圆形复合式磁控溅射阴极设计及其放电特性模拟研究

基于二维有限元算法使用COMSOL软件对圆形复合式磁控溅射阴极的磁场进行了计算,结合Matlab优化工具箱分别采用遗传算法和模拟退火算法对圆形复合式磁控溅射阴极的结构进行优化,得到靶材利用率达到最大的最优结构.对得到的最优化磁控阴极,基于自洽粒子模拟方法,使用VSim软件对不同工况下的放电特性进行了模拟.研究发现随着磁场非平衡度的增加,阴极表面电势降落最大的位置和等离子体聚集的位置,沿着阴极表面外沿不断向阴极中心移动,阴极表面磁场的强度不断减小.随着磁场非平衡度的增加,等离子体密度先增加后减小,鞘层厚度先减小后增加,等离子体的密度和鞘层厚度不仅与磁场非平衡度有关,而且与磁场强度有关.最后根据粒子模拟的结果,对复合式磁控阴极的靶材刻蚀深度进行了研究.研究发现,在优化前后靶材的刻蚀范围从60 mm扩展至整个靶面,极大地提高了靶材利用率.     

筒形溅射阴极的磁场优化及其高功率放电特性研究

基于高功率脉冲磁控溅射(HiPIMS)技术开发的筒形溅射阴极,配合电磁系统可有效地提升等离子体的输运效率.然而电磁系统的引入反作用于筒内放电特性,从而使靶面放电面积和放电强度无法同时维持.鉴于此,本文通过调整磁场布局,研究了靶面切向(横向)磁场和法向(纵向)磁场对靶面放电的作用规律,优化后靶面切向磁场分布更加均匀,磁场强度高于40 mT的靶面区域占比由51%增至67%,同时法向峰值强度外移,强度由73 mT增至96 mT.采用Ar/Cr体系放电发现:相同工艺条件下,优化后的溅射阴极辉光变亮,靶电流增大,放电面积变宽,放电特性得到显著提升.利用等离子体整体模型仿真和发射光谱仪检测发现优化后离子电流和光谱强度得到明显提升,Cr粒子密度提高一倍,增至2.6×10^20 m^–3,且离化率上升至92.1%,同时输出离子通量提高近一倍,实现了靶面放电与离子输出的双促进.     

筒内高功率脉冲磁控放电的电磁控制与优化

高功率脉冲磁控溅射(Hi PIMS)技术被提出以来就受到广泛关注,其较高的溅射材料离化率结合适当的电磁控制,可产生高致密度、高结合力和高综合性能的涂层,但其沉积速率低、放电不稳定、溅射材料离化率差异较大.我们设计了一种筒形溅射源,通过对结构的设计优化,利用类空心阴极放电效应,使问题得到解决.然而其靶面切向磁场不均匀,电子逃逸严重,进而造成等离子体密度偏低,且放电不均匀.本文通过对其放电和等离子体分布进行仿真,提出电场阻挡和磁铁补偿两种方案,研究了不同电场控制条件下的放电行为和等离子体分布.结果表明:增加电子阻挡屏极可以生成势阱,从而有效抑制电子从边缘的逸出;优化后的磁铁补偿可以显著提高靶面横向磁场的均匀性及靶面利用率.两种方案同时作用时,Hi PIMS放电刻蚀环面积更大、且更加均匀.     

磁约束磁控溅射源的磁场设计

磁控溅射镀膜机中的磁场分布对靶材利用率有着重要影响。为了提高磁控溅射源的靶材利用率,设计组抛弃了传统的"跑道环"形式的磁场设计理念,而是将永磁体或电磁体分置溅射靶的两侧,使其在溅射靶表面上方产生磁约束(磁镜)磁场。本设计使用有限元分析方法对磁场进行仿真计算,通过模拟磁场计算结果和实测结果的比较,验证有限元方法的可靠性。Ansys有限元分析软件对磁场分布进行仿真模拟,大大简化了计算并缩短了设计周期。通过实验验证,磁约束磁场大大提高了靶材的利用率。     

Calculation of the erosion profile of a cathode for magnetron ion-sputtering systems

A method is proposed for calculating the cathode erosion profile in planar magnetron ion-sputtering systems. The method uses integral characteristics of the magnetic and electric fields and does not require detailed information on the spatial characteristics of the discharge plasma. The calculated results are compared with experimental cathode profiles for rectangular and circular planar ion-sputtering systems.     

