Fiber grating couplers for silicon nanophotonic circuits: Design modeling methodology and fabrication tolerances

Silicon nanophotonic circuits can exhibit a very high level of functional integration due to the very small cross sections of the silicon waveguides. However, to be implemented in data transmission networks, such circuits still must be interfaced with optical fibers having much larger dimensions. Due to this mismatch in size, a coupling structure is required in order to minimize the coupling loss. Diffraction grating coupler structures are one of the best candidates to perform this mode size conversion with good performances. However, they are also very sensitive to fabrication tolerances that may require an adaptation of the coupling conditions. In this paper, we present an iterative numerical method to optimize the design of a grating coupler by analyzing the out coupled beam from the waveguide towards the fiber. Using this method we show in details the sensitivity of the grating couplers to the principal fabrication variabilities in order to maximize the robustness of the design. A grating with 53% fiber to waveguide coupling efficiency is designed. Considering the dispersion of the modern CMOS fabrication processing, it appears that the optimal fiber coupling ratio remains rather constant but the optimal coupling angle at a given wavelength may vary by as much as ±10°.     

光纤耦合器的理论、设计及进展

系统总结了光纤耦合器的发展历程,归纳提炼出各个阶段的标志性事件;详细阐述了光纤耦合器的耦合类型、制作方法、性能参数;详细评述了光纤耦合器的理论分析方法;全面分析了X型、星型、光栅型、混合型等各种典型光纤耦合器的基本结构、工作原理及耦合特性;指出并展望了光纤耦合器的发展方向和应用前景。作者率先提出并设计了超长周期光纤光栅耦合器,实验上实现了两个超长周期光纤光栅之间的有效耦合。     

光纤耦合器的理论、设计及进展

系统总结了光纤耦合器的发展历程,归纳提炼出各个阶段的标志性事件;详细阐述了光纤耦合器的耦合类型、制作方法、性能参数;详细评述了光纤耦合器的理论分析方法;全面分析了X型、星型、光栅型、混合型等各种典型光纤耦合器的基本结构、工作原理及耦合特性;指出并展望了光纤耦合器的发展方向和应用前景。作者率先提出并设计了超长周期光纤光栅耦合器,实验上实现了两个超长周期光纤光栅之间的有效耦合。     

High‐efficiency single etch step apodized surface grating coupler using subwavelength structure

Grating couplers are key elements enabling the coupling of light between planar waveguide circuits and optical fibers. In this work, it is demonstrated using simulations and experiments that a high coupling efficiency can be achieved for an arbitrary buried oxide thickness by judicious adjustment of the grating radiation angle. The coupler strength is engineered by subwavelength structure, allowing straightforward apodization and single etch step fabrication. The design has been implemented using Fourier‐eigenmode expansion and finite difference time domain methods. The measured coupling loss of a continuously apodized grating is −2.16 dB with a 3 dB bandwidth of 64 nm, therefore opening promising prospects for low‐cost and high‐volume fabrication using 193 nm deep‐ultraviolet lithography. It is also shown by simulations that a coupling loss as low as −0.42 dB is predicted for a modified coupler structure with bottom mirror.     

Design for broadband high-efficiency grating couplers

In this Letter, we propose general optimization methods to design broadband high-efficiency grating couplers for planar waveguides. We attribute the coupling bandwidth to the mismatch of effective indices between the diffracted beam and the actual grating structure around the operation wavelength for fiber to waveguide excitation. The coupling bandwidth formula is deduced. A simple parameter-separate optimization procedure is proposed for general layered grating couplers for high coupling efficiency. Using our principle, we optimized a grating coupler for a horizontal slot waveguide operating at wavelength 1.55 μm for TM polarization. The grating coupler has 1 dB bandwidth of 60 nm and coupling efficiency of 65% with incident light from single-mode optical fiber (SMF) at 8°.     

Apodized fully-etched surface grating coupler using subwavelength structure for standard silicon-on-insulator waveguide

We design and demonstrate the fully-etched apodized grating couplers based on the silicon-on-insulator (SOI) platform using subwavelength structure for both transverse electric (TE) and transverse magnetic (TM) modes operation. The subwavelength grating (SWG) is used to engineer the refractive index using second-order effective medium theory (EMT). The whole designing procedure is given in details, especially a feasible and programmable method is developed to precisely manipulate the coupling strength of each grating cycle. A perfect Gaussian output beam can be synthesized for the TE mode operation, achieving a field overlap up to 98.3% with the Gaussian fiber mode. The simulated peak coupling losses are ?4.63 and ?2.99 dB for the TE mode and the TM mode, respectively, which are comparable with conventional shallowly etched grating couplers, realizing a fabrication simplification without performance penalty. The measured peak coupling loss is ?7.6 dB for the TE mode coupler with a 1 dB bandwidth of 45 nm, and ?6.1 dB for the TM mode coupler with a 1 dB bandwidth of 34 nm.     

