一种新的基于条纹投影的三维轮廓测量系统模型

提出一种新的光栅条纹投影轮廓测量术系统模型,新模型不要求测量系统满足光心连线平行于参考面、成像系统光轴垂直于参考面以及两光轴相交于参考面上等约束条件,只需投射至参考平面的正弦光栅条纹之间相互平行,简化了系统校准过程,有利于现场测量。得到的高度相位映射关系式中,待标定的系数与像点的坐标无关,不需要对每一个像点进行采样,能够减少系统标定所需的时间。实验表明:所提方法使投影装置和成像系统的位置校准过程简单,提高了系统标定的速度,且具有较高的测量精度,能够测量复杂面形的物体,增强了光栅投影三维测量系统的实用性。     

新的基于条纹投影轮廓测量的系统标定方法

提出一种新的光栅条纹投影轮廓测量术系统标定模型,新模型不要求投影装置和成像系统的光心连线与参考面平行、成像系统的光轴垂直于参考面及投影装置和成像系统的光轴相交。基于该模型得出了新的相位高度映射关系,其待定系数与成像点的坐标无关。实际测量中只需2个高度不同的标准块便可以求得待定系数。对4个标准块进行高度测量,得到的最大相对误差为06%。实验证明:该标定方法简单有效,提高了系统标定的可操作性和测量精度。     

新的基于条纹投影轮廓测量的系统标定方法

提出一种新的光栅条纹投影轮廓测量术系统标定模型,新模型不要求投影装置和成像系统的光心连线与参考面平行、成像系统的光轴垂直于参考面及投影装置和成像系统的光轴相交。基于该模型得出了新的相位高度映射关系,其待定系数与成像点的坐标无关。实际测量中只需2个高度不同的标准块便可以求得待定系数。对4个标准块进行高度测量,得到的最大相对误差为0.6%。实验证明:该标定方法简单有效,提高了系统标定的可操作性和测量精度。     

ns脉冲测量中的波形重建

为修正高电压测量探头寄生参数对测量ns脉冲波形的影响,对探头的数字补偿方法进行了研究。利用对低电压标定所得标准参考信号和探头信号做傅里叶变换,得到其各自的频谱密度,然后通过相除,得到探头灵敏度与频率的关系和信号相位与频率的关系。在实测时,再对测得信号做傅里叶变换,将得到的频谱密度乘以探头灵敏度及信号相位对频率的函数,通过傅里叶逆变换重建出待测信号。通过不同信号进行波形重建实验证明,此方法能够在短时间内很好地修正高电压测量探头寄生参数对ns脉冲波形的畸变。     

一种新的形貌检测系统标定技术

形貌检测中, 经相位解调和相位展开后,所求得的只是待测物体表面与参考面的相对相位分布, 而三维形貌检测要测的是高度分布. 在分析一般测试系统的基础上, 推导出了相位与高度分布的非线性函数映射关系. 设计了标定测试系统的实验方案. 通过平移实物参考面, 测得其上的相位分布, 由平移距离与相位增量之间的关系, 用最小二乘迭代法计算相位差与物体高度映射关系. 最后, 对一个实际测试系统进行了标定,并与Hung的标定方法进行了分析比较.理论和实验都表明, 新方法精度高, 操作方便, 降低了标定复杂度.     

基于立体标靶的双目系统标定研究

条纹投影三维测量技术的检测精度依赖于绝对相位与深度关系的标定过程,传统的标定方法步骤复杂、用时较长,在双目测量系统中对左右相机分别标定时尤为明显。因此设计一种基于立体靶标的标定方法,靶标由两个平面组成,各个靶标平面上附着规格已知的图案,平面连接处用特殊图案标识,用于区分左右两面。立体标靶实现双目测量系统相机外部参数与相位-深度的同时标定,将标定时间减少了一半,简化了标定流程;经过实验验证,利用立体标靶可以精确地进行深度(Z)以及横向(XY)的标定,实测误差小于0.053毫米,方法在双目乃至多节点三维测量系统的标定过程中具有应用价值,增加标定效率同时可避免累计误差产生。     

基于标准平面镜的双目偏折术系统标定

相位偏折术中,系统标定精度对面形测量精度具有决定性的影响.采用带标记点标靶进行标定时,由于其表面不是理想平面而引入误差,导致虚像姿态求解不精确,进而影响标定精度.通过使用高精度的标准平面镜作为反射镜,从初始系统参数开始,采用交替方向优化的方法实现系统几何参数的标定,提高了标定精度,同时避免了变量过多导致的矩阵病态问题....     