基片下磁场磁控对溅射辉光及薄膜梯度的影响

溅射时在基片下方放置磁铁，让来自基片下方的磁场发挥磁控作用，以此来研究基片下磁场磁控溅射的方法.发现辉光形貌以及沉积的薄膜厚度分布均发生明显变化的同时，辉光的外形也随着外加磁铁直径的变化而变化.运用磁荷理论对空间磁场分布进行模拟，解释了辉光形貌变化的机理；运用沉积粒子在外加梯度磁场中运动理论解释了膜厚分布. 关键词： 磁控溅射 辉光 磁场模拟 膜厚梯度     

磁控溅射辉光放电特性的模拟研究

采用二维、自洽的PIC/MCC (particle-in-cell with Monte Carlo collision) 方法,模拟了磁控溅射辉光放电过程, 重点讨论了工作参数对放电模式和放电电流的影响. 模拟结果表明, 当工作气压由小到大或空间磁场从强到弱变化时, 放电模式会从阴极空间电荷主导的放电模式过渡到阳极空间电荷主导 的放电模式.在过渡状态,对应的工作气压与磁通密度分别为0.67 Pa和0.05 T; 随着工作气压的增大,放电电流先增大后趋向平衡,当工作气压超过2.5 Pa时,电流开始随工作气压的增大而减小; 而阴极电压增大时,放电电流近似线性增加.     

外磁场作用下的磁等离子体动力学过程仿真

磁等离子体动力学推力器是空间高功率电推进装置的典型代表,磁等离子体动力学过程是其核心工作机制.为深入理解外磁场对其工作特性的影响,本文采用粒子云(particle in cell,PIC)方法结合基于自相似准则的缩比模型,进行外加磁场作用下磁等离子体动力学推力器工作过程的建模仿真,通过与实验结果对比验证模型和方法的可靠性,并重点分析推力器点火启动过程的等离子特性参数分布,以及外磁场和阴极电流对推力器工作性能的影响.研究结果表明:阴阳极放电电弧构建是推力器启动和高效工作的关键步骤;外磁场强度较低工况不利于构建稳定放电电弧,等离子体束流集中于轴线附近,推力主要产生机制是自身场加速;外磁场强度较高时,阴阳极放电电弧稳定,推力产生主要机制是涡旋加速,推力、比冲随外磁场强度线性增大;推力器效率随阴极电流和外磁场强度增大而增大;放电电压随阴极电流增大而增大,但随外磁场强度的增大表现出先减小后增大的趋势.     

外磁场作用下的磁等离子体动力学过程仿真

磁等离子体动力学推力器是空间高功率电推进装置的典型代表,磁等离子体动力学过程是其核心工作机制.为深入理解外磁场对其工作特性的影响,本文采用粒子云(particle in cell,PIC)方法结合基于自相似准则的缩比模型,进行外加磁场作用下磁等离子体动力学推力器工作过程的建模仿真,通过与实验结果对比验证模型和方法的可靠性,并重点分析推力器点火启动过程的等离子特性参数分布,以及外磁场和阴极电流对推力器工作性能的影响.研究结果表明:阴阳极放电电弧构建是推力器启动和高效工作的关键步骤;外磁场强度较低工况不利于构建稳定放电电弧,等离子体束流集中于轴线附近,推力主要产生机制是自身场加速;外磁场强度较高时,阴阳极放电电弧稳定,推力产生主要机制是涡旋加速,推力、比冲随外磁场强度线性增大;推力器效率随阴极电流和外磁场强度增大而增大;放电电压随阴极电流增大而增大,但随外磁场强度的增大表现出先减小后增大的趋势.     

Effect of E × B electron drift and plasma discharge in dc magnetron sputtering plasma

Study of electron drift velocity caused by Etimes B motion is done with the help of a Mach probe in a dc cylindrical magnetron sputtering system at different plasma discharge parameters like discharge voltage, gas pressure and applied magnetic field strength. The interplay of the electron drift with the different discharge parameters has been investigated. Strong radial variation of the electron drift velocity is observed and is found to be maximum near the cathode and it decreases slowly with the increase of radial distance from the cathode. The sheath electric field, E measured experimentally from potential profile curve using an emissive probe is contributed to the observed radial variation of the electron drift velocity. The measured values of the drift velocities are also compared with the values from the conventional theory using the experimental values of electric and magnetic fields. This study of the drift velocity variation is helpful in providing a useful insight for determining the discharge conditions and parameters for sputter deposition of thin film.     

