短脉冲激光辐照下金属镜面波纹损伤机理研究

用脉冲Nd：YAG激光(波长1．06μm、半高宽10ns)辐照了多种金属膜层镜面，用光学与原子力显微镜观察到某些样品损伤区或周围有规律的波纹图案，波纹周期从几微米到几十微米。通过分析实验结果，这里提出了波纹产生的光学模型，认为光路系统中某些元件的衍射或者强光与元件表面相互作用过程中产生的干涉可能会导致元件表面波纹状损伤图案。通过理论计算，初步解释了实验中波纹的周期和其他现象。     

脉冲激光引起铜膜镜面的环形损伤波纹研究

 用波长1.06μm、半高宽10ns的脉冲Nd:YAG激光辐照铜膜镜面，在激光辐照区，用光学显微镜观察到有规律的环形波纹状损伤图案，波纹平均周期约几十μm。通过对光路系统分析，认为样品前的小孔光阑对激光产生了菲涅尔衍射，使得在样品表面光强分布变成周期性环状分布。在极短的相互作用时间内，热扩散很小，损伤图案依赖于光强分布。并依据实验参数，用柯林斯公式对样品表面的光强分布进行了计算，所得光强分布的周期与损伤波纹的周期基本一致。     

长脉冲激光作用下薄膜表面鼓包的形成机理

 在光学薄膜的激光损伤实验中，可以在显微镜下观测到激光辐照引起的尺寸较大、形状对称性很好的鼓包。从杂质气化的角度，应用弹性力学的球壳受压膨胀模型，分析薄膜表面鼓包的形成机制，同时得到了相应情况下薄膜的损伤机制。结果表明，半径越大杂质在激光辐照下越容易引起薄膜破坏，填埋得越浅的杂质也越容易引起薄膜破坏。杂质诱导破坏机制下，薄膜的裂纹首先出现在杂质附近的薄膜基体中。在薄膜中出现裂纹的临界状态时，半径越大、填埋得越深的杂质所引起的鼓包尺寸越大、高度越高。这种热力耦合模型，弥补了现有理论的不足，进一步完善了现有理论。     

表面杂质诱导薄膜元件的热应力损伤EI北大核心CSCD

基于薄膜元件的热力学理论,建立了强激光连续辐照下薄膜元件的热分析模型,模拟了薄膜元件表面杂质吸热后向周围薄膜进行热传递的过程,并讨论了表面洁净度等级和杂质尺寸对薄膜元件热应力损伤的影响。研究结果表明:强激光连续辐照下,表面杂质会吸收激光能量产生较大的温升,激光辐照时间越长,功率密度越大,杂质的温升也越大;吸热后,达到熔点的杂质和未达到熔点的杂质分别通过热传导和热辐射的方式向周围薄膜传递热量,通过热传导作用在薄膜元件表面引起的温升明显高于热辐射作用引起的;杂质向周围薄膜传递热量后会在薄膜元件上产生非均匀的温度梯度,进而产生热应力,热应力随着温度梯度的增加而增大,且处于一定尺寸范围内的杂质,更容易诱导薄膜元件热应力损伤;此外,薄膜元件的表面洁净度等级越高,杂质粒子的数目越多,越易于造成薄膜元件的热应力损伤。     

熔石英紫外激光初始损伤形态分析

 采取355 nm激光脉冲辐照熔石英样品,利用Nomarski微分干涉差显微镜、原子力显微镜和扫描电子显微镜观测手段对前后表面产生的损伤点进行了观察分析。对前后表面损伤形态做出详细的描述和分类,从理论上对每种损伤类型产生的条件与机理做出推测。实验结果表明：熔石英前表面存在小麻点群损伤和星状裂纹损伤两种损伤形态,横向尺寸分别为0.8～2.5和1.0～5.5 μm;后表面存在小麻点群损伤、壳状剥离损伤和火山口3种损伤形态,损伤横向尺寸分别为0.48～1.33,4～20和12～30 μm。实验证明了1 μm尺度损伤点的产生与再沉积层密切相关。     

