Broadband Terahertz Polarization Converter and Asymmetric Transmission Based on Coupled Dielectric‐Metal Grating

Coupled dielectric‐metal gratings are investigated for broadband terahertz (THz) wave polarization conversion and asymmetric transmission by the experiments and numerical simulations, which are composed of the subwavelength Si grating and metallic wire grating layers. The dielectric grating layer with a large artificial birefringence and low dispersion is employed as a phase engineered waveplate, and the metal wire grating arranged with a 45° angle to the dielectric grating is utilized as a high‐efficiency polarizer. Due to the subwavelength integration, this coupled grating presents a local resonance coupling mechanism between dielectric and metal gratings, which greatly enhances the polarization rotation and expands the bandwidth, not a simple combination with dielectric and metallic gratings. The results demonstrate that a broadband asymmetric transmission with an extinction ratio of 30dB from 0.2 to 1.2 THz is achieved and the highest transmission of 90% can be obtained. It provides a simple way towards practical applications for THz artificial dispersion materials, polarization control and asymmetric transmission.     

倾斜光纤光栅谱特性

基于倾斜光纤光栅耦合模理论,采用数值分析法研究了前后向导模耦合时倾斜角度和调制深度对倾斜光纤光栅反射谱的影响,以及导模和辐射模耦合时针对不同的入射光偏振态在倾斜角度、调制深度、光栅长度等不同时倾斜光纤光栅透射谱(或反射谱)的特性.研究结果表明,在前后向导模耦合时,不同偏振态入射光的光谱几乎相同;而对于辐射模耦合,由于反射谱的包络受消光系数的调制,而不同偏振态入射光的消光系数不同,并且倾斜角度越大不同偏振态的入射光的消光系数差别越大,故在研究辐射模耦合时需要将偏振态予以考虑.     

倾斜光纤光栅谱特性

基于倾斜光纤光栅耦合模理论,采用数值分析法研究了前后向导模耦合时倾斜角度和调制深度对倾斜光纤光栅反射谱的影响,以及导模和辐射模耦合时针对不同的入射光偏振态在倾斜角度、调制深度、光栅长度等不同时倾斜光纤光栅透射谱(或反射谱)的特性.研究结果表明,在前后向导模耦合时,不同偏振态入射光的光谱几乎相同;而对于辐射模耦合,由于反射谱的包络受消光系数的调制,而不同偏振态入射光的消光系数不同,并且倾斜角度越大不同偏振态的入射光的消光系数差别越大,故在研究辐射模耦合时需要将偏振态予以考虑.     

一种条形亚波长径向偏振光栅

提出并设计了一种条形亚波长铝金属径向偏振光栅,用电子束直写方法制成,可以将偏振光偏振面的旋转直接转换为光斑的水平移动,通过定位光斑位移实现旋光角的测量.光栅由12000个单元水平排列组成,每个单元宽1μm,中心单元的格栅方向为0°,左右相邻单元的格栅分别按逆时针和顺时针方向依次旋转30″,最终实现±50°旋光角的测量范围.基于琼斯矩阵建立了光栅的理论模型,并运用严格耦合波理论分析了光栅的偏振特性与光栅脊厚、周期、占空比、入射光波长之间的关系,确定了光栅的最优结构.实验与仿真结果表明,光栅TM波的透过率大于80%、整体消光比大于26dB.这一测量模式不受光功率波动的影响,可以构成无机械旋转的新型旋光仪,或不需要旋转图像平移转换的电力光学传感器.     

Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass

A mid-IR wire-grid polarizer with a 500 nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at an oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% at 5-9 μm wavelengths and an extinction ratio greater than 20 dB at 3.5-11 μm wavelengths. This polarizer with a high extinction ratio can be fabricated more simply and less expensively than conventional IR polarizers.     

Theoretical reflective performance of a sandwiched two-layer grating polarizer

The reflective polarizer is described by a sandwiched two-layer grating with a metal slab. Such a new polarizer is aimed to improve the performance of a reflective grating-based polarizer. The grating is optimized with the usual duty cycle of 0.5, where TE and TM polarizations are reflected in the –1st and the 0th diffraction orders, respectively. With optimized grating parameters, the extinction ratio can reach 45.5 dB and 41.9 dB in two diffraction orders, which are greatly improved compared with the conventional reported surface grating polarizer with the simple structure. Attractive merits of the new design are high efficiency, high extinction ratio, wide incident wavelength bandwidth for TE polarization, and wide angular range for TM polarization. Numerical results are expected to open new opportunities for the design of a grating-based polarizer with the enhanced performance by the complicated grating configuration.     

Polarization-selective subwavelength grating used with 193 nm light

Hyper-NA ArF (193 nm) immersion lithography is one of the most potential technologies to achieve 32 nm critical dimension node. At the corresponding large angles in the photoresist, control of polarization becomes necessary. A polarization beam splitter (PBS) based on a subwavelength dielectric grating has been designed for use with 193 nm light. The polarization-selective property of such grating is explained by the mechanism of mode interference. The designed grating working as a 1 × 2 beam splitter can transmit TM wave (∼ 90%) to the zeroth order with extinction ratio of 753, and it diffracts TE wave (∼ 80%) to the −1st order with extinction ratio of 300.     

