Scanning transmission X‐ray microscopy probe for in situ mechanism study of graphene‐oxide‐based resistive random access memory

Here, an in situ probe for scanning transmission X‐ray microscopy (STXM) has been developed and applied to the study of the bipolar resistive switching (BRS) mechanism in an Al/graphene oxide (GO)/Al resistive random access memory (RRAM) device. To perform in situ STXM studies at the C K‐ and O K‐edges, both the RRAM junctions and the I₀ junction were fabricated on a single Si₃N₄ membrane to obtain local XANES spectra at these absorption edges with more delicate I₀ normalization. Using this probe combined with the synchrotron‐based STXM technique, it was possible to observe unique chemical changes involved in the BRS process of the Al/GO/Al RRAM device. Reversible oxidation and reduction of GO induced by the externally applied bias voltages were observed at the O K‐edge XANES feature located at 538.2 eV, which strongly supported the oxygen ion drift model that was recently proposed from ex situ transmission electron microscope studies.     

A scanning transmission X‐ray microscope at the Pohang Light Source

A scanning transmission X‐ray microscope is operational at the 10A beamline at the Pohang Light Source. The 10A beamline provides soft X‐rays in the photon energy range 100–2000 eV using an elliptically polarized undulator. The practically usable photon energy range of the scanning transmission X‐ray microscopy (STXM) setup is from ～150 to ～1600 eV. With a zone plate of 25 nm outermost zone width, the diffraction‐limited space resolution, ～30 nm, is achieved in the photon energy range up to ～850 eV. In transmission mode for thin samples, STXM provides the element, chemical state and magnetic moment specific distributions, based on absorption spectroscopy. A soft X‐ray fluorescence measurement setup has been implemented in order to provide the elemental distribution of thicker samples as well as chemical state information with a space resolution of ～50 nm. A ptychography setup has been implemented in order to improve the space resolution down to 10 nm. Hardware setups and application activities of the STXM are presented.     

Grazing‐incidence small‐angle X‐ray scattering from Ge nanodots self‐organized on Si(001) examined with soft X‐rays

Grazing‐incidence small‐angle X‐ray scattering (GISAXS) measurements with soft X‐rays have been applied to Ge nanodots capped with a Si layer. Spatially anisotropic distribution of nanodots resulted in strongly asymmetric GISAXS patterns in the q_y direction in the soft X‐ray region, which have not been observed with conventional hard X‐rays. However, such apparent differences were explained by performing a GISAXS intensity calculation on the Ewald sphere, i.e. taking the curvature of Ewald sphere into account.     

Estimation of soft X‐ray and EUV transition radiation power emitted from the MIRRORCLE‐type tabletop synchrotron

The tabletop synchrotron light sources MIRRORCLE‐6X and MIRRORCLE‐20SX, operating at electron energies E_el = 6 MeV and E_el = 20 MeV, respectively, can emit powerful transition radiation (TR) in the extreme ultraviolet (EUV) and the soft X‐ray regions. To clarify the applicability of these soft X‐ray and EUV sources, the total TR power has been determined. A TR experiment was performed using a 385 nm‐thick Al foil target in MIRRORCLE‐6X. The angular distribution of the emitted power was measured using a detector assembly based on an NE102 scintillator, an optical bundle and a photomultiplier. The maximal measured total TR power for MIRRORCLE‐6X is P_max? 2.95 mW at full power operation. Introduction of an analytical expression for the lifetime of the electron beam allows calculation of the emitted TR power by a tabletop synchrotron light source. Using the above measurement result, and the theoretically determined ratio between the TR power for MIRRORCLE‐6X and MIRRORCLE‐20SX, the total TR power for MIRRORCLE‐20SX can be obtained. The one‐foil TR target thickness is optimized for the 20 MeV electron energy. P_max? 810 mW for MIRRORCLE‐20SX is obtained with a single foil of 240 nm‐thick Be target. The emitted bremsstrahlung is negligible with respect to the emitted TR for optimized TR targets. From a theoretically known TR spectrum it is concluded that MIRRORCLE‐20SX can emit 150 mW of photons with E > 500 eV, which makes it applicable as a source for performing X‐ray lithography. The average wavelength, = 13.6 nm, of the TR emission of MIRRORCLE‐20SX, with a 200 nm Al target, could provide of the order of 1 W EUV.     