一种大视场相位测量轮廓术系统标定方法

在进行大视场相位测量轮廓术系统参量标定时需要大的标定平面和精密移动台,由于携带不方便,不易进行现场标定。提出了一种用于相位测量轮廓术系统参量的高精度、现场标定方法,采用一块较小的平面标定靶在有效测量体积内不同位置多次摆放,以获取密集的数据点。先标定出摄像机的内参量和外参量,再指定一个全局参考平面和若干辅助参考平面,然后在图像平面上分区计算出每个位置标定靶上每点相对辅助参考平面的高度差和相位差,最后应用极大似然估计法估计出相位高度映射参量。实验中平面高度测量的标准偏差达到0.0433 mm。这种方法只需要较小的平面标定靶,标定过程方便、精度高,完全适合大视场三维测量相位测量轮廓术系统现场标定要求。     

结构光三维测量系统标定的关键算法研究

系统参数标定是结构光三维测量系统的关键问题之一,标定板特征圆圆心检测精度与投影仪、相机镜头gamma效应引起的相位误差是系统参数标定的主要误差来源。采用Sobel算子粗定位标定板特征圆的边缘点,以正交傅里叶-马林矩(OFMM)算子对边缘点进行亚像素定位,用椭圆拟合法确定特征圆圆心的方法提高标定板特征圆检测精度。同时,推导结构光三维测量系统gamma非线性数学模型,将计算得到的系统gamma值的倒数作为投影正弦光栅的指数以降低gamma效应引起的相位误差。实验结果证明了该方法的准确性,与不采用亚像素边缘检测与gamma校正相比,X、Y方向的标定精度分别提高约3.5倍与5倍。     

基于几何约束的自适应相位解包裹算法

提出一种通过相机和投影仪的空间几何约束来展开相位包裹的方法,只需要对结构光投影测量系统进行标定,不需要进行传统的时间或空间相位展开.通过投影单周期条纹得到物体的大致高度信息以确定虚拟深度平面,在虚拟平面z0min处,根据结构光系统的标定参数创建最小绝对相位图,物体的包裹相位逐像素与进行比较,即确定条纹级数,实现相位解包裹.该方法具有良好的鲁棒性,对硬件要求低,采集图像少并且不需要额外的物体来获得z0min,能够实现自适应动态测量.实验结果表明,在同等条件下,与传统时间相位展开方法相比,该方法的相对误差降低了14.33%,同时简化了测量方法,能够有效实现物体的三维形貌测量.     

一种有效解决离轴数字全息相图倾斜畸变的数字参考平面方法

离轴数字全息中使用倾斜的平面参考波以消除成像中的零级衍射和共轭像是一种简捷和常用的方法,然而该方法遇到的一个困扰是,由于倾斜参考波引入了附加的载波频率并很难通过实验测量准确地获得附加的载波频率值或倾角,因此会导致重建的相图出现一定的倾斜畸变而无法完全修正.本文提出了一种数字参考平面算法以解决这一问题.该算法利用重建相图的平坦区域选点构建一个能准确表征相图倾斜的数字参考平面,并建立该平面参量与参考波载波频率的数学关系和作为随后相图畸变修正迭代计算的判据.该算法简单有效,不仅能实现对倾斜相位畸变的准确修正,而且能准确地获得倾斜平面参考波的附加载波频率.由于在相位解包裹重建中结合了抑噪处理,因此该方法在环境和系统噪声的影响下仍然有效,实验结果验证了理论设计的有效性.     

相位测量轮廓术中三维坐标校准新方法

提出了一种新的用于相位测量轮廓术中的三维坐标校准方法。该方法用一个含有三个虚拟校准平面的标准块代替传统相位测量轮廓术校准方法中使用的标准平面，每个虚拟校准平面由多个高度相同但空间离散分布的子区域组成，相应的连续相位恢复是通过一个迭代过程实现的，同时各个子区域还被用于横向坐标的校准。由于各个虚拟校准平面间高度是垂直变化的，传统的相位展开不能得到正确的相对位置关系，基于等效波长概念，提出了一种准确的虚拟校准平面连续相位间相对位置恢复的办法。此校准方法的特点是：在校准过程中不需要标准平面的多次精确平移；仅需要一次测量就可以完成高度和横向坐标的同时校准。文中给出的实验结果说明了该校准方法的有效性和可行性。     

