Operational characteristics of a plasma cathode with a grid stabilization in a two-stage ion source

The discharge characteristics and the parameters of the cathode plasma in a two-stage ion source with a grid plasma cathode and a magnetic trap in the anode region are investigated. It is shown that an increase in the gas pressure and the accompanying increase in the reverse ion current in the bipolar diode between the cathode and anode plasmas lead to an increase in the cathode plasma potential and a transition of the cathode into the regime of electron emission from the open plasma boundary. The dependence of the ion current extracted from the anode plasma on the area of the exit aperture of the hollow cathode and the mesh size of the grid plasma cathode is explained. The conditions at which the ion emission current from the anode plasma is maximum are determined. The potential difference at the bipolar diode is measured by using the probe method. It is shown that, when the gas pressures reaches a critical value determined by the mesh size of the grid plasma cathode, the discharge passes into a contracted operating mode, in which the ion current extracted from the anode plasma decreases severalfold.     

Improvement of the efficiency of a glow discharge-based ion emitter with oscillating electrons

Ion emission from the plasma of a low-pressure (≈5×10⁻² Pa) glow discharge with electrons oscillating in a weak (≈1 mT) magnetic field is studied in relation to the cold hollow cathode geometry. A hollow conic cathode used in the electrode system of a cylindrical inverted magnetron not only improves the extraction of plasma ions to ≈20% of the discharge current but also provides the near-uniform spatial distribution of the ion emission current density. The reason is the specific oscillations of electrons accelerated in the cathode sheath. They drift in the azimuth direction along a closed orbit and simultaneously move along the magnetic field toward the emitting surface of the plasma. A plasma emitter with a current density of ≈1 mA/cm² over an area of ≈100 cm² designed for an ion source with an operating voltage of several tens of kilovolts is described.     

Penetration of a low-pressure reflex-discharge plasma into a hollow electrode

It is shown experimentally that the plasma of a hollow-cathode reflex discharge is characterized by a nonequilibrium electron velocity distribution. The parameters of the electron distribution, which is approximated by a superposition of two Maxwellian distributions with different temperatures, are estimated. The penetration of the discharge plasma into the hollow cathode at various cathode potentials and a gas pressure of ∼10^{\t− 2} Pa is studied. It is shown that the plasma parameters in the hollow electrode depend not only on the parameters of the reflex-discharge plasma, but also on the magnitude and configuration of the magnetic and electric fields in the plasma expansion region. It is shown that the plasma penetration can be accompanied by quasineutrality violation and the formation of space-charge double layers. Experiments confirm that the ion current from the nonequilibrium plasma exceeds the Bohm current.     

Cold-hollow-cathode arc discharge in crossed electric and magnetic fields

A crossed-field cold-hollow-cathode arc is stable at low working gas pressures of 10⁻²–10⁻¹ Pa, magnetic-field-and gas-dependent arcing voltages of 20–50 V, and discharge currents of 20–200 A. This is because electrons come from a cathode spot produced on the inner cathode surface by a discharge over the dielectric surface. The magnetic field influences the arcing voltage and discharge current most significantly. When the plasma conductivity in the cathode region decreases in the electric field direction, the magnetic field increases, causing the discharge current to decline and the discharge voltage to rise. The discharge is quenched when a critical magnetic field depending on the type of gas is reached. Because of the absence of heated elements, the hollow cathode remains efficient for long when an arc is initiated in both inert and chemically active gases.     

Use of a Glow Discharge in a Magnetic Field for Production of Broad Ion Beams for Technological Applications

The results of investigations of the conditions of existence and ion-emission properties of a plasma of the high-current variety of a low-pressure glow discharge with a hollow cathode in a magnetic field are given. It has been shown that an applied weak magnetic field (10^–3 T) not only reduces the minimum threshold gas pressure, but also makes the radial distribution of the plasma density more uniform (10%). A decrease in statistical straggling of the delay time to breakdown (10² times) and in discharge formative time (10 times) with increasing pulse repetition rate has been revealed to occur as a result of the transition to multielectron discharge initiation. The mass constitution of the discharge and the charge state of ions have been investigated and ways of lowering the content of the basic types of impurities have been determined. The influence of the parameters of the space charge cathode layer on the beam formation by electrostatic ion optics was investigated. The design of a source of gas ions possessing an increased lifetime and high reliability is described. The source is capable of producing an ion beam of cross section 100 cm² with an energy of ions of up to 40 keV at an average current density of up to 1 mA/cm².     

