高电流低气压等离子体阴极电子枪设计与实验

 设计了一种新型的高功率低气压等离子体电子枪。基于空心阴极效应和低压辉光放电原理与经验，确定了空心阴极、加速间隙、工作气压范围等。提出关于等离子体阴极电子枪产生高功率、高密度电子束源的整体方案。分别在连续馈气和脉冲馈气条件下进行实验测试，得到放电电流、收集极电流与气压、脉宽及调制器电压的关系。实验获得电子枪的典型放电电流为150~200 A，脉宽60 μs；传输电子束达到30~80 A，脉宽60 μs。该结果表明该新型等离子体阴极电子枪可以取代材料阴极作为大电流、长脉冲电子束源，特别适用于等离子体加载微波管。     

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在四阳极直流放电装置上,测量并分析了辉光放电的电流-电压和发光特征随气压的变化关系。结果表明,采用稳流放电模式比稳压放电具有更宽的稳定放电气压和电流范围,能在从1～800Pa的较宽气压范围内实现氦气辉光放电,放电电流可达到500mA左右。随着电极表面亮斑的变化,对于同一气压,在低电流区,放电电压几乎成指数增长;随电流增大,电压的增长速度变缓;对于高的气压,碰撞频率的增大使得电压随电流升高的速率变小。分析表明,放电处于异常辉光区。从放电管的CCD图像可以看出,对于同一放电电流,随气压的升高,等离子体往阴极收缩。     

空心阴极等离子体电子枪研究

对空心阴极等离子体电子枪的理论与机理做了较详细的分析，介绍了空心阴极放电特性，论 述了激励电极和调制电极在空心阴极内等离子体形成过程中的作用，分析了等离子体中电子 和离子的运动及主要参数，推导出空心阴极内电场与电流密度的表达式，研究了形成稳定电 子束流的基本条件.利用泊松方程、电流连续性方程和运动方程对其进行了数值模拟计算， 并给出了优化结果. 在此基础上设计出了输出束流脉宽为1μs、幅值达2kA的空心阴极等离 子体电子枪. 关键词： 空心阴极 等离子体 电子枪     

磁控溅射辉光放电特性的模拟研究

采用二维、自洽的PIC/MCC (particle-in-cell with Monte Carlo collision) 方法,模拟了磁控溅射辉光放电过程, 重点讨论了工作参数对放电模式和放电电流的影响. 模拟结果表明, 当工作气压由小到大或空间磁场从强到弱变化时, 放电模式会从阴极空间电荷主导的放电模式过渡到阳极空间电荷主导 的放电模式.在过渡状态,对应的工作气压与磁通密度分别为0.67 Pa和0.05 T; 随着工作气压的增大,放电电流先增大后趋向平衡,当工作气压超过2.5 Pa时,电流开始随工作气压的增大而减小; 而阴极电压增大时,放电电流近似线性增加.     

辉光放电触发赝火花开关的时延及抖动特性

 设计了一种辉光放电触发赝火花开关,对其时延和抖动特性进行系统研究。研究了开关时延、抖动与辉光放电电流、气压、触发电压及阳极电压的关系。当辉光放电电流小于0.30 mA时,开关无法触发导通;当电流为0.35~0.60 mA时,随辉光放电电流的增大,开关时延、抖动减小;当辉光放电电流为0.60 mA时,开关时延、抖动基本不变,出现饱和。当氦气气压低于6 Pa,开关难以触通,与理论计算值6.95 Pa吻合;当氦气气压为6~12 Pa时,开关的时延、抖动随气压的升高而减小;气压为12~30 Pa时,开关工作在比较稳定的状态。当触发电压小于3 kV,开关难以触通;随着触发电压的增大,开关时延、抖动减小;当触发电压大于5.3 kV,开关时延、抖动基本保持不变。开关在稳定工作条件下,阳极电压在8~25 kV范围内变化时;开关时延基本不变。     