高功率脉冲电子束辐照SiO_2的光学和激光损伤性能

研究了不同剂量的60 kW高功率脉冲电子束辐照对高纯熔石英玻璃的微观结构、光学性能和激光损伤特性的影响规律.光学显微图像表明,辐照后熔石英样品由于热效应导致表面破裂,裂纹密度和尺寸随辐照剂量增加而增大,采用原子力显微镜分析表面裂纹的微观形貌,裂纹宽度约1μm,同时样品表面分布着大量尺寸约0.1—1μm的碎片颗粒.吸收光谱测试表明,所有样品均在394 nm处出现微弱的吸收峰,吸收强度随着电子束辐照剂量增大呈现先增加后减小的趋势.荧光光谱测试发现辐照前后样品均有3个荧光带,分别位于460,494和520 nm,荧光强度随辐照剂量的变化趋势与吸收光谱一致.利用355 nm激光研究了不同剂量电子束辐照对熔石英激光损伤阈值的影响,结果表明熔石英的损伤阈值随着辐照剂量的增加而降低.在剂量较低时,导致熔石英激光损伤阈值下降的原因主要是色心缺陷;剂量较高时,导致损伤阈值降低的原因主要是样品表面产生的大量微裂纹和碎片颗粒对激光的调制和吸收.     

高功率脉冲电子束辐照SiO$lt;sub$gt;2$lt;/sub$gt;的光学和激光损伤性能

研究了不同剂量的60 kW高功率脉冲电子束辐照对高纯熔石英玻璃的微观结构、光学性能和激光损伤特性的影响规律. 光学显微图像表明, 辐照后熔石英样品由于热效应导致表面破裂, 裂纹密度和尺寸随辐照剂量增加而增大, 采用原子力显微镜分析表面裂纹的微观形貌, 裂纹宽度约1 um, 同时样品表面分布着大量尺寸约0.1–1μm的碎片颗粒. 吸收光谱测试表明, 所有样品均在394 nm处出现微弱的吸收峰, 吸收强度随着电子束辐照剂量增大呈现先增加后减小的趋势. 荧光光谱测试发现辐照前后样品均有3个荧光带, 分别位于460, 494和520 nm, 荧光强度随辐照剂量的变化趋势与吸收光谱一致. 利用355 nm激光研究了不同剂量电子束辐照对熔石英激光损伤阈值的影响, 结果表明熔石英的损伤阈值随着辐照剂量的增加而降低. 在剂量较低时, 导致熔石英激光损伤阈值下降的原因主要是色心缺陷; 剂量较高时, 导致损伤阈值降低的原因主要是样品表面产生的大量微裂纹和碎片颗粒对激光的调制和吸收. 关键词： 熔石英 电子束辐照 色心 激光损伤阈值     

熔石英表面加工引入金属微粒的三倍频激光损伤机制

 以材料表面金属元素吸收作为主线建立熔石英表面损伤模型,理论模拟了激光辐照过程中金属微粒周围温度场的变化,模型结果显示,在脉冲时间内微粒周围温度很快达到损伤判据给出的临界温度。通过激光损伤实验,对比刻蚀与未刻蚀样品之间的损伤密度,证实了金属微粒含量与损伤密度存在密切联系。计算结果和实验结果均表明：金属微粒是熔石英激光损伤中重要的吸收前驱体,极大降低了熔石英材料的表面抗损伤性能。     

窄带干涉滤光片抗击不同输出方式激光的损伤特性研究

利用Nd∶YAG调Q单脉冲激光和自由脉冲激光对硬膜窄带干涉滤光片进行激光损伤阈值的测试,并且采用表面热透镜技术测量了滤光片的吸收率。实验发现:窄带干涉滤光片的吸收率和激光损伤阈值强烈依赖于辐照激光波长与窄带干涉滤光片通带的相对位置;在调Q单脉冲激光作用下,不同中心波长的滤光片损伤形貌存在明显的差别,而在自由脉冲激光作用下,各滤光片的损伤形貌则趋于相同,均表现为典型的热熔烧蚀破坏。根据实验结果,结合损伤形貌,通过驻波场理论对激光作用下滤光片内电场分布的分析与模拟,探讨了两种激光模式作用下滤光片的损伤特征和损伤机理的不同特点。     

激光等离子体效应对硅表面损伤特征的影响

硅材料作为光电探测器的基础材料,研究其在强激光辐照下的损伤问题在激光探测、国防领域很有意义。对高强度纳秒激光作用下硅表面的损伤形貌特征进行了研究,结果表明:激光等离子体的热效应及冲击波效应,使激光作用区域内的物质迅速向外飞溅,形成点坑,并在点坑周围形成辐射状冷却物;散射光与入射激光干涉产生形成周期性分布的热应力使得硅材料表面张力发生变化,冷却后会在坑底表面产生周期性结构;从激光等离子体的光谱中可以发现N,O和Si的特征光谱,在重复激光脉冲作用下会在硅表面上覆盖一层导致色变的SiOx和SiNx复合薄膜,是激光等离子体的喷射产物。     

