近红外偏振干涉相位补偿器的稳定性

相位补偿器是偏振干涉仪的核心部件,其稳定性直接影响偏振干涉光谱仪的可靠性.本文分析了相位补偿器的光程差相对灵敏度、光楔倾斜误差、斜入射角误差和温度适应性等指标,并给出相应的误差容限计算公式.研究表明:相位补偿器移动光楔沿运动方向的抗干扰能力是经典迈克尔逊干涉仪的2/Δnsinθ倍,抗倾斜能力是经典迈克尔逊干涉仪的1.75/Δn倍;当入射光以微量倾斜误差入射后,相位补偿器不会产生额外的附加光程差;―20~85℃范围内的温度变化对相位补偿器产生的最大光程差误差为1.8μm,具有很高的热稳定性;当光楔角为30°时,干涉仪在性能、尺寸和成本之间达到均衡;晶体材料的双折射率差通常远小于1,偏振干涉的稳定性更加明显.本研究为相位补偿器在更为复杂的环境中的应用奠定了基础.     

基于波长移相剪切干涉的准直波前重构技术

为了实现干涉仪出射准直波前的重构，提出了基于波长调谐移相的横向剪切干涉技术。干涉仪出射波前分别经楔板的前后表面反射，通过角锥棱镜返回后在干涉仪CCD上形成剪切干涉条纹。采用波长移相方法提取剪切干涉条纹的相位信息从而实现准直波前重构。分析相对剪切比对波面重构精度的影响，推导相对剪切比和其影响因素间的关系公式，给出波长移相中光程差常数分量的估算方法。测量干涉仪的三组出射波前，波前的峰谷值分别为3.22λ、2.10λ、0.83λ。该方法简化了传统测量干涉仪准直波前的横向剪切干涉装置，提高了测量精度，特别适合于测量波长移相干涉仪的出射波前。     

大孔径静态干涉光谱成像系统(LASIS)中实体Mach-Zehnder干涉仪加工误差容限分析

简要叙述了LASIS光谱成像系统的原理和仪器构成,针对LASIS光谱成像仪像方视场与干涉数据单边过零采样的要求,通过对实体Mach-Zehnder横向剪切干涉仪结构和光路进行分析,并对比Sagnac型横向剪切干涉仪的结构,研究了该干涉仪的附加光程差与加工误差的关系,给出了附加光程差公式和误差容限公式,对探测器阵面上光程差变化的非线性效应影响进行了分析和仿真。结果表明,相比Sagnac型横向剪切干涉仪,因实体Mach-Zehnder干涉仪的非共光路特点产生的附加光程差会导致探测器上的零光程位置的偏移,为保证过零单边采样的要求,需对干涉仪的尺寸误差进行严格约束,其中组成干涉仪的两块非对称五角棱镜非对称量的匹配误差小于0.02 mm;而探测器上光程差变化的非线性效应引起的光谱复原误差小于0.2%,基本可以忽略不计。     

Ronchi相移剪切干涉仪及其相位提取误差分析

在分析Ronchi相移剪切干涉仪典型系统参数的基础上,系统研究了该干涉仪相位提取精度的主要影响因素。结合传统的五步相移算法,采用所提出的八步与十步相移算法,对Ronchi相移剪切干涉仪的相位提取误差进行理论分析和仿真计算。仿真结果说明,八步和十步相移算法可以有效地消除多级衍射光寄生干涉对相位提取精度的影响,且十步相移算法比八步相移算法具有更高的相位提取精度;为了提高测量精度,要求相移误差优于2%;探测器位数大于10位;光栅周期误差小于1%;光源空间相干性低于0.1。通过采用不同的相移算法、剪切率和光源空间相干性的三组对比实验,对理论分析的正确性进行了验证。     

大孔径静态干涉成象光谱仪中横向剪切干涉仪的空间光线分析

介绍基于横向剪切干涉仪的大孔径静态干涉成象光谱仪的原理,用坐标变换和矢量分析的方法计算空闪光线的光程差,通过计算机仿真归纳出横向剪切干涉仪空间光线光程差的一般表达式。     

等光程干涉仪中参考镜楔角最优补偿方式研究北大核心CSCD

在测量多表面平行样品时,多面干涉会影响测量结果。为了能改善多面干涉问题,介绍了等光程干涉仪,并研究了参考镜楔角的最佳补偿方式。在等光程干涉仪中,由于参考镜和分光镜的楔角和倾角的存在,测量结果中会带有回程误差。根据参考镜楔角的不同情况采用了不同的补偿,理论分析并确定了各种补偿的放置方式和补偿量,同时研究了倾角和楔角的大小对于要被遮拦光束高度和像方数值孔径NA的影响。再利用Zemax进行不同补偿方式下的干涉仪仿真,并根据仿真得到的干涉图PV值分析回程误差的大小。分析表明:选用最佳补偿方式,参考镜楔角为1′,回程误差优于0.003个波长。     

