沉积温度对硫化锌(ZnS)薄膜的结晶和光学特性影响研究

对不同温度下沉积的ZnS薄膜的结晶情况和光学特性进行了研究, 结果表明：沉积温度对ZnS薄膜的物理和光学特性有较大影响, 不同的温度沉积的ZnS薄膜具有不同的择优取向, 牢固度也大不相同; 不同沉积温度下, ZnS薄膜的光学常数也不尽相同. 温度为115 ℃和155 ℃时, ZnS薄膜的物理性能和光学性能较差, 不适合空间用光学薄膜的研制使用. 而190 ℃和230 ℃沉积温度下所得薄膜具有较好的物理和光学性能, 适合于不同要求的空间用薄膜器件的研制使用. 关键词： 硫化锌薄膜 沉积温度 表面形貌 光学常数     

柔性有机电致发光器件导电基板的工艺性能

在聚对苯二甲酸乙二醇酯(PET)柔性衬底上采用直流磁控溅射技术制备了氧化铟锡(ITO)透明导电薄膜,研究了衬底温度、溅射功率和溅射压强等工艺条件对薄膜光电性能的影响,并利用原子力显微镜(AFM)表征了衬底及ITO薄膜的表面形貌。结果表明,在PET衬底温度50℃、溅射功率100W和溅射压强2.66×10-1Pa的条件下,可以得到低方阻(50Ω/□)和高透过率(>90%)的透明导电薄膜。以此柔性ITO衬底为阳极,制备了结构为PET/ITO/NPB/Alq3/Mg∶Ag的柔性有机电致发光器件,在驱动电压为13V时,器件的发光亮度达到了2834cd/m2。     

原子层沉积制备铱薄膜的特性研究

以乙酰丙酮铱[Ir(acac)3]和高纯氧为前驱体,采用原子层沉积(ALD)方法在基板温度为340℃的石英玻璃和硅基板上制备了金属铱薄膜。采用反射光谱测试仪、X射线电子能谱(XPS)、X射线衍射(XRD)、扫描电子显微镜(SEM)和原子力显微镜(AFM)等手段对不同厚度薄膜的微结构、表面形貌和光学性能进行了研究。结果表明,原子层沉积制备的Ir薄膜中元素纯度较高(大于95%),表面粗糙度低,并呈现多晶纳米颗粒。同时,Ir薄膜在紫外波段表现出较好的光学特性,可以用于制作Ir金属紫外光栅等光学器件。     

发光层的形态结构对电致发光器件性能影响的研究

详细研究了沉积在Poly(9-vinylcarbazole)(PVK)薄膜上的8－羟基喹啉铝（Alq3）薄膜的形态结构对电致发光器件ITO／PVK／Alq3/Mg-Ag性能的影响。研究结果表明：发光层（Alq3层）的表面形貌极大地影响发光层和金属阴极的接触面积,从而影响器件的电流－电压特性。发光层的表面越均匀连续,发光层和金属阴极的接触面积就越大,通过器件的电流就越大。在三种条件的器件中,基底温度为438K时制备的Alq3薄膜所对应的器件的量子效率最高,298K制备的器件的率效次之,77K制备的器件的效率最差。     

衬底温度对PLD制备的Mo薄膜结构及表面形貌的影响

 运用脉冲激光沉积(PLD)技术在Si(100)基片上沉积了金属Mo薄膜。在激光重复频率2 Hz,能量密度5.2 J/cm²,本底真空10^－6 Pa的条件下,研究Mo薄膜的结构和表面形貌,讨论了衬底温度对薄膜形貌与结构的影响。原子力显微镜(AFM)图像和X射线小角衍射(XRD)分析表明,薄膜表面平整、光滑,均方根粗糙度小于2 nm。沉积温度对Mo薄膜结构和表面形貌影响较大,在373~573 K范围内随着温度升高,薄膜粗糙度变小,结晶程度变好。     

沉积条件对ZnTe/ZnTe:Cu薄膜结构及CdTe电池性能的影响

用共蒸发法沉积了ZnTe/ZnTe:Cu复合多晶薄膜,通过XRD,XPS,C-V,I-V等研究了沉积温度对薄膜结构、Cu浓度分布及电池性能的影响.结果表明,沉积温度对薄膜的结构影响不明显,薄膜呈立方相,经185 ℃退火后出现了六方相.对薄膜的剖析发现,Cu浓度分布呈现先上升到一极大值而后快速下降的趋势, 100 ℃沉积的ZnTe/ZnTe:Cu薄膜,ZnTe层起到了阻止Cu扩散作用,用这种薄膜制作的太阳电池X_D较大 关键词： ZnTe多晶薄膜 沉积温度 薄膜结构 器件性能     