The morphology of pulsed laser-induced damage on the surface of a copper film mirror

A copper film mirror was irradiated using a pulsed Nd:YAG laser (1.06 μm,10 ns) through an aperture. After laser irradiation, the damaged spot was analyzed using an optical microscope and periodic damage rings were found at the laser irradiation spot, the average spacing of these rings being about 40–50 μm. The damage ring could be observed in the periphery of the laser spot under lower laser energy densities. As the laser fluence increased, the periodic damage rings grew to cover the whole laser spot. Under higher laser energy density, the whole film was damaged and the rings disappeared. A Fresnel diffraction model is used to explain the appearance of these rings. The laser beam is diffracted by the aperture in the optic path, the laser intensity distribution at the copper film mirror becomes periodic rings and damage ripple pattern forms instantly with the laser ablation. The laser intensity distribution at the mirror surface is calculated using Collins formula, with which the period of the damage rings and other phenomena can be explained.     

Surface damage morphology investigations of silicon under millisecond laser irradiation

The surface damage morphologies of single crystal silicon induced by 1064 nm millisecond Nd:YAG laser are investigated. After irradiation, the damage morphologies of silicon are inspected by optical microscope (OM) and atomic force microscope (AFM). The plasma emission spectra of the damaged region are detected by the spectrometer. It is shown that surface oxidation and nitridation have occurred during the interaction of millisecond laser with silicon. In addition, the damage morphologies induced by 2 ms and 10 ns pulse width laser are compared. The damage morphology obtained by 2 ms laser is an evident crater. Three types of damage morphologies are formed at different laser energy densities. The circular concentric ripples are found surrounding the rim of the crater. The spacing of the ripples is 15 ± 5 μm. Two types of cracks are observed: linear crack and circular crack. The linear crack is observed in the center of the damaged region which propagates to the periphery of the damaged region. The circular crack is located at the rim of the crater. The damage morphology induced by 10 ns laser is surface layer damage. The periodic linear waves are generated due to the interference between the incident beam and the scattered beam. The spacing of the ripples is 1.54 μm which is close to the incident laser wavelength 1.064 μm. The linear crack is located at the center of the damaged region. Furthermore, for the same laser energy density, the dimension of the damaged region and the crater depth induced by 2 ms laser are greater than that of 10 ns laser. It indicates that the damage mechanism under millisecond pulse laser irradiation is strongly different from the case of nanosecond pulse laser.     

The laser polarization as control parameter in the formation of laser-induced periodic surface structures: Comparison of numerical and experimental results

Considering self-organized surface pattering upon multi-pulse femtosecond laser irradiation, in particularly the strong dependence of ripples orientation on the laser polarization, we present numerical simulations from an adopted surface erosion model and compare the result to our experimental data on laser-induced nanostructures formation. We present the surface morphologies obtained by this model for different polarizations of the incident laser electric field and show good agreement with ripple formation produced by laser ablation experiments. The correlation of ripples orientation with laser polarization can be described within a model where the polarization causes a breaking of symmetry at the surface. Further we discuss a time evolution of pattern formation. Our results support the non-linear self-organization mechanism of pattern formation on the surface of solids.     

Surface micro/nanostructuring of titanium under stationary and non-stationary femtosecond laser irradiation

In this paper the surface topography of titanium samples irradiated by femtosecond laser pulses is described. When the fluence is about 0.5 J/cm² periodic ripples with a period of about 700 nm are formed. For fluences between 0.5 and 2 J/cm², a microcolumnar surface texture develops in the center of the irradiated spots and ripples are formed in the periphery of the spots. When experiments are performed with a non-stationary sample, the microcolumns exhibit ripples similar to those observed when the radiation fluence is about 0.5 J/cm² and in the outer regions of the irradiated areas for fluences between 0.5 and 2 J/cm². Since the energy distribution in the transverse cross-section of the laser beam is Gaussian, we conclude that the ripples form when the microcolumns are subjected to fluences near the melting threshold of the material at the trailing edge of the moving laser beam.     