四种典型旋转型干涉仪的光程差分析和仿真

从经典迈克尔逊干涉仪结构出发,主要分析了四种旋转型干涉仪的结构特点,以及干涉仪的光程差与旋转角度之间的关系。通过设定参数,使用干涉仪光程差表达式对这四种旋转型干涉仪的光程差作了模拟仿真。在干涉仪光程差表达式基础上,对这四种旋转型干涉仪的旋转速度与旋转角度之间关系也作了模拟仿真。通过对干涉仪光程差的模拟仿真和比较,能够直观地反映出干涉仪光程差与旋转角度之间的关系。在要求运动速度误差控制在3%以内情况下,讨论了四种旋转型干涉仪的旋转角度范围。通过对干涉仪的光程差分析和仿真,这对于研究干涉仪的结构和性能分析具有很好的借鉴意义。     

光纤干涉测距中光程定位的研究

提出一种由定位干涉仪和测量干涉仪组成的光纤干涉绝对距离测量方法;并用标准长度光纤实现光程倍增以增大测量范围;重点讨论了用脉冲电流调制的准单色光源实现光程定位的方法及其精度。通过理论分析和仿真实验,定位重复性误差优于±1μm。     

激光雷达系统快速准直的方法和光学装置

 研制了一种能够方便、快速调节激光雷达收发光路准直的光学装置,分析了装置楔角的选取要求、准直误差及其相应的矫正方法。该装置结构简单,主要由两个楔形光学平板组成,通过电机转动两个楔板可使出射光束方向在一定范围内任意改变,该调节范围由楔板的楔角和折射率决定。利用折射定律,严格推导了装置中两个楔形光学平板的旋转角度与出射光束方向之间的关系。提出了将该光学装置插入到激光雷达发射光路,采用螺旋式粗扫、圆形和径向细扫相结合的光束扫描方式实现对激光雷达准直的方法,并给出了系统准直调节过程中的判断准则和具体的准直步骤。     

双剪切波面干涉测量法

用于星间通信的激光器具有接近衍射极限的激光波面,已有的波面测量方法,在这一具体测量问题中,都存在一定限制。双剪切波面干涉测量法在雅满横向剪切干涉仪的基础上,采用四块楔形平板,将干涉图分为上下两个部分,具有不同的条纹间距,由此求出波面高度和符号,同得到单幅干涉图的其它干涉测量方法相比,它的最小可测量波高减小一倍以上。在介绍干涉仪的基本结构和原理的基础上,模拟了像差存在时的干涉图,并在实验上得到了波高为0．3A的初步结果。双剪切波面干涉测量法,可以目视判断波差的符号和估计量值,为等光程相干,适用于半导体等相干长度小的光源。     

Phase-shifting lateral shearing interferometer with two pairs of wedge plates

We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance.     

Digital phase-shifting interferometer with an electrically addressed liquid-crystal spatial light modulator

A digital phase-shifting interferometer with a liquid-crystal-display coupled, parallel aligned, nematic liquid-crystal spatial light modulator is developed. The optical phase shift in the Michelson-type polarization interferometer is achieved by a digital phase shift of a grating displayed on the spatial light modulator. Accurate experimental results of using the heterodyne system for pi/2 phase steps were demonstrated. A phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shift was achieved.     

Phase Retrieval of Phase-Shifting Interferometry with Iterative Least-Squares Fitting Algorithm: Experiments

We report our experimental results of phase-shifting interferometry with an iterative least-squares fitting technique to estimate both the wave front phases and the phase shifts. The method allows phase retrieval from phase-shifting interferograms even though the calibration data of the phase shifter is unknown. The algorithm is used to analyze two sets of experimental interferograms. One records by moving a piezoelectric transducer shifter randomly and therefore has embedded random phase shifter errors, and the other samples the interference movie recorded by a video recorder while driving a stepping motor and therefore has embedded random intensity noises. The results are comparable with that of the conventional M-frame algorithm. Investigation of the effects of the intensity noises and phase shift errors shows the algorithm to perform well in both. Problems such as convergence, unique solution and reliability are also discussed.     