Effect of the electron beam and ion flux parameters on the rate of plasma nitriding of an austenitic stainless steel

The method of nitriding of metals in an electron beam plasma is used to change the current density and energy of nitrogen ions by varying the electron beam parameters (5–20 A, 60–500 eV). An electron beam is generated by an electron source based on a self-heated hollow cathode discharge. Stainless steel 12Kh18N10T is saturated by nitrogen at 500°C for 1 h. The microhardness is measured on transverse polished sections to obtain the dependences of the nitrided layer thickness on the ion current density (1.6–6.2 mA/cm²), the ion energy (100–300 eV), and the nitrogen-argon mixture pressure (1–10 Pa). The layer thickness decreases by 4–5 μm when the ion energy increases by 100 V and increases from 19 to 33 μm when the ion current density increases. The pressure dependence of the layer thickness has a maximum. These results are in conflict with the conclusions of the theory of the limitation of the layer thickness by ion sputtering, and the effective diffusion coefficient significantly exceeds the well-known reported data.     

Generation of a pulsed high-current low-energy beam in a plasma electron source with a self-heated cathode

The transition of a low-current discharge with a self-heated hollow cathode to a high-current discharge is studied, and stability conditions for the latter in the pulsed–periodic mode with a current of 0.1–1.0 kA, pulse width of 0.1–1.0 ms, and a pulse repetition rate of 0.1–1.0 kHz are determined. The thermal conditions of the hollow cathode are analyzed, and the conclusion is drawn that the emission current high density is due to pulsed self-heating of the cathode’s surface layer. Conditions for stable emission from a plasma cathode with a grid acting as a plasma boundary using such a discharge are found at low accelerating voltage (100–200 eV) and a gas pressure of 0.1–0.4 Pa. The density of the ion current from a plasma generated by a pulsed beam with a current of 100 A is found to reach 0.1 A/cm². Probe diagnostics data for the emitting and beam plasmas in the electron source are presented, and a mechanism behind the instability of electron emission from the plasma is suggested on their basis.     

Gas-filled electron diode based on a glow discharge

Stable ignition and sustention of a pulsed discharge with a current of up to 180 A and duration of 12 μs at a pressure of 10⁻¹–10⁻² Pa are achieved in a glow-discharge plasma cathode with the help of an auxiliary initiating discharge. An electron emission current density of up to 100 A/cm² and accelerating voltageof 15 kV are obtained in a gas-filled diode based on this type of a plasma cathode. An electron beam witha neutralized space charge can be transported almost without losses in a weak axial magnetic field alonga plasma channel formed due to the gas ionization by the accelerated electrons over a distance of up to 30 cm.     

Intense emission from a grid-stabilized plasma cathode

Intense emission from a grid-stabilized plasma cathode based on a glow discharge with an expanded anode area is studied. In the electrode system of the ion source, the potential difference between a large-mesh grid electrode (a hole diameter of 4–6 mm) and cathode and anode plasma reaches 200 V and the glow discharge current is up to 1 A. The current distribution over the electrodes of the plasma cathode is taken, and the dependences of the electron extraction efficiency and electron-emitting-plasma potential on the gas pressure and discharge parameters are obtained. A relationship between the geometric parameters of the grid, cathode plasma potential, and efficiency of electron extraction from the plasma is derived. It is shown that stable intense emission from the plasma cathode can be provided in wide ranges of gas pressure and discharge current by varying the geometry and mesh size of the plasma cathode grid. Discharge contraction in the grid plane at elevated gas pressures is explained. It is assumed that the emitting plasma becomes inhomogeneous due to variation in the thickness of near-electrode layers in the holes of the grid, which makes the distribution of the emission current from the plasma more nonuniform.     

Localization of plasma in the extended hollow cathode of a ribbon-electron-beam plasma source at forevacuum pressures

The results of a study of the plasma density distribution in the slit aperture of a right-angled extended hollow cathode used in a ribbon-electron-beam plasma source operating at forevacuum pressures (1–10 Pa) are presented. It is shown that a local peak of plasma density appears in some region of the slit aperture as the slit width is decreased. This results in the appearance of a region of increased current density when the ribbon beam forms. The uniformity of the beam current density distribution is additionally disturbed by the reverse ion flow whose effect on the emission properties of the plasma is significant in the region of elevated pressure. A model which describes the development of plasma density nonuniformity in a hollow cathode is proposed which is based on the idea that the electron current flows predominantly through the slit aperture regions that are associated with local openings of the cathode layer ion sheaths. __________ Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 6, pp. 3–9, June, 2007.     