考虑溅射损失的RF共振法离子引出和收集

采用PIC-MCC方法研究了AVLIS工程中一维RF共振法离子引出和收集过程，重点研究离子在收 集板上造成的溅射损失以及离子的收集效率.模拟结果表明，RF共振法与平行板静电场法相 比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；增加引出电压，可以缩短引出 时间，降低碰撞损失，但是增加了溅射损失，使得收集率降低；增大磁场强度，使碰撞损失 降低，溅射损失增加，收集率降低. 关键词： AVLIS PIC-MCC 离子引出 溅射     

低气压条件下氢气潘宁放电的模拟分析

为更好地理解低气压、弱电离条件下潘宁离子源放电过程中离子和电子的动力学行为, 通过建立二维轴对称模型, 采用粒子模拟与蒙特卡罗相结合(PIC/MCC)的方法, 考虑了电子与氢气之间的弹性碰撞、激发、电离以及氢原子、离子之间的弹性碰撞和电荷交换等过程, 对微型氢气潘宁离子源放电和引出过程进行了数值研究. 考察了磁场位形、壁面二次电子发射系数、引出电压和充气压力对放电过程的影响, 得到了实验中难以诊断得到的放电腔内电子与离子数密度分布, 阳极电流、引出极离子电流、单原子氢离子比例和双原子氢离子比例等宏观参数与实验结果相一致. 通过仿真使得对氢气潘宁放电机制的研究从定性过渡到定量, 这对于潘宁离子源的设计和改进具有重要意义. 关键词： 潘宁放电 氢气 粒子模拟 蒙特卡罗     

Phase field simulation of microstructure evolution in Fe-Cr-Co alloy during thermal magnetic treatment and step aging

The evolution of modulated structures in Fe-Cr-Co alloys during isothermal aging under an external magnetic field and multiple step aging was simulated based on a phase field method. In this simulation, the magnetic configuration during the decomposition was calculated by a micromagnetic method, and the chemical Gibbs energy function was calculated by the CALPHAD approach based on the experimental equilibrium phase diagram. The calculation results provide a quantitative microstructure change directly linked to the phase diagram and demonstrate obvious microstructure difference between isothermal aging and multiple aging. The ferromagnetic precipitates elongate along the direction of the external magnetic field. The simulated evolution and microstructure are in good agreement with the experimental results.     

JAERI 10 A 离子源体积产生效率数值优化

阐述了拥有自主知识产权的粒子模拟-蒙特卡罗算法, 采用该算法数值研究了JAERI 10 A多峰离子源放电特性, 并分析主要放电参数(气压、放电电极位置、过滤磁场大小、放电电压等)对体积产生率的影响. 模拟结果显示: 为了得到高体积负氢离子产量, 过滤磁场不宜太大, 放电电压不宜太小, 而应该适当选取过滤磁场和放电电压, 主要通过同时调节气压和放电位置来实现离子源优化.     

磁控直流辉光等离子体放电特性

本文利用单探针诊断等离子体参数来研究自行设计的磁控直流辉光等离子体实验装置的放电特性, 从而得出电子密度与气体压强、电子密度分布与磁场位型以及磁场强度等的关系. 另外, 用有限元的方法对线圈通电产生的磁场进行数值计算, 模拟出不同接线方式的两种磁场位型分布. 通过实验得出这两种不同的位型的磁场均对等离子体的状态有一定的“控制”作用, 而且这种“控制”作用与现有理论相符合.     

THEORETICAL INVESTIGATION OF ELECTRON-NEUTRAL ATOM COLLISION PROCESS AND ELECTRON TRANSPORT PARAMETERS IN DC GLOW DISCHARGE OF PLASMA WITH A TRANSVERSE MAGNETIC FIELD

A Monte Carlo simulation (MCS) technique is used to simulate the cathode sheath region of a helium dc glow discharge. In such a simulation, a nonuniform electric field and a transverse uniform magnetic field are considered. When the magnetic field intensity increases from 0 to 800 G, all types of collision considered in this paper are enhanced. This result is in agreement with the experimental result. The results also show that with the increase of magnetic field intensity, the electron transport time, the electron density increase, and the electron mean energy decreases.     

