GaN基激光器多量子阱垒材料的研究

在(0001)蓝宝石衬底上分别用金属有机化学气相沉积技术外延生长了InGaN/GaN, InGaN/InGaN, InGaN/AlInGaN多量子阱激光器结构, 并分别制作了脊形波导GaN基激光器。同步辐射X射线衍射,电注入受激发射光谱测试及光功率-电流(L-I)测试证明,相对于GaN垒材料,InGaN垒材料,AlInGaN四元合金垒材料更能改善多量子阱的晶体质量,提高量子阱的量子效率及降低激光器阈值电流。相关的机制为：组分调节合适的四元合金垒层中Al的掺入使得量子阱势垒高度增加,阱区收集载流子的能力增强;In的掺入能更多地补偿应力,减少了由于缺陷和位错所产生的非辐射复合中心密度;In的掺入还减小了量子阱中应力引致的压电场,电子空穴波函数空间交叠得以加强,使得辐射复合增加。     

载流子复合机制对InGaN多量子阱蓝光LED调制带宽的影响

通过设计InGaN多量子阱LED有源区的不同结构,研究了载流子复合机制对LED调制速度的影响。结果显示,由于窄量子阱LED的载流子空间波函数重叠几率更高,且电子泄露效应更显著,所以复合速率更快,调制带宽更高。In组分为1%的InGaN量子垒LED可提高辐射复合的权重,使得调制带宽高于GaN量子垒LED;In组分为5%时,电子泄露和俄歇复合占据主导地位,且由于这两种复合机制复合速率很快,所以调制带宽显著提高。     

AlInGaAs/AlGaAs垂直腔面发射激光器温度特性的对比研究

通过测量、对比材料生长和器件制备条件基本相似，但是谐振腔腔模波长与增益峰值波长相对位置明显不同的两类氧化物限制型应变AlInGaAs/AlGaAs量子阱垂直腔面发射激光器(VCSEL)在261—369K温度范围内输出光功率-电流的变温曲线，同时结合测试得到的两类样品的白光反射谱、光荧光谱以及模拟计算得到的不同温度下VCSEL反射谱和增益谱，分析了输出光功率、阈值电流、斜率效率和激射波长随温度变化的关系，掌握了新材料AlInGaAs的温度特性，得到了谐振腔腔模波长和增益峰值波长的相对位置对VCSEL输出特性，尤其是对阈值的影响规律，指出获得室温工作阈值最低且稳定的VCSEL的一个方法是调整谐振腔腔模波长和增益峰值波长的相对位置，并利用这种方法获得了特征温度T₀=333K的AlInGaAs/AlGaAs量子阱VCSEL器件. 关键词： AlInGaAs 垂直腔面发射激光器 特征温度     

三元系和四元系GaN基量子阱结构的显微结构

GaN基量子阱是光电子器件如发光二极管、激光二极管的核心结构。实验表明,采用InGaN/GaN三元和AlInGaN/GaN四元两种不同量子阱结构的激光二极管的发光性质和发光效率有明显差别,研究了这两种不同量子阱结构的显微特征。利用原子力显微镜表征了样品的(001)面;通过高分辨X射线衍射对两种量子阱结构的(002)面作ω/2θ扫描测得其卫星峰并分析了两种不同量子阱结构的界面质量;利用X射线衍射对InGaN/GaN和AlInGaN/GaN这两种量子阱的(002)、(101)、(102)、(103)、(104)、(105)和(201)面做ω扫描,进而得到其摇摆曲线。最后利用PL谱研究了它们的光学性能。通过这些显微结构的分析和研究,揭示了InGaN/GaN三元和AlInGaN/GaN四元两种不同量子阱结构宏观性质不同的结构因素。     

GaN基量子阱的激子跃迁和光学性质

采用光致发光谱、光致发光激发谱以及拉曼光谱对GaN基量子阱材料进行了实验观察和分析 .实验结果表明样品中量子点结构不均匀及InGaN层中In成分分布不均匀 ,且其光致发光谱的波峰是由自由激子辐射复合发光引起的 .同时由室温下InGaN/GaN量子阱的拉曼谱可得知InGaN/GaN多量子阱的结构特征     

