表面声波传感器及其应用

本文简要介绍多种表面声波传感器的结构、特点、应用及其研究进展概况。表面声波传感器依其波型分类,主要包括瑞利波、水平切变声板波、乐甫波和兰姆波传感器;其应用领域根据作用特点大致可分为物理传感器和化学、生物传感器,前者较易实现,后者特异性强,需要针对具体情况作更细致研究。由于表面声波的传播速度和相位对周围环境的参量变化极为敏感,因此有关传感器具有很高的灵敏度和广泛的应用领域。

Surface acoustic wave sensors and their applications

This paper introduces briefly the structures,specifications and applications of surface acoustic wave(SAW)sensors,as well as the progresses in the related studies.The SAW sensors include Rayleigh wave,shear horizontal acoustic plate wave,Love wave and Lamb wave sensors.The application fields are classified according to the functions into physical sensors and chemical/biological sensors;the former can be performed more easi- ly,but the latter homes special functions and so needs to be studied in more details based on the practical conditions.The SAW sensors have very high sensitivity and wide applica- tions due to the velocities and phases of SAW are very sensitive to the parameter changes of environments.