X‐ray Raman spectroscopy of lithium‐ion battery electrolyte solutions in a flow cell

The effects of varying LiPF₆ salt concentration and the presence of lithium bis(oxalate)borate additive on the electronic structure of commonly used lithium‐ion battery electrolyte solvents (ethylene carbonate–dimethyl carbonate and propylene carbonate) have been investigated. X‐ray Raman scattering spectroscopy (a non‐resonant inelastic X‐ray scattering method) was utilized together with a closed‐circle flow cell. Carbon and oxygen K‐edges provide characteristic information on the electronic structure of the electrolyte solutions, which are sensitive to local chemistry. Higher Li⁺ ion concentration in the solvent manifests itself as a blue‐shift of both the π* feature in the carbon edge and the carbonyl π* feature in the oxygen edge. While these oxygen K‐edge results agree with previous soft X‐ray absorption studies on LiBF₄ salt concentration in propylene carbonate, carbon K‐edge spectra reveal a shift in energy, which can be explained with differing ionic conductivities of the electrolyte solutions.     

Measurement of the X‐ray mass attenuation coefficients of silver in the 5–20 keV range

The X‐ray mass attenuation coefficients of silver were measured in the energy range 5–20 keV with an accuracy of 0.01–0.2% on a relative scale down to 5.3 keV, and of 0.09–1.22% on an absolute scale to 5.0 keV. This analysis confirms that with careful choice of foil thickness and careful correction for systematics, especially including harmonic contents at lower energies, the X‐ray attenuation of high‐Z elements can be measured with high accuracy even at low X‐ray energies (<6 keV). This is the first high‐accuracy measurement of X‐ray mass attenuation coefficients of silver in the low energy range, indicating the possibility of obtaining high‐accuracy X‐ray absorption fine structure down to the L₁ edge (3.8 keV) of silver. Comparison of results reported here with an earlier data set optimized for higher energies confirms accuracy to within one standard error of each data set collected and analysed using the principles of the X‐ray extended‐range technique (XERT). Comparison with theory shows a slow divergence towards lower energies in this region away from absorption edges. The methodology developed can be used for the XAFS analysis of compounds and solutions to investigate structural features, bonding and coordination chemistry.     

Hard X‐ray‐induced damage on carbon–binder matrix for in situ synchrotron transmission X‐ray microscopy tomography of Li‐ion batteries

The electrode of Li‐ion batteries is required to be chemically and mechanically stable in the electrolyte environment for in situ monitoring by transmission X‐ray microscopy (TXM). Evidence has shown that continuous irradiation has an impact on the microstructure and the electrochemical performance of the electrode. To identify the root cause of the radiation damage, a wire‐shaped electrode is soaked in an electrolyte in a quartz capillary and monitored using TXM under hard X‐ray illumination. The results show that expansion of the carbon–binder matrix by the accumulated X‐ray dose is the key factor of radiation damage. For in situ TXM tomography, intermittent X‐ray exposure during image capturing can be used to avoid the morphology change caused by radiation damage on the carbon–binder matrix.     

