A microprism array as shearing device for speckle shearing interferometry

In most speckle shearing interferometers image shearing is performed by means of a Michelson interferometer or by means of a wedge prism covering half of the aperture of the camera objective. We present a speckle shearing interferometer which utilizes a microprism array for this purpose. It is placed between the test specimen and the camera. In comparision with a wedge prism it exhibits some advantages: it needs no exact alignment, it works with any camera lens, the shearing distance and direction of shearing can be easily changed by changing position (resp. angular orientation) of the element. Phase stepping for computer evaluation of the speckle shearing interferograms is performed by the translation of the shearing element. A special translation stage was developed. Experimental results are presented. The interferometer is suited for microcomponent and microsystem testing.     

A simple electronic speckle shearing interferometer

A new speckle shearing interferometer with simple setup is proposed. The interferometer can be converted easily from a speckle referenced speckle pattern interferometer into a speckle shearing interferometer and vice versa. A beamsplitter and a mirror are used to generate the shear. The amount of shear can be adjusted by simply rotating the mirror. The costs involved are low and it is particularly useful for fast inspection in non-destructive testing of structural integrity. Both the theoretical studies of the method of measurement and the experimental results are presented.     

基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术

提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路,将物体偏转一微小角度（等效为物面与参考面间形成空气楔）产生等厚干涉,可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理,并进行了实物测量,给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌,所以具有灵敏度高的优点。     

An integrated liquid crystal phase modulator for speckle shearing interferometry

A versatile phase-stepping speckle shearing interferometer is described that employed a calibrated liquid crystal as its phase modulator, operating at 514 nm. By implementation of an algorithm upon phase-stepped shearographic images it was possible to create a phase map, that provided quantitative data regarding the derivative of any out-of-plane surface displacement. The use of a liquid crystal phase modulator in an optical arrangement had advantages over alternative methods. However, it is normally limited by spatial non-uniformity of the cells birefringence. The birefringence for a nematic liquid crystal cell was determined in several cross-sectional locations, before the cell was successfully integrated into a Michelson speckle shearing interferometer. Such a scheme offers flexibility in the shearing angle, and a measurement system that may operate over an extended range of monitoring wavelengths.     

A new lateral shearing interferometer for precision surface measurement

A new lateral shearing interferometer is proposed for precision surface measurement. In this shearing interferometer, a novel shear generator made of a single birefringence crystal plate is utilized. The shear adjustment is realized through the change of angle at which tested wavefront is incident into the crystal plate. By changing the orientation of the principal section of the plate, the generator can adjust the shearing direction. With the incident beam being circularly polarized, the generator can equalize the intensities of two shearing beams to make a good contrast interference pattern. The interferometer is simple and compact in terms of mechanism and has a complete common optical path structure. Phase shifting can be realized conveniently. The interferometer is insensitive to external vibrations and environmental disturbances, and hence has good stability and reliability with high measurement accuracy. To examine the performance of the proposed interferometer, experimental testing was conducted. High accuracy and repeatability are demonstrated.     

用于多参数同时测量的散斑干涉仪

本文描述了一种新的散斑干涉仪,它可以同时对表面应变物体的面内位移、离面位移、位移梯度和莫尔曲率进行测量;由于利用了取向滤波方法,在滤波系统输出平面同时得到了与这些参数对应的散斑条纹.还利用散斑空间运动规律较好地解释了散斑干涉与散斑剪切干涉之间的关系.     

Strain and vibration analysis by fibre based speckle shearing interferometry

An optical fibre based, speckle shearing interferometer is described. The instrument uses a highly birefringent optical fibre to illuminate a test object with equal intensities of light guided by the orthogonal polarisation eigenstates of the fibre. A Wollaston prism is used to obtain two sheared images with adjustable shear. Optical phase changes between the sheared images are readily achieved, without mechanical movement of components, by straining the optical fibre. Object strain determination, by fringe analysis with phase stepping techniques, is readily achieved. Vibration analysis by heterodyning is also reported.     