Calculation of electric and magnetic induced fields in humans subjected to electric power lines

In this work, analysis of the human body exposed to high voltage electric and magnetic fields is presented. The distribution of the electric field is obtained by using Laplace's equation. This relates the surface charge induced on the body to the potential in a reciprocal Laplace problem, which is then calculated by charge simulation method coupled with genetic algorithms to determine the appropriate arrangement of simulating charges inside the human body. The magnetic field intensity along the vertical center line of the human is calculated. Exposure to external electric and magnetic fields at power frequency induces electric field, magnetic field and currents inside the human body. The presented model for simulating electric and magnetic fields are a three dimensional field problem and introduced different types of charges to simulate the different elementary geometrical shapes of human body. The particular strength of the charge simulation method in this application is its ability to allow a detailed representation of the shape and posture of the human body. The results have been assessed through comparison induced current, electric field, magnetic field and there distribution over the body surface, as estimated in other experimental and computational work.     

外加磁场对射频磁控溅射制备铝掺杂氧化锌薄膜影响的研究

利用射频磁控溅射法制备了铝掺杂氧化锌(AZO)透明导电薄膜,在传统的磁控溅射系统中引入外加磁场,研究了外加磁场对AZO薄膜沉积速率、形貌结构及光电特性的影响.研究结果表明,外加磁场后薄膜的沉积速率从不加磁场的13.04 nm/min提高到了19.93 nm/min;外加磁场后薄膜表面平整致密、颗粒大小均匀,结晶质量较高,而不加磁场薄膜表面形貌呈蠕虫状,薄膜质量较差.溅射时间为90 min时,外加磁场前后AZO薄膜方阻分别为30.74?/和12.88?/.外加磁场对薄膜可见光透过率影响不大,但使薄膜的吸收边蓝移现象更明显.运用ansys软件对磁控溅射二维磁场分布模拟后发现,外加磁场提高了靶上方横向磁场强度,改善了磁场分布的均匀性,加强了磁场对电子的磁控作用,提高了靶电流,是AZO薄膜的溅射速率、光电性能和形貌结构得到提高和优化的原因.     

Multi-objective optimization of gradient coil for benchtop magnetic resonance imaging system with high-resolution

Significant high magnetic gradient field strength is essential to obtaining high-resolution images in a benchtop mag- netic resonance imaging （BT-MRI） system with permanent magnet. Extending minimum wire spacing and maximum wire width of gradient coils is one of the key solutions to minimize the maximum current density so as to reduce the local heating and generate higher magnetic field gradient strength. However, maximum current density is hard to optimize together with field linearity, stored magnetic energy, and power dissipation by the traditional target field method. In this paper, a new multi-objective method is proposed to optimize the maximum current density, field linearity, stored magnetic energy, and power dissipation in MRI gradient coils. The simulation and experimental results show that the minimum wire spacings are improved by 159% and 62% for the transverse and longitudinal gradient coil respectively. The maximum wire width increases from 0.5 mm to 1.5 mm. Maximum gradient field strengths of 157 mT/m and 405 mT/m for transverse and lon- gitudinal coil are achieved, respectively. The experimental results in BT-MRI instrument demonstrate that the MRI images with in-plane resolution of 50 ~tm can be obtained by using the designed coils.     

Particle‐in‐cell simulation of the effect of curved magnetic field on wall bombardment and erosion in a hall thruster

A curved, convex towards the channel bottom magnetic field is an important feature of an advanced Hall thruster that allows confining the plasma flow in the channel center, reducing the divergence angle of the ejected ion beam, and improving the discharge performance. In this article, the discharge behaviour of a Hall thruster in magnetic fields with different degrees of curvature is simulated with a particle‐in‐cell numerical method, and the effect of curved magnetic field on the ion bombardment and wall erosion and the associated mechanisms are studied and analysed. The results show that, as the curvature of the magnetic field increases, the propellant ionization becomes more confined at the channel center, the potential drop inside the channel decreases, and the acceleration region shifts outside the channel, which lead to the attenuation of the ion energy bombarding the wall and the deviation of the bombardment angle from the optimal sputtering angle. Conversely, the ion flux bombarding the wall near the channel exit increases. Nevertheless, the bombardment energy and angle are the dominant factors for the wall erosion, and the wall erosion rate clearly decreases with the increasing curvature of the magnetic field. These findings are closely related to the behaviour of electron conduction under a curved magnetic field; the relevant mechanisms are clarified in this article.