Apodized grating coupler using fully-etched nanostructures

A two-dimensional apodized grating coupler for interfacing between single-mode fiber and photonic circuit is demonstrated in order to bridge the mode gap between the grating coupler and optical fiber. The grating grooves of the grating couplers are realized by columns of fully etched nanostructures, which are utilized to digitally tailor the effective refractive index of each groove in order to obtain the Gaussian-like output diffractive mode and then enhance the coupling efficiency.Compared with that of the uniform grating coupler, the coupling efficiency of the apodized grating coupler is increased by 4.3% and 5.7%, respectively, for the nanoholes and nanorectangles as refractive index tunes layer.     

A Novel Design of Grating Couplers for Efficient Broadband Coupling between Silicon-on-Insulator Nanophotonic Waveguides and Fibres

A novel design of out-of-plane grating couplers is proposed for coupling between silicon-on-insulator nanophotonic waveguides and single-mode fibres. The coupler with the first-order diffraction coupling to the optical fibre is actually a second-order reflected grating with two times of period of the first-order grating. To enhance outcoupled power, a back hole is designed to form in the silicon substrate and a kind of metals is placed on the top acting as a reflection layer. The coupler is optimized using coupled-mode-based simulations, showing that the coupling efficiency to and from tapered optical fibre can be as high as 85% with 1dB bandwidth about 23 nm.     

High efficiency silicon nitride grating coupler

In this paper, we have designed, fabricated and characterized silicon nitride grating couplers with high efficiency at 1490 nm. The devices are fabricated using deep UV photolithography with resolution requirement of ～500 nm. The grating coupler fabricated yields a peak coupling efficiency of ?5.1 dB. The 1-dB bandwidth of the grating coupler is 60 nm.     

Polarization-independent grating coupler for micrometric silicon rib waveguides

Grating couplers are a promising approach to implement efficient fiber-chip coupling. However, their strong polarization dependence makes dual-polarization operation challenging. In this Letter we propose, for the first time, a polarization-independent grating coupler for thick rib silicon-on-insulator (SOI) waveguides. Coupling efficiency is optimized by designing the grating pitch and duty cycle, without varying the bottom oxide thickness, which significantly simplifies practical implementation. Directivity of the grating coupler is enhanced by a high reflectivity layer under the bottom oxide after the selective removal of the Si substrate. Dual-polarization coupling efficiency of -2.8 dB is shown.     

BPM Simulation and Comparison of 1 × 2 Directional Waveguide Coupling and Y-Junction Coupling Silicon-on-Insulator Optical Couplers

For developing large area opto-electronic silicon-on-insulator (SOI) devices, the optical coupler is a basic key device. In this article, the authors design and simulate 1 2 2 directional waveguide coupling and Y-branch coupling optical couplers based on Unibond SOI rib waveguides. The beam propagation method (BPM) is used for light propagation analysis. The simulation results and comparisons of the two kinds of optical couplers are reported. The S-bend waveguide for attaching to the two kinds of SOI optical coupler is also analyzed by BPM. We find that the directional coupler has lower power loss, but the Y-junction coupler is more wavelength insensitive with the same device size and splitting angle. The fabrication tolerance analysis shows Y-junction coupler has better fabrication characteristics.     

CMOS compatible highly efficient grating couplers with a stair-step blaze profile

A novel grating coupler with a stair-step blaze profile is proposed.The coupler is a CMOS process compatible device and can be used for light coupling in optical communication.The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm.Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication.     

Fabrication of Silicon-Blazed Gratings for Couplers

To our knowledge, no blazed grating has been fabricated in silicon (Si) at a pitch of less than half a micron. In this article, we report the fabrication of Si-blazed gratings at the period of 400 nm, using electron beam lithography and ion beam etching techniques. The blazed grating is extremely useful as a grating coupler in integrated optics, operating at the telecommunication wavelength of 1.3 mum, because very high output efficiency of the grating coupler is expected. This will allow coupling to thin film devices in silicon, previously not regarded as promising because coupling to them was very inefficient.     