空穴注入层对蓝色有机电致发光器件性能的影响

以DPVBi为发光层,NPB为空穴传输层,在阳极ITO和NPB之间分别插入不同的空穴注入层CuPc和PEDOT:PSS,制备了两种结构的蓝色有机电致发光器件(OLEDs):ITO/CuPc/NPB/DPVBi/BCP/Alq3/Al和ITO/PEDOT:PSS/NPB/DPVBi/BCP/Alq3/Al,研究了不同空穴注入材料对蓝色OLEDs发光性能的影响,并与没有空穴注入层的器件进行了比较.其中CuPc分别采用旋涂和真空蒸镀两种丁艺,比较了不同成膜工艺对器件发光特性的影响.结果表明:加入空穴注入层的器件比没有空穴注入层器件性能要好,其中插入水溶性CuPc的器件,其发光亮度和效率虽然比蒸镀CuPc器件要低,但比插入PEDOT:PSS 器件发光性能要好.又由于水溶性CuPc采用旋涂工艺成膜,与传统CuPc相比,制备工艺简单,所以为一种不错的空穴注入材料.     

生长温度对磁控溅射ZnO薄膜的结晶特性和光学性能的影响

采用反应射频磁控溅射方法，在Si (100) 基片上制备了具有高c轴择优取向的ZnO薄膜.利用 原子力显微镜、透射电子显微镜、X射线衍射分析、拉曼光谱等表征技术，研究了沉积温度 对ZnO薄膜的表面形貌、晶粒尺度、应力状态等结晶性能的影响；通过沉积温度对透射光谱 和光致荧光光谱的影响，探讨了ZnO薄膜的结晶特性与光学性能之间的关系.研究结果显示， 在室温至500℃的范围内，ZnO薄膜的晶粒尺寸随沉积温度的增加而增加，在沉积温度为500 ℃时达到最大；当沉积温度为750℃时，ZnO薄膜的晶粒尺度有所减小；在室温至750℃的范 围内，薄膜中ZnO晶粒与Si基体之间均存在着相对固定的外延关系；在沉积温度低于500℃时 ，制备的ZnO薄膜处于压应变状态，而750℃时沉积的薄膜表现为张应变状态.沉积温度的不 同导致ZnO薄膜的折射率、消光系数、光学禁带宽度以及光致荧光特性的变化，沉积温度对 紫外光致荧光特性起着决定性的作用.此外，探讨了影响薄膜近紫外光致荧光发射的可能因 素. 关键词： ZnO薄膜 表面形貌 微观结构 光学常数     

电子束蒸发制备YBCO超导薄膜研究

采用电子束沉积制备YBCO超导薄膜,研究了760℃—840℃的不同退火温度下高温热处理对YBCO薄膜双轴织构、表面形貌及超导性能的影响。超导临界电流密度测试、X射线衍射(XRD)和扫描电镜(SEM)的结果表明,退火温度在在800℃时,YBCO薄膜具有良好的织构和平整致密的表面形貌,在77K自场下的临界电流密度J可达4.2×106/cm2。     

无机厚膜发光器件绝缘层的研究

采用丝网印刷技术,在Al2O3陶瓷基板上印刷、高温烧结内电极及绝缘层,制备出陶瓷厚膜基板,进而制备了新型厚膜电致发光显示器(TDEL)。整个器件结构为陶瓷基板/内电极/厚膜绝缘层/发光层/薄膜绝缘层/ITO透明电极。研究不同结构的无机厚膜发光器件对器件性能的影响,并对器件的亮度—电压、亮度—频率进行测量。结果显示绝缘层在无机发光器件中不是单纯的保护作用,它对器件的性能有十分重要的影响。主要是对注入电子的加速作用,从而提高发光亮度。绝缘层本身对无机厚膜发光器件的发光机理没有关系。     