Robust geometric,phase and colour structured light projection system calibration

This paper introduces a new comprehensive procedure for both geometric and colour calibration of structured light system. In order to perform both geometric and colour calibration procedure, a new calibration artifact is proposed. The intrinsic and extrinsic parameters of projector and camera are estimated by using an extended pinhole camera model with a tangential and radial distortion. Camera image plane coordinates are obtained by extracting features from images of a calibration artifact. Projector image plane coordinates are calculated on the basis of continuous phase maps obtained from a fringe pattern phase reconstruction procedure. In order to stereo calibrate camera-projector system, pairs of corresponding image plane points are calculated with subpixel accuracy. In addition, one of three pattern views is used in colour calibration. RGB values of a colour field pattern detected by camera and their reference values are compared. This comparison leads to derivation of a colour transformation matrix. The performance of the proposed method is tested by measuring plane, sphere and distance reference. Also 360 degrees complex object 3D model from a set of measurements is obtained. Residual mean errors for all tests performed are calculated.     

光栅投影相位法系统模型及标定方法

本文针对传统投影光栅相位法的光学三角法模型进行了改进,采用直入射光路并配合使用一种简便易行的标定方法,只需使用相移公式求取相位差,而不会引入与系统几何位置关系有关的量,简化了求取高度矩阵的要求。实验结果表明,新系统模型精度良好,测量误差为0.107 mm。采用该模型和标定方法可以克服传统方法系统模型的局限性,最大限度减少误差源并提高抗干扰性。     

An absolute phase to world coordinates method for the defocusing structured light shape measurement system

This paper proposes a flexible calibration method for the defocusing structured light three-dimensional (3D) imaging system. Neither a high accuracy translation stage nor the parameters of the projector is required. Therefore the method is more flexible in many practical applications. World coordinates for calibration are obtained based on the method of coordinates from known plane. The monotonic nonlinear relationships between the absolute phase and each world coordinate have been investigated. Different from other methods, in our method, the 3D shape is directly recovered by the absolute phase to world coordinates method. Experimental results show that, when polynomial curve fitting methods are used, the root-mean-squared (RMS) error for the flat plate reconstruction is less than 0.12 mm, and the measurement error of 3D points is less than −0.34%. Furthermore, when comparing the measurement results of our method with the method of coordinates from known plane based on camera calibration, the relative error is less than −0.05%. Therefore, camera calibration is considered as the major error source.     

Line-scan CCD camera calibration in 2D coordinate measurement

We present a line-scan camera calibration method in a plane not perpendicular to but parallel to the optical axis, without requiring the camera motion or a complex calibration pattern. A random 2D reference coordinate system in the calibration plane can be used, images of a rod perpendicular to the calibration plane at known coordinates are captured by the camera, the relation between the given coordinates and the rod image centroid position are analyzed based on a reduced pinhole model and image processing, and then the camera parameters and distortion factors are all estimated. These distortion factors build a sample relation only between the image position in theory and in practice, and they do not change with object position. Two wide-angle line-scan cameras that are used in a 2D-coordinate measurement system are calibrated by this method; the application results illustrate the effectiveness and convenience of this method.     

Fourier-transform profilometry calibration based on an exhaustive geometric model of the system

In Fourier-transform profilometry (FTP), the height information is extracted from the phase distribution through triangulation; the relationship between the phase and height distribution depends on the system parameters such as the relative position of the projector and the camera, the fringe frequency and the reference plane position. In this paper, we propose a novel calibration approach for FTP that uses calibration planes to calculate the system parameters. The main innovation of this method is the application of an exhaustive geometric model of the FTP that expresses the phase-to-height relationship in the most general way with a camera and a projector not aligned; the aberration due to optics is also considered and compensated for. The obtained calibration data have a precise physic meaning and can be easily compared with the real system. Tests on both simulated and real data showed that the proposed method is robust, even in the case on non-negligible noise level.     

Physical spherical phase compensation in reflection digital holographic microscopy

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization with nanometric axial resolution in real-time. However, the measurement results may be affected by an additional phase curvature introduced by the microscope objective (MO) used in DHM. It needs to be removed either by numerical compensation or by physical compensation.We present a method of physical spherical phase compensation for reflection DHM in the Michelson configuration. In the object arm, collimated light is used for illumination. Due to the use of the MO, the object wavefront may have a spherical phase curvature. In the reference arm, a lens and mirror combination is used to generate a spherical recording reference wave in order to physically compensate the spherical phase curvature of the object wavefront. By controlling the position of the mirror and the sample stage, the compensation process has been demonstrated. The relative positions of the test specimen and the reference mirror must be fixed for the physical spherical phase to be totally compensated. A numerical plane reference wave is preferred for the numerical reconstruction of the phase introduced by the test specimen. Experimental results on wafer pattern recognition are also given.