一种基于光纤阵列的激光照明方法

提出一种用于激光三维成像的均匀光照明系统,通过仿真实验验证了系统的有效性。光纤脉冲激光器发射窄脉冲红外激光光束经过光纤分路器后,出射64路能量相同的激光光束,每一路激光光束从光纤阵列出射,出射阵列置于发射光学系统焦点前后,形成点阵照明,被目标物反射的激光光束经接收光学系统接收后,成像于APD面阵探测器之上,像元和点光源一一对应。解决了传统照明系统存在的光能分布不均匀和激光能量利用率低的问题。     

全息波导显示系统中输出光栅的优化

全息波导显示系统中输出光栅的衍射效率、位置和长度对整个显示系统的光强输出均匀性及能量利用率有重要的影响.通常输出光强均匀性由输出光栅的衍射效率决定,能量利用率受多重光栅的位置和长度影响.本文以中心视场光束的输出光强均匀为目的,对相应输出光栅衍射效率的位置分布进行优化与曲线拟合,得到输出光栅衍射效率随输出位置连续递增的分布曲线,并应用到所有视场光束.计算结果表明,相比于传统阶梯状衍射效率分布输出光栅,全息波导显示系统中采用具有连续衍射效率分布输出光栅时的光强输出均匀性得到明显提升.针对部分衍射光束未能进入出瞳的现象,提出错位优化法,按照出瞳大小和使用距离优化各重输出光栅的位置和尺寸,减小了光栅的无效衍射区域,提高了出瞳范围内的能量利用率.     

米粒大激光组合器将为可穿戴设备提供屏幕解决方案

正日本福井大学的研究人员研制出一种激光光束组合器,其仅有一粒米大小,却可为智能穿戴设备提供屏幕扫描方案。这个激光光束组合器包含3种光波导和3个定向耦合器。研究人员介绍,耦合器可将一种光输入转换成为另一种。图中绿光由光波导中心穿过,由始至终都呈直线。而另外两个发生弯曲的光束则是蓝色和红色光。其中,3个光束的位置次序是非常重要的,因为这将直接影响到最后光输出的效率。在光波导的输出端,3个光     

光束整形在激光照明中的应用

提出利用光束整形技术提高激光照明均匀性、调节照明远场光斑尺寸的方法,用Easylaser激光仿真软件分析光束截断比对照明均匀性的影响,分析大气湍流条件下光束整形对照明均匀性的影响,并比较调节光束质量与光束整形对照明均匀性的影响。结果表明:光束整形具有调节照明激光远场光斑尺度及均匀性的能力,相位调节因子越大,整形后远场光斑半径越大、均匀性越好;光束截断比越大照明均匀性越好;弱湍流条件下,光束整形比调节光束质量的照明激光远场光斑均匀性更好。     

泵浦匀化对Innoslab激光放大器光束质量的改善

针对结构紧凑的部分端面泵浦混合腔板条激光放大器，研究了泵浦匀化对其输出激光光束质量的改善作用。基于ZEMAX仿真软件，设计并对比分析了直接成像和波导匀化后再成像两种泵浦耦合方式对激光二极管阵列慢轴（晶体宽度）方向光强分布均匀性的影响，发现波导匀化后泵浦均匀性得到明显提升且激光二极管阵列发光坏点对泵浦成像的影响得以弱化。进一步实验验证了泵浦匀化对Innoslab激光放大器性能的改善作用:波导匀化后慢轴方向泵浦均匀度从90.6%提高到95.4%，进而使3通放大后输出激光光束质量因子M2从2.41提升到1.55，并且有效抑制了多通放大腔内的自激振荡。     

提高深紫外光刻照明系统扩束单元光束均匀性的方法

在曝光线宽为90nm节点的投影光刻机照明系统中,针对准分子激光光源扩束后出射光束均匀性较差的问题,用高斯光束边缘叠加能够提高均匀性的原理对反射式扩束单元进行了分析。结果表明,平行反射式扩束单元出射光束之间叠加尺寸与反射板某区域透射率存在矛盾,制约了照明光束均匀性的提高。为此,提出了非平行反射扩束镜组,推导了出射光束尺寸、叠加子光束个数与两反射镜楔角之间的关系式,确定了楔角的取值范围和扩束单元的结构形式。通过建模分析,验证了设计的扩束单元在实现光束一维扩束的同时,不仅减小了叠加光束的干涉散斑效应,还提高了光束均匀性。     