多脉冲激光对K9玻璃的表面损伤实验研究

 实验研究了波长为1 064 nm、脉宽为10 ns、重复频率为1 Hz的激光脉冲对K9玻璃的表面损伤特点,给出了脉冲透过能量随激光脉冲作用次数变化的规律。采用3维立体显微镜对损伤形貌进行观察,发现K9玻璃的损伤表面呈环状分布,分为烧蚀区、微裂纹区和断裂区。随着激光脉冲个数的增加,损伤由点状破坏演变为损伤区,微裂纹逐渐增长,损伤面积逐渐增大。基于激光支持的爆轰波理论分析,激光与脆性材料的相互作用可引起微裂纹的大量增长。在多脉冲激光的作用下,K9玻璃损伤的累积效应明显,表面损伤阈值明显降低,表面裂纹增长明显,损伤面积逐渐增大;但随着激光脉冲的继续增加,这种损伤趋于稳定。     

真空条件下激光诱导光纤损伤特性研究

实验研究并分析了调Q Nd:YAG 脉冲激光诱导光纤损伤特性.设计了在真空条件下全石英光纤传输1064 nm 脉冲激光实验.通过将激光注入光纤端面气压降低到10—100 Pa, 光纤端面击穿阈值提高到大气环境下的185 倍.结合光纤端面损伤形貌分析可知,光纤端面损伤主要是由于激光驻波场和烧蚀共同作用的结果,光纤端面或内部大量的缺陷降低了光纤抗激光损伤的能力.在真空条件下由于光纤端面光学击穿阈值的提高,激光诱导光纤损伤特性又表现出了另外一种损伤模式——光纤初始输入段损伤.它发生在光纤输入段附 关键词： 激光损伤 光束传输 真空 石英光纤     

Creation of periodic subwavelength ripples on tungsten surface by ultra-short laser pulses

Formation of periodic subwavelength ripples on a metallic tungsten surface is investigated through a line-scribing method under the irradiation of 800?nm, 50 fs to 8 ps ultra-short laser pulses. The distinctive features of the induced ripple structures are described in detail with different laser parameters. Experimental measurements reveal that with gradual decrease of the laser fluence, the pulse duration or the scanning speed, the ripple period is inclined to reduce but the ripple depth tends to become pronounced. Theoretical analyses suggest that the transient dielectric function change of the tungsten surface mainly originates from the nonequilibrium distribution of electrons due to the d-band transitions. A sandwich-like physical model of air?Cplasma?Ctarget is proposed and the excitation of a surface plasmon polaritonic (SPP) wave is supposed to occur on the interface between the metallic target and the electron plasma layer. Formation of ripples can be eventually attributed to the laser?CSPP interference. Theoretical interpretations are consistent with the experimental observations.     

Control parameters in pattern formation upon femtosecond laser ablation

Femtosecond laser ablation experiments on different materials have revealed a great diversity of self-organized nano-structures on the bottom of the ablated area. They range from arrays of nano-spheres to bifurcating longer lines, with size and shape depending on the irradiation dose and number of laser pulses. In this contribution, laser beam polarization and surface charge distribution, following surface relaxation, are investigated as control parameters for this nano-structures formation. Experiments with linear, circular and, for the first time, elliptical polarized light indicate that the laser polarization has a great influence on the orientation of the ripples. Investigations with laser beams of elliptical polarization show that, whereas the ripples orientation is defined by the major axis of the polarization ellipse, the ripple morphology is sensitive to the ellipticity. For silicon samples electrical measurements with a scanning-probe microscope on the ablated area reveal a spatial variation of the surface potential, possibly generated by a local change in dopant density, correlated with the patterns’ modulation on the crater bottom.     

超声清洗与激光预处理对减反膜阈值的影响

 研究了超声清洗和激光预处理两种后处理手段对减反膜的损伤特性的影响。采用电子束蒸发技术制备了1 064 nm减反膜，利用超声清洗及激光预处理的方法分别对样品进行处理，并对处理前后的样品分别进行激光损伤阈值测试及破斑深度测量。结果表明：处理后减反膜的损伤阈值均有所提升，但激光预处理的阈值增强效果更加明显；超声清洗前后的破斑深度没有大的变化，而激光预处理后的破斑深度比处理前浅得多；原因在于超声清洗只能去除表面杂质，激光预处理可减少和抑制膜层内较深处的缺陷。