Photopolymer diffractive optical elements in electronic speckle pattern shearing interferometry

In this paper we present an electronic speckle pattern shearing interferometer using a photopolymer diffractive optical element in the form of a holographic grating, in combination with a ground glass to shear the images. The sheared images on the ground glass are further imaged onto a CCD camera. The distance between the grating and the ground glass can be used to control the shear and to vary the sensitivity of the system. The direction of sensitivity is easily controlled by rotation of the diffraction grating around its normal.Introducing photopolymer holographic gratings in ESPSI gives the advantage of using high aperture optical elements at relatively low cost. The fact that the diffractive optical element is a photopolymer layer on glass substrate with thickness of 2 mm makes for a compact optical system.The system was successfully used for detection of the resonant frequencies of a vibrating object.Most of the published work on vibration analysis is analytical. Very few experimental results are available in the literature. The well known laser Doppler vibrometers (LDV) and accelerometers used for modal analysis are pointwise measurement techniques, although multipoint LDV is available at significant cost.Electronic speckle pattern techniques suitable for experimental detection of the resonant frequencies of vibrating objects are very promising for vibration analysis because they are whole field and non-contact.A finite element model is developed for prediction of the vibration modes of the object under test. Detection of vibrational modes of aluminium diaphragm is demonstrated and compared with the theoretical model. The results obtained are very promising for future application of ESPSI systems with HOEs, for modal analysis. A significant advantage of shearography over electronic speckle pattern interferometry is that ESPSI is relatively insensitive to external disturbances. Another advantage of the proposed system is that it could be easily converted to a phase-shifting electronic speckle shearing interferometer.     

马赫-曾德尔型相移矢量剪切干涉仪

为了实现对激光波面的等光程测试,设计了一个新颖的相移矢量剪切干涉仪。该干涉仪以马赫曾德尔结构为基础,为等光程干涉仪。通过在相干的两路光束中分别插入楔角方向正交放置的楔板实现矢量剪切;其中一块楔板分成两块(平板部分和楔板部分),楔板部分沿平板部分的表面移动,通过改变光程差来实现相移,2π相移所需的移动距离为几毫米的量级,该相移方法在相移精度控制上比较简单。文中还对楔板引入的横向剪切误差和相移误差进行了分析,最后给出了实验所得的一组相移干涉图。     

Simple phase-shifting lateral shearing interferometer

A phase-shifting electronic speckle pattern shearing interferometer with a very simple shearing device is proposed. Two partially reflective glass plates are used to introduce the shear in this new interferometer. The reflection coefficients of the coatings on the two plates are 0.3 and 0.7. The distance between the two glass plates controls the size of the shear. The proposed new interferometric system is simple, flexible, and low cost.     

基于偏振位相调制的位相轮廓测量

本文介绍了一种用来测量三维物体面形的位相轮廓方法，它是通过将正弦光场投影到被测物面，该光场被物体表面调制后发生位相改变，利用偏振位相调制及位相检测算法计算物面的位相分布，再根据几何关系实现对物体三维形貌的测量。实验装置采用一种偏振位相调制的干涉光场投影装置对光场进行简便而精确的移相，采用ＣＣＤ摄像机记录畸变光场，并用计算机处理和显示测量结果。文中给出了有关实验结果。     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

Curvature measurement using three-aperture digital shearography and fast Fourier transform

Curvature measurement using a three-aperture digital shearography (DS) system is reported in this paper. The outer apertures are covered with wedge plates for introducing shear. Four images by sequentially blocking the outer apertures are used for quantitative measurement. Fourier transform technique is used to determine two sheared slope phase maps from two images at a time representing initial and deformed states. Subtraction of these two-phase maps yields the curvature phase map. Experimental results are presented for a circular diaphragm clamped along the edges and loaded at the center.     