斜波导喇曼振荡器

 采用斜波导的喇曼氢气池, 使泵浦激光束在波导内部传播, 增大了受激喇曼散射的作用区域。在传播过程中光束截面逐渐被压缩, 补偿因波导内壁的反射损耗而引起的功率密度下降。在一定气压范围内提高了喇曼转换的效率, 并利用波导对激光束的均匀作用, 使输出的一阶斯托克斯光光强的均匀性获得改善。     

基于阶梯相位调制的窄谱激光主动照明均匀性

提出一种基于阶梯相位调制的窄谱激光主动照明方法,利用阶梯型相位调制器对窄谱激光进行相位调制,提高照明激光到达目标处的光斑均匀性和稳定性.建立了窄谱激光阶梯相位调制和照明激光远场光斑均匀性的理论模型,搭建了光束经过1.8 km水平传输的窄谱激光主动照明实验平台,通过5阶梯相位调制器对0.05 nm线宽的照明激光进行相位调制,实现了照明激光远场光斑匀化实验.实验结果表明,通过5阶梯相位调制器进行相位调制后,远场光斑包含57%能量区域的空间闪烁率从0.73改善到0.33,中心光强时间闪烁指数从0.38改善到0.14,照明激光远场光斑均匀性和稳定性都得到明显提升.     

基于振动弛豫理论提高光抽运太赫兹激光器输出功率的研究

以半经典密度矩阵理论和分子振动弛豫理论为基础,研究添加适当比例缓冲气体与适当减小波导芯径对光抽运太赫兹激光器输出光强的影响.计算结果表明,加入适当比例缓冲气体或适当减小波导的芯径均能提高太赫兹激光的输出光强;同时优化两个参数能进一步提高抽运激光能量转化为太赫兹激光能量的效率,延长工作腔中的有效激活区,延缓抽运饱和效应的出现,提高太赫兹激光输出光强.该研究对提高光抽运太赫兹激光器的能量转化效率、提高光抽运太赫兹激光器的输出功率及实现光抽运太赫兹激光器的小型化有重要的指导意义.     

远红外自由电子激光光腔改进的模拟分析

 提出在中物院远红外自由电子激光光腔中全程采用波导对光场进行约束，利用计算光束与电子束横向叠合因子分析了光腔中是否加入波导管对腔内净增益的影响。模拟了减小波导管间隙和提高扭摆器峰值磁场场强对腔内增益的影响。3维数值模拟计算表明在光腔中加入波导使扭摆器净增益由-6%提高到约25%；波导管的间隙每缩小2 mm，腔内净增益提高7％~15％；场强每提高0.02 T，腔内净增益可增加5%~10%。     

准分子激光光束均匀性的评价指标研究

 详细研究了准分子激光光束均匀性的各项评价指标，加工窗口描述了加工任务本身对光束均匀度的要求；能量分数回答了具体加工窗口即均匀度要求下的能量利用率问题；平顶因子则描述了整个光斑能量分布范围内的均匀性问题。利用激光波面分析仪对不同均匀器所获得的均匀光束进行评价比较，蝇眼透镜均匀器能量利用率高，整个光斑内的均匀效果好，但最佳均匀截面的位置动态范围小；组合棱镜均匀器均匀截面动态范围大，但整体均匀效量较差。     

XeCl准分子激光光束均匀器及其应用

采用光束均匀器，改善ＸｅＣｌ准分子激光器输出光束强度的分布，其起伏优于２％，用这一装置测量了Ｃ６０薄膜的刻蚀阈值，并完成了准分子激光改变Ｃ６０薄膜电导率的实验研究。     

Performance of a zoom homogenizer for reshaping coherent laser beams

We have reshaped the TEM₀₀ beam emitted by a diode-pumped Nd-Yag laser by means of an optical homogenizer with zoom. The laser beam, first enlarged up to a size of (100 × 37.5) mm², is homogenized and resized to a final dimension continuously adjustable from (130 × 4.5) mm² up to (130 × 52) mm². We measured the plateau uniformity, the root mean square fluctuation and the edge steepness of the beam according to the ISO standard definitions, showing a poor reliability of the above parameter values due to the definitions themselves, and propose an amendment to overcome this problem. We obtained a very sharp edge steepness, but the spatial coherence of the laser beam put a lower limit to the high-frequency intensity fluctuations on the plateau region of the homogenized beam. Finally, we discuss the optimum homogenizer design for spatially coherent laser beams, including the depth of focus issue.     