微空心阴极维持辉光放电的时空特性

利用流体模型在氩气环境下模拟得到了微空心阴极维持辉光放电的电势、电子密度、离子密度和电场等放电参数的时空分布特性.模拟结果表明,微空心阴极维持辉光放电在不同的时刻表现出不同的放电模式.放电的初始阶段为汤生放电模式;第二阶段为汤生放电模式向空心阴极效应放电模式过渡阶段,微空心阴极维持辉光放电得到初步发展;第三阶段为空心阴极效应放电模式,微空心阴极维持辉光放电区逐渐形成;第四阶段为放电的稳态阶段.在稳态放电状态下,空心阴极腔内的电子和离子密度峰值达到10~(15)cm~(-3),位于空心阴极腔的中心位置,维持辉光放电区电子密度可以达到10~(13)cm~(-3).研究结果同时表明,微空心阴极放电促进了微空心阴极维持辉光放电的形成;同时微空心阴极维持辉光放电也促进了微空心阴极放电的发展.另外,实验研究表明,第二阳极对微空心阴极腔内外的电势、电场和带电粒子密度的分布均有重要影响,并且对维持辉光放电区域的影响更加明显.第二阳极是形成维持辉光放电的必要条件.     

气压对大面积等离子体片电子密度分布的影响

利用脉冲磁约束线形空心阴极放电装置,在15mT磁场约束下,产生了持续时间为200μs、峰值放电电流为3A、面积为60cm×60cm的大面积等离子体片。采用快帧法和旋转空心阴极法,在90~210Pa内,利用朗缪尔探针首次获得了不同气压的等离子体片的厚度向电子密度分布及其演化构成的二维分布图;研究了在同等峰值放电电流条件下,等离子体片达到最大厚度向峰值电子密度时,气压对所需放电时间、最大厚度向峰值电子密度及电子密度半高宽的影响。结果表明:在相同的峰值放电电流条件下,等离子体片达到最大厚度向峰值电子密度的时间随气压的降低而减小;气压越低,最大厚度向峰值电子密度越大,电子密度半高宽越小。     

赝火花开关辉光放电腔的粒子模拟与实验研究

 给出了赝火花开关所需辉光放电腔的具体要求,对赝火开关辉光放电腔进行了优化设计,并对优化后的放电腔进行了粒子模拟和实验研究。粒子模拟结果表明：此放电腔为辉光放电腔,辉光放电建立时间约18.5 ns;辉光放电时,此放电腔阴极位降占整个电位降的主要部分,且阴极位降区净离子密度为一常数。实验结果显示：此放电腔为辉光放电腔,其工作在Paschen曲线最低点左侧,放电电压随气压的升高而降低;当辉光放电电流为0.14～3.60 mA时,放电模式为正常辉光放电。     

铁电阴极电子枪的初步实验研究

 设计加工了铁电阴极电子枪,给出了模拟计算及其初步实验结果。电子枪为皮尔斯枪型,采用顺电相陶瓷Ba0.67Sr0.33TiO₂作为铁电阴极材料,电子枪电压脉宽80 ns,幅值最大可达80 kV,设计电子枪导流系数为0.15×10^-6 A·V^-3/2。电子枪电压从30 kV逐步增大到56 kV,测量到其发射电流从0.7 A逐步增大到2.5 A。根据实验结果拟合得到的电子枪导流系数为0.2×10^-6 A·V^-3/2,与设计基本符合。     

用发射光谱法测量氮气直流辉光放电的转动温度

本文报道了氮气气压分别为10和20Pa时，对直流辉光放电的发射光谱进行测量和分析的结果。选择的研究对象为N2放电中形成的N2^ B^2∑u^ →X^2∑g^ 跃迁的Δv=v′-v″=0谱带系中v′=0→v″=0谱带的R支。在阴极背面辉光区、阴极鞘层区、正柱区以及阳极辉光区中分别选择一点进行了转动分辨的发射光谱的测量。利用自己编写的光谱拟合程序，获得了相应的实验条件下N2^ 的转动温度，给出了转动温度随放电电压的变化趋势，其结果可以用直流放电的帕邢定律得到很好的解释。在10和20Pa气压下，放电的阴极鞘层区、正柱区、阳极辉光区中的转动温度都随放电电压呈现出了不同的变化趋势，甚至是完全相反的变化趋势。我们认为这是由于气压不同时，放电状态不同所致：气压为10Pa时的放电是正常辉光放电，而气压为时20Pa的放电为反常辉光放电。     

