectively. In addition, the velocity of a leaky surface wave (SAW) is determined by two methods. One method is based on measuring the position of the inflexion point for the experimental phase of the reflection coefficient, and the other is based on calculating the SAW velocity corresponding to the measured values of density and bulk wave velocities. The errors of these methods are found to be equal to 0.42 and 0.17%, respectively.     

基于绝缘体上硅的一种改进的Mach-Zehnder声光调制器

传统的基于绝缘体上硅的Mach-Zehnder(MZ)声光调制器中,叉指换能器位于两臂的同一侧.为实现高的调制效率,声表面波的波峰和波谷分别调制MZ干涉仪的两臂,这要求控制MZ干涉仪两臂之间的距离为奇数倍声波半波长.但实际上由于传播过程中衬底材料的变化,声波波长会变大,这会导致两臂的间距难以准确设置.另一方面,声波在传播过程中经过MZ干涉仪的一臂后会发生衰减,降低了对另一臂的调制效果,影响了整体的调制效率.本文针对这些问题给出了一种解决方案,把叉指换能器放在MZ波导两臂之间,确保MZ干涉仪两臂到叉指电极中心距离相等.采用有限元法,首先对新提出的结构进行分析,然后通过声光互作用原理得到了材料的折射率变化;进而研究了波导类型、波导宽度、氧化锌厚度及叉指对数等因素对声光调制效率的影响,并对声光调制器的结构参数进行了优化以提高其性能.基于COMSOL Multiphysics的仿真结果表明,当条波导宽度为6μm,氧化锌只覆盖有叉指电极的部分且厚度为2.2μm,控制叉指电极数目为50对时,波导有效折射率变化在驱动电压为1 V时可以达到4.08×10~(-4),比传统结构提高了12%.     

环形定子的激光致表面波机理及可视化探测研究

开展了用于新型激光驱动马达的环形定子的激光致表面波机理及实验研究. 提出一种带有凹槽阵列结构的环形定子新设计, 建立了激光在环形定子表面激发表面波的物理模型, 揭示了影响表面波幅值的关键因素; 采用一种新颖的激光致表面波可视化探测方法, 在波长1053 nm, 脉宽30 ns, 单脉冲能量1 mJ的激光激发下, 对表面波在铜质环形定子表面的传播特性进行了可视化探测实验. 理论与实验研究表明: 当激发光斑的位置紧邻凹槽阵列时, 沿着圆环向凹槽方向传播的表面波会被齿状凹槽阵列迅速衰减和吸收, 而沿着圆环向远离凹槽方向传播的表面波能够持续传递, 从而首次实现了激光致表面波在环形定子上的单向传播; 而对没有凹槽阵列结构的圆环进行的对比实验表明, 激光致表面波在圆环表面双向传播, 最终因相互混叠和串扰等而处于混乱状态. 由激光在该种环形定子表面激发出的单向表面波, 可望在光致表面波马达及驱动机构中获得应用. 关键词： 激光致表面波 环形定子 表面波可视化 激光驱动     

Reflection and mode conversion of surface acoustic waves studied by scanning acoustic force microscopy

We present measurements of the reflection and mode conversion of surface acoustic waves (SAWs) by scanning acoustic force microscopy (SAFM). The SAFM offers a unique combination of high lateral resolution and high sensitivity towards acoustic modes of all polarizations. Since a SAW mixing experiment of two waves can be performed even if the amplitude difference between both waves is 40 dB, wavefields of extremely small amplitudes can be investigated. Using SAFM, the reflection of SAWs from a metallic wedge is investigated with submicron lateral resolution. We are able to identify two reflected wave modes, a Love and a non-coupling Rayleigh mode, by measuring their phase velocities. Received: 4 December 2000 / Accepted: 6 December 2000 / Published online: 9 February 2001     

Temperature and strain sensitivities of surface and hybrid acoustic wave Brillouin scattering in optical microfibers