Analysis of a hollow-cathode reflex discharge in a hydrocarbon flow

Variation of parameters of a reflex discharge with a hollow cathode operating continuously in propane with a flow rate of 1.3–5.6 (m³ mPa)/s and a discharge current of 0.1–0.4 A is analyzed. It is shown that for a hydrocarbon flow rate of 2.4 (m³ mPa)/s and higher, an increase in the discharge voltage takes place after a time interval depending on the discharge current and gas pressure; this is explained by the formation of coating of the dissociation products of hydrocarbon molecules on the electrodes of the discharge chamber. An increase in the thickness of the carbon coating of the cathodes with time and their charging with ions lead to electric breakdown of coatings and the formation of cathode spots. The oscillograms of the discharge current and voltage indicate a short-term transformation of the glow discharge into the arc discharge. The energy spectra of ions emerging from the discharge are measured, and the effect of the discharge current and the gas flow rate on the energy spread of ions is analyzed. The operation time of the discharge in hydrocarbon after which the cleaning of the discharge chamber is required is determined. The possibility of using an ion source based on the reflex discharge with a hollow cathode for technological purposes is established.     

Influence of the cathode and anode jets on the properties of a high-current electric arc

A study is made of the effects related to the formation of electrode jets in discharges in hydrogen and air at a current of 10⁵–10⁶ A, a current growth rate of 10¹⁰ A/s, an initial pressure of 0.1–4.0 MPa, and a discharge gap length of 5–40 mm. After secondary breakdown, jets are observed in a semitransparent discharge channel expanding with a velocity of (4–7)×10² m/s. The formation of shock waves in the interaction of the jets with the ambient gas and the opposite electrode is observed by the shadowgraphy method. Seventy microseconds after the beginning of the discharge, the pressure of the metal vapor plasma near the end of the tungsten cathode amounts to 177 MPa. The brightness temperature in this case is T=59×10³ K, the average ion charge number is [`(m)] = 3.1\overline m = 3.1 , and the metal vapor density is n=5.3×10<sup>19</sup> cm<sup>−3</sup>. After 90 μs, the average ion charge number and the metal vapor density near the anode end are [`(m)] = 2.6\overline m = 2.6 and n=7.4×10¹⁹ cm⁻³, respectively. Based on the experimental data, possible reasons for the abnormally high values of the total voltage drop near the electrodes (up to ∼1 kV) are discussed.     

Emission properties of a plasma cathode based on a glow discharge for generating nanosecond electron beams

The emission properties of a plasma cathode based on a nanosecond pulsed glow discharge with currents of up to 200A at a pressure of 5×10⁻² Pa are studied experimentally. Stable ignition and burning of the discharge are ensured if the current in the auxiliary pulsed discharge is 25–30% of that in the main discharge and its pulse duration exceeds that of the main discharge by more than an order of magnitude. Emission current pulses from the cathode with amplitudes of up to 140A fully reproduce the discharge current and are determined by the transparency of the grid anode. Zh. Tekh. Fiz. 69, 62–65 (November 1999)     

Experimental Studies on Low-Pressure Plane-Parallel Hollow Cathode Discharges

Hollow cathode discharge (HCD) is widely used in material processing and plasma emission spectroscopy due to several advantages over other plasma sources. Basically, the HCD consists of a cathode with a hollow structure (cavity, hole, or parallel faces) and an anode of arbitrary shape. In this investigation, experimental studies on low-pressure plane-parallel HCD operated at different process conditions are reported. Herein, we investigate the dependence of the discharge current on the product of the gas pressure and inter-cathode distance (pD). In addition, the electron temperature and density were inferred from the current-voltage characteristics of a single cylindrical Langmuir probe positioned between the cathodes, on the discharge axis. The measurements were carried out at different gas pressures, magnetic field intensities, working gases, inter-cathode distances, cathode materials, and discharge voltages. The results showed that, at different gas pressures, the maximum discharge current (I_d,max) is not only a function of the product pD, but also of the pressure itself. Application of a uniform longitudinal magnetic field improved plasma confinement between cathodes, leading to a substantial increase in I_d,max in most of the situations considered in this study. However, for oxygen discharge, a strong discharge current reduction after the application of the magnetic field was observed. In relation to the Langmuir probe studies, it was observed that the uniform longitudinal magnetic field reduced the electron temperature, but this behavior depends strictly on pD. The typical values of electron density and electron temperature in the case of the nitrogen discharge were n_e?=?10¹⁷ m^?3 and T_e?=?2.5 eV, respectively. Finally, our experiments showed that the pD range for hollow cathode effects was between 0.2–5 Pa m.     