数字散斑法在局域剪切带三维变形研究中的应用

在适当的温度、应变率和预变形下,合金材料的拉伸试验中,将会出现伴随应力锯齿形跌落的雪崩式剪切变形带,即波特文-勒夏特利埃(Portevin-Le Chatelier,PLC)效应。利用高速数字摄像系统(分辨力1000 frames/s)并结合数字散斑干涉法(Digital speckle pattern interferometry,DSPI)和数字散斑相关法设计了一套光学变形测量系统,实现了拉伸试验中对试件表面三维变形的实时、精确测量。利用该光学系统对铝铜合金试件在拉伸试验中产生的跳跃传播的局域剪切带瞬态成核过程进行捕捉。通过结合数字散斑相关法得到的面内变形定量结果和数字散斑干涉法得到的表现离面变形的条纹图,再现了剪切变形带成核和传播瞬间的三维变形过程。     

Phase-shifting lateral shearing interferometer with two pairs of wedge plates

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.     

Digital speckle pattern interferometry (DSPI) with increased sensitivity: Use of spatial phase shifting

This paper presents a real-time digital speckle pattern interferometry system with twofold increase in sensitivity for the measurement of in-plane displacement and first order derivative of out-of-plane displacement (slope). Spatial phase shifting technique has been used for quantitative fringe analysis. The system employs a double aperture arrangement in front of the imaging system that introduces spatial carrier fringes within the speckle for spatial phase shifting. For in-plane displacement measurement, the scattered fields from the object are collected independently along the direction of illumination beams, and combined at the image plane. For slope measurement, a shear is introduced between the two scattered fields. Experimental results on an edge clamped circular plate subjected to in-plane rotation for in-plane displacement measurement and central loading for slope measurement are presented.     

New multiplexed system for synchronous measurement of out-of-plane deformation and two orthogonal slopes

We propose a novel system for synchronous measurement of out-of-plane deformation and two orthogonal slopes using a single camera. The linearly polarized reference beam introduced by an optical fiber interferes with the unpolarized object beam to measure the out-of-plane deformation. A modified Mach—Zehnder interferometer is used to measure the two orthogonal slopes of the out-of-plane deformation. One of the object beams of the Mach—Zehnder interferometer is an unpolarized beam, and the other object beam is split into two orthogonal linearly polarized object beams by a polarizing prism. The two beams are orthogonally polarized. Hence, they will not interfere with each other. The two polarized beams respectively interfere with the unpolarized beam to simultaneously measure the two orthogonal slopes of the out-of-plane deformation. In addition, the imaging lens and apertures are respectively placed in three optical paths to independently control the carrier frequencies and shearing amounts. The effectiveness of this method can be proved by measuring two pressure-loaded circular plates.     

Two-dimensional strain measurement with ESPI

Optical techniques have been applied to the measurement of solid deformations in many instances. Practical difficulties with a particular technique can be overcome, in some circumstances, with attention to experimental detail. However, a common problem is the quantitative interpretation of the optical data thus obtained: this can be a time-consuming process and depends on the operator's skill. This paper describes an electronic speckle pattern interferometer that measures two in-plane displacement components simultaneously. The (phase-stepping) procedures implemented for automated displacement and strain analysis are described. Simultaneous measurement of the two displacement components is particularly important for shear strain measurement, because data from the two in-plane views must be combined. The accuracies of displacement and strain measurements are shown to be ±0·03 μm and ±6 μstrain, respectively. Results are presented for a compact tension specimen.     

Measurement of modal damping by electronic speckle shearing interferometry

A time-average electronic speckle shearing interferometer (ESSI) has been used for modal damping measurement. This is effected by a new fringe enhancement technique. The damping factor of a cantilever measured by using this technique agrees well with the value measured by using the accelerometer method. The study shows that time-average speckle interferometry can be used as a convenient tool for modal damping measurement.