Temperature and strain sensitivities of surface acoustic wave (SAW) and hybrid acoustic wave (HAW) Brillouin scattering (BS) in 1 μm-1.3 μm diameter optical microfibers are simulated. In contrast to stimulated Brillouin scattering (SBS) from bulk acoustic wave in standard optical fiber, SAW and HAW BS, due to SAWs and HAWs induced by the coupling of longitudinal and shear waves and propagating along the surface and core of microfiber respectively, facilitate innovative detection in optical microfibers sensing. The highest temperature and strain sensitivities of the hybrid acoustic modes (HAMs) are 1.082 MHz/℃ and 0.0289 MHz/με, respectively, which is suitable for microfiber sensing application of high temperature and strain resolutions. Meanwhile, the temperature and strain sensitivities of the SAMs are less affected by fiber diameter changes, ranging from 0.05 MHz/℃/μ to 0.25 MHz/℃/μ and 1×10^-4 MHz/με/μ to 5×10^-4 MHz/με/μ, respectively. It can be found that that SAW BS for temperature and strain sensing would put less stress on manufacturing constraints for optical microfibers. Besides, the simultaneous sensing of temperature and strain can be realized by SAW and HAW BS, with temperature and strain errors as low as 0.30 ℃-0.34 ℃ and 14.47 με-16.25 με.     

A Novel Rotation Speed Measurement Method Based on Surface Acoustic Wave

This paper presents an original passive wireless rotation speed measurement method based on surface acoustic wave (SAW) technology. A theoretical analysis was conducted on the principle of SAW rotation speed measurement and a numerical analysis on the SAW response energy pulses with different rotation angles and resonance frequencies was performed. Numerical calculation results showed that when the distance and the effective length of the antenna connected to SAWR vary with the rotation angle, the energy of acquired SAW response varies periodically. The rotation speed was estimated by searching the crossing points of the SAW response energy pulses and its mean value line. The SAW rotation speed measurement system was set up and the high performance SAW resonators were fabricated on a quartz substrate. The proposed measurement system was tested with a maximum error of 0.6 rpm, indicating that the system is capable of measuring rotation speeds from 10 to 100 rpm. Experimental results verified the validity and feasibility of presented rotation speed measurement method.     

表面声波传感器及其应用

本文简要介绍多种表面声波传感器的结构、特点、应用及其研究进展概况。表面声波传感器依其波型分类,主要包括瑞利波、水平切变声板波、乐甫波和兰姆波传感器;其应用领域根据作用特点大致可分为物理传感器和化学、生物传感器,前者较易实现,后者特异性强,需要针对具体情况作更细致研究。由于表面声波的传播速度和相位对周围环境的参量变化极为敏感,因此有关传感器具有很高的灵敏度和广泛的应用领域。     

Development of SH-SAW sensors for underwater measurement

We developed SH (shear horizontal) surface acoustic wave (SAW) sensors to detect protein molecules in liquid solutions applying a particular antibody thin film on the delay line of transverse SAW devices. The antibody investigated was human-immuno-globulin G (HigG) to hold the antigens (anti-HigG) in the protein solution to be measured. The sensor showed stable response to the mass loading effects of the anti-HigG molecules with the sensitivity up to 10.8 ng/ml/Hz.     

Bragg diffraction of microcavity polaritons by a surface acoustic wave

Bragg scattering of polaritons by a coherent acoustic wave is mediated and strongly enhanced by the exciton states resonant with the acoustic and optic fields in the intraband and interband transitions, respectively. In this case, in contrast with conventional acousto-optics, the resonantly enhanced Bragg spectra reveal the multiple orders of diffracted light. For polaritons in GaAs microcavities driven by a surface acoustic wave of nu(SAW)=1 GHz and I(ac)< or approximately 100 W/cm(2) the main acoustically induced band gap can be as large as Delta(MC)(ac) approximately equal to 0.6 meV and the Bragg replicas up to n=3 can be observed.     