Breakdown formation in a transient hollow cathode discharge-astatistical study

Discharge formation at low pressure is found to be greatly influenced in the presence of a suitable hollow cathode region. The formation of a moving virtual anode which extends the anode potential to within the hollow cathode region is thought to be responsible for the enhanced ionization growth which subsequently leads to gas breakdown. In this paper, the spatial evolution of the local potential in the discharge region of a pulsed hollow cathode discharge has been measured in a range of pressures with two different cathode apertures. An extensive data set has been collected and analyzed using a statistical technique. From the characteristic of the statistical distribution of the data, unique features associated with the role of hollow cathode at the different stages of discharge formation have been identified. It was found that the influence of the hollow cathode region is strongest in the start of ionization growth and in the final change over to high current breakdown     

赝火花开关放电的蒙特卡罗粒子模拟

采用粒子模拟和蒙特卡罗相结合的方法,应用静电求解模型,对赝火花开关初始放电过程进行了模拟。赝火花开关初始放电过程主要由汤森放电过程、等离子体形成、空心阴极效应和场致发射引发主放电组成;等离子体形成和空心阴极效应对赝火花开关的发展导通具有至关重要的作用。改变赝火花开关工作参数,如气压、电极孔径、阳极电压和阴极腔中初始粒子密度,研究其对赝火花开关电子峰值电流形成时间的影响。结果表明:随着气压、电极孔径、阳极电压和初始粒子密度的增大,赝火花开关电子峰值电流形成时间减小。     

微空心阴极放电的流体模型模拟

采用流体模型研究了微空心阴极放电(MHCD)的特点，对放电中电场的形成，电子和离子的密度分布，电子能量分布进行了数值模拟.该计算是针对高气压，圆筒形阴极结构下的He放电.结果表明放电中存在空心阴极效应，从电子能量分布可以看出，放电中存在高能电子，放电空间的电场分布主要表现为径向电场.此外，通过改变气压，阴极孔径等参数计算出它们对放电的影响.分析表明减小孔径有利于负辉区更充分的重合.提高气压将缩短阴极位降区. 关键词： 微空心阴极放电 流体模型     

The characteristics of pulsed hollow cathode discharges used forpseudospark switch triggering

The complex interaction between the trigger discharge and the main switch discharge in high-power gas discharge switches influences both the switching characteristics, and the switch and trigger lifetime. Any attempts to improve either of these parameters has to take into account the pressure and geometry dependence of a particular trigger geometry. Yet, although not very intensely investigated in detail for this particular purpose, pulsed hollow cathode discharges are commonly used for low-pressure gas discharge triggering as in pseudospark switches. Measurements of the electron current flowing to the cathode backplane of a pseudospark switch from the pulsed hollow cathode trigger discharge show that maximum current densities are peaked around the symmetry axis of the trigger electrode, an effect which is more pronounced at low pressures. Delayed (and slowed-down) increase of the current density at larger radii leads to increasing delay and jitter, provided the trigger coupling holes in the cathode backplane are located off-axis. The electron current density increases with decreasing diameter of the trigger electrode, and with increasing pressure of the working gas. In addition, it is shown that a preionization (keep-alive) current in the trigger electrode region shows a distinct influence on the trigger current distribution, proving that there exists an optimum keep-alive current depending on the geometry and gas pressure     

Dynamics of pulsed magnetron discharge in high-current electron guns

High-speed video filming is applied to investigate low-pressure (argon 0.053–0.133 Pa) pulsed gas discharge dynamics in a planar magnetron built-in the explosive emission cathode of a high-current electron gun. It has been found that, in the beginning, the discharge starts at the side surface of the cathode and then spreads to its face. The stability of the discharge ignition instant at the cathode face as a function of the working pressure of the gas and the cathode design has been studied. It has been found that the pulsed longitudinal magnetic field results in the discharge switching over in the axial direction onto the electron gun collector. A qualitative explanation of the observed discharge behavior has been given.     