Fabrication of Silicon-Blazed Gratings for Couplers

To our knowledge, no blazed grating has been fabricated in silicon (Si) at a pitch of less than half a micron. In this article, we report the fabrication of Si-blazed gratings at the period of 400 nm, using electron beam lithography and ion beam etching techniques. The blazed grating is extremely useful as a grating coupler in integrated optics, operating at the telecommunication wavelength of 1.3 mum, because very high output efficiency of the grating coupler is expected. This will allow coupling to thin film devices in silicon, previously not regarded as promising because coupling to them was very inefficient.     

Characteristics of Fused Optical Fiber Grating Couplers with Tapered Shapes

Fused optical fiber grating couplers (FGCs), in which Bragg gratings are written in the coupling regions of fused optical fiber couplers with tapered shapes along them are theoretically and experimentally investigated. By coupled mode analysis considering these tapered shapes, the drop efficiencies of the FGCs, which are inherently zero for the normal fiber couplers without grating, are calculated. The grating offset, which is the difference between the centers of grating and the coupler taper, is found to be effective to increase the drop efficiency of the FGC. It is determined that the tapered shapes influence the wavelength dependence of the drop efficiency and tolerate the grating offset precision. Apodizations for the grating of FGC are found to be effective in suppressing side lobes of the drop efficiency. Measurement of the wavelength characteristics of drop efficiency and the temperature characteristics of drop wavelength of the fabricated fused FGC confirm that the lightwave with specific wavelength can be dropped by the FGC and that the temperature dependence of the drop wavelength is similar to that of Bragg wavelength changes of usual fiber Bragg gratings.     

掺半导体玻璃波导的导波功率限制

首次利用阳极氧化法在掺半导体玻璃上制备了两端带有抛物耦合喇叭的4微米条宽沟道波导,用光栅耦合器将波长0.532微米的YAG倍频激光耦合进波导中,实现了输出光的功率限制.     

Ultracompact directional couplers realized in InP by utilizing feature size dependent etching

We present the design, fabrication, and measurement of an ultracompact directional coupler in InP/InGaAsP/InP. By utilizing the lag effect in the dry etching process, in one etch step, deeply etched asymmetric waveguides with a shallow groove in between are fabricated. This special property enhances the coupling efficiency for the directional coupler and thus makes the device ultracompact. We demonstrate directional couplers as short as 55 microm, which is only 1/30th the length of the conventional design.     

Single etch grating couplers for mass fabrication with DUV lithography

Surface grating couplers enable efficient coupling of light between optical fibers and planar waveguide circuits. While traditional grating designs require two etch steps for efficient coupling to silicon-on-insulator waveguides, recently proposed subwavelength structured gratings can achieve the same coupling efficiencies with a single etch step, thereby significantly reducing fabrication complexity. Here we demonstrate that such couplers can be fabricated on a large scale with ultra-violet lithography, achieving a 5?dB coupling efficiency at 1,550?nm. Through both simulations and experiments we give physical insight on how pattern fidelity impacts the performance of these couplers, and propose strategies to deal with inevitable process variations.     

Novel grating couplers for diode-bars multi-point side-pumping double-clad fiber

Three grating couplers for diode-bars single-point and multi-point side-pumping double-clad fiber (DCF) are presented. The principles, characteristics and coupling efficiencies of these grating couplers are described and computed by a rigorous electromagnetic theory. We show computationally that the optimized gratings can couple the high-power TE- or TM-polarized pump lights with 94.7% and 79.7% into the DCF, respectively. For an un-polarized pump light, 72.4% efficiency can be reached. We also have analyzed the leakage of pump powers for diode-bars multi-point side-pumping DCF. Besides, the fabrication tolerances and other performances of the grating couplers are analyzed.     

Polarization beam splitter using a binary blazed grating coupler

A novel polarization beam splitter using a two-layer grating coupler is proposed and demonstrated. It can directly couple the normally incident light from fiber into two separate waveguides according to their polarization states while splitting them. It realizes high coupling efficiency and a good extinction ratio by using binary blazed grating couplers. The coupling length is less than 14 microm. The extinction ratio is better than 20 dB for both polarizations over a 40 nm wavelength range, and the coupling efficiencies for the two layers are 58% and 50%.