引入n型InGaN/GaN超晶格层提高量子阱特性研究

利用金属有机物化学气相淀积技术在蓝宝石衬底上生长了InGaN/GaN量子阱结构. 研究了引入n型InGaN薄层或InGaN/GaN超晶格层的量子阱特性,结果表明通过引入n型InGaN薄层或InGaN/GaN超晶格层缓解了量子阱有源区中的应力,改善了多量子阱表面形貌,减少了V型缺陷密度,而且提高了多量子阱的光致发光强度,从而也改进了LED的发光效率. 关键词： InGaN/GaN多量子阱 原子力显微镜 X射线双晶衍射 光致发光     

蓝光激光器结构中InGaN/GaN多量子阱界面效应的精细光致发光光谱研究

金属有机化学气相沉积（MOCVD）方法制备InGaN/GaN多量子阱结构时,在GaN势垒层生长的N₂载气中引入适量H₂,能够有效改善阱/垒界面质量从而提升发光效率。本工作利用光致发光（PL）光谱技术,对蓝光激光器结构中的InGaN/GaN多量子阱的发光性能进行了精细的光谱学测量与表征,研究了通H₂生长对量子阱界面的调控效应及其发光效率提升的物理机制。室温PL光谱结果显示,GaN势垒层生长载气中引入2.5%的H₂使InGaN/GaN多量子阱的发光效率提升了75%、发光峰的峰位蓝移了17 meV、半峰宽（FWHM）减小了10 meV。通过功率依赖的PL光谱特征分析,我们对InGaN/GaN量子阱中的量子限制Stark效应（QCSE）和能带填充（Band Filling）效应进行了清晰的辨析,发现了发光峰峰位和峰宽的光谱特征主要受QCSE效应影响,H₂的引入能够大幅度降低QCSE效应,并且确定了QCSE效应被完全屏蔽情况下的发光峰能量为2.75 eV。温度依赖的PL光谱数据揭示了通H₂生长量子阱结构中显著减弱的载流子局域化行为,显示界面质量提高有效降低了限制势垒的能量波动,从而导致更窄的发光峰半峰宽。PL光谱强度随温度的变化规律表明,通H₂生长并不改变量子阱界面处的非辐射复合中心的物理本质,却能够显著减少非辐射复合中心的密度,有助于提升量子阱的发光效率。通过时间分辨PL光谱分析,发现通H₂生长会导致量子阱结构中更短的载流子辐射复合寿命,但不影响非辐射复合寿命。载流子复合寿命的变化特征进一步确认了通H₂生长对量子阱结构中QCSE效应和非辐射复合中心的影响规律。综合所有PL光谱分析结果,我们发现通H₂生长能够提高InGaN/GaN多量子阱的界面质量、显著减弱应力效应（更弱的QCSE效应）、降低限制势垒的能量波动以及减少界面处非辐射复合中心的密度,从而显著提升量子阱的发光效率。该研究工作充分显示了PL光谱技术对半导体量子结构发光性能的精细表征能力,光谱分析结果能够为InGaN/GaN多量子阱生长提供有价值的参考。     

高效InGaN/AlInGaN发光二极管的结构设计及其理论研究（英文）

利用Advanced Physical Models of Semiconductor Devices(APSYS)理论对比研究了InGaN/AlInGaN和InGaN/GaN多量子阱作为有源层的InGaN基发光二极管的结构和电学特性。与InGaN/GaN基LED中GaN作为垒层材料相比,在AlInGaN材料体系中,通过调节AlInGaN中Al和In的组分可以优化器件的性能。当InGaN阱层材料中In组分为8%时,可以实现无应力的In0.08Ga0.92N/AlInGaN基LED。在这种无应力结构中可以进一步降低大功率LED的"效率下降"(Effciency droop)问题。理论模拟结果显示,四元系AlInGaN作为垒层可以进一步减少载流子泄露,增加空穴注入效率,减少极化场对器件性能的影响。在In0.08Ga0.92N/AlInGaN量子阱中的载流子浓度、有源层的辐射复合率、电流特性曲线和内量子效率等方面都优于InGaN/GaN基LED。无应变AlInGaN垒层代替传统的GaN垒层后,能够得到高效的发光二极管,并且大电流注入下的"效率滚降"问题得到改善。     