Effect of Cathode and Anode Voltage on an Ion Sheath Thickness in a Magnetically Confined Diffusion Plasma

This article reports about the ion sheath thickness variation occurring in front of a negatively biased plate immersed in the target plasma region of a double plasma device. The target plasma is produced due to the local ionization of neutral gas by the high energetic electrons coming from the source region (main discharge region). It is observed that for an increase in cathode voltage (filament bias voltage) in the source region, the ion flux into the plate increases. As a result, the sheath at the plate contracts. Again, for an increase in source anode voltage (magnetic cage bias), the ion flux to the plate decreases. As a result, the sheath expands at the plate. The ion sheath formed at the separation grid of the device is found to expand for an increase in cathode voltage and it contracts for an increase in the anode voltage of the main discharge region. One important observation is that the applied anode bias can control the Bohm speed of the ions towards the separation grid. Furthermore, it is observed that the ion current collected by the separation grid is independent of changes in plasma density in the diffusion region but is highly dependent on the source plasma parameters. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Ion emission from arc discharge plasmas

Results are presented from studies of the ion-emission properties of the anode plasmas of low-pressure contracted arc discharges and vacuum arcs. It is shown that creating a longitudinal magnetic field in the anode region of a discharge changes the plasma parameters significantly and facilitates a large increase in the ion current. Space charge limited ion current in a vacuum arc leads to a reduction in the noise level of the total ion current and of its components with charges of up to +3, while creating Penning discharge conditions ensures that ions of different gases can be generated in this discharge system at fractions as high as 90%, depending on the type of plasma forming gas.Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences. Translated from Izvestiya Vuzov, Fizika, No. 3, pp. 24–33, March, 1994.     

Cathodic-arc plasma density, radial profile, and total plasmainventory as measured by microwave interferometer and Faraday cup

The total amount of plasma, peak plasma density, and plasma density radial profile are derived from a series of measurements of ion current density (with a Faraday cup) and integrated electron line density (with a microwave interferometer) for a cathodic arc derived plasma. Comparisons are made between cathode material (erbium and titanium), arc current, background gas pressure, and the presence or absence of a series magnetic solenoid around the coaxial anode and cathode     

Control of the clustering process in molecular beams using IR lasers

The prebreakdown stage of a gas discharge in a diode with strongly overloaded cathode is studied by laser methods (by simultaneous use of multiframe interferometry and shadow and schlieren photographing) at atmospheric pressure. The spatial resolution of the methods is about 20 μm. A probing pulse of a laser (LS-2151 Nd: YAG laser with a half amplitude duration of 70 ps and a pulse energy of up to 40 mJ) is synchronized with a voltage pulse with accuracy of about 1 ns. High field strength at the cathode is achieved due to the use of thin individual metal tips on the electrodes. It is shown that the initial stage of breakdown of a discharge gap is accompanied by the emergence of a dense plasma cloud at the end of a tip with electron density of about 5 × 10¹⁹ cm^–3 with a size of tens of microns, as well as by a sharp increase in the total current through the diode. After the emergence of a dense plasma cloud at the end of a cathode tip, a similar cloud is formed on the surface of the anode; sometime later, these clouds join together and form a tubular current channel. The dynamics of the breakdown, as well as the parameters of the plasma are studied by the abovementioned techniques in three independent optical channels.     

Self-oscillating mode of electron beam generation in a source with a grid plasma emitter

Plasma processes and electron beam generation in an electron source with a grid plasma cathode are investigated. Experiments are conducted under the conditions of efficient electron extraction and an intense counter ion flux, which break grid stabilization. It is shown that a rise in the gas pressure and in the emitting plasma potential leads to the plasma potential modulation in the frequency range 10⁴–10⁵ Hz. Under the self-oscillation conditions, an electron beam is obtained with a constant current of up to 16 A and an electron energy modulated up to 100% of the accelerating voltage level (100–300 V). An explanation is given for relaxation self-oscillations arising when the plasma potential grows and for the system’s inertial non-linearity arising when the plasma potential induced by the space charge of the counter ion flux lags behind the current of electron-beam-generated ions.     

稀土离子Ho+,Ce+,La+与H2碰撞的单电子俘获截面测量

在复旦大学加速器实验室的３０ｋｅＶ同位素分离器上，使用新近建立的一套用于单价离子与气体分子碰撞的单电子俘获截面测量装置，测量了５—３０ｋｅＶ Ho⁺,Ce⁺,La⁺与H₂碰撞的单电子俘获截面．实验发现中空型离子源的阳极电压的变化对于稀土离子的亚稳态比例有一定影响，同时造成了单电子俘获截面的很大变化，而阳极电压对Ａｒ⁺的影响很小．还对实验结果进行了分析 关键词：