A Microoptic Network Unit Using Planar Microlens Array

We propose a new concept for an optical network unit using planar microlens array for fiber to the home networks. It is expected from this modeling that an optical coupling loss of 2.5 dB, a polarization dependent loss of 0.5 dB and an extinction ratio larger than 50 dB can be achieved. The structure design and its fabrication method are discussed.     

Broadband long-wavelength infrared Si/SiO2 subwavelength grating reflector

A long-wavelength IR broadband reflector is demonstrated using a high-index-contrast subwavelength grating based on a Si/SiO2 system. The field response has been computationally and experimentally verified to exhibit broadband reflectance in the spectral range of 13-16 μm with Δλ/λ=18.5% for reflectance >70%. The gratings exhibit incident field polarization dependence with an average extinction ratio of 1:1.6.     

Coupling characteristics of high birefringence dual-core As2S3 rectangular lattice photonic crystal fiber

A type of As2S3 chalcogenide glass mid-infrared dual-core photonic crystal fiber has been proposed.The dualcore photonic crystal fiber(PCF) consists of two asymmetric cores.The high polarization property and the coupling characteristics have been studied by using the finite element method and mode coupling theory.Numerical results show that the birefringence at wavelength λ = 10 μm is up to 0.01386 and the coupling length can reach wavelength λ = 5 μm,261 μm and 271.44 μm for x-polarized mode and y-polarized mode,respectively.It demonstrates that a 6.786-mm-long fiber can exhibit an extinction ratio of better than 10 dB and a bandwidth of 180 nm.     

Terahertz transmission characteristics of double wire-grid polarizer on low-loss polyethylene substrate

We fabricated a double metallic wire-grid polarizer consisting of micrometer-pitch Cu grating on both sides of low-loss polyethylene substrate by simple electroplating and lithography micro-processing techniques. The performance of transmission was measured using a terahertz (THz) time domain spectroscopy system. The mixed polarization effects of surface plasmon polaritons in an azimuthally rotated grating were investigated. The polarization dependence of both amplitude and phase shift on frequency was demonstrated in the wide range of 0.1?C3 THz, and the extinction ratio is over 22 dB.     

Achromatic diffraction from polarization gratings with high efficiency

We demonstrate a broadband, thin-film, polarizing beam splitter based on an anisotropic diffraction grating composed of reactive mesogens (polymerizable liquid crystals). This achromatic polarization grating (PG) manifests high diffraction efficiency (approximately 100%) and high extinction ratio (> or = 1000:1) in both theory and experiment. We show an operational bandwidth Deltalambda/lambda0 approximately 56% (roughly spanning visible wavelength range) that represents more than a fourfold increase of bandwidth over conventional PGs (and significantly larger than any other grating). The diffraction angle and operational region (visible, near-infrared, midwave infrared, and ultraviolet wavelengths) may be easily tailored during fabrication. The essence of the achromatic design is a stack of two chiral PGs with an opposite twist sense and employs the principle of retardation compensation. We fully characterize its optical properties and derive the theoretical diffraction behavior.     

TE/TM-mode pass polarizers and splitter based on an asymmetric twin waveguide and resonant coupling

A new passive TE/TM-mode polarization filter for an InP system based on an asymmetric twin waveguide and resonant coupling is investigated. Linear taper sections with different taper angles are introduced to couple between the two vertically separated waveguides. The underlying waveguide is designed to enable direct edge coupling from an optical fiber. At a wavelength of 1.55?μm power extinction ratios of 20 dB for the TE- and more than 10 dB for the TM-polarization are reported for devices shorter than 400?μm. An increased extinction ratio can be obtained by concatenating structures. Furthermore, we show this concept can be expanded to a polarization splitter.     

Polarizing beam splitter of a deep-etched fused-silica grating

We described a highly efficient polarizing beam splitter (PBS) of a deep-etched binary-phase fused-silica grating, where TE- and TM-polarized waves are mainly diffracted in the -1st and 0th orders, respectively. To achieve a high extinction ratio and diffraction efficiency, the grating depth and period are optimized by using rigorous coupled-wave analysis, which can be well explained based on the modal method with effective indices of the modes for TE/TM polarization. Holographic recording technology and inductively coupled plasma etching are employed to fabricate the fused-silica PBS grating. Experimental results of diffraction efficiencies approaching 80% for a TE-polarized wave in the -1st order and more than 85% for a TM-polarized wave in the 0th order were obtained at a wavelength of 1550 nm. Because of its compact structure and simple fabrication process, which is suitable for mass reproduction, a deep-etched fused-silica grating as a PBS should be a useful device for practical applications.     