In situ electrochemical high‐energy X‐ray diffraction using a capillary working electrode cell geometry

The ability to generate new electrochemically active materials for energy generation and storage with improved properties will likely be derived from an understanding of atomic‐scale structure/function relationships during electrochemical events. Here, the design and implementation of a new capillary electrochemical cell designed specifically for in situ high‐energy X‐ray diffraction measurements is described. By increasing the amount of electrochemically active material in the X‐ray path while implementing low‐Z cell materials with anisotropic scattering profiles, an order of magnitude enhancement in diffracted X‐ray signal over traditional cell geometries for multiple electrochemically active materials is demonstrated. This signal improvement is crucial for high‐energy X‐ray diffraction measurements and subsequent Fourier transformation into atomic pair distribution functions for atomic‐scale structural analysis. As an example, clear structural changes in LiCoO₂ under reductive and oxidative conditions using the capillary cell are demonstrated, which agree with prior studies. Accurate modeling of the LiCoO₂ diffraction data using reverse Monte Carlo simulations further verifies accurate background subtraction and strong signal from the electrochemically active material, enabled by the capillary working electrode geometry.     

Humic acid metal cation interaction studied by spectromicroscopy techniques in combination with quantum chemical calculations

Humic acids (HA) have a high binding capacity towards traces of toxic metal cations, thus affecting their transport in aquatic systems. Eu(III)–HA aggregates are studied by synchrotron‐based scanning transmission X‐ray microscopy (STXM) at the carbon K‐edge and laser scanning luminescence microscopy (LSLM) at the ⁵D₀→⁷F_1,2 fluorescence emission lines. Both methods provide the necessary spatial resolution in the sub‐micrometre range to resolve characteristic aggregate morphologies: optically dense zones embedded in a matrix of less dense material in STXM images correspond to areas with increased Eu(III) luminescence yield in the LSLM micrographs. In the C 1s‐NEXAFS of metal‐loaded polyacrylic acid (PAA), used as a HA model compound, a distinct complexation effect is identified. This effect is similar to trends observed in the dense fraction of HA/metal cation aggregates. The strongest complexation effect is observed for the Zr(IV)–HA/PAA system. This effect is confirmed by quantum chemical calculations performed at the ab initio level for model complexes with different metal centres and complex geometries. Without the high spatial resolution of STXM and LSLM and without the combination of molecular modelling with experimental results, the different zones indicating a `pseudo'‐phase separation into strong complexing domains and weaker complexing domains of HA would never have been identified. This type of strategy can be used to study metal interaction with other organic material.     

Optimization of L‐shell X‐ray fluorescence detection of lead in bone phantoms using synchrotron radiation

Closely related toxicity and retention mechanisms of lead (Pb) in the human body involve the bone tissues where Pb can accumulate and reside on a time scale ranging from years to tens of years. In vivo measurements of bone Pb can, therefore, play an important role in a comprehensive health risk assessment of Pb exposure. In vivo L‐shell X‐ray fluorescence (LXRF) measurement of bone Pb was first demonstrated over 4 decades ago. Implementation of the method, however, encountered challenges associated with low sensitivity and calibration procedure. In this study, the LXRF measurement was optimized by varying the incident photon energy and the excitation‐detection geometry. The Canadian Light Source synchrotron radiation was used to compare 2 different excitation‐detection geometries of 90^° and 135^° using 3 different X‐ray photon energies: 15.8, 16.6, and 17.5 keV. These energies optimized excitation of the L₃ subshell of Pb and simulated the most intense K‐shell emissions of zirconium, niobium, and molybdenum, respectively. Five rectangular plaster‐of‐Paris bone phantoms with Pb concentrations of 0, 7, 17, 26, and 34 μg/g, and one rectangular 3.1‐mm‐thick resin phantom mimicked the X‐ray attenuation properties of human bone and soft tissue, respectively. Optimal LXRF detection was obtained by the 15.8‐keV energy and the 90^° and 135^° geometries for the bare bone and the bone and soft tissue phantoms, respectively.     