有机发光材料DPVBi的空穴阻挡特性

讨论了有机发光材料4,4′-bis(2,2′-diphenylvinyl)-1,1′-biphenyl(DPVBi),在结构为ITO/N,N′-bis-(1-naphthyl)-N,N′-diphenyl-1,1′-biphenyl-4,4′-diamine(NPB)/DPVBi/tris-(8-hydroxyquinoline)aluminum(Alq₃)/LiF/Al的有机电致发光器件中所表现出来的空穴阻挡特性。通过实验可以看到,当NPB的厚度小于DPVBi的厚度时,DPVBi对空穴的阻挡作用和其自身的厚度有关,厚度越大阻挡能力越强。DPVBi的厚度一定(120nm)且不足以将空穴完全限制于DPVBi层内时,其对空穴的阻挡能力,随着NPB厚度(30~60nm)的增加而相对减弱。当NPB的厚度大于DPVBi的厚度时,进入DPVBi层的空穴,随着它们之间厚度差别的增大而增加,从而使器件的光谱半峰全宽加大。这几条规律对于制作基于DPVBi的有机蓝光和有机白光器件具有一定的指导意义。     

Optical and structural investigation of a-plane GaN layers on r-plane sapphire with nucleation layer optimization

Nonpolar a-plane GaN epilayers are grown on several r-plane sapphire substrates by metal organic chemical vapour deposition using different nucleation layers:(A) a GaN nucleation layer deposited at low temperature(LT);(B) an AlN nucleation layer deposited at high temperature;or(C) an LT thin AlN nucleation layer with an AlN layer and an AlN/AlGaN superlattice both subsequently deposited at high temperature.The samples have been characterized by Xray diffraction(XRD),atomic force microscopy and photoluminescence.The GaN layers grown using nucleation layers B and C show narrower XRD rocking curves than that using nucleation layer A,indicating a reduction in crystal defect density.Furthermore,the GaN layer grown using nucleation layer C exhibits a surface morphology with triangular defect pits eliminated completely.The improved optical property,corresponding to the enhanced crystal quality,is also confirmed by temperature-dependent and excitation power-dependent photoluminescence measurements.     

Spray pyrolysis deposition of ZnO thin films on FTO coated substrates from zinc acetate and zinc chloride precursor solution at different growth temperatures

ZnO thin films were fabricated using zinc chloride and zinc acetate precursors by the spray pyrolysis technique on FTO coated glass substrates. The ZnO films were grown in different deposition temperature ranges varying from 400 to 550 °C. Influences of substrate temperature and zinc precursors on crystal structure, morphology and optical property of the ZnO thin films were investigated. XRD patterns of the films deposited using chloride precursor indicate that (1 0 1) is dominant at low temperatures, while those deposited using acetate precursor show that (1 0 1) is dominant at high temperatures. SEM images show that deposition temperature and type of precursor have a strong effect on the surface morphology. Optical measurements show that ZnO films are obviously influenced by the substrate temperatures and different types of precursor solutions. It is observed that as temperature increases, transmittance decreases for ZnO films obtained using zinc chloride precursor, but the optical transmittance of ZnO films obtained using zinc acetate precursor increases as temperature increases.     

Molecular dynamics simulations of AlN deposition on GaN substrate

ABSTRACT

In this work, we investigated the deposition of AlN film on GaN substrate by using molecular dynamics (MD) simulations. The effects of GaN substrate surface, growth temperature, and injected N: Al flux ratio on the growth of AlN film were simulated and studied. Consequently, the deposited AlN film on the (0001) Ga-terminated GaN surface achieves better surface morphology and crystallinity than that on the (000-1) N-terminated GaN surface due to the different diffusion ability of Al and N adatoms on two GaN surfaces. Furthermore, with the increase of growth temperature, the surface morphology and crystallinity of AlN film were improved owing to the enhanced mobility of adatoms. At the optimised injected N: Al flux ratio of 1, comparatively good surface morphology and crystallinity of deposited AlN films were realised. This method lays a foundation for the follow-up real-time study of defects and stress evolution of AlN on GaN and can be applied to film growth of other materials.     

Preparation and characterizations of amorphous nanostructured SiC thin films by low energy pulsed laser deposition

Amorphous silicon carbide (SiC) thin films were deposited on silicon substrates by pulsed laser ablation at room temperature. Thicknesses and surface morphology of the thin films were characterized using optical profilers, atomic force and field emission scanning electron microscopy. Nanohardnes, modulus and scratch resistance properties were determined using XP nanoindenter. The results show that crack free, smooth and nanostructured thin films can be deposited using low laser energy densities.     