菲索干涉仪中精确移相的实现

为了实现移相式菲索干涉仪对光学元件面形的高精度测量,建立了干涉仪同步采集移相系统,并对精确移相方法进行了研究。介绍了移相系统的构成和工作原理,计算了测量过程中移相器的速度。针对PZT移相器在移相过程中会引入离焦误差,并存在加速段和减速段的问题,详细设计了移相器的行进过程。最后,对移相器的性能进行了标定。在改造后的干涉仪上开展了重复性验证实验,结果表明：干涉仪可以获得λ/11 340的RMS测量重复性。对改造后干涉仪与Zygo公司生产的Verifire XP/D干涉仪的测量精度做了比对实验,结果显示：相同元件下两者测量结果的面形RMS之差约为0.9 nm,表明提出的移相系统及移相方法在重复性和准确度方面都能满足纳米级面形测量的要求,为研制高精度移相干涉仪奠定了基础。     

Simple phase-shifting lateral shearing interferometer

A phase-shifting electronic speckle pattern shearing interferometer with a very simple shearing device is proposed. Two partially reflective glass plates are used to introduce the shear in this new interferometer. The reflection coefficients of the coatings on the two plates are 0.3 and 0.7. The distance between the two glass plates controls the size of the shear. The proposed new interferometric system is simple, flexible, and low cost.     

用于全场光学相干层析成像的无色散相移器研究

提出了基于旋转λ/2波片无色散相移器的理论模型,和实施该相移器功能的全场光学相干层析成像(Optical coherence tomography,OCT)系统,为实现快速、高分辨光学相干层析成像提供了一种有效方法。该相移器能在宽光谱范围内无色散地获得八倍于λ/2波片旋转角的相移量,避免了利用单色光相移算法提取信号时存在的系统误差。针对修正Carré算法和三步相移算法所要求的不同相移量,在240 nm波长范围内,对相移器的性能进行了数值分析。结果表明,在给定光谱范围内,相移量越大,相移误差的绝对值也越大,幅值比变化范围也越大。用于实施无色散相移器功能的全场光学相干层析成像系统结构,与现有结构相比,具有一些有益的特点。     

Efficient iterative algorithm for phase-shifting interferometry

This paper presents an efficient iterative least-squares algorithm for phase-shifting interferometry. If the phase shifts contain errors, the residuals (i.e. the differences between the recorded intensities and their recalculated values) of least-squares algorithm are dependent on these errors. Based on this fact, an approach that allows estimating the phase shift errors from these residuals is derived. Using the results, the values of phase shifts are corrected. By iterating the two steps: phase evaluation and phase shift correction, the phase distribution can be accurately reconstructed. Its validity and performances have been investigated by both the numerical simulation and experiment results. The convergence condition with this algorithm is also discussed.     

Step index fibre using laser interferometer

A model is suggested to describe the fringe shift which occurs due to the phase variations of cladded glass fibre introduced between the two plates of the liquid wedge interferometer illuminated with a He–Ne laser. The fringe shift of the phase object which appears in the denominator of the Airy distribution formula of the multiple beam interference is represented in the harmonic term. An experiment is conducted using liquid wedge interferometer where the step index glass fibre of a nearly quadratic thickness variation is introduced between the two plates of the interferometer. The obtained fringe shift shows a good agreement with the proposed quadratic model. The Matlab code is written to plot the interferometer fringes comprising the shift of the step index fibre. Secondly, recognition of elliptical fibres is outlined using tomographic imaging. Finally, results and concluding remarks are given.     

基于二维光栅分光的同步移相干涉测量技术

为了干涉测量的抗振目的,提出了一种新的同步移相干涉测量方案并搭建了实验装置。整个测量系统在迈克耳孙偏振移相干涉仪的基础上,利用一个正交的二维光栅产生对称分光,选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之分别通过偏振方向依次相差45°的一个偏振片组,从而分别形成0°、90°、180°和270°相移的四幅移相干涉图,按照传统的四步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统的测量误差的影响。利用该系统测量一球面系统,结果与在ZYGO干涉仪上相比较,球面系统的均方根误差相差0.012λ,峰谷值相差0.051λ。     

Improvement of the sensitivity of measurements in the formation of holographic interferograms of wedge plates

We consider the method for improving the sensitivity of measurements in the formation of aberration-free interference images of wedge plates, which do not require a priori knowledge of the position of the wedge edge. It is shown that the sensitivity in the measurement of the wedge angle in real time interferometry is doubled in the case of recording on the reference hologram of the wedge plate followed by its reconstruction by the object light wave that has passed through the wedge plate rotated through 180° relative to the normal. It turns out that recording of a pair of holograms of the wedge plate, one of which is the image of the wedge plate turned through 180° relative to the normal to the plate, makes it possible to increase the sensitivity of measurements by more than an order of magnitude by eliminating the systematic components of measuring errors due to complete compensation of aberrations. The results of experimental testing of the method are considered.