空心针-板电极大气压氩气辉光放电的特性研究

大气压均匀放电等离子体在工业领域具有非常广泛的应用前景,它是利用直流电源激励的空心针-板放电装置,以氩气为工作气体在大气压空气中产生均匀稳定的放电。对氩气流量和气隙间距对辉光放电发光特性的关系进行了研究,结果表明放电所产生的等离子体柱连接两个电极,发光较为均匀(观察不到放电丝)。在板电极附近放电等离子体柱直径最大,最大直径随着电流和气流的增大而增大。放电伏安特性研究发现,与低气压辉光放电相类似,两电极间的电压随着电流的增大而减小,并且随气流和气隙间距的增大而增大。对该大气压直流均匀放电在扫描范围为330～450 nm的光学发射光谱进行分析,获得了放电等离子体的分子振动温度和谱线强度比I_391.4/I_337.1随氩气流量和气隙间距的变化关系。I_391.4/I_337.1均随流量和气隙间距的增大而降低。对等离子体柱的I_391.4/I_337.1沿气流方向(等离子体柱轴向)进行了空间分辨测量,并进行了定性分析,结果表明,振动温度及电子平均能量随着远离空心针口距离的增大而增大。这些结果对大气压辉光放电在工业中的应用具有重要意义。     

Optimization of the UV CuII laser

The cw output power of the uv CuII laser has been optimized with respect to the hollow cathode geometry, the discharge current, the fill gas pressure and the resonator mirror parameters. A maximum laser output power of 900 mW for multiline operation at 248.6, 259.1, 260.0, and 270.3 nm was achieved with 100 A discharge current, 260 V voltage and 16 mbar fillgas pressure, when a hollow cathode of 1.2 m length and 2×6 mm² cross section was employed. The single-pass pain gl has been estimated to 7%. A hollow cathode cross section of 1.5×4.5 mm² is suggested as an optimum geometry. In addition, some investigations on the mechanism of the laser power decay in Ne–Cu-discharges are presented.     

Glow Discharge Characteristics of Hollow Needle-Plate Electrode in Atmospheric Pressure ArgonSCIEI北大核心CSCD

Atmosphere pressure uniform plasma has the broad application prospect in the industrial field. Using hollow needle cathode - plate anode device excited by direct-current voltage, a uniform and stable glow discharge is generated at atmospheric pressure in ambient air with argon used as working gas. The influence of the experimental parameters (including gas flow rate and the gas gap width) on discharge has been investigated by optical method. It can be found that a glow-discharge plasma column can bridge the two electrodes. The plasma column is uniform, and no filaments can be discerned. Near the plate electrode, the diameter of the plasma column is largest of all positions. The maximal diameter of the plasma column increases with increasing the discharge current or the gas flow rate. Through electrical method, the voltage-current characteristic has been investigated. It has been found that the discharge voltage decreases with increasing the current which is similar with the characteristic of glow discharge in low pressure. It increases with increasing the gas gap width or the gas flow rate. By analyzing the optical emission spectrum scanning from 330 to 450 nm emitted from the direct-current glow discharge, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated as functions of the gas flow rate and gas gap width. Results indicate that both the vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 decrease with increasing the gas flow rate or the gas gap width. In addition, the molecular vibrational temperature and the intensity ratio of spectral lines I-391.4/I-337.1 have been investigated in spatial resolution along the direction of gas flow(plasma column axial), and give a qualitative analysis as well. It is found that the vibrational temperature and the average electron energy increase with increasing the distance from the hollow needle cathode. These results are important to the industrial applications of glow discharge.     

The influence of discharge parameters on the generation of ions H<Subscript>3</Subscript><Superscript>+</Superscript> in the source based on reflective discharge with hollow cathode

For hydrogen ions source based on reflective discharge with hollow cathode the investigations of the effect of discharge current and gas pressure on the component composition of the ion beam have been performed. It has been shown that the optimization of the discharge parameters makes it possible to achieve up to 70% triatomic hydrogen ions H₃ ⁺ in the beam.