The effect of deposition temperature on the surface coverage and morphology of iron-phosphate coatings on low carbon steel

The influence of deposition temperature and concentration of NaNO₂ in the phosphating bath on the surface morphology and coverage of iron-phosphate coatings on low carbon steel was investigated. The phosphate coatings were chemically deposited on steel from phosphate bath at different temperatures (30-70 °C) and with the addition of different amounts of accelerator, NaNO₂ (0.1, 0.5 and 1.0 g dm⁻³). The morphology of phosphate coatings was investigated using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The composition of iron-phosphate coatings was determined using energy dispersive X-ray spectroscopy (EDS) and X-ray diffraction (XRD). Surface coverage was evaluated by the voltammetric anodic dissolution (VAD) technique.It was shown that the increase in temperature of the NaNO₂-free phosphating bath up to 70 °C caused an increase in surface coverage. The addition of NaNO₂ in the phosphating bath significantly increased the surface coverage of phosphate coatings deposited at temperatures lower than 50 °C. The phosphate crystals were of laminated and needle-like structures for deposits obtained at temperatures lower than 50 °C, while at higher temperatures needle-like structure was transformed to laminated structure. The increase in NaNO₂ concentration in the phosphating bath from 0.1 to 1.0 g dm⁻³ did not significantly increase the surface coverage, but decreased the crystals size, consequently favouring the phosphate nucleation and better packing of the crystals.     

Structural, morphology and electrical properties of layered copper selenide thin film

Thin films of copper selenide (CuSe) were physically deposited layer-by-layer up to 5 layers using thermal evaporation technique onto a glass substrate. Various film properties, including the thickness, structure, morphology, surface roughness, average grain size and electrical conductivity are studied and discussed. These properties are characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), ellipsometer and 4 point probe at room temperature. The dependence of electrical conductivity, surface roughness, and average grain size on number of layers deposited is discussed.      

Effect of temperature on pulsed laser deposition of ZnO films

ZnO thin films have been deposited on Si(1 1 1) substrates at different substrate temperature by pulsed laser deposition (PLD) of ZnO target in oxygen atmosphere. An Nd:YAG pulsed laser with a wavelength of 1064 nm was used as laser source. The influences of the deposition temperature on the thickness, crystallinity, surface morphology and optical properties of ZnO films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), selected area electron diffraction (SAED), photoluminescence (PL) spectrum and infrared spectrum. The results show that in our experimental conditions, the ZnO thin films deposited at 400 °C have the best surface morphology and crystalline quality. And the PL spectrum with the strongest ultraviolet (UV) peak and blue peak is observed in this condition.     

沉积亚单层荧光染料提高有机发光器件的发光效率

结合掺杂薄层作为发光探针层的方法和亚单层（sub-monolayer）有机发光技术，利用沉积在有机发光器件发光层中的亚单层奎丫啶酮（Quinacridone，QAD）分子作为探针，同时改变QAD层的位置，对有机发光器件中激子的形成与扩散进行了研究，器件结构为ITO/NPB(60 nm)/ Alq3(x nm)/QAD(0.05 nm)/Alq3［(60－x) nm］/LiF/Al（其中x=0，2.5，5，7.5 nm）.通过对各器件不同条件下的电致发光谱、发光强度和发光效率的对比研究，得到在x＝5 nm处引入亚单层QAD可以使QAD分子通过能量转移而获得的激子数量最多，进而可以实现高效率的发光.     

热稳定空穴传输材料的合成及其电致发光器件

合成了两种NPB的新衍生物:N,N’-二(1-萘基)-N,N’-二(4-甲基苯基)-1,1’-联苯-4,4’二胺(NTB)和N,N’-二(1-萘基)-N,N’-二(4-叔丁基苯基)-1,1’-联苯-4,4’二胺(NBB)。DSC测得其玻璃态转变温度分别为108℃和129℃,表现出好的热稳定性。紫外光电子能谱测得其电离势均为5.2eV。NTB和NBB固体光致发光光谱的最大发射波长分别位于455nm和460nm。分别以NPB、NTB、NBB作为空穴传输层材料(HTM)制作了结构相同的有机电致发光器件,3种器件发光光谱相同,均为Alq₃的绿色发光,器件的起亮电压分别为11,9,8V,在15V工作电压时的亮度分别为1000,1300,1200cd/m²,初步研究了器件的发光特性和稳定性。