高效InGaN/AlInGaN发光二极管的结构设计及其理论研究

利用Advanced Physical Models of Semiconductor Devices (APSYS)理论对比研究了InGaN/AlInGaN 和 InGaN/GaN多量子阱作为有源层的InGaN基发光二极管的结构和电学特性。与InGaN/GaN 基LED 中GaN作为垒层材料相比,在AlInGaN材料体系中,通过调节AlInGaN中Al和In的组分可以优化器件的性能。当InGaN阱层材料中In组分为8%时,可以实现无应力的In_0.08Ga_0.92N/AlInGaN基 LED。在这种无应力结构中可以进一步降低大功率LED的"效率下降"(Effciency droop)问题。理论模拟结果显示,四元系AlInGaN作为垒层可以进一步减少载流子泄露,增加空穴注入效率,减少极化场对器件性能的影响。在In_0.08Ga_0.92N /AlInGaN量子阱中的载流子浓度、有源层的辐射复合率、电流特性曲线和内量子效率等方面都优于InGaN/GaN基LED。无应变AlInGaN垒层代替传统的GaN垒层后,能够得到高效的发光二极管,并且大电流注入下的"效率滚降"问题得到改善。     

具有三角形InGaN/GaN多量子阱的高内量子效率的蓝光LED(英文)

对InGaN量子阱LED的内量子效率进行了优化研究。分别对发光光谱、量子阱中的载流子浓度、能带分布、静电场和内量子效应进行了理论分析。对具有不同量子阱数量的InGaN/GaN LED进行了理论数值比对研究。研究结果表明,对于传统结构的LED而言,2个量子阱的结构相对于5个和7个量子阱具有更好的光学性能。同时还研究了具有三角形量子阱结构的LED,研究结果显示,三角形多量子阱结构具有较高的电致发光强度、更高的内量子效率和更好的发光效率,所有的优点都归因于较高的电子-空穴波函数重叠率和低的Stark效应所产生的较高的载流子输入效率和复合发光效率。     

Efficiency droop suppression in GaN-based light-emitting diodes by chirped multiple quantum well structure at high current injection

Gallium nitride(Ga N) based light-emitting diodes(LEDs) with chirped multiple quantum well(MQW) structures have been investigated experimentally and numerically in this paper. Compared to conventional LEDs with uniform quantum wells(QWs), LEDs with chirped MQW structures have better internal quantum efficiency(IQE) and carrier injection efficiency. The droop ratios of LEDs with chirped MQW structures show a remarkable improvement at 600 m A/mm2,reduced down from 28.6%(conventional uniform LEDs) to 23.7%(chirped MQWs-a) and 18.6%(chirped MQWs-b),respectively. Meanwhile, the peak IQE increases from 76.9%(uniform LEDs) to 83.7%(chirped MQWs-a) and 88.6%(chirped MQWs-b). The reservoir effect of chirped MQW structures is the significant reason as it could increase hole injection efficiency and radiative recombination. The leakage current and Auger recombination of chirped MQW structures can also be suppressed. Furthermore, the chirped MQWs-b structure with lower potential barriers can enhance the reservoir effect and obtain further improvement of the carrier injection efficiency and radiative recombination, as well as further suppressing efficiency droop.     

Modeling and simulation of efficiency droop in GaN-based blue light-emitting diodes incorporating the effect of reduced active volume of InGaN quantum wells

The efficiency droop of InGaN-based blue light-emitting diodes (LEDs) is analyzed using numerical simulations with a modified ABC carrier recombination model. The ABC model is modified to include the effect of reduced effective active volume of InGaN quantum wells (QWs) and incorporated into the numerical simulation program. It is found that the droop of internal quantum efficiency (IQE) can be well explained by the effect of reduced light-emitting active volume without assuming a large Auger recombination coefficient. A simulated IQE curve with the modified ABC model is found to fit quite well with a measured efficiency curve of an InGaN LED sample when the effective active volume takes only 2.5% of the physical volume of QWs. The proposed numerical simulation model incorporating the reduced effective active volume can be advantageous for use in the modeling and simulation of InGaN LEDs for higher efficiency.     

Investigation of GaN-based dual-wavelength light-emitting diodes with p-type barriers and vertically stacked quantum wells

Designs of p-doped in quantum well (QW) barriers and specific number of vertically stacked QWs areproposed to improve the optical performance of GaN-based dual-wavelength light-emitting diodes (LEDs).Emission spectra, carrier concentration, electron current density, and internal quantum efficiency (IQE)are studied numerically. Simulation results show that the efficiency droop and the spectrum intensityat the large current injection are improved markedly by using the proposed design. Compared with the conventional LEDs, the uniform spectrum intensity of dual-wavelength luminescence is realized when aspecific number of vertically stacked QWs is adopted. Suppression of electron leakage current and the promotion of hole injection efficiency could be one of the main reasons for these improvements.     