SAW characteristics of AlN films sputtered on silicon substrates

This article is focused on the analysis of the electroacoustic response of surface acoustic wave (SAW) filters made of aluminium nitride (AlN) thin films on various types of Si wafers. AlN films with (00.2) orientation were deposited by RF reactive sputtering of an Al target in Ar and N(2) admixtures on Si(100) and (111) wafers with resistivities ranging between 10 and 2000 Omega cm. The electroacoustic response of SAW filters with an acoustic wavelength of 40 microm was analysed by measuring the Sij parameters with a network analyser. We have determined that the out-of-band loss is directly related to the Si substrate resistivity, varying from 26 dB for 10 Omega cm to 55 dB for 2000 Omega cm. The SAW velocity depends on the orientation of the Si wafer, being approximately 4700 m/s for Si(111) and 5100 m/s for Si(100). The electroacoustic responses of the SAW filters were fitted by computations based on a simple circuital model that takes into account parasitic effects such as airborne electromagnetic coupling and conduction through the substrate. This procedure provides accurate values of the electromechanical coupling factor k2 even for devices with poor characteristics. Good quality SAW filters of AlN on high resistivity Si(100) wafers with k2 larger than 0.12% are demonstrated.     

Determination of crystallographic orientation of large grain metals with surface acoustic waves

A previously described laser ultrasonic technique known as spatially resolved acoustic spectroscopy (SRAS) can be used to image surface microstructure, using the local surface acoustic wave (SAW) velocity as a contrast mechanism. It is shown here that measuring the SAW velocity in multiple directions can be used to determine the crystallographic orientation of grains. The orientations are determined by fitting experimentally measured velocities to theoretical velocities. Using this technique the orientations of 12 nickel and 3 aluminum single crystal samples have been measured, and these are compared with x-ray Laue backreflection (LBR) measurements with good agreement. The root mean square difference between SRAS and LBR measurements in terms of an R-value is less than 4.1°. The influence of systematic errors in the SAW velocity determination due to instrument miscalibration, which affects the accurate determination of the planes, is discussed. SRAS has great potential for complementary measurements or even for replacing established orientation determination and imaging techniques.     

All-optical adaptive scanning acoustic microscope

We have constructed a fast laser-based surface acoustic wave (SAW) microscope, which may be thought of as a non-perturbing scanning acoustic microscope. The instrument is capable of rapid high resolution vector contrast imaging at several discrete frequencies, without any damage to the sample. Tailoring the generating optical distribution using computer-generated holograms allows us to both focus the acoustic waves (increasing their amplitude) and to spread the optical power over the sample surface (preventing damage). Accurate quantitative amplitude and phase (velocity) measurements and unique acoustic contrast mechanisms are possible with our instrument based on this technology due to the non-perturbing nature and the instrument geometries.However, the complexity of the optical generation profile leads to a strong dependence on material properties such as the SAW velocity and material anisotropy. We address these issues in this paper, and demonstrate how a spatial light modulator may be used to adapt the generating optical distribution to compensate for the material properties. This facilitates simpler alignment and velocity matching, and, combined with an acoustic wavefront sensor, will allow real-time adjustment of the generating source to enable imaging on anisotropic materials.     

ZnO薄膜/金刚石在不同激励条件下声表面波特性的计算与分析

本文首先以刚度矩阵法为基础, 给出了ZnO薄膜/金刚石在四种不同激励条件下的有效介电常数计算公式. 然后以此为工具, 分别计算了多晶ZnO(002) 薄膜/多晶金刚石和单晶ZnO(002) 薄膜/多晶金刚石的声表面波特性, 并根据计算结果及设计制作声表面波器件的要求, 对ZnO膜厚的选择进行了详细地分析. 最后讨论了ZnO/金刚石/Si复合晶片可以忽略Si衬底对声表面特性影响时对金刚石膜厚的要求. 关键词： 声表面波 压电多层结构 有效介电常数 刚度矩阵法     

准一维电子通道中声电电流的理论计算

表面声波在GaAs/Al _x Ga_1-x As异质结表面上沿由分裂门产生的准一维电子通道方向传 播时，在通道中诱导产生声电电流.采用WKB近似，计算了只有一个电子被量子阱俘获时的声电电流；并在此基础上，详细讨论了表面声波的频率和功率，以及门电压和源漏偏压对声电电流的影响. 关键词： 表面声波 准一维电子通道 量子阱 声电电流     

A Novel Acoustic Emission Fiber Optic Sensor Based on a Single Mode Optical Fiber Coupler

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Acousto-optic light deflection in an Al2O3 optical waveguide structure

The total deflection of an optical guided wave by a surface acoustic wave (SAW) in a silicon-based SiO₂/AL₂O₃/SiO₂ optical waveguide structure is reported. The SAW is generated by an interdigital transducer with piezoelectric ZnO deposited on top of the optical waveguide structure.     