Observing Nanometre Scale Particles with Light Scattering for Manipulation Using Optical Tweezers

Nanometre-scale particles can be manipulated using optical tweezers, but cannot be directly observed. We present a simple method that nanoparticles can be directly observed using optical tweezers combined with dark field microscopy. A laser beam perpendicular to a tightly focused laser beam for trap illuminates specimen and does not enter objective, nanoparticles in focal plane all can be directly observed in dark field because of light scattering. It is implemented that the polystyrene beads of diameter lOOnm can be directly observed and trapped.     

One-dimensional reflective diffuser for line beam shaper with microlens array homogenizer

A laser beam shaping architecture based on a microlens array homogenizer has been exploited, in which the interference effect due to the coherency of the laser source deteriorates the uniformity. Moving diffusers have been considered as an effective way of averaging out the interference pattern. Because the uniformity is required in the line direction only, a one-dimensional reflective-type diffuser with a well-controlled diffusion angle has been proposed and prototyped. The diffuser is attached onto a rotating cylinder for movement in operation. The experiment demonstrates the effectiveness of the scheme, and a line beam with a uniformity of up to 92% has been achieved.     

基于微透镜阵列匀束的激光二极管面阵抽运耦合系统分析

为了提升高功率固体激光器中激光二极管(LD)面阵抽运场性能,采用几何光学和数理统计分析的方法,建立了基于微透镜阵列匀束的LD面阵抽运耦合系统的数学与物理模型,对微透镜阵列参数与最终耦合输出抽运场参数之间的关系进行分析,明确了微透镜单元F数、微透镜通光单元数以及微透镜阵列空间周期参数的设计原则.经实验测试,优化设计完成的LD面阵抽运耦合系统光场不均匀度为7.9%,耦合效率为90.7%.     

Laser processing of micro-optical components in quartz

Laser induced backside wet etching combined with the diffractive gray tone phase mask has been used for the fabrication of a micro-lens array with a single lens diameter of 1 mm and a micro-prism in quartz. The micro-lens array was tested as beam homogenizer for high power XeCl excimer laser yielding a clear improvement in the quality of the laser beam.The optimum fluence range for fabrication of micro-lenses by laser induced backside wet etching using 1.4 M pyrene in THF solution and 308 nm irradiation wavelength is 1-1.6 J/cm². The etching mechanisms of LIBWE are based on a combination of pressure and temperature jumps at quartz-liquid interface.     

环形区域上Zernike模式法波前重构

 针对激光技术领域常见的环形激光光束,利用圆域Zernike多项式和环域Zernike多项式进行模式法波前重构,结果显示,如果环形激光光束波前相位畸变主要由低空间频率成分组成,则可以直接利用圆域Zernike多项式进行波前重构;如果环形激光光束波前相位畸变含有较多的高阶频率成分,则利用环域Zernike多项式进行波前重构。     

Fibre bundle scanner for laser photocoagulation treatment

Wide-angle irradiation is achieved in laser photocoagulation treatment by means of a fibre bundle. The laser transmission system consists of multiple quartz fibres, the input ends of which are aligned and driven by a stepper motor across a high-power laser beam. The output ends are arranged in a hexagonal close-packed array from which the diverging laser beam successively irradiates different parts of a lesion without the use of a mechanical scan over the lesion. This fibre bundle scanner is useful for the treatment of widely spread skin lesions such as port wine stains.     

New simplified coupling scheme for the delivery of 20 MW Nd:YAG laser pulses by large core optical fibers

The feasibility of transmitting 20 MW, 5 ns laser pulses from a frequency doubled Nd:YAG laser through a standard 1500 μm multi mode optical fiber is demonstrated. A new coupling scheme employing an optical homogenizer prevents breakdown in air without the use of a vacuum chamber. At the same time a very homogeneous flat top beam profile on the fiber surface is achieved. The new scheme therefore clearly simplifies fiber coupling of high power laser pulses. Experiments on the delivery of more than 20000 pulses with 110 mJ mean energy without fiber damage have been performed. Received: 2 August 2000 / Revised version: 18 August 2000 / Published online: 22 November 2000