Caltrop particles synthesized by photochemical reaction induced by X‐ray radiolysis

X‐ray radiolysis of a Cu(CH₃COO)₂ solution was observed to produce caltrop‐shaped particles of cupric oxide (CuO, Cu₂O), which were characterized using high‐resolution scanning electron microscopy and micro‐Raman spectrometry. X‐ray irradiation from a synchrotron source drove the room‐temperature synthesis of submicrometer‐ and micrometer‐scale cupric oxide caltrop particles from an aqueous Cu(CH₃COO)₂ solution spiked with ethanol. The size of the caltrop particles depended on the ratio of ethanol in the stock solution and the surface of the substrate. The results indicated that there were several synthetic routes to obtain caltrop particles, each associated with electron donation. The technique of X‐ray irradiation enables the rapid synthesis of caltrop cupric oxide particles compared with conventional synthetic methods.     

Interface characterization of B4C‐based multilayers by X‐ray grazing‐incidence reflectivity and diffuse scattering

B₄C‐based multilayers have important applications for soft to hard X‐rays. In this paper, X‐ray grazing‐incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B₄C‐based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, etc. Quantitative results for W/B₄C, Mo/B₄C and La/B₄C multilayers were compared. W/B₄C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B₄C and Mo/B₄C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B₄C‐based multilayers.     

Soft X‐ray absorption spectroscopy and resonant inelastic X‐ray scattering spectroscopy below 100 eV: probing first‐row transition‐metal M‐edges in chemical complexes

X‐ray absorption and scattering spectroscopies involving the 3d transition‐metal K‐ and L‐edges have a long history in studying inorganic and bioinorganic molecules. However, there have been very few studies using the M‐edges, which are below 100 eV. Synchrotron‐based X‐ray sources can have higher energy resolution at M‐edges. M‐edge X‐ray absorption spectroscopy (XAS) and resonant inelastic X‐ray scattering (RIXS) could therefore provide complementary information to K‐ and L‐edge spectroscopies. In this study, M_2,3‐edge XAS on several Co, Ni and Cu complexes are measured and their spectral information, such as chemical shifts and covalency effects, are analyzed and discussed. In addition, M_2,3‐edge RIXS on NiO, NiF₂ and two other covalent complexes have been performed and different d–d transition patterns have been observed. Although still preliminary, this work on 3d metal complexes demonstrates the potential to use M‐edge XAS and RIXS on more complicated 3d metal complexes in the future. The potential for using high‐sensitivity and high‐resolution superconducting tunnel junction X‐ray detectors below 100 eV is also illustrated and discussed.     

Highly stable amorphous indium‐zinc‐oxide thin‐film transistors with back‐channel wet‐etch process

The stabilities of amorphous indium‐zinc‐oxide (IZO) thin film transistors (TFTs) with back‐channel‐etch (BCE) structure are investigated. A molybdenum (Mo) source/drain electrode was deposited on an IZO layer and patterned by hydrogen peroxide (H₂O₂)‐based etchants. Then, after etching the Mo layer, SF₆ plasma with direct plasma mode was employed and optimized to improve the bias stress stability. Scanning electron microscopy and X‐ray photoelectron spectroscopic analysis revealed that the etching residues were removed efficiently by the plasma treatment. The modified BCE‐ TFTs showed only threshold voltage shifts of 0.25 V and –0.20 V under positive/negative bias thermal stress (P/NBTS, V_GS = ±30 V, V_DS = 0 V and T = 60 °C) after 12 hours, respectively. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Soft‐X‐ray ARPES facility at the ADRESS beamline of the SLS: concepts,technical realisation and scientific applications

Soft‐X‐ray angle‐resolved photoelectron spectroscopy (ARPES) with photon energies around 1 keV combines the momentum space resolution with increasing probing depth. The concepts and technical realisation of the new soft‐X‐ray ARPES endstation at the ADRESS beamline of SLS are described. The experimental geometry of the endstation is characterized by grazing X‐ray incidence on the sample to increase the photoyield and vertical orientation of the measurement plane. The vacuum chambers adopt a radial layout allowing most efficient sample transfer. High accuracy of the angular resolution is ensured by alignment strategies focused on precise matching of the X‐ray beam and optical axis of the analyzer. The high photon flux of up to 10¹³ photons s^?1 (0.01% bandwidth)^?1 delivered by the beamline combined with the optimized experimental geometry break through the dramatic loss of the valence band photoexcitation cross section at soft‐X‐ray energies. ARPES images with energy resolution up to a few tens of meV are typically acquired on the time scale of minutes. A few application examples illustrate the power of our advanced soft‐X‐ray ARPES instrumentation to explore the electronic structure of bulk crystals with resolution in three‐dimensional momentum, access buried heterostructures and study elemental composition of the valence states using resonant excitation.     