深紫外双层金属光栅偏振器的设计与分析

193 nm波长浸没式步进扫描投影光刻机是实现45 nm及以下技术节点集成电路制造的核心装备.增大数值孔径是提高光刻分辨率的有效途径,而大数值孔径曝光系统的偏振性能严重影响光刻成像质量.光刻机曝光系统偏振参数的高精度检测是对其进行有效调控的前提.基于光栅的偏振检测技术能实现浸没式光刻机偏振检测装置的小型化,满足其快速、高精度在线检测的需求,该技术中的关键部件是结构紧凑且偏振性能良好的光栅.本文基于反常偏振效应和双层金属光栅对TE偏振光的透射增强原理,采用严格耦合波理论和有限时域差分方法,设计了一种双层金属光栅偏振器.计算了该偏振器的初始结构参数,并通过数值仿真得到了其偏振性能关于各光栅参数的变化关系.仿真结果表明,中间层高度是影响TE偏振光透射增强的主要因素;垂直入射时TE偏振光的透过率可达到56.8%,消光比高达65.6 dB.与现有同波段金属光栅偏振器相比,所设计的光栅偏振器在保证高透过率的同时,消光比提升了四个数量级.     

八边形晶格双芯光子晶体光纤偏振分束器

分别以碲玻璃和SF6玻璃作为基质材料,设计制作了一种基于双折射效应的新型八边形晶格双芯光子晶体光纤偏振分束器。应用全矢量有限元法（FEM）分析了碲玻璃和SF6两种双芯光子晶体光纤中结构参数对双折射和相对耦合长度特性的影响,数值模拟了碲玻璃和SF6两种偏振分束器的性能。结果表明：在碲玻璃和SF6两种双芯光子晶体光纤中,增大椭圆率可同时增加结构的双折射和相对耦合长度,与SF6玻璃偏振分束器相比较,碲玻璃偏振分束器具有更高的消光比和更大的带宽,即在工作波长为1.55 μm处,消光比达到最小值-53.46 dB,且消光比小于-20 dB的带宽为120 nm。     

高功率宽调谐范围掺Yb3+光子晶体光纤激光器

采用闪耀光栅作为色散元件,构建了前向、后向输出两种结构的可调谐掺Yb3 光子晶体光纤激光器,并对其输出特性进行了分析研究.在抽运功率5.75W时,前向输出结构实现了1050.6～1110.2 nm的连续调谐输出,光谱线宽约0.1 nm,边模抑制比大于44 dB.在调谐激光波长为1085 nm时,得到最高输出功率677 mW.结构改进的后向输出结构的可调谐输出结构在抽运功率4.43 W,调谐波长1075 nm,实现了2.21 W的功率输出,斜率效率为73%;调谐范围50.9 nm(1042.1～1093 nm),光谱线宽小于0.08 nm,边模抑制比大于50 dB.两种结构的可调谐激光器输出均为线偏振光,偏振度大于89.5%.     

Design of Ultra Compact Polarization Splitter Based on the Complete Photonic Band Gap

A novel design of polarization splitter based on the complete photonic band gap has been proposed in this paper. The proposed Photonic Band Gap (PBG) polarization splitter is formed by two photonic crystal waveguides composed of dielectric rods in air in honeycomb structure for which complete photonic band gap is obtained using the plane wave expansion (PWE) method. The splitting properties (i.e. coupling length, extinction ratio and insertion loss) of PBG polarization splitter have numerically been investigated using the finite difference time domain (FDTD) method. It has been shown that polarization splitter of length as small as 32 μm can be designed at λ=1.55 μm. The proposed polarization splitter offers a large bandwidth of 120 nm.     

A novel polarization splitter based on dual-core elliptical-holes hybrid photonic crystal fiber

A novel kind of polarization splitter in dual-core elliptical holes hybrid photonic crystal fiber is proposed. Numerical results show that the splitter can reach small coupling length ratio of 0.5, for wavelength from 1.15 μm to 1.9 μm. At wavelength 1.55 μm, the extinction ratio can achieve ?64 dB and the 1.92-mm-long splitter is suggested to achieve extinction ratio better than ?10 dB, a bandwidth of 150 nm. The fiber has small coupling length ratio, small coupling length and high extinction ratio and it is more suitable for fabricating polarization splitter.     

像素偏振片阵列制备及其在偏振图像增强中的应用

像素偏振片阵列在实时测量光的斯托克斯参量方面具有重要的应用.本文设计和制作了基于金属铝纳米光栅的像素偏振片阵列,制作工艺基于电子束曝光技术.偏振片阵列单元尺寸为7.4μm,每相邻2×2单元的透偏振方向分别为0,7π/4,π/2和3π/4.光栅周期为140 nm,占空比为0.5,深度100 nm,光栅面型为矩形.像素偏振片阵列的扫描电子显微镜照片显示,制备的偏振片阵列的金属纳米光栅栅线无断线、无交叉、无杂物污染,光栅栅线结构平直,厚度均匀,满足理想矩形面型.采用偏振光作为照明光的光学显微镜拍摄图片显示,像素偏振片阵列整体形状规则,具有很好的偏振特性,最大偏振透射率可达到79.3%,消光比可达到454.将像素偏振片阵列与CCD(charge coupled device)集成在一起,采集单帧图像即可计算图像的斯托克斯参量,从而得到拍摄物体线偏振度图像和线偏振角图像,实现了偏振增强,可应用于目标反隐和识别.