Analysis of spurious bulk waves in ball surface wave device

We analyzed the acoustic waves propagating in a sphere to establish a useful guideline for the design of NDE apparatus and ball surface acoustic wave (SAW) device exploiting the diffraction-free propagation of SAW on a sphere. First, we calculated the laser-generated acoustic displacements both under ablation condition and under thermoelastic condition and verified experimentally the validity of the calculation. Next, the acoustic waves excited by out-of-plane stress and those excited by in-plane stress were compared. The results showed that when the out-of-plane stress was applied, the relative amplitudes of the bulk waves to that of the SAW were larger and the number of bulk waves was larger than that when the in-plane stress was applied, while the SAW had similar waveforms in each case. The ratio of the relative amplitude of the bulk waves for the out-of-plane stress and the in-plane stress was 3.1:1 at phi(1)=90 degrees and 1.67:1 at phi(1)=0 degrees. The large amplitude for the out-of-plane stress can be explained by wide directivities of bulk waves. Consequently, we found that it is necessary for ball SAW device to select a piezoelectric material and form of interdigital transducer so that the in-plane stress becomes dominant.     

Scanning tunneling microscopy of RF oscillating surfaces

Amplitude and phase of high frequency surface acoustic wave (SAW) fields are investigated by a novel scanning tunneling microscopy technique. The gap voltage is modulated at a slightly detuned high frequency. Due to the nonlinearity of the tunneling process a frequency mixing appears. For scanned areas with dimensions much smaller than the wavelength of the SAW a remarkable local variation of amplitude and phase of the tunneling current at the difference frequency is observed. Depending on the local morphology different components of the particle displacement vector are detected. Model calculations of amplitude and phase images are presented for a real topography.     

Determination of elastic properties of Si/Ge superlattices and Si1-xGex films from surface acoustic modes by Brillouin scattering

Surface acoustic waves (SAW) have been measured by means of Brillouin scattering (BS) both as a function of k×h and the direction of k in the sample plane (k is the wavevector of the surface acoustic mode and h the thickness of the film). The velocity of the Rayleigh wave on sufficiently thick films (h > 4000 Å) has been experimentally found to ve uneffected by the elastic properties of the substrate material. Thus the directional dependence of the hypersonic surface wave is completely determined by the elastic properties of the layer material alone and reflects its crystallographic symmetry. The SL's can be treated as media with effective elastic constants because the wavelength of the thermally excited Rayleigh wave is much longer than the SL period. Furthermore, the angular dispersion of the SAW can be used to calculate the elastic constants of each film separately.     

Laser-ultrasonic surface wave dispersion measurements on surface-treated metals

Surface acoustic wave (SAW) velocity spectroscopy has been long considered to be one of the leading candidates for nondestructive characterization of surface-treated metals because of its ability to probe the material properties at different penetration depths depending on the inspection frequency. We developed a high-precision laser-ultrasonic technique to study the feasibility of SAW dispersion spectroscopy for residual stress assessment on shot-peened metals. This technique is capable of measuring SAW dispersion with a relative error of 0.1% over a frequency range from 2 to 15 MHz. Our experimental results obtained from shot-peened aluminum 2024-T351 samples indicate that the dispersion of the surface wave is a superposition of different effects of surface treatment in the material, including surface roughness, compressive residual stress, and cold work. Although the surface roughness induced component is often the dominating part of the overall dispersion, the experimental results also indicate that it is feasible to observe a perceivable change in the dispersion of the SAW when the specimen is heat-treated at different temperatures, which has no perceivable effect on the surface roughness. The part of the dispersion, which changes during annealing via thermal relaxation, is due to near-surface residual stresses and the decay of texture, although at high frequencies nonuniform grain coarsening could also play a significant role.