Enhancement of measurement accuracy of X‐ray PIV in comparison with the micro‐PIV technique

The X‐ray PIV (particle image velocimetry) technique has been used as a non‐invasive measurement modality to investigate the haemodynamic features of blood flow. However, the extraction of two‐dimensional velocity field data from the three‐dimensional volumetric information contained in X‐ray images is technically unclear. In this study, a new two‐dimensional velocity field extraction technique is proposed to overcome technological limitations. To resolve the problem of finding a correction coefficient, the velocity field information obtained by X‐ray PIV and micro‐PIV techniques for disturbed flow in a concentric stenosis with 50% severity was quantitatively compared. Micro‐PIV experiments were conducted for single‐plane and summation images, which provide similar positional information of particles as X‐ray images. The correction coefficient was obtained by establishing the relationship between velocity data obtained from summation images (V_S) and centre‐plane images (V_C). The velocity differences between V_S and V_C along the vertical and horizontal directions were quantitatively analysed as a function of the geometric angle of the test model for applying the present two‐dimensional velocity field extraction technique to a conduit of arbitrary geometry. Finally, the two‐dimensional velocity field information at arbitrary positions could be successfully extracted from X‐ray images by using the correction coefficient and several velocity parameters derived from V_S.     

Full‐field X‐ray reflection microscopy of epitaxial thin‐films

Novel X‐ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full‐field hard X‐ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and sub‐nanometer height sensitivity. Sub‐second X‐ray exposures can be used to acquire a 14 µm × 14 µm image with an effective pixel size of 20 nm on the sample. The optical configuration and various engineering considerations that are necessary to achieve optimal imaging resolution and contrast in this type of microscopy are discussed.     

Calibration method at the N K‐edge using interstitial nitrogen gas in solid‐state nitrogen‐containing inorganic compounds

The standard method of soft X‐ray beamline calibration at the N K‐edge uses the ν = 0 peak transition of gas‐phase N₂. Interstitial N₂ gas trapped or formed within widely available solid‐state ammonium‐ and amine‐containing salts can be used for this purpose, bypassing gas‐phase measurements. Evidence from non‐nitrogen‐containing compounds (KH₂PO₄) and from He‐purged ammonium salts suggest that production of N₂ gas is through beam‐induced decomposition. Compounds with nitrate or nitrite as anions produce coincident features and are not suitable for this calibration method.     

Transmission of an X‐ray beam through a two‐dimensional photonic crystal and the Talbot effect

Results of computer simulations of the transmission of an X‐ray beam through a two‐dimensional photonic crystal as well as the propagation of an X‐ray beam in free space behind the photonic crystal are reported. The photonic crystal consists of a square lattice of silicon cylinders of diameter 0.5 µm. The amount of matter in the path of the X‐ray beam rapidly decreases at the sides of the cylinder projections. Therefore the transmission is localized near the boundaries, and appears like a channeling effect. The iterative method of computer simulations is applied. This method is similar to the multi‐slice method that is widely used in electron microscopy. It allows a solution to be obtained with acceptable accuracy. A peculiarity in the intensity distribution inside the Talbot period z_T in free space was found when the intensity is approximately equal to the initial value at a distance 0.46z_T, and it is shifted by half a period at distance 0.5z_T. The reason for this effect is the existence of a periodic phase of the wavefunction of radiation inside the intensity peaks. Simulations with zero phase do not show this effect. Symmetry rules for the Talbot effect are discussed.