Optical polarization characteristics for AlGaN-based light-emitting diodes with AlGaN multilayer structure as well layer

The optical properties of AlGaN-based quantum well(QW) structure with two coupled thin well layers are investigated by the six-by-six K-P method.Compared with the conventional structure,the new structure,especially the one with lower Al-content in the barrier layer,can enhance the TE-/TM-polarized total spontaneous emission rate due to the strong quantum confinement and wide recombination region.For the conventional QW structure,the reduction of well thickness can lead the degree of polarization(DOP) to decrease and the internal quantum efficiency(IQE) to increase.By using the coupled thin well layers,the DOP for the structure with high Al-content in the barrier layer can be improved,while the DOP will further decrease with low Al-content in the barrier layer.It can be attributed to the band adjustment induced by the combination of barrier height and well layer coupling.The IQE can also be further enhanced to 14.8%-20.5% for various Al-content of barrier layer at J=100 A/cm~2.In addition,the efficiency droop effect can be expected to be suppressed compared with the conventional structure.     

Effect of carrier spillover and Auger recombination on the efficiency droop in InGaN-based blue LEDs

We have investigated efficiency droop in InGaN-based blue LEDs by considering radiative, nonradiative, and carrier spillover processes in the context of internal quantum efficiency (IQE) vs. injection current. If relied on fitting only, both the Auger recombination and an empirical formula for carrier spillover are consistent with experiments. However, the dependence of IQE on quantum well parameters and lack of droop in optical pumping experiments support the notion that carrier spillover is the main mechanism in play.     

量子阱数量变化对InGaN/AlGaN LED的影响

采用软件理论分析的方法分析了InGaN/AlGaN量子阱数量变化对发光二极管内量子效率、电子空穴浓度分布、载流子溢出产生的影响。分析结果表明:量子阱的个数不是越多越好,LED的光学性质和量子阱的个数并不成线性关系。量子阱个数太少时,电流溢出现象较明显;而当量子阱个数太多时,极化现象明显,且会造成材料浪费。因此应根据工作电流选择合适的量子阱个数。     

Reversible Carriers Tunnelling in Asymmetric Coupled InGaN/GaN Quantum Wells

Temperature-dependent photoluminescence （PL） and time resolved photoluminescence （TRPL） are performed to study the PL characteristics and carrier transfer mechanism in asymmetric coupled InGaN/GaN multiple quantum wells （AS-QWs）. Our results reveal that abnormal carrier tunnelling from the wide quantum well （WQW） to the narrow quantum well （NQW） is observed at temperature higher than about lOOK, while a normal carrier tunnelling from the NQW to the WQW is observed at temperature lower than 100 K. The reversible carrier tunnelling between the two Q Ws makes it possible to explore new types of temperature sensitive emission devices. It is shown that PL internal quantum efficiency （IQE） of the NQW is enhanced to about 46% due to the assistant of the abnormal carrier tunnelling.     

Influence of the quantum-confined Stark effect on the temperature-induced photoluminescence blueshift of In GaN/GaN quantum wells in laser diode structures

Measurements of the excitation power-dependence and temperature-dependence photoluminescence(PL) are performed to investigate the emission mechanisms of In Ga N/Ga N quantum wells(QWs) in laser diode structures. The PL spectral peak is blueshifted with increasing temperature over a certain temperature range. It is found that the blueshift range was larger when the PL excitation power is smaller. This particular behavior indicates that carriers are thermally activated from localized states and partially screen the piezoelectric field present in the QWs. The small blueshift range corresponds to a weak quantum-confined Stark effect(QCSE) and a relatively high internal quantum efficiency(IQE) of the QWs.     

Performance improvement of AlGaN-based deep ultraviolet light-emitting diodes with double electron blocking layers

The AlGaN-based deep ultraviolet light-emitting diodes(LED) with double electron blocking layers(d-EBLs) on both sides of the active region are investigated theoretically. They possess many excellent performances compared with the conventional structure with only a single electron blocking layer, such as a higher recombination rate, improved light output power and internal quantum efficiency(IQE). The reasons can be concluded as follows. On the one hand, the weakened electrostatic field within the quantum wells(QWs) enhances the electron–hole spatial overlap in QWs, and therefore increases the probability of radioactive recombination. On the other hand, the added n-AlGaN layer can not only prevent holes from overflowing into the n-side region but also act as another electron source, providing more electrons.